JP2859173B2 - Loading device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a loader for supplying a work stacked on a cassette to a processing section and an unloader for stacking and storing the work processed by the processing section in the cassette. -For a dengue device.

[0002]

2. Description of the Related Art For example, in a process of manufacturing a liquid crystal display device, there is a process of forming a circuit pattern on a glass substrate by lithography. In the circuit pattern forming process, a process of pre-cleaning a glass substrate on which resist has been applied, exposed, and developed, performing an etching process, and then further performing a post-cleaning process on the etched glass substrate. is there.

[0003] A processing apparatus has been developed which can perform the above pre-cleaning, etching and post-cleaning continuously. In this case, a loader for supplying the glass substrate to the processing apparatus is provided at an entrance side of the processing apparatus, and an unloader for taking in the glass substrate processed by the processing apparatus is provided at an exit side. I have. The above loader and unloader
The loading device constitutes a loading device.

The above glass substrates are stacked and accommodated in a cassette. The loader and the unloader have a setter, and the setter of the loader takes out the glass substrate from the cassette. The removed glass substrate is transferred to the transport mechanism,
It is carried into the processing apparatus by this transport mechanism. The glass substrate processed by the processing apparatus is carried out by the transfer mechanism. The unloaded glass substrates are received by the unloader's setter, and are stacked and accommodated in a cassette.

In such a configuration, the glass substrates supplied from the loader to the processing apparatus are supplied in a line. Conventionally, the alignment of the glass substrates has been performed collectively by fixing and installing the cassette on the base of the loader or the unloader.

[0006] However, fixing the cassette at a predetermined position requires fixing work, which causes a reduction in productivity. Also, when transferring the aligned glass substrates to the transport mechanism by the setter, if the setter moves, the glass substrates on the setter may be displaced and moved, which impairs the alignment state of the glass substrates. There is. This applies not only to the loader but also to the unloader.

[0007] The size of the glass substrate varies depending on the size of the liquid crystal display device to be produced. In that case, each time a glass substrate of a different size is required, a cassette for that size must be installed. However, if the cassette is replaced every time the size of the glass substrate is different, the cassette must be fixedly installed, which causes a decrease in productivity.

Further, even when processing glass substrates of the same size continuously, if a plurality of cassettes are set in advance and processing of the glass substrates of one cassette is completed, another cassette is processed. If the glass substrate is processed, the processing operation does not need to be interrupted, so that the productivity can be improved.

[0009] However, conventionally, the cassette is installed so as to coincide with the center of the processing apparatus, and the row provided between the cassettes is provided.
Since the glass substrates are transferred by driving the setter of the die or the unloader in the front-rear direction and the vertical direction, when a plurality of cassettes are arranged, the glass substrates are transferred to each cassette by the setter. Sometimes I couldn't do that.

If the setter can be driven not only in the front-back direction but also in the left-right direction, the glass substrates can be transferred to a plurality of cassettes. However, simply allowing the setter to be driven in the left-right direction would cause the glass substrate to move greatly in the direction of movement when the setter was moved in the left-right direction, thereby impairing the alignment of the substrate. become.

[0011]

As described above, in the conventional loading device of the loading device, the work in the cassette is aligned by fixing the cassette. In some cases, the fixing work is troublesome, and when a work is transferred between the cassette and the processing unit by a loader or unloader setter, the work moves on the setter and moves. In some cases, the alignment of the marks may be impaired.

Further, when a plurality of cassettes are installed in order to accommodate glass substrates having different sizes, the setter must be moved in the left-right direction. Not only is it easy to shift greatly, but the tact time is sometimes long.

The present invention has been made based on the above circumstances, and an object thereof is to provide a plurality of cassettes so that even when the setter is moved in the left-right direction, the work can be moved in the left-right direction. It is an object of the present invention to provide a loading device that can prevent a shift and can reduce a tact time.

[0014]

According to the first aspect of the present invention, there is provided a loader for supplying an unprocessed work to a processing unit or a processing unit for processing a workpiece. In a loading device having an unloader for recovering a work, at least one of the loader and the unloader is provided along a direction in which a plurality of cassettes for stacking and storing the work are intersected with a moving direction of the work in the processing unit. A first horizontal moving body provided between the processing section of the base and the cassette so as to be drivable along a horizontal direction intersecting the moving direction of the work; and a first horizontal moving body. A second horizontal moving body provided on the body so as to be drivable along the moving direction of the work; and a second horizontal moving body being drivable along the vertical direction. And the second horizontal moving body when the first horizontal moving body provided on the vertical moving body is driven to face a predetermined cassette among the plurality of cassettes. a setter for entering the cassette interlocking Shiteso, the setter is driven toward or away from as well as positioned on both sides of the setter provided in the vertical mover receives a work from the loader section or the processing section and When the first horizontal moving body is driven, the work may be displaced on the setter while being driven in the direction of approaching to contact both sides of the work and positioning the work on the setter. A pair of alignment members for holding the workpiece, and a moving direction of the second horizontal moving body provided on the first horizontal moving body.
Has a transport roller that drives in the same direction as
The received work is transported to the processing unit, and
And a transfer means for receiving the work processed in step (1) and transferring the work to the setter .

According to the first aspect of the present invention, the setter is moved forward and backward,
While being driven in the left-right and up-down directions, the work on the setter is prevented from moving by a pair of alignment members. Therefore, even if the setter is driven back and forth and left and right, the alignment of the work is not impaired. In addition, since the transfer means is provided integrally with the setter, the work is transferred from the setter to the transfer means or from the transfer means to the setter while the first horizontal moving body is moving, thereby shortening the tact time. it can.

[0016]

An embodiment of the present invention will be described below with reference to the drawings. In FIG. 7, reference numeral 1 denotes a processing device. The processing apparatus 1 includes a pre-cleaning unit 2 for cleaning a liquid crystal substrate P as a work, an etching processing unit 3 for etching the cleaned glass substrate P, and a post-cleaning unit for cleaning the etched glass substrate P again. 4 and a drying section 5 for drying the glass substrate P cleaned by the post-cleaning section 4 are sequentially arranged.

A loader 11 is disposed on the pre-cleaning section 2 side of the processing apparatus 1, and an unloader 12 is disposed on the drying processing section 5 side. The loader 11 and the unloader 12 constitute a loading device of the present invention, and since they have the same configuration, only one of them will be described below.

That is, the loading device has a base 15 composed of a gantry as shown in FIG. This base
4 and 7, a pair of mounting plates 16 are supported by a support post 17 at predetermined intervals in a left-right direction crossing the front-rear direction, at one end in the front-rear direction on the upper surface of the It is provided at the height of. The cassette 1 is placed on each mounting plate 16.
8 is positioned and mounted.

In a cassette 18 mounted on the mounting plate 16 of the loader 11, unprocessed glass substrates P are stacked and stored at predetermined intervals in the vertical direction. The glass substrate P processed by the processing apparatus 1 is collected and stacked and accommodated in a cassette 18 mounted on the mounting plate 16 of the unloader 12.

The loader 11 is installed between the pre-cleaning section 2 of the processing apparatus 1 and the mounting plate 16 and the unloader.
The die 12 is provided between the drying section 5 and the mounting plate 16. That is, a pair of left and right guide rails 21 are provided on the upper surface of the front end side and the rear end side of the base 15 along the left and right direction. Guides 23 provided on the front end side and the rear end side of the lower surface of the first horizontal moving body 22 are slidably engaged with the left and right guide rails 21, respectively.

That is, the first horizontal moving body 22 is freely movable in the left-right direction orthogonal to the center line of the processing apparatus 1. Note that the first moving body 22 is formed in a rectangular frame shape with an open center as shown in FIG.

A left and right feed screw 24 is rotatably supported by a support 25 on the rear end upper surface of the base 15. A nut 26 is screwed into the feed screw 24. The nut body 26 is attached to a rear end of the first horizontal moving body 22 by a connecting member 27.

One end of the left and right feed screw 24 has a driven pulley.
A rib 28 is fitted. A left and right drive motor 29 is provided on the base 15 near one end of the left and right feed screw 24. A drive pulley 31 is fitted on the rotation shaft of the left and right drive motor 29. A timing belt 32 is stretched between the driving pulley 31 and the driven pulley 28.

Therefore, when the left and right drive motor 29 is operated, the left and right feed screw 24 is driven to rotate via the pair of pulleys 31 and 28 and the timing belt 32. The nut member 26 moves in the axial direction of the feed screw 24. Thus, the first horizontal moving body 22 is driven in the left-right direction.

Front and rear guide rails 35 are provided on the upper surface of the first horizontal moving body 22 at both ends in the left-right direction, respectively, along the front-rear direction orthogonal to the left-right direction. The front and rear guide rail 35 has a second
Sliders 37 provided on the lower surface of both ends along the left-right direction of the lower surface of the horizontal moving body 36 are slidably engaged. Thus, the second horizontal moving body 36 is movable in the front-rear direction along the front-rear guide rail 35.

A front-rear feed screw 38 is rotatably supported by a support 39 on the upper surface of one end in the left-right direction of the first horizontal moving body 36. A nut body 41 is screwed into the front-rear feed screw 38. The nut body 41 is connected to the second horizontal moving body 36 by the connecting member 42.
Attached to.

A driven pulley 43 is fitted to one end of the front-rear feed screw 38. The first horizontal moving body 36
In the vicinity of the driven pulley 43, a front-rear drive motor 44 is provided. A drive pulley 45 is fitted on the rotation shaft of the front-rear drive motor 44. This drive pulley 45
A timing belt 46 is stretched between the driven pulley 43 and the driven pulley 43. Therefore, when the front-rear drive motor 44 is operated and the front-rear feed screw 38 is rotationally driven, the second horizontal moving body 36 is driven in the front-rear direction.

As shown in FIGS. 1 to 3, a vertical plate 51 is provided on the front end side (the processing apparatus 1 side) of the second horizontal moving body 36 so as to connect a middle part of the rear surface in the height direction. . A pair of upper and lower guides 52 are provided in parallel at both ends in the width direction on the front surface of the vertical plate 51 along the vertical direction. Sliders 54 provided on both ends in the width direction of a plate-like vertical moving body 53 are slidably engaged with the vertical guide 52.

A connecting member 55 is attached to the rear surface of the lower end of the vertical moving body 53. The connecting member 55 has a long hole 51a formed in the vertical plate 51 along the vertical direction.
A nut body 56 is fixed to an end protruding from the long hole 51a. The nut body 56 is screwed into a vertical feed screw 57 disposed on the rear side of the vertical plate 51. The upper and lower ends of the vertical feed screw 57 are rotatably supported by bearings 58, respectively.

At the lower end of the rear surface of the vertical plate 51, a vertical drive motor 61 is provided as shown in FIG. The drive pulley 6 fitted to the rotating shaft of the vertical drive motor 61
A timing belt 64 is stretched between the driven pulley 2 and the driven pulley 63 fitted to the lower end of the vertical feed screw 57.

Therefore, when the vertical drive motor 61 is operated to rotate the vertical feed screw 57, the nut body 56 moves up and down along the screw 57. The body 53 is linked. That is, the vertical moving body 53 is driven up and down.

As shown in FIG. 2, one end of the setter 71 in the front-rear direction is fixed to the upper end of the vertical driving body 53. As shown in FIG. 5, the setter 71 has a substantially U-shape in plan view, and its width dimension is set so as to fit into the cassette 18. Further, on the upper surface of the setter 71, a plurality of conical projections 72a for supporting the lower surface of the glass substrate P by point contact and the front and rear ends of the glass substrate P on the Substrate P
And a restricting member 72b for restricting the movement in the front-rear direction.

A pair of aligning rails 75 are provided horizontally at a predetermined interval in the vertical direction on the upper part of the front surface of the vertical driving body 53. As shown in FIGS. 2 and 6, a pair of alignment members 76 are slidably provided on the alignment rail 75. The alignment member 76 is a strip-shaped movable plate 77.
And a strip-shaped alignment guide 78 having a base end fixed to the upper end of the movable plate 77. The movable plate 77 has a slider 79 slidably engaged with the alignment rail 75. Is provided. A pair of alignment guides 78 are provided parallel and spaced along opposite sides of the setter 71, and are located slightly above the upper surface of the setter 71.

As shown in FIG. 6, alignment cylinders 81 are provided at both ends in the width direction of the front surface of the vertical moving body 53, respectively. The rod of the alignment cylinder 81 is connected to the movable plate 77 of the alignment member 76. Accordingly, when the alignment cylinder 81 is operated, the pair of alignment members 76 are slidably driven in the direction of coming and coming along the alignment rail 75. That is, the pair of sharp guides 78 are driven to open and close symmetrically with respect to the center of the vertical moving body 53 in the width direction.

The alignment guide 78 of the pair of alignment members 76
Are provided with a plurality of positioning rollers 82 which are rotatable with their axes perpendicular to each other and protrude inward in the width direction of the alignment guide 78.

The pair of alignment guides 78 are spaced apart from each other at an interval larger than the width of the glass substrate P, and are driven by the approaching cylinder 81 in the approaching direction, whereby the positioning roller 82 is moved. The glass substrate P placed on the setter 71 abuts on both sides in the width direction and
Is positioned on the setter 71. That is, the center of the glass substrate P in the width direction is set to the setter 71 (the vertical moving body 53).
At the center in the width direction.

As shown in FIGS. 4 and 5, a transport mechanism 91 is provided on the first horizontal moving body 22 at a position opposed to the setter 71. This transport mechanism 91 is
There are four pillars 92 erected on each side of the horizontal moving body 22 in the moving direction (left-right direction). Prop 9
A U-shaped upper end plate 93 having one end in the front-rear direction on the cassette 18 side is opened at the upper end of the cassette 2.

At the inner side in the width direction of the upper surface on both sides of the upper end plate 93, a mounting plate 94 is provided upright along the entire length in the longitudinal direction of the upper end plate 93 with the plate surface vertical. A plurality of transport rollers 95 are provided at predetermined intervals along the longitudinal direction on the inner surfaces of the mounting plates 94 facing each other so as to be rotatable with their axes horizontal, and a driven pulley 96 is coaxial on the outer surfaces. It is provided in. The distance between the right and left transport rollers 95 is set to be larger than the width of the setter 71.

A pair of transport rollers 95 facing each other at one end in the front-rear direction of the pair of mounting plates 94 are provided on one drive shaft 97. One end of the drive shaft 97 is connected to a rotation shaft of a transport motor 98 provided on one upper end plate 93. A drive pulley 99 is provided at a portion of the drive shaft 97 located on the outer surface side of the mounting plate 94.

On the outer surface of each mounting plate 94, a tension roller 10 is attached to the driving pulley 99 and the driven pulley 96.
The belt 102 is stretched through the belt 1. Therefore, when the transfer motor 98 is operated, the transfer roller 95 is driven to rotate. Therefore, the glass substrate P mounted on the transfer roller 95 as described later is transferred to the transfer roller 95.
When the roller 95 is rotationally driven, it is conveyed in a predetermined direction according to the rotation.

The height position of the glass substrate P conveyed by the convey rollers 95 is the lowest of the setter 71 which is driven up and down together with the up and down moving body 53 by the up and down driving motor 61 as shown in FIG. Slightly higher than the position you set. Thus, the glass substrate P held by the setter 71 is transferred to the transport roller 95 by driving the setter 71 downward.

Outside the upper surface of the upper end plate 93 in the width direction,
A plurality of guide rollers 1 whose axes are perpendicular as shown in FIG.
03 are provided at predetermined intervals in the longitudinal direction. The guide rollers 103 abut on both sides of the glass substrate P conveyed by the convey rollers 95 in the width direction, and guide the conveyance of the glass substrate P. That is, the glass substrate P to be conveyed is prevented from shifting in the width direction.

Next, the operation of the loading device having the above configuration will be described. When the unprocessed glass substrate P is supplied from the loader 1 to the processing apparatus 1, first, the first horizontal moving body 22 is driven in the left-right direction by the left-right driving motor 29, and the setter 71 is turned into a pair. It is positioned to face either one of the cassettes 18. Next, the height of the setter 71 is set to a position slightly lower than the lowermost glass substrate P accommodated in the cassette 18 by the vertical drive motor 61.

When the positioning of the setter 71 is completed,
The front-rear drive motor 44 is operated to move the second horizontal moving body 36.
Of the cassette 18 in the front-rear direction. Thereby, the setter 71 enters below the lowermost glass substrate P of the cassette 18. Then, the setter 71 is slightly raised by the vertical drive motor 61, and the glass substrate P held by the cassette 18 is moved upward.
Is transferred to the upper surface of the setter 71.

The setter 71 on which the glass substrate P has been transferred is driven in the retreating direction and then in the descending direction. Thus, the glass substrate P held on the setter 71 is transferred to the transfer roller 95 of the transfer mechanism 91.

When the setter 71 is retracted, the pair of alignment cylinders 81 are operated to drive the pair of alignment members 76 in the approaching direction, and the center of the glass substrate P on the setter 71 is set by the pair of alignment guides 78. The center is set to 71. That is, the glass substrate P is positioned and aligned on the setter 71.

Further, when the setter 71 has finished retreating, the left and right driving motor 29 operates to activate the first horizontal moving body 2.
2 is driven in the left-right direction so that the center of the setter 71 coincides with the center of the processing device 1. At the same time,
The setter 71 is driven in a downward direction by a vertical drive motor 61, and the glass substrate P on the setter 71 is transferred to the transfer mechanism 9.
It is delivered to one transport roller 95.

That is, since the transport mechanism 91 is provided integrally with the first horizontal moving body 22, the first horizontal moving body 22
The setter 71 is moved downward while driving the glass substrate P held by the setter 71 to the transfer roller 95.
Therefore, the tact time can be reduced as compared with the case where these operations are performed separately.

The center of the setter 71, that is, the transport roller
When the center in the width direction of the glass substrate P transferred to the roller 95 has been positioned so as to coincide with the center of the processing apparatus 1, the transport motor 98 of the transport mechanism 91 operates and the transport roller 95 is moved. Rotated. Thereby, the glass substrate P is supplied from the transfer mechanism 91 to the processing apparatus 1.

While a plurality of cassettes 18 are installed in the loader 11, the setter 7 can be driven not only in the front-back direction but also in the left-right direction. Accordingly, even if the center of the cassette 18 does not coincide with the center of the processing device 11, the first horizontal moving body 22 is driven in the left-right direction so that the center of the setter 71 coincides with the center of the cassette 18, or The glass substrate P of each cassette 18 can be supplied to the processing apparatus 1 because the center can be matched with the center of the apparatus 1.

As described above, since the glass substrates P of the plurality of cassettes 18 can be supplied, even if one of the cassettes 18 becomes empty, the glass substrates P of the other cassette 18 can be supplied, and the cassettes which have become empty in the meantime. Since it is sufficient to replace the cassette 18, it is not necessary to stop the entire apparatus for replacing the cassette 18, and the productivity can be improved.

While the first horizontal moving body 22 is moved in the left-right direction so that the center of the setter 71 coincides with the center of the transport mechanism 91, the glass substrate P transferred to the setter 71 is aligned with the alignment member 76. Are held on both sides in the width direction. Therefore, even if the setter 71 is driven in the left-right direction, the glass substrate P is prevented from moving on the setter 71. That is, the setter 71 and
The relative position between the setter 71 and the glass substrate P taken out of the cassette 18 does not shift.

After the glass substrate P is taken out of the cassette 18, it is aligned by the alignment member 76. Therefore, the substrate P in the cassette 18 installed in the loader 11 is
Since it is not necessary to align the
Need not be positioned and fixed to the loader 11. That is, since the setting of the cassette 18 is facilitated, the productivity can be improved.

As described above, the glass substrate P supplied from the loader 11 to the processing apparatus 1 is subjected to predetermined processing in the processing apparatus 1 and then transported to the unloader 12 waiting at the exit side. It is delivered to the transport roller 95 of the mechanism 91.

The glass substrates P transferred to the transport roller 95 are stacked and accommodated in the cassette 18 by the operation of the setter 71 in the reverse of the operation on the loader 11 side.
In other words, in the unloader 12, when the glass substrate P is delivered to the transport roller 95, the setter 71 is driven in the ascending direction to receive the glass substrate P from the transport roller 95 and receive a pair of alignment guides. At the same time when the first horizontal moving body 22 is aligned on the setter 71 by the
The cassette 29 is driven in the left-right direction and positioned so that its center coincides with the center of the cassette 18.

Next, the setter 71 is a front-rear drive motor 44.
After being driven in the direction of entering the cassette 18 by the drive motor, it is lowered by a predetermined size by the vertical drive motor 61. Thereby, the glass substrate P held by the setter 71 is transferred to the cassette 18.

The setter 71 which has delivered the glass substrate P to the cassette 18 is driven in the left-right direction so that the center thereof coincides with the center of the processing apparatus 1, and the transfer roller 9 is provided.
It is driven in the descending direction to a position slightly lower than 5, and waits.

Therefore, also in the unloader 12,
As in the case of the loader 11, the glass substrate P driven in the left-right direction is not only prevented from being shifted in the left-right direction by the alignment guide 78, but also the glass substrate P delivered from the processing apparatus 1 to the setter 71 is removed. Since it is driven and positioned in the left-right direction, it can be successively accommodated in two cassettes 18 set in the unloader 12.

Further, since the positioning of the setter 71 in the height direction and the positioning in the left and right directions can be performed simultaneously, the tact time can be reduced as compared with the case where the positioning is performed separately.

The present invention is not limited to the above embodiment, but can be variously modified. For example, the number of cassettes installed in the loader or the unloader is not limited to two, and may be three or more, and in other words, it is only necessary to be plural.
Further, the work may be other than a glass substrate for liquid crystal, and the point is not limited.

[0061]

As described above, according to the first aspect of the present invention, at least one of the loader and the unloader is set in the front-rear direction, which is the same direction as the center of the processing section. The drive can be driven in a horizontal direction intersecting the front-rear direction and in a vertical direction intersecting a plane formed by the front-rear direction and the left-right direction, and the work transferred to the setter integrally with the setter. An alignment member for aligning the wafers, and furthermore, a word aligned on the setter.
A transfer means for transferring the work processed by the processing unit or the processing unit is provided so as to be integrally linked with the horizontal movement of the setter.

As a result, the work can be aligned on the setter, so that it is not necessary to fix the cassette fixedly and align the work in the cassette collectively. The setting and replacement work of the cassette becomes easy.

Further, since the setter can be driven in the left-right direction while transferring the work to the transport means, the tact time can be reduced as compared with the case where these operations are sequentially performed.

Further, by driving the setter in the left-right direction, a plurality of cassettes can be set in the loader and the unloader. For this reason, when the work has been taken in and out of one cassette, the work can be taken in and out of the other cassettes and the empty or full cassette can be exchanged during that time. In some cases, you do not have to pause the device to replace it.

[Brief description of the drawings]

FIG. 1 is a plan view of an entire apparatus according to an embodiment of the present invention from which a setter and a transport mechanism are removed.

FIG. 2 is a cross-sectional view showing a mounting structure of a setter and an alignment member.

FIG. 3 is a side view along the line AA in FIG. 2;

FIG. 4 is a side view showing the transport mechanism.

FIG. 5 is a plan view showing the transport mechanism.

FIG. 6 is a front view of the vertical moving body, also taken along the line BB of FIG. 4;

FIG. 7 is a schematic configuration diagram of a processing apparatus provided with a loader and an unloader.

[Description of Signs] 1 ... Processing device, 11 ... Loader, 12 ... Unloader, 15
... Base, 18 ... Cassette, 23 ... First horizontal moving body,
36: second horizontal moving body, 53: vertical moving body, 71: setter, 76: alignment member, 91: transport mechanism (transporting means).

Claims (1)

(57) [Claims] 1. A loading apparatus having a loader for supplying an unprocessed work to a processing unit or an unloader for collecting a work processed by the processing unit, wherein at least one of the loader and the unloader is the work. A base in which a plurality of cassettes for stacking and storing the workpieces are installed along a direction intersecting the moving direction of the work in the processing unit; and a moving direction of the work between the processing unit of the base and the cassette. A first horizontal moving body provided so as to be driven along a horizontal direction intersecting with the first horizontal moving body; and a second horizontal moving body provided so as to be driven along the moving direction of the work on the first horizontal moving body. A vertical moving body provided on the second horizontal moving body so as to be drivable in the vertical direction; and the first horizontal moving body provided on the vertical moving body. A setter but entering the driven that in the plurality of interlocking the predetermined said second when facing the cassette horizontally movable body of the cassettes Shiteso <br/> in the cassette, the vertical mover The setter is located on both sides of the setter and is driven in the direction of coming and going. When the setter receives a work from the loader section or the processing section, it is driven in the approaching direction to abut on both sides of the work to contact this work. A pair of alignment members that are positioned on the setter and hold the work so as not to move on the setter when the first horizontal moving body is being driven; The workpiece is provided in the second
Transport roller driven in the same direction as the horizontal moving body
And transports the workpiece received from the setter to the processing unit.
And receive the work processed by the processing unit.
A loading device comprising: a transfer means for transferring to a setter .