JP2833489B2 - Laser processing machine - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical scanning laser processing machine for processing a workpiece by moving a processing head.

[0002]

2. Description of the Related Art FIG.
FIG. 23 is a schematic view showing a conventional cantilever structure type optical scanning laser beam machine disclosed in Japanese Patent Publication No. 89, and FIG. 23 is a plan view thereof. In the drawing, 1 is a Y arm movable in the Y axis direction, 2 is a Y axis rail disposed below the Y arm 1, 3 is a Y axis rail receiver for receiving the Y axis rail 2, 4
Is a laser beam, 5 is a laser beam condensed and the workpiece 6
A processing head 7 for irradiating the laser beam 4 on the upper side is a bend mirror (7a... First bend mirror, 7b... A second bend mirror) for reflecting the laser beam 4 to the processing head 5; The Y-axis bellows 9 covering the opening and the drive unit is provided with the Y-axis rail receiver 3 and the Y-axis bellows 9.
A holding plate 10 that holds the arm 1 and its driving part and is movable in the X-axis direction is an X-axis rail, 11 is attached to a lower portion of the holding plate 9, and an X-axis rail receiver that receives the X-axis rail 10. 12 is an X-axis bellows that covers the X-axis direction drive unit, 13 is a processing table that holds the workpiece 6, 14 is a gantry that supports the whole, 15 is a processing chamber, 16
Is a laser oscillator that outputs the laser light 4.

Next, the operation will be described. The Y-arm 1 is movable in the Y-axis direction by a Y-axis rail attached to its lower part and a Y-axis rail receiver 3 attached to a holding plate 9. Further, the holding plate 9 holds the Y arm 1 and its driving part, and supports the entire frame 14.
An X-axis rail 10 attached to the holding plate 9 and an X-axis rail receiver 11 attached to a lower portion of the holding plate 9 can move in the X-axis direction. On the other hand, the laser light 4 output from the laser oscillator 16 is stored in the Y arm 1 and fixed to the holding plate 9 (therefore, the first arm does not move even if the Y arm 1 moves in the Y axis direction). The light is reflected by the bend mirror 7a and the second bend mirror 7b attached to the tip of the Y arm 1, and is reflected by the second bend mirror 7b.
Is guided to the processing head 5 attached to the lower part of. The laser beam 4 is condensed by this processing head 5 and the gantry 1
Irradiation is performed on the workpiece 6 held on the processing table 13 fixed on the workpiece 4.

At this time, by moving the Y arm 1 in the Y axis direction and moving the holding plate 9 in the X axis direction, the processing head 5 can be moved in any axis direction on the XY plane. The workpiece 6 can be processed into an arbitrary shape. The opening and the driving section of the Y arm 1 have a Y bellows 8 and the X axis direction driving section has an X bellows 1.
2 are attached for dust protection. Also, Y
The movable area of the arm 1 and the entire processing area
And take safety measures.

Since the conventional cantilever structure type optical scanning laser beam machine shown in FIG. 22 is constructed as described above, in order to move the machining head in the Y-axis direction, the Y arm itself is moved. However, since the weight of the moving portion increases, the vibration caused by the movement in the Y-axis direction increases, and there is a problem that the machining accuracy is adversely affected. Further, since the movement range of the Y arm in the Y-axis direction is difficult to understand, the collision easily hits a human body or an object, and there is a problem in safety.

Therefore, a laser beam machine capable of solving this problem, that is, a laser beam machine in which a machining head is arranged on a Y-arm movable in the X-axis direction and only this machining head is movable in the Y-axis direction. Are disclosed in JP-A-61-242782 and JP-A-5-77075.

As another conventional example, a laser oscillator for oscillating laser light is provided, a first plane intersecting the axis of the laser light, a second plane intersecting the first plane, and a second plane intersecting the first plane. A third plane intersecting the plane, a fourth plane intersecting the third plane, and a fifth plane intersecting the fourth plane
A first bend mirror for receiving a laser beam on the first plane is provided at an intersection of the first and second planes so that an optical axis is formed on each of the first and second planes. A second bend mirror is provided so as to face the mirror, and a third bend mirror is provided at the intersection of the second plane and the third plane so as to face the second bend mirror. A fourth bend mirror is provided at the intersection of the plane and the fourth plane so as to face the third bend mirror, and a fourth bend mirror is provided at the intersection of the fourth and fifth planes. Fifth bend mirrors are disposed so as to face each other, and the optical axis distance between the second bend mirror and the third bend mirror, and the fourth bend mirror, the fifth bend mirror, and the like. A laser processing machine in which the optical axis distance changes during
No. 894 and the like.

[0008] As another conventional example, a mirror for receiving linearly polarized laser light output from a laser oscillator is provided.
A laser processing machine using a circularly polarizing mirror is disclosed in
No. 6985, and the like.

As still another conventional example, by moving a laser processing head having a bend mirror and a condenser lens, the length of a laser beam from a laser oscillator to a processing point for performing laser processing on a workpiece is reduced. In a laser processing machine that changes, a laser processing machine that provides a collimator that can be moved by a drive motor between a laser oscillator and a laser processing head makes the diameter of a laser beam and the focal length of a condenser lens substantially constant. Japanese Patent Laid-Open No. 4-3
No. 27394, and the like.

FIGS. 24 and 2 show still another conventional example.
5 is shown. FIG. 24 shows, for example, Japanese Patent Application Laid-Open No. 5-69.
FIG. 25 is a plan view showing a conventional optical scanning laser beam machine disclosed in Japanese Patent Publication No. 170, and FIG. 25 is a front view thereof. In the figure, a laser processing machine is a base 2 provided on a floor 103.
7 and a first work table 107a and a second work table 107b arranged on both sides of the base 27, and a large number of support pillars 11 are respectively provided on the upper portions thereof, and the support columns 11 are erected in the shape of a sword. The first workpiece W
a, the second workpiece Wb is placed. Next, the guide rail 24 is attached in the X-axis direction of the upper surface of the base 27,
An X-axis carriage 115 is provided on the guide rail 24 via a guide 117 so as to be slidable in the X-axis direction.
Next, the X-axis carriage 115 is provided with a hollow hole 129 having a rectangular cross section in the Y-axis direction, and a beam-shaped Y-axis carriage 131 having a rectangular cross section and long in the Y-axis direction is mounted therein. It is slidable in the Y-axis direction via a slide rail 133 and a guide 135. The first housing 147 is provided at each end of the Y-axis carriage 131.
a and a second housing 147b, and the first housing 147a and the second housing 147b have a first laser processing head 149a and a second laser processing head 149b.
b is held vertically. On the other hand, the laser oscillator 16 emits a laser beam LB to be emitted on the floor 103.
Are arranged at a height above the X-axis carriage 115 so as to be guided in the X-axis direction. Telescopic beam conduit 157 (FIG. 2)
4. Only a part is shown in FIG. ), The beam splitter 15 including a half mirror 161 for guiding the laser beam LB and a total reflection bend mirror 165.
9. Here, a right beam conduit 157 for guiding the laser beam LB divided approximately in half, a first end-stage bend mirror 163a supported by the first housing 147a, and a left beam for guiding the remaining half laser beam LB. Beam conduit 157
And the second end-stage bend mirror 163b supported by the second housing 147b, and the first and second end-stage bend mirrors 163 for refracting the laser beam LB guided to each vertically downward.
a, 163b, further leading first and second housings 147
a, 147b, and finally these laser beams LB are condensed and focused on the first workpiece Wa and the second workpiece Wb.
First and second processing heads 14 for performing laser processing
9a and 149b are installed.

Next, the operation will be described. The X-axis carriage 115 has a guide rail 2 attached to its lower part.
4. It can be moved in the X-axis direction by the guide 117. Further, the Y-axis carriage 131 is movable in the Y-axis direction by a slide rail 133 and a guide 135 provided therein. On the other hand, the laser beam LB emitted from the laser oscillator 16 passes through a telescopic beam conduit 157 and reaches a beam splitter 159 having a half mirror 161 and a total reflection bend mirror 165. In the beam splitter 159, almost half of the laser beam LB incident on the half mirror 161 from the X-axis direction is introduced into the first end-stage bend mirror 163a supported by the first housing 147a on the right through the beam conduit 157. The other half of the laser beam LB is transmitted as it is to be incident on the total reflection bend mirror 165 in the beam splitter 159, and is transmitted to the second final stage bend mirror 163b supported by the second housing 147b on the left.
Introduce through 7. First and second final stage bend mirror 16
The laser beam LB guided to the first and second housings 147a and 147b is refracted vertically downward.
b, the first and second processing heads 149a, 149
The light is condensed at 49b, and the first workpiece Wa and the second workpiece Wb
And laser processing is performed. At this time, X
By moving the axis carriage 115 in the X-axis direction and moving the Y-axis carriage 131 in the Y-axis direction, the first and second workpieces Wa can be moved in any direction on the XY plane. , Wb can be processed into any shape. Further, a laser beam LB emitted from one laser oscillator 16 is first and second beams emitted from a beam splitter 159.
Since the laser beam is divided and introduced into the laser processing heads 149a and 149b, the two first and second workpieces Wa and Wb can be simultaneously and continuously processed in large numbers.

[0012]

As disclosed in Japanese Unexamined Patent Publication Nos. 61-242772 and 5-77075, the conventional laser beam machine as shown in FIG. Although the above-mentioned disadvantages possessed can be solved,
Since the center of gravity of the Y arm is always outside the pair of X-axis rails, the difference in load applied to each rail and the bending moment are large, and there is a problem in the life of the rail and the rail receiver.

The laser beam machine disclosed in JP-A-63-16894 and JP-A-61-296985 reduces the circular polarization rate while transmitting a circularly polarized laser beam to a processing point. There was a problem that would.

Further, in the laser processing machine disclosed in Japanese Patent Application Laid-Open No. 4-327394, it is necessary to move the collimating device by a drive motor, so that a change in beam diameter in the movable range of the processing head is reduced. There is a problem that the means of the above becomes complicated.

Further, in the laser beam machine shown in FIGS. 24 and 25, the Y-axis carriage itself must be moved in order to move the machining head in the Y-axis direction.
Since the weight of the moving part becomes large and unbalanced, the vibration at the time of moving in the Y-axis direction increases, and there is a problem that the processing accuracy is adversely affected.

Further, in the laser beam machine shown in FIGS. 24 and 25, since the purpose is to simultaneously machine two workpieces and continuously process a large number of workpieces of the same shape, different types of workpieces are processed. The problem that compound machining is not possible, and
Since the laser beam is split into almost half by the beam splitter, the output of the laser oscillator is reduced by 2 times compared to the single processing.
There is a problem that it is required to be twice or more.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a cantilever type laser beam machine capable of extending the life of rails and rail supports. And

Another object of the present invention is to provide a laser beam machine capable of transmitting a circularly polarized laser beam to a processing point without lowering the circular polarization rate.

Another object of the present invention is to provide a laser beam machine having a simple configuration and capable of reducing a change in beam diameter in the movable range of the machining head.

Still another object of the present invention is to provide an optical scanning laser beam machine capable of eliminating unbalance of the weight of the Y-axis carriage when the machining head moves in the Y-axis direction and reduction of machining accuracy due to vibration.

It is another object of the present invention to provide an optical scanning type laser beam machine capable of performing a plurality of lines and different types of workpieces with a single laser beam machine.

Another object of the present invention is to provide an optical scanning type laser beam machine capable of realizing an optical path configuration for reducing the output by laser beam splitting for processing a plurality of lines and preventing the laser oscillator output from increasing. I do.

[0023]

According to a first aspect of the present invention, there is provided a laser beam machine for processing a laser beam by moving a laser beam on a workpiece by moving a processing head for irradiating the laser beam. , A laser oscillator, an arm movably provided in a first axial direction on a rail portion arranged in a first axial direction, and a second arm orthogonal to the first axis on a plane with the arm. A first bend mirror and a second bend mirror for receiving a laser beam output from a laser oscillator on the first axis.
A bend mirror, a third bend mirror and a fourth bend mirror on the arm, a fifth bend mirror on the processing head, and a laser beam path. It is located above.

According to a second aspect of the present invention, in the laser beam machine according to the first aspect, a first bend mirror that first receives a laser beam output from a laser oscillator is provided with at least a second axis. It is supported so as to be movable in a third axial direction orthogonal to.

According to a third aspect of the present invention, there is provided a laser processing machine for processing by moving a laser beam on a workpiece by moving a processing head for irradiating the laser beam. A cantilever arm movably provided in the first axial direction on a rail portion provided in a first axial direction, and the cantilever arm is orthogonal to the first axis in a plane with the cantilever arm; A housing provided movably in a second axial direction, and a processing head built in the housing and movable in a direction perpendicular to the plane, wherein the cantilever arm includes the first cantilever. A double-winged cantilever arm that is substantially symmetrical with respect to an axis about the axis is formed, the center of gravity of the arm is positioned on the rail, and a plurality of processing lines are provided. .

According to a fourth aspect of the present invention, in the laser beam machine according to the third aspect, a plurality of lines share one housing which moves on a double-winged cantilever arm. Things.

According to a fifth aspect of the present invention, in the laser beam machine according to the third aspect, a housing that moves on a double-winged cantilever arm is individually provided for each of a plurality of lines. Things.

According to a sixth aspect of the present invention, in the laser beam machine according to the fifth aspect, a laser beam guided to a plurality of lines has an optical path switched by a beam switching device.

According to a seventh aspect of the present invention, in the laser processing machine according to the fifth aspect, one of the housings has a processing device other than the laser processing.

According to an eighth aspect of the present invention, in the laser beam machine according to any one of the first to seventh aspects, a rotary table is provided outside the movable range of the processing head.

According to a ninth aspect of the present invention, in the laser beam machine according to the eighth aspect, there is provided means for vertically moving or sliding the rotary table body.

[0032] The invention according to claim 10 of the present invention is as follows.
In the laser beam machine according to any one of claims 1 to 9, a lifting table is provided with a lifting roller.

[0033] The invention according to claim 11 of the present invention provides:
According to a tenth aspect of the present invention, there is provided the laser processing machine, further comprising means for driving a roller body of the elevating roller.

According to a twelfth aspect of the present invention,
A first plane intersecting the axis of the laser light, a second plane intersecting the first plane, and a second plane intersecting the second plane. The first plane receives laser light such that an optical axis is formed on each of the third plane, the fourth plane intersecting the third plane, and the fifth plane intersecting the fourth plane. A first bend mirror is provided at an intersection of the first plane and the second plane so as to face the first bend mirror, and a second bend mirror is provided at the intersection of the second plane and the third plane. A third bend mirror is provided at an intersection of the third plane and the fourth plane so as to face the second bend mirror.
A fourth bend mirror is provided at an intersection of the fourth bend mirror and a fourth bend mirror at an intersection of the fourth and fifth planes so as to face the third bend mirror. Fifth bend mirrors are disposed so as to face each other, and the optical axis distance between the second bend mirror and the third bend mirror, and the fourth bend mirror and the fifth bend mirror In the laser beam machine in which the optical axis distance changes between the first and second bend mirrors, the second to fifth bend mirrors cancel out the phase shift amount inherent to the bend mirror. It is arranged as follows.

According to a thirteenth aspect of the present invention,
In the laser beam machine according to claim 12, the first bend mirror is supported by an XY movement adjusting mechanism.

According to a fourteenth aspect of the present invention,
In the laser beam machine according to the twelfth or thirteenth aspect, the second to fifth bend mirrors are ES or PS coated mirrors.

[0037]

In the laser beam machine constructed as described above, it is possible to reduce the difference in load applied to the arm and the like and the load moment applied to each of the pair of rails supporting the arm.

Further, the first bend mirror can be moved in accordance with the height of the optical axis of the laser oscillator.

Further, the unbalance of the arm weight and the reduction in processing accuracy due to vibration during movement can be eliminated, and a plurality of processing lines can be formed by one laser processing machine.

Further, the processing of a plurality of lines can be configured efficiently at low cost.

Further, a plurality of lines of workpieces can be continuously and efficiently processed.

Further, the laser beam guided to a plurality of lines can be quickly switched.

Further, for example, if the first line is a tapping primary processing line and the other lines are secondary processing lines for sheet metal by laser processing after the primary processing, one of the plurality of lines constitutes one. With the processing system, high value-added products can be manufactured.

Further, a workpiece having a cylindrical shape can be laser-processed while preventing interference with the processing head.

When the workpiece placed on the processing table is large, the rotary table body is retracted so as not to hinder the loading / unloading of the workpiece.

Further, the workpiece placed on the processing table can be easily moved.

Further, the loading and unloading of the workpiece placed on the processing table can be automated.

The circularly polarized laser light is transmitted to the processing head without lowering the circular polarization rate.

Further, the laser beam can be made incident on the center of the second bend mirror while maintaining the angle of the first bend mirror at which the circular polarization ratio becomes good.

Further, the circularly polarized laser light is transmitted to the processing head with a reduced output attenuation during transmission without lowering the circular polarization rate.

[0051]

【Example】

Embodiment 1 FIG. Hereinafter, a first embodiment of the present invention will be described with reference to FIGS.
This will be described with reference to FIG. FIG. 1 is a perspective view showing the entire optical scanning laser processing machine according to the first embodiment of the present invention. This perspective view omits some parts and mechanisms to avoid complicating the drawing. Although not shown, the omitted parts, mechanisms, and the like are shown in FIGS. That is, FIG. 2 is a perspective view showing details of the X, Y, and Z-axis direction moving mechanisms of the first bend mirror, FIG. 3 is a front view showing details of a counter bellows portion of the Y-axis optical path, and FIG. FIG. 5 is a view showing the installation of a blower for setting a negative pressure, and FIG. 5 is a view showing details of an elevating roller for transporting a work to be processed in the X-axis direction. 6 is a perspective view showing a configuration of an optical path system formed by first to fifth bend mirrors and a collimation lens. FIG. 7 is a perspective view for explaining the principle of canceling the amount of phase shift by the bend mirror. FIG. 8 is a diagram showing beam propagation characteristics when a collimation lens or a collimation mirror is installed.

In the figure, 17a to 17e reflect the laser beam output from the laser oscillator 16 and
Mirror (17a ... first bend mirror, 1)
7b: second bend mirror, 17c: third bend mirror, 17d: fourth bend mirror, 17e: fifth bend mirror), and the first bend mirror 17a and the second bend mirror 17b are X A third bend mirror 17c and a fourth bend mirror 17d
Is disposed on the Y arm 18, and the fifth bend mirror 17 e is disposed on the processing head 5. The bend mirrors 17a to 17e are provided with the first bend mirror 17a.
a is a circularly polarizing mirror (+ 90 ° retarder), and the second bending mirror 17a transmits the laser beam 4 circularly polarized by the first bending mirror 17a to the processing head 5 without lowering the circular polarization ratio. Bend mirror 17b and third
And the fourth and fifth bend mirrors 17d and 17e are arranged so that the phase shift amounts cancel each other. The principle of canceling the phase shift amount will be described later mainly with reference to FIG. Each of the second to fifth bend mirrors 17b to 17e is formed of a generally used metal mirror such as a copper mirror.

As shown in FIG. 6, the collimation lens 39 has a beam waist between the second bend mirror 17b and the third bend mirror 17c and near an intermediate position of the movable range of the processing head 5. Position. The first bend mirror 17a has an angle adjusting function, and details thereof are shown in FIG.
The mechanism is movable in the axis and Z-axis directions. In FIG. 2, reference numerals 70a, 70b, and 70c denote lock screws for fixing members to be moved in the X-axis, Y-axis, and Z-axis directions.
Is a Y-axis direction moving member, 72 is this Y-axis direction moving member 71
Is a Z-axis direction moving member, and 74 is a bend block that holds the first bend mirror 17a.

Reference numeral 18 denotes a Y arm which is fixed in the Y-axis direction and is movable in the X-axis direction.
The bend mirror 17d is supported at its base as shown in FIG. A Z-axis unit 21 including the processing head 5
The Y-arm 18, which is mounted so as to be movable in the Y-axis direction, has a thinner tip and a thinner wall, so that the center of gravity of the Y-arm 18 and the X-axis rail 24 a, which will be described later, can be set regardless of the position of the Z-axis unit 21. 24b. 19a and 19b are Y arms 18
A pair of Y-axis rails arranged above, 20a and 20b are Y
A pair of Y-axis rail receivers 21 for receiving the axis rails 19a and 19b, 21 are provided with Y-axis rail receivers 20a and 20b,
A Z-axis unit which is movable on the Y-arm 18 in the Y-axis direction and has a function of moving the processing head 5 up and down, and supports a fifth bend mirror 17e above the Z-axis unit.

Reference numeral 22 denotes a dustproof Y-axis bellows for covering a Y-axis drive unit (not shown) including Y-axis rails 19a and 19b and Y-axis rail receivers 20a and 20b. Reference numeral 23 denotes a Y-axis optical path (a fourth bend mirror). This is a dust-proof Y-axis optical path bellows that covers the space between the 17d and the fifth bend mirror 17e). The details of this portion are configured as shown in FIG. That is, as shown in FIG. 3, the fifth bend mirror 17e is covered with a box 34, and a counter bellows 35 fixed with a fixing bracket 36 on the opposite side of the Y-axis optical path bellows 23 across this box 34 is connected to the internal space. In this state, when the Z-axis unit moves in the Y direction, the pressure inside the bellows does not change, thereby preventing the surrounding air from being sucked into the bellows.

Reference numerals 24a and 24b denote a pair of X-axis rails arranged on the X-axis. Reference numerals 25a and 25b denote X-axis rail receivers mounted on the lower surface of the end of the Y arm 18 for receiving the X-axis rails 24a and 24b. 26 is an X-axis rail 24a, 24b
And an X-axis drive unit (not shown) including X-axis rail receivers 25a and 25b, and an X-axis optical path (second bend mirror 17b).
Between the first bend mirror 17c and the third bend mirror 17c)
A shaft bellows 27, a base on which the X-axis rails 24a, 24b are disposed and which supports the above-mentioned components as a whole, and a rotary table 28 which holds and rotates the workpiece 29 mainly having a cylindrical shape, is large. In order not to hinder the loading and unloading of the workpiece 6, the workpiece 6 is disposed outside the movable range of the processing head 5 on the processing table 31, and is supported by an actuator 75 such as an air cylinder so as to be able to move up and down. The rotary table 28 may be configured to slide in the retreating direction without being moved up and down, or a dedicated stand for the rotary table 28 may be provided to separate the rotary table 28 from the processing table 31.

Reference numeral 30 denotes a knife-edge-shaped support for mainly holding the flat workpiece 6, and reference numeral 31 denotes a processing table.
By providing a blower 48 for making the inside of the processing table 31 a negative pressure as shown in FIG.
It is configured such that fumes and the like can be sucked and discharged. In addition, since the laser processing machine is of a light scanning type and the processing table 31 is a fixed type that does not move independently, the processing table 31 can be arbitrarily changed according to the shape, size, etc. of the workpiece 6. . As shown in FIG. 5, an actuator 76 such as an air cylinder is provided on the processing table 31 so that the workpiece 6 can be lifted from the knife-edge-shaped support 30 and easily moved manually in the X-direction. The lifting roller 49 is provided so as to be movable up and down. The elevating roller 49 has a free bear configuration so that the workpiece 6 can be moved in any horizontal direction.

Next, the operation and action of this cantilever structure type optical scanning type laser beam machine will be described. That is, in FIG. 1, the Y-arm 18 does not move in the Y-axis direction, and the Z-axis unit 21 is moved in the Y-axis direction by the Y-axis rail receivers 20a and 20b. 19
Move on b. Further, the Y-arm 18 has X-axis rail receivers 25a and 25b installed on the lower surface of the end, and can move in the X-axis direction on the X-axis rails 24a and 24b provided on the gantry 27. On the other hand, the laser light 4 output from the laser oscillator 16 is reflected by the bend mirrors 17 a to 17 e, collected by the processing head 5 installed below the Z-axis unit 21, and held by the knife edge support 30. The workpiece 6 is irradiated. At this time, the Z-axis unit 21 is moved in the Y-axis direction, and the Y arm 18 is moved in the X-axis direction.
Since the workpiece 6 can be moved in an arbitrary direction on a plane, the workpiece 6 can be laser-processed into an arbitrary shape.

This laser processing machine mounts a Z-axis unit 21 including the processing head 5 movably in the Y-axis direction.
The arm 18 is configured such that its center of gravity is located between the X-axis rails 24a and 24b regardless of the position of the Z-axis unit 21 by making the distal end portion thinner and thinner. Therefore, the load applied to the Y arm 18 and the like is almost equally applied to the X-axis rail 24a and the X-axis rail 24b.
5a and the X-axis rail receiver 25b are also almost equally applied.

The workpiece 2 mainly having a cylindrical shape
Rotating table 28 which can hold and rotate 9
Is provided, the workpiece 29 having a mainly cylindrical shape can be held, and the same processing can be performed while rotating. At this time, since the processing height is higher than that of the flat workpiece 6, the Z-axis unit 21 raises the processing head 5 to perform the processing. In addition, the rotary table 28 performs processing of, for example, a flat plate or the like that does not use the rotary table.
In this case, the processing area is disposed outside the movable range of the processing head 5 so as not to narrow the processing area, and further supported by an actuator 75 such as an air cylinder so that the processing head 5 can be raised or slid in the retreating direction as necessary. I have. Therefore, when the large workpiece 6 is loaded and unloaded, the rotary table 28 does not interfere.

As shown in FIG. 5, the working table 31 is provided with a lifting roller 49 which is raised and lowered by an actuator 76 such as an air cylinder. When the workpiece 6 is lifted from the knife-edge-shaped support 30 by hand, the workpiece 6 can be easily moved manually in the X-axis direction. Also,
At the time of loading of the workpiece 6, if the elevating roller 49 is raised to a position where the roller portion is higher than the tip of the knife-edge-shaped support 30, the loading operation of the workpiece 6 can be facilitated.

Further, this laser processing machine is capable of adjusting a circular polarization rate,
The first bend mirror 17a is provided for facilitating optical axis adjustment and the like.
Is a circular polarizing mirror (+ 90 ° retarder). At the time of this laser processing, the laser beam 4 circularly polarized by the first bend mirror 17a is transmitted to the processing head 5 so that the laser beam 4 can be transmitted to the processing head 5 without lowering the circular polarization rate.
In the fifth to fifth bend mirrors 17b to 17e, the second and third bend mirrors 17b and 17c cancel the phase shift amount with the fourth and fifth bend mirrors 17d and 17e. The laser beam 4 circularly polarized by the first bend mirror 17a is transmitted to the processing head 5 without lowering the circular polarization rate.

The principle of the cancellation is as shown in FIG.
The laser beam 4 immediately after being circularly polarized by the first bend mirror has a phase difference of 90 ° between the S-wave component and the P-wave component, but is reflected by the second bend mirror and changes direction. And the inherent phase shift amount ΔPS ゜ of the bend mirror, the phase of the P-wave component is further advanced by ΔPS ゜, but the third bend mirror conversely changes the S-wave component by ΔPSΔ.
If it is arranged so that the phase is advanced by PS 、,
The direction-changed laser light 4 reflected by the third bend mirror has an S-wave component of 0 ° + ΔPS ゜ and a P-wave component of 90 ° + ΔPS ゜, which is a difference between the S-wave component and the P-wave component. The phase difference is 90 ° and does not lower the circular polarization rate. Due to such a principle of cancellation, the laser beam 4 circularly polarized by the first bend mirror 17a is transmitted to the processing head 5 without lowering the circular polarization ratio even in the mirror configuration of the present invention. In the first embodiment, the laser beam 4 that has been circularly polarized by the first bend mirror 17a and has a phase difference of 90 ° between the S-wave component and the P-wave component is transmitted to the second bend mirror 17b. Is reflected and changed direction, the P-wave component is further advanced in phase by ΔPS ゜ by the inherent phase shift amount ΔPS ゜ of the bend mirror, and the third bend mirror 17c
Is reflected and changed direction, the P-wave component is further reduced by ΔP due to the inherent phase shift amount ΔPS ゜ of the bend mirror.
Although the phase is advanced by S ゜, the fourth bend mirror 17d is arranged so that the S-wave component is advanced by ΔPS ゜, and the fifth bend mirror 17e is shifted by S-wave component. Are arranged such that the phase is further advanced by ΔPS ゜. That is, the laser beam 4 reflected by the fifth bend mirror 17e and changed in direction has an S-wave component of 0.
The phase difference between the so-called S-wave component and the P-wave component is 90 so that ゜ + 2ΔPS ゜ and the P-wave component are 90 ° + 2ΔPS ゜.
The fourth bend mirror 17d and the fifth bend mirror 17e are arranged so as to satisfy ゜.

Further, the first bend mirror 17a has an angle adjusting function, and as shown in FIG.
Since the mechanism is movable in the axis, Y-axis, and Z-axis directions, when adjusting the angle of the first bend mirror 17a for adjusting the circular polarization rate, the first bend mirror 17a is loosened with the lock screw 70a. By moving the moving member 71 in the X-axis direction and by loosening the lock screw 70b,
Can be moved in the Y-axis direction, so that the second bend mirror 1 can be moved while maintaining the best angle of circular polarization.
The laser beam 4 can be made incident on the center of 7b.

Since the first bend mirror 17a is supported by a mechanism movable in the Z-axis direction as shown in FIG. 2 in detail, the lock oscillator 70c is loosened by loosening the lock screw 70c. After the installation, the first bend mirror 17a can be easily adjusted up and down according to the height center of the laser beam 4.

In this laser beam machine, as shown in FIG. 6, the collimation lens 39 is moved between the second bend mirror 17b and the third bend mirror 17c and at the intermediate position of the movable range of the processing head 5. Since it is arranged at a position having a beam waist in the vicinity, as shown in FIG. 8, a change in the beam diameter in the movable range of the processing head 5 is very small.

Embodiment 2 FIG. In the first embodiment described above, the second bend mirror 17b to the fifth bend mirror 17b
The laser beam 4 circularly polarized by the first bend mirror 17a is configured such that the above-described arrangement configuration cancels out all the phase shift amounts inherent to the second bend mirror 17b to the fifth bend mirror 17e. Is transmitted to the processing head 5 without lowering the circular polarization rate. For this reason, in this configuration, the second bend mirror 17b to the fifth bend mirror 17e are different from commonly used metal mirrors which have a larger phase shift amount than commonly used metal mirrors such as copper mirrors. ES (ENHANCED SILVER) with high reflectivity
Coating mirror or PS (PROTECTED
SILVER) The laser beam 4 circularly polarized by the first bend mirror 17a can be replaced with a coating mirror.
Can be transmitted to the processing head 5 without lowering the circular polarization rate (by the principle of canceling the amount of phase shift described with reference to FIG. 7) and reducing the output attenuation during transmission.

The arrangement of the second bend mirror 17b to the fifth bend mirror 17e cancels out all the phase shift amounts unique to the second bend mirror 17b to the fifth bend mirror 17e. If not,
Second bend mirror 17b to fifth bend mirror 17e
In the case where the metal mirror is replaced with an ES coating mirror or a PS coating mirror, the output attenuation during transmission can be reduced, but the phase shift amount of the ES coating mirror or the PS coating mirror is large, so that the transmission is performed to the processing head 5. On the way, the circular polarization rate is greatly reduced.

Embodiment 3 FIG. In the above-described first embodiment, as shown in FIG.
Second bend mirror 17b and third bend mirror 17c
And at a position having a beam waist near the intermediate position of the movable range of the processing head 5, but as shown in FIG. 9, the plane mirror 40 and the collimation 41 are replaced with the collimation lens 39, as shown in FIG. Even if it is arranged between the second bend mirror 17b and the third bend mirror 17c and at a position having a beam waist near the middle position of the movable range of the processing head 5, the processing as shown in FIG. The beam diameter change in the movable range of the head 5 can be extremely reduced.

Embodiment 4 FIG. In addition, as shown in FIG. 10, by providing a concave lens 42 between the second bend mirror 17b and the collimation lens 39, or by using a convex mirror 43 instead of the plane mirror 40 as shown in FIG. As shown in FIG.
Is enlarged so as to have a beam waist near the middle position of the movable range of the processing head 5, so that the change in the beam diameter in the movable range of the processing head 5 can be reduced, and the beam diameter is large. The diameter can be reduced.

Embodiment 5 FIG. As shown in FIG. 13, the position of the first bend mirror 17a and the position of the second bend mirror 17b are moved in the Y direction, and a pair of reversing mirrors are disposed between the first and second bent mirrors 17c. 37a,
A reversing mirror storage box 38 storing 37b is provided,
With a configuration in which the Y arm 18 is moved in the same direction by の of the moving distance in the X direction, the transmission distance of the laser beam 4 from the first bend mirror 17a to the fourth bend mirror 17d can be made constant. Is possible, in this case Y arm 1
The beam diameter of the laser beam 4 does not change due to the movement of the laser beam 8 in the X direction.

Embodiment 6 FIG. Further, by making the Y arm 18 a high mechanical strength material or a high mechanical strength configuration, the processing head 5 can be used for a three-dimensional machine having a two-axis rotating mechanism having rotating shafts 44 and 45 as shown in FIG. A processing head, or a processing head for welding or surface modification as shown in FIG. 15 (for example, a parabolic mirror processing head, a beam scanner processing head, an integration mirror processing head, a polygon mirror processing head, a kaleidoscope) (For example, a machining head). In the case of this embodiment, since it can be replaced with a three-dimensional processing head provided with a two-axis rotating mechanism, processing of a three-dimensional workpiece can be performed, and a processing head for welding or surface modification can be used. Therefore, welding and surface modification can be performed on the workpiece.
FIG. 15 shows a parabolic mirror-type processing head among the processing heads for welding or surface modification. In the figure, the laser beam 4 reflected by the plane mirror 46 is a parabolic mirror 47.
And is irradiated on the workpiece.

Embodiment 7 FIG. In addition, as shown in FIG.
Safety cover 32 covering arm 18 and processing table 31
The laser beam is absorbed so that the inside of the loading / unloading portion of the workpiece 6 or 29 can be observed inside and the reflected light from the workpiece generated during the processing can be prevented from being irradiated to the outside. A transparent door 33 made of a material such as an acrylic material may be used. In this case, the loading and unloading of the workpiece 6 or 29 is performed by the transparent doors 33a and 33b.
Is slid in the direction of the arrow in the figure, and is stored at the position of the transparent door 33c. Also,
In the safety measures shown in FIG. 16, an interlock that cannot operate the machine when the transparent door 33 is open may be provided. When the transparent door 33 cannot be provided, as shown in FIG. 17, a photoelectric tube 51 is attached to the tip of the Y arm 18 and a light receiving sensor 53 for receiving the light of the photoelectric tube 51 is provided on the holding stay 52. If an operator accidentally enters the range of movement of
An interlock configuration in which the machine stops depending on whether or not the light receiving sensor 53 receives light may be used.

Embodiment 8 FIG. In Example 1, FIG.
As shown in FIG.
If a motor 7 is provided and a roller is driven by a motor 77 via a chain 78, the workpiece 6 can be automatically conveyed.

Embodiment 9 FIG. Next, a ninth embodiment according to the present invention will be described with reference to FIGS. 19 to 21, the laser processing machine is provided with a gantry 2 provided on a floor 103.
7 and a first processing table 107a and a second processing table 107b disposed on both sides of the pedestal 27. On the first processing table 107a, a large number of support columns 111 are erected in the shape of a sword with their tips facing upward. Then, the first workpiece Wa is placed on the upper part thereof, and the second workpiece Wb is placed on the second processing table 107b by the workpiece fixing jig 108. next,
An X-axis rail 24 is mounted on the upper surface of the gantry 27 in the X-axis direction, and a Y-axis arm 115 is provided on the X-axis rail 24 via a guide 117 so as to be slidable in the X-axis direction.
The Y-axis arm 115 forms a double-winged cantilever arm that is substantially symmetrical about an axis about the X-axis, and the position of the center of gravity is substantially at the center between the two X-axis rails 24. Thus, the load on each X-axis rail 24 is made substantially equal. Next, a housing 147 is provided on the Y-axis arm 115 via a Y-axis guide rail 133 and a guide 135 attached in the Y-axis direction, and is slidable in the Y-axis direction. 147 is shared by two processing lines. The laser processing head 5 is held vertically by the housing 147 and is movable in the vertical direction. On the other hand, the laser oscillator 16 is disposed on the floor 103 at a height at which the laser beam LB emitted from the laser oscillator 16 is guided above the gantry 27 in the X-axis direction. The laser beam LB is applied to the first and second bend mirrors 170,
The light is reflected and guided at 171, further vertically guided by a third bend mirror 172 installed below the Y-axis arm 115, and moved in the Y-axis direction by a fourth bend mirror 173 installed above the Y-axis arm 115. The bend block 17 installed at the upper end of the Y-axis arm through the beam conduit 157
4 and the fifth and sixth bend mirrors 17 held thereon
180 ° by 5,176 and the beam conduit 1
57, the laser beam LB is refracted vertically downward by the seventh bend mirror 163 supported on the housing 147, and finally the laser beam LB is condensed, and
A processing head 5 held by a housing 147 for performing focused irradiation and laser processing on the second workpieces Wa and Wb, respectively, is installed.

Next, the operation of the double-winged cantilever type laser beam machine will be described. The Y-axis arm 115 is movable in the X-axis direction by an X-axis rail 24 and a guide 117 attached to its lower part. The housing 147 is movable in the Y-axis direction by a Y-axis guide rail 133 and a guide 135 mounted on the Y-axis arm 115 in the Y-axis direction. On the other hand, the laser beam LB emitted from the laser oscillator 16 is transmitted to the first and second bend mirrors 170 and 1.
The light is reflected and guided at 71, and further guided vertically upward by a third bend mirror 172 installed below the Y-axis arm 115,
The fourth bend mirror 173 installed above the Y-axis arm 115 guides in the Y-axis direction, and the bend block 174 installed at the upper end of the Y-axis arm, and the fifth and sixth bend mirrors 175 held there. The laser beam LB is turned 180 ° by 176 and is refracted vertically downward by the seventh bend mirror 163 supported on the housing 147, and the laser beam LB is condensed by the processing head 5 held on the housing 147. First and second workpieces W
The laser processing is performed by intensively irradiating a and Wb. At this time, by moving the Y-axis arm 115 in the X-axis direction and moving the housing 147 in the Y-axis direction,
Since the first and second workpieces Wa and Wb can be moved into an arbitrary shape because they can be moved in any axis direction on the Y plane. Further, the first and second workpieces Wa and Wb can be combined with, for example, a flat plate and a flat plate, a flat plate and a pipe, a pipe and a pipe, so that two-line composite processing can be performed. FIG. 19 shows a case where a flat plate and a pipe are combined with the first and second workpieces Wa and Wb.

Embodiment 10 FIG. Also, as shown in FIG.
First and second housings 147a, 1 for each of the two lines
47b and first and second processing heads 5 held thereon
By providing a and 5b, processing can be performed continuously and efficiently. At this time, the first and second housings 147a and 147b and the first and second machining heads 5
The laser beam LB guided to a and 5b is transmitted to the beam switching device 1
59, the third bend mirror 172 attached to the lower part of the Y-axis arm 115
When the laser beam LB guided vertically upward from the laser beam reaches the beam switching device 159, the laser beam LB is guided to the processing line on the right side of FIG. 20 (referred to as a first processing line) by a fourth bend mirror 173a and a beam conduit 157. , Is guided to the fifth bend mirror 175a on the first housing 147a, is condensed by the first processing head 5a, is intensively irradiated on the first workpiece Wa, and the line 1 can be processed. On the other hand, when processing the second processing line on the left side after processing the first processing line, the laser beam LB is output from the beam switching device 15.
9, the fourth bend mirrors 173a and 173b fixed thereto are moved by a driving device such as an air cylinder 177 so as to be movable only in the X-axis direction.
In order to switch to the fourth bend mirror 173b, the laser beam LB passes through the beam conduit 157, is guided to the fifth bend mirror 175b on the second housing 147b, is focused by the second processing head 5b, and is condensed by the second processing head 5b. The workpiece Wb is intensively irradiated, so that the second processing line can be processed.

Embodiment 11 FIG. In the above-described tenth embodiment, as shown in FIG. 21, the laser beam LB is directed only to the first processing line, so that the line is dedicated to laser processing. If the two housings 147b are replaced with a tapping processing device or the like, a high-value-added product can be manufactured by one processing system constituting these two lines.

In Examples 9 to 11 described above,
In any of the above optical path configurations, the laser beam LB emitted from the oscillator 16 is not configured to be guided to each line by laser beam division as shown in the conventional example. Oscillator output is not required, and processing with higher output is possible even with the same oscillator output. Further, in the above-described embodiments 9 to 11, the number of lines is two, but may be three or more.
In particular, an even-numbered line is preferable because the right and left weight balance can be easily obtained. Furthermore, the present invention can be configured not only by the optical scanning type but also by another type of laser processing machine, or by appropriately combining another processing device.

[0080]

As described above, according to the present invention, a laser oscillator, an arm movably provided in a first axial direction on a rail portion provided in a first axial direction, and And a processing head movably provided on a rail disposed at a second axis direction orthogonal to the first axis on a plane. Further, an output from the laser oscillator is provided on the first axis. A first bend mirror and a second
A laser beam path is provided by providing a third bend mirror and a fourth bend mirror on the arm, and a fifth bend mirror on the processing head, and the center of gravity of the arm is adjusted to the first position. Since it is located between a pair of rails arranged on the axis of the arm, the difference in load load and the load moment of the arm and the like applied to each of the pair of rails supporting the arm can be reduced, and the life of the rail and the rail receiver is improved. Can be achieved.

Further, since the first bend mirror which first receives the laser beam output from the laser oscillator is supported so as to be movable at least in the third axis direction orthogonal to the second axis, the first bend mirror is provided. Can be moved in accordance with the height of the optical axis of the laser oscillator, which in turn makes it easy to set the installation level of the laser oscillator, and can easily cope with different outputs and different optical axis heights. .

A laser oscillator, a cantilever arm movably provided in the X-axis direction on a pair of rails provided in the X-axis direction, and a rail provided on the arm,
A housing provided so as to be movable in a Y-axis direction orthogonal to the X-axis on a plane, and a processing head portion incorporated in the housing and movable in a direction perpendicular to the plane (workpiece); The cantilever arm is formed by forming a double-wing cantilever beam arm that is substantially symmetrical with respect to the axis about the X axis, and by setting the center of gravity to be substantially the center between the X-axis direction rails. The load on each rail is almost equalized, and a plurality of processing lines are provided, so that the weight imbalance, which is a disadvantage of the cantilever arm, and the reduction in processing accuracy due to vibration during movement are reduced. In addition, since a single laser processing machine can form a plurality of processing lines, complex processing of different types of workpieces can be performed.

Further, since a plurality of lines share a single housing running on the double-winged cantilever arm, machining of the plurality of lines can be inexpensively and efficiently configured.

Further, the housing running on the double-winged cantilever arm is provided for each of the plurality of lines.
A plurality of lines of workpieces can be continuously and efficiently processed.

Since the laser beam guided to a plurality of lines is realized by a beam switching device, the laser beam guided to a plurality of lines can be quickly switched.

Also, since one of the housings has a processing device other than laser processing, for example, the first line is tapped to form a primary processing line, and the other line is formed by laser processing after the primary processing. In this case, a high-value-added product can be manufactured by one processing system that configures the plurality of lines.

Further, since the rotary table is provided outside the movable range of the processing head, it is possible to easily perform laser processing on a cylindrical workpiece in a state where interference with the processing head is prevented. Also, there is an effect that the rotary table does not narrow the processing area at the time of flat plate processing or the like.

Further, since means for moving up and down or sliding the rotary table main body is provided, when the work to be mounted on the processing table is large, the rotary table main body is not hindered from carrying in and out of the work. It has the effect of being able to evacuate.

Further, since the up-and-down type rollers are provided on the processing table, there is an effect that the workpiece placed on the processing table can be easily moved.

Also, since the means for driving the roller body of the elevating roller is provided, the loading and unloading of the workpiece placed on the processing table can be automated, and the present laser processing machine can be used in an FA production line. This has the effect that it can be configured as part of

A laser oscillator for oscillating linearly polarized laser light is provided, a first plane intersecting the axis of the laser light, a second plane intersecting the first plane, and a second plane intersecting the first plane. A third plane intersecting the plane, a fourth plane intersecting the third plane, and a fifth plane intersecting the fourth plane
A first bend mirror for receiving a laser beam on the first plane is provided at the intersection of the first and second planes so that the optical axis is formed on the first plane. A second bend mirror facing the bend mirror, and a third bend mirror at the intersection of the second plane and the third plane facing the second bend mirror. A fourth bend mirror is provided at an intersection of the third plane and the fourth plane so as to face the third bend mirror, and a fourth bend mirror is provided at an intersection of the fourth plane and the fifth plane. Fifth bend mirrors are respectively disposed so as to face the first and second bend mirrors, and the optical axis distance between the second and third bend mirrors and the fourth and fifth bend mirrors are arranged. In a laser beam machine whose optical axis distance to a bend mirror changes, the first bend Since the mirror is a circularly polarizing mirror and the second to fifth bend mirrors are arranged so as to cancel the phase shift amount inherent to the bend mirror, it is easy to adjust the circular polarization rate, adjust the optical axis, and the like. Therefore, the laser light circularly polarized by the first bend mirror can be transmitted to the processing head without lowering the circular polarization rate.

Further, since the first bend mirror is supported by the XY movement adjusting mechanism, the laser beam can be made incident on the center of the second bend mirror while maintaining a good angle of circular polarization. The effect that can be performed.

Also, since the second to fifth bend mirrors are ES or PS coated mirrors, the output attenuation of the circularly polarized laser light during transmission can be reduced without lowering the circular polarization rate. And has the effect that it can be transmitted to the processing head.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an entire optical scanning laser beam machine according to a first embodiment of the present invention.

FIG. 2 is a perspective view showing details of an X-, Y-, and Z-axis direction moving mechanism of a first bend mirror according to the first embodiment of the present invention.

FIG. 3 is a front view illustrating details of a counter bellows portion of a Y-axis optical path according to the first embodiment of the present invention.

FIG. 4 is a view showing the installation of a blower for setting a negative pressure inside the processing table according to the first embodiment of the present invention.

FIG. 5 is a diagram illustrating details of an elevating roller that conveys the processed work in the X-axis direction according to the first embodiment of the present invention.

FIG. 6 is a perspective view showing an optical path configuration formed by first to fifth bend mirrors and a collimation lens according to the first embodiment of the present invention.

FIG. 7 is a diagram for explaining a principle of canceling a phase shift amount by a bend mirror according to the present invention.

FIG. 8 is a diagram illustrating beam propagation characteristics when a collimation lens or a collimation mirror according to the present invention is installed.

FIG. 9 is a perspective view illustrating an optical path configuration when a collimation mirror according to a third embodiment of the present invention is installed.

FIG. 10 is a perspective view showing an optical path system configuration when a concave lens is installed between an oscillator beam outlet and a collimation lens according to Embodiment 4 of the present invention.

FIG. 11 is a diagram illustrating beam propagation characteristics when a convex mirror is installed between an oscillator beam outlet and a collimation lens according to a fourth embodiment of the present invention.

FIG. 12 is a diagram illustrating beam propagation characteristics when a concave lens or a convex mirror is installed between an oscillator beam outlet and a collimation lens or a collimation mirror according to Embodiment 4 of the present invention.

FIG. 13 is a perspective view showing an optical path system configuration with a constant optical path length according to Embodiment 5 of the present invention.

FIG. 14 is a diagram illustrating a three-dimensional processing head including a two-axis rotation mechanism according to a sixth embodiment of the present invention.

FIG. 15 is a view showing a parabolic mirror-type machining head for welding according to Embodiment 6 of the present invention.

FIG. 16 is a perspective view showing installation of a safety cover according to Embodiment 7 of the present invention.

FIG. 17 is a diagram showing a modification of the seventh embodiment of the present invention.

FIG. 18 is a diagram illustrating details of an elevating roller that conveys a workpiece in an X-axis direction according to an eighth embodiment of the present invention.

FIG. 19 is a perspective view showing an entire optical scanning laser beam machine according to Embodiment 9 of the present invention.

FIG. 20 is a perspective view showing the entire optical scanning laser beam machine according to Embodiment 10 of the present invention.

FIG. 21 is a perspective view showing an entire optical scanning laser beam machine according to Embodiment 11 of the present invention.

FIG. 22 is a front view showing a conventional cantilever structure type optical scanning laser beam machine.

FIG. 23 is a plan view showing a conventional cantilever structure type optical scanning laser beam machine.

FIG. 24 is a plan view showing another conventional optical scanning laser beam machine.

FIG. 25 is a front view showing another conventional optical scanning laser beam machine.

[Explanation of symbols]

4 laser light, 5 processing head, 6 flat workpiece, 16 laser oscillator, 17 bend mirror, 17a
A first bend mirror, 17b a second bend mirror,
17c third bend mirror, 17d fourth bend mirror, 17e fifth bend mirror, 18 Y arm,
19a, 19b Y-axis rail, 20a, 20b Y-axis rail receiver, 21 Y-axis unit, 22 Y-axis bellows,
23 Y-axis optical path bellows, 24a, 24b X-axis rails, 25a, 25b X-axis rail receiver, 26 X-axis bellows, 27 gantry, 28 rotary table, 29 cylindrical workpiece, 30 knife edge support, 31 processing table , 32 Safety cover, 33 Transparent door, 34 Box, 35 Counter bellows, 36 Fixing bracket, 3
7 pairs of reversing mirrors, 38 reversing mirror storage boxes,
39 collimation lens, 40 plane mirror, 41
Collimation mirror, 42 concave lens, 43 convex mirror, 44, 45 rotation axis, 46 plane mirror, 47 parabolic mirror, 48 blower, 49 elevating roller, 50 workpiece, 70a, 70b, 70c lock screw, 71Y
Axis moving member, 72 holder, 73 Z axis direction moving member, 74 bend block, 75 actuator, 10
7a 1st processing table, 107b 2nd processing table, 115 Y-axis arm, 117 guide, 133Y
Shaft guide rail, 135 guide, 147 housing, 157 beam conduit, 159 beam switching device, 1
63 seventh bend mirror, 170 first bend mirror, 171 second bend mirror, 172 third bend mirror, 173 fourth bend mirror, 174 bend block, 175 fifth bend mirror, 176 sixth
Bend mirror.

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁶ Identification code FI B23K 37/02 B23K 37/02 B

Claims (14)

(57) [Claims] 1. A laser processing machine for processing by moving a laser beam on a workpiece by moving a processing head for irradiating the laser beam, a laser oscillator and a rail portion disposed in a first axial direction. An arm provided movably in a first axial direction above, and a processing head provided movably in a second axial direction orthogonal to the first axis on a plane with the arm, A first bend mirror for receiving a laser beam output from a laser oscillator on a first axis;
A bend mirror, a third bend mirror and a fourth bend mirror on the arm, a fifth bend mirror on the processing head, and a laser beam path. A laser processing machine located above. 2. The apparatus according to claim 1, wherein a first bend mirror that first receives a laser beam output from a laser oscillator is supported so as to be movable at least in a third axial direction orthogonal to the second axis. 2. The laser beam machine according to 1. 3. A laser processing machine for processing by moving a laser beam on a workpiece by moving a processing head for irradiating the laser beam, wherein a laser oscillator and a rail portion arranged in a first axial direction are provided. A cantilever arm movably provided in the first axial direction above, and a movably provided in the cantilever arm in a second axial direction orthogonal to the first axis on a plane. And a processing head provided in the housing, wherein the cantilever arm is substantially symmetrical about an axis about the first axis. And a plurality of processing lines, the center of gravity of which is positioned on the rail, and a plurality of processing lines. 4. The laser beam machine according to claim 3, wherein the plurality of lines share one housing that moves on the double-winged cantilever arm. 5. The laser beam machine according to claim 3, wherein a housing moving on the double-winged cantilever arm is individually provided for each of the plurality of lines. 6. The laser beam machine according to claim 5, wherein an optical path of the laser light guided to the plurality of lines is switched by a beam switching device. 7. The laser processing machine according to claim 5, wherein one of the housings has a processing device other than the laser processing. 8. The laser beam machine according to claim 1, wherein a rotary table is provided outside a movable range of the machining head. 9. The laser beam machine according to claim 8, further comprising means for moving up and down or sliding the rotary table body. 10. The laser beam machine according to claim 1, wherein a lifting roller is provided on the machining table. 11. The laser beam machine according to claim 10, further comprising means for driving a roller body of the lifting roller. 12. A laser oscillator for oscillating linearly polarized laser light, a first plane intersecting an axis of the laser light, a second plane intersecting the first plane, and a second plane intersecting the first plane. A first plane intersecting the plane, a fourth plane intersecting the third plane, and a fifth plane intersecting the fourth plane, wherein the first plane is formed such that an optical axis is formed. A first bend mirror that receives the laser beam at a crossing portion between the first plane and the second plane, and a second bend mirror that faces the first bend mirror; At the intersection of the plane and the third plane, a third bend mirror is attached to the third bend mirror so as to face the second bend mirror.
A fourth bend mirror is provided at an intersection between the fourth plane and the fourth plane so as to face the third bend mirror, and a fourth bend mirror is provided at an intersection between the fourth plane and the fifth plane. Fifth bend mirrors are respectively disposed so as to face the fourth bend mirror, and an optical axis distance between the second bend mirror and the third bend mirror, and a distance between the fourth bend mirror and the fourth bend mirror. In a laser beam machine in which the optical axis distance from the fifth bend mirror changes, the first bend mirror is a circular polarization mirror, and the second to fifth bend mirrors are unique to the bend mirror. A laser processing machine provided so as to cancel out a phase shift amount. 13. The laser beam machine according to claim 12, wherein the first bend mirror is supported by an XY movement adjusting mechanism. 14. The laser beam machine according to claim 12, wherein the second to fifth bend mirrors are ES or PS coated mirrors.