JP2833601B2 - Manufacturing method of printed wiring board - Google Patents

Manufacturing method of printed wiring board

Info

Publication number
JP2833601B2
JP2833601B2 JP31758796A JP31758796A JP2833601B2 JP 2833601 B2 JP2833601 B2 JP 2833601B2 JP 31758796 A JP31758796 A JP 31758796A JP 31758796 A JP31758796 A JP 31758796A JP 2833601 B2 JP2833601 B2 JP 2833601B2
Authority
JP
Japan
Prior art keywords
printed wiring
wiring board
forming
photo via
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP31758796A
Other languages
Japanese (ja)
Other versions
JPH10163637A (en
Inventor
秀樹 菊池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP31758796A priority Critical patent/JP2833601B2/en
Publication of JPH10163637A publication Critical patent/JPH10163637A/en
Application granted granted Critical
Publication of JP2833601B2 publication Critical patent/JP2833601B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は印刷配線板の製造方
法に関し、特にビルドアップ工法を用いた印刷配線板の
製造方法に関するものである。
The present invention relates to a method of manufacturing a printed wiring board, and more particularly to a method of manufacturing a printed wiring board using a build-up method.

【0002】[0002]

【従来の技術】従来の印刷配線板における分割用溝の形
成方法は、公知技術にて製造した印刷配線板の外形加工
後、ホイールカッタが回転している所に印刷配線板を搬
送させ、機械的に分割用溝を形成している方法が一般的
であるが、特に薄板の印刷配線板の場合に分割用溝を形
成する際、基材に亀裂を生じてしまったり、バリが発生
することがあり、重大な問題となっていた。この問題を
解決する方法として、特開平4−42594号公報によ
ると図4(a)〜(d)に示すように、銅箔10が形成
されたポリイミド樹脂よりなるフレキシブル樹脂基材1
1を使用し、銅箔10の表面上にレジスト製版を行な
い、製版された感光性レジスト13を用いて銅箔10の
所定部をエッチング除去することにより絶縁樹脂基材エ
ッチング用レジストを形成し、この絶縁樹脂基材エッチ
ング用レジストを用いて、スルーホール孔12、分割用
溝7等の所定形状の孔及び溝を所定数だけ基材のエッチ
ング時に一括して形成する方法が開示されている。ま
た、特開平3−232293号公報によると、図5
(a),(b)に示すように、化学切削性ガラス板15
を局部露光、一次熱処理後湿式エッチングしてスルーホ
ール孔12及び分割用溝7を同時に形成する方法が開示
されている。
2. Description of the Related Art A conventional method for forming a dividing groove in a printed wiring board is to form a printed wiring board manufactured by a known technique, and then transport the printed wiring board to a place where a wheel cutter is rotating, and then use a machine. In general, the method of forming the dividing groove is generally used.However, when forming the dividing groove particularly in the case of a thin printed wiring board, the base material may be cracked or burr may be generated. There was a serious problem. As a method for solving this problem, according to JP-A-4-42594, as shown in FIGS. 4A to 4D, a flexible resin substrate 1 made of a polyimide resin having a copper foil 10 formed thereon is used.
1 is used to make a resist plate on the surface of the copper foil 10, and a predetermined portion of the copper foil 10 is etched away using the plate-formed photosensitive resist 13 to form an insulating resin substrate etching resist; A method is disclosed in which a predetermined number of holes and grooves of a predetermined shape such as the through-holes 12 and the dividing grooves 7 are collectively formed at the time of etching the base material by using the insulating resin base material etching resist. According to Japanese Patent Application Laid-Open No. 3-232293, FIG.
(A) and (b), as shown in FIG.
Local exposure, primary heat treatment and wet etching to simultaneously form the through-hole 12 and the dividing groove 7.

【0003】[0003]

【発明が解決しようとする課題】前述した従来の印刷配
線板の製造方法においては以下のような問題があった。
すなわち、図4(a)〜(d)に示した特開平4−42
594号公報と図5(a),(b)に示した特開平3−
232293号公報記載の例では、共に両面印刷配線板
(2層板)のみであり、更に、分割用溝の形成とスルー
ホール孔の形成を同時に形成する製造工程において、分
割用溝は半貫通、スルーホール孔は貫通である必要があ
るため、基材溶解条件の割り出しが大変困難であった。
The above-mentioned conventional method for manufacturing a printed wiring board has the following problems.
That is, Japanese Unexamined Patent Application Publication No. 4-42 shown in FIGS.
No. 594 and Japanese Unexamined Patent Application Publication No.
In the example described in Japanese Patent Application Publication No. 232293, both are only double-sided printed wiring boards (two-layer boards). Further, in the manufacturing process of simultaneously forming the dividing grooves and forming the through-hole holes, the dividing grooves are partially penetrated. Since the through-holes need to be penetrated, it was very difficult to determine the conditions for dissolving the base material.

【0004】本発明の目的は、容易に分割用溝とスルー
ホール孔の形成を同時にできる印刷配線板の製造方法を
提供することにある。
An object of the present invention is to provide a method of manufacturing a printed wiring board in which a dividing groove and a through hole can be easily formed at the same time.

【0005】[0005]

【課題を解決するための手段】本発明は、ビルドアップ
工法を使った印刷配線板の製造方法において、回路形成
済みの内層コア材に感光性樹脂を塗布する工程と、フォ
トビア孔と分割用溝を形成するためのマスクフィルムを
使用してフォト法により露光,現像してフォトビア孔と
切断用溝を同時に形成する工程を含むことを特徴とす
る。
According to the present invention, there is provided a method of manufacturing a printed wiring board using a build-up method, wherein a step of applying a photosensitive resin to an inner core material on which a circuit has been formed, a photo via hole and a dividing groove are provided. And forming a photo via hole and a cutting groove at the same time by exposing and developing by a photo method using a mask film for forming a mask film.

【0006】[0006]

【発明の実施の形態】次に本発明の実施の形態について
図面を参照して説明する。
Embodiments of the present invention will now be described with reference to the drawings.

【0007】図1(a)〜(c),図2(a)〜
(c),図3(a)〜(c)は本発明の一実施の形態の
印刷配線板の製造方法を説明するための工程順に示した
断面図である。本発明の一実施の形態の印刷配線板の製
造方法は、まず、図1(a)に示すように、従来より公
知の方法で導体パターン1とフォトビアランド2を形成
する。この際に使用する絶縁基材3に厚さ100μmの
エポキシ樹脂を用い、銅箔厚は12μmである。次に、
図1(b)に示すように、上記方法にて形成したコア層
4に感光性絶縁樹脂5を両面にそれぞれ厚さ80μm塗
布を行なう。次に、図1(c)に示すように、フォトビ
ア孔6と分割用溝7を形成するためのマスクフィルム8
を予め用意しておき、そのマスクフィルム8を感光性絶
縁樹脂5に重ねて4J/cm2 のUV光を照射し露光を
行なう。その時のフォトビア孔径は0.15mm、分割
用溝幅は0.15mmとする。(通常ビルドアップ基板
で使われているフォトビア孔径と同等)次に、図2
(a)に示すように、ブチル系溶剤により現像を行ない
フォトビア孔6bと分割用溝7を同時に形成する。次
に、図2(b)に示すように、無電解銅めっき及び電気
銅めっきを行ない、フォトビア6aを形成する。
FIGS. 1 (a) to 1 (c), 2 (a) to
3 (c) and FIGS. 3 (a) to 3 (c) are cross-sectional views shown in the order of steps for explaining the method for manufacturing a printed wiring board according to one embodiment of the present invention. In the method for manufacturing a printed wiring board according to one embodiment of the present invention, first, as shown in FIG. 1A, a conductor pattern 1 and a photo via land 2 are formed by a conventionally known method. At this time, an epoxy resin having a thickness of 100 μm is used for the insulating base material 3 and the thickness of the copper foil is 12 μm. next,
As shown in FIG. 1B, a photosensitive insulating resin 5 is applied to both sides of the core layer 4 formed by the above-described method, with a thickness of 80 μm. Next, as shown in FIG. 1C, a mask film 8 for forming a photo via hole 6 and a dividing groove 7 is formed.
Is prepared in advance, and the mask film 8 is superposed on the photosensitive insulating resin 5 and exposed to UV light of 4 J / cm 2 to perform exposure. At this time, the diameter of the photo via hole is 0.15 mm, and the width of the dividing groove is 0.15 mm. (Equivalent to the photo via hole diameter normally used in build-up boards)
As shown in FIG. 3A, the photo via hole 6b and the dividing groove 7 are simultaneously formed by performing development using a butyl-based solvent. Next, as shown in FIG. 2B, electroless copper plating and electrolytic copper plating are performed to form photovias 6a.

【0008】その後、図2(c)に示すように、両面1
回ビルドアップしたコア9に再び感光性絶縁樹脂5を両
面にそれぞれ厚さ80μm塗布を行なう。次に、図3
(a)に示すように、フォトビア孔6bと図2(a)に
て作成した分割用溝7と同じ箇所に再びフォトビア孔6
bと分割用溝7を形成するためのマスクフィルム8を予
用意しておき、そのマスクフィルム8を感光性絶縁樹脂
膜5に重ねて4J/cm2 のUV光を照射し露光を行な
う。その時のフォトビア孔6bの径は0.15mm、分
割用溝7の幅は0.15mmとする。(通常ビルドアッ
プ基板で使われているフォトビア孔径と同等)次に、図
3(b)に示すように、ブチル系溶剤により現像を行な
いフォトビア孔6bと分割用溝7を同時に形成する。そ
の時、分割用溝7がコア層4まで到達するまで現像を行
なう。ブチル系溶剤は感光性樹脂の感光していない箇所
のみ現像され、フォトビアランド2や絶縁基材3は溶解
されないので、分割用溝7が貫通してしまうことはな
い。次に、図3(c)に示すように、無電解銅めっき及
び電気銅めっきを行ない、フォトビア6aを形成する。
[0008] Thereafter, as shown in FIG.
The photosensitive insulating resin 5 is again applied to both sides of the core 9 that has been built up twice, to a thickness of 80 μm. Next, FIG.
As shown in FIG. 2A, the photo via hole 6b is again placed in the same place as the dividing groove 7 created in FIG.
b and a mask film 8 for forming the dividing groove 7 are prepared in advance, and the mask film 8 is overlaid on the photosensitive insulating resin film 5 and irradiated with 4 J / cm 2 UV light for exposure. At this time, the diameter of the photo via hole 6b is 0.15 mm, and the width of the dividing groove 7 is 0.15 mm. (Equivalent to the diameter of a photo via hole normally used in a build-up substrate) Next, as shown in FIG. 3B, development is performed with a butyl-based solvent to form a photo via hole 6b and a dividing groove 7 at the same time. At this time, development is performed until the dividing groove 7 reaches the core layer 4. The butyl-based solvent is developed only in the unexposed portions of the photosensitive resin, and the photo via lands 2 and the insulating base material 3 are not dissolved, so that the dividing grooves 7 do not penetrate. Next, as shown in FIG. 3C, electroless copper plating and electrolytic copper plating are performed to form photovias 6a.

【0009】これにより、フォトビア6aと分割用溝7
が同時に形成できる。従って、製造工程を追加すること
なく従来のビルドアップ工法で製造できるため、多層印
刷配線板の製造にも適用でき、フォトビア孔6bの形成
と同時に任意の場所に自由度の高い任意の形状の分割用
溝7を形成することができ、感光性絶縁樹脂5が溶解し
なくなるまで現像すればよいので、困難な製造条件割り
だしが不要ととなるため、容易に分割用溝7のある多層
印刷配線板を製造することができる。
As a result, the photo via 6a and the dividing groove 7
Can be formed simultaneously. Therefore, since it can be manufactured by the conventional build-up method without adding a manufacturing process, it can also be applied to the manufacture of a multilayer printed wiring board, and can be divided into arbitrary shapes having a high degree of freedom at arbitrary locations at the same time as the formation of the photo via holes 6b. Grooves 7 can be formed, and development can be performed until the photosensitive insulating resin 5 is no longer dissolved, so that it is not necessary to divide difficult manufacturing conditions. Boards can be manufactured.

【0010】[0010]

【発明の効果】以上説明したように本発明は、製造工程
を追加することなく従来のビルトアップ工法にて製造
し、フォトビア孔形成と同時に任意の場所に自由度の高
い任意の形状の分割用溝を形成することができる。更
に、困難な製造条件割りだしが不要となるため、容易に
分割用溝のある多層印刷配線板を製造することができ
る。
As described above, the present invention can be manufactured by a conventional built-up method without adding a manufacturing process, and can be used to divide an arbitrary shape with a high degree of freedom at an arbitrary place at the same time as forming a photo via hole. Grooves can be formed. Further, since it is not necessary to divide difficult manufacturing conditions, a multilayer printed wiring board having a dividing groove can be easily manufactured.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)〜(c)は本発明の一実施の形態の印刷
配線板の製造方法を説明するための工程順に示した断面
図である。
FIGS. 1A to 1C are cross-sectional views illustrating a method of manufacturing a printed wiring board according to an embodiment of the present invention in the order of steps for explaining the method.

【図2】(a)〜(c)は本発明の一実施の形態の印刷
配線板の製造方法を説明するための工程順に示した断面
図である。
FIGS. 2A to 2C are cross-sectional views illustrating a method of manufacturing a printed wiring board according to an embodiment of the present invention in the order of steps.

【図3】(a)〜(c)は本発明の一実施の形態の印刷
配線板の製造方法を説明するための工程順に示した断面
図である。
FIGS. 3A to 3C are cross-sectional views shown in a process order for describing a method of manufacturing a printed wiring board according to an embodiment of the present invention.

【図4】(a)〜(d)は従来の印刷配線板の製造方法
の一例を説明するための工程順に示した断面図である。
FIGS. 4A to 4D are cross-sectional views sequentially illustrating steps for explaining an example of a conventional method for manufacturing a printed wiring board.

【図5】(a),(b)は従来の印刷配線板の一例の分
割用溝のスルーホール孔の断面図である。
5 (a) and 5 (b) are cross-sectional views of through-hole holes in a dividing groove of an example of a conventional printed wiring board.

【符号の説明】[Explanation of symbols]

1 導体パターン 2 フォトビアランド 3 絶縁基材 4 コア層 5 感光性絶縁樹脂 6a フォトビア 6b フォトビア孔 7 分割用溝 8 マスクフィルム 9 両面1回ビルドアップしたコア 10 銅箔 11 フレキシブル樹脂基材 12 スルーホール孔 13 感光性レジスト 14 外形支持バー 15 化学切削性ガラス板 DESCRIPTION OF SYMBOLS 1 Conductor pattern 2 Photo via land 3 Insulating base material 4 Core layer 5 Photosensitive insulating resin 6a Photo via 6b Photo via hole 7 Dividing groove 8 Mask film 9 Core built up once on both sides 10 Copper foil 11 Flexible resin base material 12 Through hole Hole 13 Photosensitive resist 14 External support bar 15 Chemically cut glass plate

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 ビルドアップ工法による印刷配線板の製
造方法において、エポキシ樹脂の絶縁基材上に導体パタ
ーンとフォトビアランドを形成する工程と、この絶縁基
材上に導体パターンとフォトビアランドを形成したコア
層に感光性絶縁樹脂を両面に塗布し、マスクフィルムを
当接しUV光を照射し露光,現像を行いフォトビア孔と
分割用溝を同時に形成する工程と、無電解銅めっき及び
電気銅めっきを行いフォトビアを形成し両面1回ビルド
アップしたコアを形成する工程と、このコアに再び感光
性樹脂を両面に塗布しマスクフィルムを当接しUV光を
照射し露光,現像して前記フォトビア孔と前記分割用溝
と同じ箇所に再びフォトビア孔と分割用溝を同時に形成
する工程と、無電解銅めっき及び電気銅めっきを行いフ
ォトビアを形成する工程とを含むことを特徴とする印刷
配線板の製造方法。
In a method of manufacturing a printed wiring board by a build-up method, a step of forming a conductor pattern and a photo via land on an insulating base material of epoxy resin, and forming the conductor pattern and the photo via land on the insulating base material Applying a photosensitive insulating resin to both sides of the formed core layer, contacting a mask film, irradiating with UV light, exposing and developing to form a photo via hole and a dividing groove simultaneously, electroless copper plating and electrolytic copper A step of forming photovias by plating and forming a core that has been built up once on both sides; applying a photosensitive resin to both sides of the core again, contacting a mask film, irradiating UV light, exposing and developing the photovia holes And a step of simultaneously forming a photo via hole and a dividing groove again in the same place as the dividing groove, and forming a photo via by performing electroless copper plating and electrolytic copper plating. And a process for producing a printed wiring board.
【請求項2】 前記露光,現像がブチル系溶剤により行
われることを特徴とする請求項1記載の印刷配線板の製
造方法。
2. The method for manufacturing a printed wiring board according to claim 1, wherein said exposing and developing are performed with a butyl solvent.
JP31758796A 1996-11-28 1996-11-28 Manufacturing method of printed wiring board Expired - Fee Related JP2833601B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31758796A JP2833601B2 (en) 1996-11-28 1996-11-28 Manufacturing method of printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31758796A JP2833601B2 (en) 1996-11-28 1996-11-28 Manufacturing method of printed wiring board

Publications (2)

Publication Number Publication Date
JPH10163637A JPH10163637A (en) 1998-06-19
JP2833601B2 true JP2833601B2 (en) 1998-12-09

Family

ID=18089902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31758796A Expired - Fee Related JP2833601B2 (en) 1996-11-28 1996-11-28 Manufacturing method of printed wiring board

Country Status (1)

Country Link
JP (1) JP2833601B2 (en)

Also Published As

Publication number Publication date
JPH10163637A (en) 1998-06-19

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