TWI547336B - Apparatus for processing work by laser beam - Google Patents

Description

Workpiece processing device using laser light

The present invention relates to a workpiece processing apparatus, and more particularly to a workpiece processing apparatus that irradiates a workpiece such as a glass substrate with laser light.

For the use of a laser light workpiece processing apparatus, for example, a device disclosed in Patent Document 1 is known. In such a processing apparatus, green laser light having a wavelength of about 532 nm is irradiated onto a workpiece such as a glass substrate. Although the green laser light generally penetrates the glass substrate, the laser light is concentrated, and when the intensity exceeds a certain threshold, the glass substrate will absorb the laser light. In this state, plasma is generated in the condensing portion of the laser light, and the glass substrate is thus evaporated. By the above principle, processing for forming a hole or the like can be performed on the glass substrate.

Further, Patent Document 2 discloses a laser processing head in which an optical system for eccentricity and an auxiliary air nozzle are provided below the optical system for laser light collecting. The eccentric optical system is freely rotatable, and the laser light can be eccentric from the optical axis of the optical system for laser light collecting. Further, the auxiliary gas nozzle is configured to pass the laser light from the eccentric optical system while simultaneously injecting the auxiliary gas coaxially. The eccentric optical system of Patent Document 2 has a set of dovetails disposed with a gap interposed therebetween. Each of the wedge-shaped turns is freely rotatable around the optical axis by its motor.

Patent Document 1: Japanese Laid-Open Patent Publication No. 2007-118054

Patent Document 2: Japanese Laid-Open Patent Publication No. Hei 11-156579-

When scanning laser light on a glass substrate along a curve such as a circle, an arc, or an S-shape by using a conventional laser light processing apparatus as described above, it is necessary to synchronously drive the stage on which the glass substrate is mounted in the x direction and the y direction. For example, when scanning a laser beam from a straight line extending in the x direction to a linear trajectory extending in the y direction via an arcuate curved portion, it is necessary to drive the motor in the x direction only at the beginning, in an arc shape. The y-direction drive motor is driven at the start position of the trajectory, and the x-direction drive motor is stopped at the end position of the arc-shaped trajectory.

However, since the machine has a large inertia, the machine cannot be moved or stopped immediately for the drive control of each motor. In other words, even when the y-direction driving motor is started to be driven at the start position of the arc-shaped trajectory, the operation of the y-direction of the machine is delayed, and when the x-direction driving motor is stopped at the end of the arc-shaped trajectory, the machine is stopped. The station will also be unable to stop the x-direction motion immediately due to inertia.

Therefore, it is necessary to estimate that the machine is controlled by the decrease in the followability of the inertia as described above, or by reducing the scanning speed (the moving speed of the machine). In this way, the control becomes complicated, and the processing speed is lowered, thereby reducing the processing efficiency.

SUMMARY OF THE INVENTION An object of the present invention is to suppress a decrease in scanning speed and to improve processing efficiency when scanning laser light along a processing line including a curve such as a circle, an arc, or an S-shape.

A workpiece processing apparatus using laser light according to a first aspect of the invention is a processing apparatus that irradiates a workpiece with laser light, and includes a workpiece machine. The workpiece to be processed is loaded; the machine driving means; the laser light output part for outputting the laser light; the deflection/rotation means; and the scanning control means. The machine driving means moves the workpiece table in the x and y directions orthogonal to each other in a plane parallel to the loading surface. The deflection/rotation means deflects the laser light emitted from the laser output unit from the emission axis while rotating the deflected laser light around the emission axis. The scanning control means coordinates the control of the machine driving means and the deflection/rotation means to scan the laser beam rotating around the injection axis while moving on the workpiece table along the processing line, thereby causing the above-mentioned deflection/rotation means The injection axis moves at a larger radius than the curved portion of the processing line.

In this apparatus, the workpiece machine on which the workpiece is loaded is driven in the x and y directions by the machine driving means, and the laser light deflected from the shooting axis is rotated around the shooting axis by the biasing/rotating means. Therefore, when the processing line contains a curve, in the curve portion, the workpiece machine is moved in the x and y directions while the laser light is deflected/rotated, thereby making the path of the workpiece machine move, as depicted. A radius larger than the curve of the processing line.

Here, since the radius of the scanning trajectory of the workpiece machine can be increased, the scanning speed can be increased even if the follower of the workpiece machine to the driving means is slow. Therefore, the processing speed becomes faster and the processing efficiency also increases.

According to a second aspect of the invention, in the apparatus of the first aspect of the invention, the deflecting/rotating means includes: the first dovetail and the second dovetail are arranged to face each other; and the rotating means The first and second dovetails are rotated about the exit axis; and the collecting lens is used to condense the laser light onto the workpiece.

Here, by rotating a pair of wedge-shaped turns around the exit axis, the laser light collected on the workpiece can be rotated.

The workpiece processing apparatus using laser light according to the third invention is the second In the apparatus of the present invention, the rotation means of the deflecting/rotating means includes: a first motor for rotating the first dovetail around the injection axis; and a second motor for rotating the second dovetail about the injection axis .

Here, each wedge type can be individually controlled. Therefore, the partial vector of the laser light can be arbitrarily controlled.

According to a fourth aspect of the invention, in the apparatus of the first aspect of the invention, the means for rotating the deflecting/rotating means is a hollow motor in which the first and second dovetails are disposed.

According to a fifth aspect of the invention, in the apparatus of the first aspect of the invention, the scanning control means controls the machine in the x direction or the y direction by the machine driving means when scanning the linear processing line. mobile. Further, when the curved processing line is scanned, the machine driving means controls the table to move in the x direction or the y direction, and the laser light is rotated by the above-described deflection/rotation means.

Here, as described above, the scan trajectory radius of the workpiece can be made larger. Therefore, even if the workpiece machine is less sluggish with respect to the driving device, the scanning speed can be increased and the processing efficiency can be improved.

According to a fifth aspect of the invention, in the apparatus of the fifth aspect of the invention, the deflecting/rotating means includes: the first dovetail and the second dovetail are arranged to face each other; and the rotating means is configured to The first and second dovetails rotate around the exit axis; and the concentrating lens condenses the laser light onto the workpiece. The scanning control means controls the machine table to move in the x direction or the y direction by the machine driving means when scanning the laser beam along the processing line including the straight line portion and the curved portion. sweep When the curved portion of the processing line is drawn, the machine driving means controls the movement of the machine in the x direction or the y direction, and the first and second dovetails are rotated in the same direction around the injection axis.

Here, as described above, the scanning track radius of the workpiece machine can be made larger.

According to a seventh aspect of the invention, in the apparatus of the fifth aspect of the invention, the deflecting/rotating means includes: the first dovetail and the second dovetail are disposed to face each other; and the rotating means is configured to The first and second dovetails rotate around the optical axis; and the collecting lens condenses the laser light onto the workpiece. Wherein, the scanning control means controls the movement of the machine in the x direction or the y direction by the machine driving means when scanning the laser beam along the processing line including the straight line portion and the curved portion portion, when scanning the straight portion of the processing line When scanning the curved portion of the processing line, in the front and rear regions including the curved portion including the curved portion, the machine driving means controls the movement of the machine in the x direction or the y direction, and the first and second wedge shapes are simultaneously formed.稜鏡 Rotate in the opposite direction around the exit axis.

Here, the scanning radius of the workpiece machine can be increased, and the machining efficiency can be improved.

A workpiece processing apparatus using laser light according to any one of the first to seventh aspects of the present invention, further comprising a condensing point rotating mechanism for rotating a condensing point of the laser light It is disposed between the laser light output portion and the deflection/rotation means, and includes a pair of wedge-shaped turns and a hollow motor in which a pair of wedge-shaped turns are disposed.

Here, the laser light deflected by a pair of wedge-shaped turns is illuminated Rotate around the optical axis. This deflected and rotated laser light will converge on the workpiece to draw a circle. The overall trajectory of this circle will be scanned along the processing line.

According to the invention as described above, in the processing of the workpiece using the laser light, when the laser processing is performed along the scanning line including the curved track, the reduction in the scanning speed can be suppressed, and the processing efficiency can be improved.

[Overall composition]

Fig. 1 is a view showing the overall configuration of a workpiece processing apparatus according to an embodiment of the present invention. This workpiece processing apparatus is a device that irradiates laser light onto a workpiece such as a glass substrate along a processing line to perform processing such as drilling. This apparatus includes a base 1, a workpiece machine 2 on which a glass substrate as a workpiece is mounted, and a laser light irradiation head 3 that irradiates the glass substrate with laser light. As shown in Fig. 1, on the plane along the upper surface of the base 1, the axes orthogonal to each other are defined as the x-axis and the y-axis, and the axis in the vertical direction orthogonal to the axes is defined as the z-axis. Further, the bidirectional (+ direction and - direction) along the x-axis is set to the x-axis direction, the bidirectional direction along the y-axis is set to the y-axis direction, and the bidirectional direction along the z-axis is set to the z-axis direction.

[Workpiece table and its moving mechanism] <Workpiece Machine>

The workpiece table 2 is formed in a rectangular shape, and a machine moving mechanism 5 is provided below the workpiece machine 2 for moving the workpiece table 2 in the x-axis direction and the y-axis direction.

The workpiece table 2 shown in Fig. 2 is enlarged, and has a plurality of blocks 6. The plural block 6 is a glass substrate G shown by a chain line in the figure, from the workpiece The member supported by the surface of the machine table 2 can be mounted at any position of the workpiece machine 2 in order to avoid the processing line L (shown by a broken line) of the glass substrate G. Further, a plurality of intake holes 2a are formed in the grid shape on the workpiece table 2, and the intake holes 6a penetrating in the vertical direction are formed in each of the blocks 6. Further, the glass substrate G disposed on the square 6 can be adsorbed and fixed by connecting the air suction holes 6a of the block 6 and the air suction holes 2a of the workpiece machine 2. Further, the mechanism for inhaling is constituted by a well-known exhaust pump or the like, and the description thereof is omitted here.

<machine moving mechanism>

As shown in Fig. 1, the machine moving mechanism 5 includes: a pair of first and second guide rails 8 and 9; first and second mobile stations 10 and 11; and each mobile station 10; 11 y-axis motor 5a and x-axis motor 5b (refer to Fig. 7). The pair of first guide rails 8 are provided on the upper surface of the base 1 so as to extend in the y-axis direction. The first moving machine table 10 is provided on the upper portion of the first rail 8, and has a plurality of guide portions 10a that are movably engaged with the first rail 8 on the lower surface thereof. The second guide rail 9 is provided on the upper surface of the first moving machine table 10 and extends in the x-axis direction. The second moving machine table 11 is provided on the upper portion of the second guide rail 9, and has a plurality of guide portions 11a that are movably engaged with the second guide rail 9 on the lower surface thereof. On the upper surface of the second moving machine table 11, the workpiece machine 2 is mounted through the fixing member 12.

With the above-described machine moving mechanism 5, the workpiece table 2 can be moved in the x-axis direction and the y-axis direction.

[Laser light head]

The laser light irradiation head 3 is mounted as shown in Figs. 1 and 3 a gantry frame 1a placed on the upper surface of the base 1, and having: a laser light output portion 15; an optical system 16; a high-speed hollow motor 17 having a pair of high-speed rotating wedges (described later); and a rotation/biasing The mechanism 18 is internally provided with a pair of low-speed rotation wedges (described later) and a collecting lens. Further, an x-axis direction moving mechanism 21 is provided to move the laser light irradiation head 3 in the x-axis direction, and a z-axis direction moving mechanism 22 moves the high-speed hollow motor 17 and the deflection/rotation mechanism 18 in the z-axis direction. The z-axis direction moving mechanism 22 has a z-axis motor 22a (see FIG. 7) and the like.

<Laser light output section>

The laser light output unit 15 is constituted by a laser tube similar to the conventional one. With this laser light output portion 15, green laser light having a wavelength of 532 nm is emitted toward the opposite side of the workpiece stage 2 along the y-axis.

<Optical System>

The optical system 16 guides the laser light from the laser light output unit 15 to one of the high speed hollow motors 17 and the high speed rotating wedge type. The optical system 16 is shown in an enlarged view of FIG. 3, and has: first to fourth reflecting mirrors 25 to 28; a power monitor 29 for measuring laser light output; and a beam expander 30.

The first mirror 25 is disposed in the vicinity of the output side of the laser light output unit 15, and reflects the laser light emitted to the y-axis direction in the x-axis direction. The second mirror 26 is arranged in the x-axis direction and arranged in the first mirror 25, and reflects the laser light traveling in the x-axis direction in the y-axis direction to the workpiece table 2 side. The third mirror 27 and the fourth mirror 28 are arranged above the high speed hollow motor 17 in the x-axis direction. The third mirror 27 will be the second The laser light reflected from the mirror is introduced to the fourth mirror 28. The fourth mirror 28 introduces the laser light reflected by the third mirror 27 to the high-speed hollow motor 17 below. The beam expander 30 is disposed between the second mirror 26 and the third mirror 27, and is configured to expand the laser light reflected by the second mirror 26 into a parallel beam of a fixed magnification. By means of the beam expander 30, the laser light can be concentrated into smaller spots.

<Wedge type and high speed hollow motor for high speed rotation>

Fig. 4 is a schematic view showing a high-speed hollow motor 17 in which high-speed rotating wedge-shaped jaws 321 and 322 are disposed inside. The high-speed hollow motor 17 has a rotation axis R extending in the z-axis direction at the center, and the central portion including the rotation axis R is hollow. A pair of high-speed rotating wedges 321 and 322 are fixed to the hollow portion. The pair of wedge-shaped jaws 321 and 322 have the same shape and are heavier than the year-on-year, and have only different refractive indices. Each of the wedge-shaped jaws 321 and 322 has inclined faces 321a and 322a inclined with respect to the rotation axis R, and vertical faces 321b and 322b perpendicular to the rotation axis R. Further, the pair of wedge-shaped jaws 321 and 322 are disposed such that the mutually perpendicular surfaces 321b and 322b are opposed to each other, and the two vertical faces 321b and 322b are parallel, and the two inclined faces 321a and 322a are parallel.

When the two high-speed rotation wedge-shaped jaws 321 and 322 having the same shape and the same weight are arranged as described above, the entire center of gravity of the two high-speed rotation wedge-shaped jaws 321 and 322 is located on the rotation axis R. Therefore, even if the wedge-shaped jaws 321 and 322 are rotated at a high speed, the amount of dynamic unbalance can be greatly reduced.

<Declination when using two wedges 〉>

Referring to Figure 5, the apex angle of the crucible is set to δ, and the refractive index is set to n. At this time, the deviation angle θ of this 系 is δ hours, (n-1)‧δ

Furthermore, the above formula is SIN δ=δ (unit is radian), which is an approximate expression when δ is slightly approximated. In the case of the present embodiment, the maximum apex angle δ is only about 5°, so the approximation of Sin δ = δ is also possible. Therefore, the angles of the two wedge-shaped turns of the same shape (the same apex angle) and the refractive indices of n1 and n2 are respectively θ 1 and θ 2 θ 1 = (n1-1) ‧ δ

θ 2 = (n2-1) ‧ δ Then, if the two wedge-shaped 稜鏡 are assembled and arranged, the angling angle θ is θ=(n1-1)‧δ-(n2-1)‧δ=(n1-n2)‧δ As can be seen, as long as it is a combination of wedge-shaped turns of the same apex angle δ and the same material, then n1=n2 The total declination is "0".

However, when n1≠n2, the total declination is not "0", but is proportional to the difference between the refractive indices of the two wedge-shaped turns.

Therefore, the refractive indices of the two high-speed rotation wedge-shaped jaws 321 and 322 are made different here so that the laser light passing through the two wedge-shaped jaws 321 and 322 is deflected. That is, by using such a wedge-shaped crucible 321, 322, a mechanism for deflecting the laser light with a good balance of rotation can be realized.

In the case of wedge-shaped crucibles having the same specific gravity and different refractive indices, the following combinations are conceivable.

<Example 1> S-BSM22+S-T1H11 (specific gravity: 3.24, manufactured by O’Hara Co., Ltd.)

The angling angle (°) at the time of this combination is "0.169" with respect to the apex angle of 1°.

<Example 2> N-SSK2+N-SF57 (specific gravity: 3.53, manufactured by Shot Japan Co., Ltd.)

The angling angle (°) at this combination is "0.232" with respect to the apex angle of 1°.

<Example 3> BACD11+E-FD10 (specific gravity: 3.07, manufactured by HOYA Co., Ltd.)

The angling angle (°) at the time of this combination is "0.170" with respect to the apex angle of 1°.

Further, regarding the shape (vertex angle) of the two wedge-shaped jaws 321 and 322, the radius of rotation r of the laser light (=f/tan θ) determined by the focal length distance f and the off-angle θ of the collecting lens as will be described later. Or f/θ) is set to the desired value.

<Wedge type and condenser lens for low speed rotation>

Fig. 6 is a schematic view showing a deflection/rotation mechanism 18 in which a pair of low-speed rotation wedge-shaped jaws 341 and 342 are disposed inside. The deflecting/rotating mechanism 18 has a rotating shaft extending in the z-axis direction at the center. This rotating shaft is coaxial with the rotating shaft R of the high speed hollow motor 17. The deflection/rotation mechanism 18 includes a pair of low-speed rotation wedge-shaped jaws 341 and 342 provided at a center portion including the rotation axis R, and a low-speed rotation first low-speed motor 345 and a second low-speed motor 346, respectively. Corresponds to these wedge types. The first low speed motor 345 and the second low speed motor 346 are both hollow motors, and wedge-shaped turns 341 and 342 are attached to the inside of the hollow rotating shaft. The wedge-shaped turns 341 and 342 are individually rotated by the first low-speed motor 345 for low-speed rotation and the second low-speed motor 346, respectively, and the fixed rotation angle can be maintained.

The pair of low-speed wedge-shaped jaws 341 and 342 have the same shape and the same material (year-old weight), so the refractive index is also the same. Also, a pair of low-speed wedge type 稜鏡341, The 342 has inclined faces 341a and 342a that are inclined with respect to the rotation axis, and vertical faces 341b and 342b that are perpendicular to the rotation axis. By the combination of the two wedge-shaped jaws 341, 342, the pair of low-speed wedge-shaped jaws 341, 342 can have a predetermined off-angle.

Further, a condenser lens 35 is fixed to the output side of one of the deflecting/rotating mechanisms 18 for the low-speed wedge-shaped jaws 341 and 342. The condenser lens 35 can also be separately disposed separately from the deflection/rotation mechanism 18.

<Support and handling system for laser irradiation head>

The above-described laser light irradiation head 3 is supported by the door type frame 1a of the base 1 as described above. More specifically, as shown in FIG. 3, one of the upper rails 36 extending in the x-axis direction is provided on the upper surface of the portal frame 1a, whereby the third rail 36 and a driving mechanism (not shown) are formed. The x-axis direction moving mechanism 21. Then, the support member 37 is movably supported by the pair of third guide rails 36. The support member 37 has a lateral support member 38 supported by the third guide rail 36, and a vertical support member 39 extending downward from one end side of the workpiece support 2 side of the lateral support member 38. The pair of fourth guide rails 40 are provided on the side surface of the vertical support member 39 so as to extend in the z-axis direction, whereby the pair of fourth guide rails 40 and the drive mechanism (not shown) constitute the z-axis direction movement mechanism 22. The third moving stage 41 is supported by the fourth rail 40 so as to be movable in the z-axis direction.

Then, the laser light output unit 15, the first to fourth mirrors 25 to 28, the power monitor 29, the beam expander 30, and the like are supported by the lateral support members 38. A motor support member 42 is fixed to the third moving machine table 41, and the motor support member 42 supports the high speed hollow motor 17 and the deflection/rotation Agency 18.

[Control block diagram]

As shown in Fig. 7, the glass substrate processing apparatus has a controller 50. The controller 50 is connected to the laser light output unit 15 and the y-axis motor 5a for driving the respective moving machines 10 and 11, the x-axis motor 5b, the z-axis motor 22a, the high-speed hollow motor 17, and the first and second low speeds. Motors 345, 346. Thus, the controller 50 controls the laser output from the laser light output portion 15 while controlling the rotation of each motor, thereby controlling the scanning trajectory of the laser light and the like.

[action] <Basic processing action>

The processing operation of the glass substrate using laser light will be described below.

First, a plurality of blocks 6 are mounted on the surface of the workpiece table 2. At this time, a plurality of blocks 6 are arranged to avoid the processing line L of the glass substrate G as shown in FIG. The glass substrate G to be processed is loaded on a plurality of squares 6 mounted as described above.

Next, the laser irradiation head 3 is moved in the x-axis direction by the x-axis direction moving mechanism 21, and the workpiece table 2 is moved in the y-axis direction by the machine moving mechanism 5, so that the laser light of the laser irradiation head 3 is made. The spotlight is located at the beginning of the processing line L.

After the laser irradiation head 3 and the glass substrate G are moved to the processing position as described above, the laser light is irradiated onto the glass substrate G for processing. Here, the laser light emitted from the laser light output unit 15 is reflected by the first mirror 25 and introduced into the second mirror 26 . Further, the laser light incident on the first mirror 25 is measured by the power monitor 29 to measure the laser output. Injection into the second mirror The laser light of 26 is reflected in the y-axis direction, and the beam expander 30 expands the light beam to be introduced into the third mirror 27. Then, the laser beam reflected by the third mirror 27 and reflected by the fourth mirror 28 is input to one of the center portions of the high-speed hollow motor 17 and the pair of high-speed rotating wedges 321 and 322.

The laser light input to the pair of high-speed rotation wedge-shaped crucibles 321 and 322 is biased toward the output by two wedge-shaped crucibles 321 and 322 having different refractive indexes. Further, the high-speed rotation wedge-shaped jaws 321 and 322 are rotated at a high speed of, for example, 15,000 rpm or more, so that the laser light penetrating the wedge-shaped jaws 321 and 322 has a very small radius of rotation (for example, a diameter of 0.4 mm to 0.8 mm). ) Perform high speed rotation.

The laser light emitted from the high-speed rotation wedge-shaped crucibles 321 and 322 is input to the low-speed rotation wedge-shaped crucibles 341 and 342. One of the low-speed rotation wedge-shaped jaws 341 and 342 rotates relative to the other, and has a larger off-angle than the high-speed rotation wedge-shaped jaws 321 and 322. Therefore, by rotating the low-speed rotation wedge-shaped jaws 341, 342, the high-speed rotating laser light can be rotated and scanned with a large radius of rotation (for example, an outer diameter of 5.0 mm). Further, the number of rotations of the low-speed rotation wedge-shaped jaws 341 and 342 is small, for example, about 400 to 800 rpm.

Figure 8 is a view showing the trajectory of the above-described laser light on a glass substrate. Here, the circular path drawn by the laser light deflected/rotated by the high-speed rotating wedge-shaped jaws 321 and 322 due to machining errors or mounting errors of the pair of high-speed rotating wedge-shaped jaws 321 and 322 An error has occurred. Due to this error, there is an error in the aperture that is finally processed. At this time, one of the low-speed rotation wedge-shaped jaws 341 and 342 is rotated relative to the other to adjust the off-angle to be adjusted. The scanning trajectory of the laser light of the wedge-shaped crucibles 341 and 342 for low-speed rotation can be used. Thereby, the hole of the desired diameter can be processed with high precision.

Here, the height removed by one processing by the laser light is several tens of μm. Therefore, when the glass substrate G is drilled, it is difficult to form a hole even if the light collecting point is scanned only once along the processing line, that is, it is difficult to remove the inner portion of the processing line.

Therefore, in order to form a condensed spot (processed portion) on the lower surface of the glass substrate, the z-axis direction moving device 22 controls the position of the deflection/rotation mechanism 18 including the condensing lens 35 in the z-axis direction (refer to Fig. 9). (a)). In this state, after the light collecting point is wound around the processing line, the position of the deflection/rotation mechanism 18 in the z-axis direction is controlled, that is, the light collecting point is raised as shown in Fig. 9(b). Then, similarly, the light collecting point is wound around the processing line, and then the light collecting point is raised. By repeating the above operation, the inner portion of the processing line can be removed to form a hole.

Alternatively, the condensed spot may be raised in the z-axis direction without being caused to wrap around the processing line, and may be drilled in the same manner even if it is processed into a spiral shape.

<The first processing example of the corner portion>

Next, as shown in FIG. 10, processing is performed by irradiating laser light along a processing line having two straight portions extending in the x-axis direction and the y-axis direction and an arc-shaped curved portion positioned between the two straight portions. Coordinated control of time. In the example shown in Fig. 10, the low-speed rotation wedge-shaped jaws 341, 342 are rotated in the opposite directions before and after the curve portion of the processing line, and the mobile stations 10, 11 are moved and controlled. In Figure 10, the solid line is the processing line, a little chain line It is a movement locus of the workpiece machine 2 (the center of the optical system of the laser light irradiation head 3: the emission axis of the laser light output portion 15). Further, "90°" and "0°" in Fig. 10 are angles of the respective laser light positions with respect to the exit axis of the center of the optical system of the laser light irradiation head 3.

Fig. 11 is a timing chart showing the speed control of each motor when the machining shown in Fig. 10 is performed.

The coordinated control of the moving machines 10, 11 and the driving of the low speed motor at the time of the above processing will be described using the flowchart of Fig. 12.

In step S1, the processing of the straight line portion is performed. Here, the workpiece table 2 is moved in the -x-axis direction by the x-axis motor 5b at a constant speed. In step S2, the position information of the workpiece machine 2 is obtained. In step S3, the position information obtained in step S2 is used to determine whether it is an arc start position. The arc start position is a position at which the straight portion is terminated and the curved portion is started in the scanning trajectory of the workpiece machine 2 shown by the one-dot chain line in Fig. 10.

Steps S2 and S3 are repeatedly performed before reaching the arc start position. When the arc start position is reached, the process proceeds from step S3 to step S4 and step S5.

The arc interpolation operation is performed in step S4. That is, as shown in Fig. 11, the rotation of the x-axis motor 5b is gradually lowered to lower the speed in the x-axis direction, and the rotation of the y-axis motor 5a is gradually increased from "0" to increase the speed in the y-axis direction.

Further, in step S5, as shown in FIG. 11, the second low-speed motor 346 at a speed V _H toward clockwise rotation, while the first low speed motor 345 at a speed V _L is rotated in a counterclockwise direction. However, the speed of V _H is set to about 3 times that of V _L .

In step S6, it is judged whether or not it is the arc end position. Steps S4 and S5 are continued to be repeated until the arc end position is reached.

When the arc end position is reached, the process proceeds from step S6 to step S7. In step S7, the processing of the straight line portion in the y-axis direction is performed. That is, as shown in Fig. 11, the rotation of the x-axis motor 5b and the first and second low speed motors 345, 346 is stopped, and only the y-axis motor 5a is rotated to move the workpiece table 2 in the y-axis direction at a constant speed.

By the coordinated control as described above, the moving moving machine tables 10, 11 are controlled for the solid line processing line, and the center of rotation of the deflecting/rotating mechanism 18 is moved on the one-point chain line. That is, the scanning radius of the workpiece machine 2 can be made larger than the radius of the curved portion of the processing line, and the scanning control of the workpiece machine 2 can be facilitated.

<The second processing example of the corner portion>

Fig. 13 and Fig. 14 are views showing a second processing example in the case where the processing line having the same shape as that of the first processing example is processed by another control process. In the example shown in Fig. 13 and Fig. 14, the low-speed rotation wedge-shaped jaws 341 and 342 are rotated in the same direction in the curved portion of the processing line, and the mobile stations 10 and 11 are moved and controlled. In Fig. 13, the solid line is the processing line, and the one-point chain line is the movement locus of the workpiece machine 2. Fig. 14 is a timing chart showing the speed control of each motor during the processing shown in Fig. 13.

The coordinated control of the movement of the moving machine and the driving of the low speed motor during the above processing will be described by the flowchart of Fig. 15.

The processing of the straight line portion is performed in step P1. Here, by the x-axis horse Up to 5b, the workpiece table 2 is moved in the -x axis direction at a constant speed. The position information of the workpiece machine 2 is obtained in step P2. In step P3, the position information obtained in step P2 is used to determine whether it is the arc start position. Thus, in the second processing example, the arc start position is a position at which the straight portion of the machining line is terminated and the arc portion is started.

Steps P2 and P3 are repeated until the arc start position is reached. When the arc start position is reached, the process proceeds from step P3 to step P4 and step P5.

The arc interpolation operation is performed in step P4. That is, as shown in Fig. 14, the rotation of the x-axis motor 5b is gradually lowered to lower the speed in the x-axis direction, and the rotation of the y-axis motor 5a is gradually increased from "0" to increase the speed in the y-axis direction.

Further, in step P5, as shown in Fig. 14, the first low speed motor 345 and the second low speed motor 346 are rotated in the clockwise direction at a predetermined speed.

In step P6, it is judged whether or not it is the arc end position. Steps P4 and P5 are continuously repeated until the arc end position is reached.

When the arc end position is reached, the process proceeds from step P6 to step P7. In step P7, the straight line portion processing in the y-axis direction is performed. That is, as shown in Fig. 14, the rotation of the x-axis motor 5b and the first and second low speed motors 345, 346 is stopped, and only the y-axis motor 5a is rotated, and the workpiece table 2 is moved in the y-axis direction at a low speed.

By the coordinated control as described above, the moving control moving machines 10, 11 are moved to the machining line of the solid line, and the rotation center of the deflecting/rotating mechanism 18 is moved on the one-point chain line. That is, the scanning radius of the workpiece machine 2 can be made The radius of the curved portion of the processing line is larger, and the scanning control of the workpiece machine 2 is facilitated.

In the second example, when the low-speed rotation wedge-shaped jaws 341 and 342 are rotated in the same direction at the same speed, the low-speed rotation wedge-shaped jaws 341 and 342 can be integrally rotated by one motor.

[feature]

According to the above embodiment, the laser beam is deflected/rotated while moving the workpiece table 2 in the x and y directions, and when the curved portion of the processing line is processed, the drawing radius can be made larger than the processing line. The trajectory moves the workpiece table 2. Therefore, even if the workpiece machine has poor followability to each motor, the scanning speed can be increased to improve the processing efficiency.

Further, since the pair of second wedge type cymbals can be separately rotated, the deflection vector of the laser light from the optical axis can be arbitrarily controlled.

[Other Embodiments]

The present invention is not limited to the above embodiments, and various modifications and changes can be made without departing from the scope of the invention.

In the above-described embodiment, a pair of high-speed rotation wedges are provided, and the laser beam is simultaneously scanned at a high speed, but the high-speed rotation wedge type may be omitted.

Further, in the above-described embodiment, the mechanism for moving the condensed spot in the z-axis direction is caused by the z-axis direction moving device 22 moving the deflecting/rotating mechanism 18 including the condensing lens 35, but it is also possible to advance The deflection/rotation mechanism 18 including the condensing lens is fixed to move the workpiece table 2 in the z-axis direction.

In the above embodiment, a glass substrate is used as an example of a workpiece. However, the present invention can be applied similarly to the case of cutting a resin film. Further, when the present invention is applied to a resin film, an optical system for high-speed rotation and a z-axis direction moving mechanism are not required.

The processing examples shown in Figs. 10 and 13 are only examples, and the present invention can of course be applied to other processing lines including various curved portions.

1a‧‧‧Door frame

2‧‧‧Working machine

2a, 6a‧‧‧ suction holes

3‧‧‧Laser light head

5‧‧‧Machine moving mechanism

5a‧‧‧y-axis motor

5b‧‧‧x shaft motor

6‧‧‧ square

8‧‧‧1st rail

9‧‧‧2nd rail

10‧‧‧1st mobile station

11‧‧‧2nd mobile station

11a‧‧‧Guidance

15‧‧‧Laser light output

16‧‧‧Optical system

17‧‧‧High speed hollow motor

18‧‧‧Direction/rotation mechanism

21, 22‧‧‧z axis direction moving mechanism

22a‧‧‧z shaft motor

25 to 28‧‧1st to 4th mirrors

29‧‧‧Power monitor

30‧‧‧beam expander

36‧‧‧3rd rail

37‧‧‧Support members

38‧‧‧Horizontal support members

39‧‧‧Vertical support members

40‧‧‧4th rail

41‧‧‧3rd mobile machine

42‧‧‧Motor support members

35‧‧‧ Concentrating lens

50‧‧‧ Controller

321, 322‧‧‧ wedges for high-speed rotation

341, 342‧‧‧ Low-speed rotating wedge

345, 346‧‧‧1st and 2nd low speed motors

321a, 322a, 341a, 342a‧‧‧ bevel

321b, 322b, 3413, 342b‧‧‧ vertical faces

G‧‧‧glass substrate

Fig. 1 is a perspective view showing the appearance of a workpiece processing apparatus according to an embodiment of the present invention.

Figure 2 is an enlarged perspective view of the workpiece machine.

Fig. 3 is an enlarged perspective view showing the configuration of a laser irradiation head.

Fig. 4 is a schematic view showing a configuration of a high-speed hollow motor and a wedge for high-speed rotation.

Figure 5 is a schematic diagram showing the relationship between the apex angle and the yaw angle of the crucible.

Fig. 6 is a schematic view showing the arrangement of the first and second low speed motors, the first and second wedge-shaped turns, and the collecting lens.

Figure 7 is a control block diagram of the device.

Figure 8 is a trajectory diagram of laser light.

Fig. 9 (a) and (b) are views showing the action of controlling the condensed spot in the z-axis direction.

Fig. 10 is a view showing a processing line and a scanning trajectory of the first processing example of the apparatus.

Fig. 11 is a timing chart showing the speed control of each of the motors of the first processing example.

Fig. 12 is a control flow chart of the first processing example.

Fig. 13 is a view showing a processing line and a scanning trajectory of the second processing example of the apparatus.

Fig. 14 is a timing chart showing the speed control of each of the motors of the second processing example.

Fig. 15 is a control flow chart of the second processing example.

Claims (8)

A workpiece processing apparatus using laser light, which is a processing apparatus for irradiating a workpiece with laser light and processing along a processing line including a curved portion, comprising: a workpiece machine table on which a workpiece to be processed is loaded; and a machine driving means The workpiece machine can move in mutually orthogonal x and y directions in a plane parallel to the loading surface; the laser light output unit outputs laser light; and the deflecting/rotating means is emitted from the laser output unit. The laser light is deflected from the shooting axis while rotating the deflected laser light around the shooting axis; and the scanning control means cooperatively controls the driving of the above-mentioned machine and the driving of the deflecting/rotating means to move one side of the workpiece machine side The laser light that is rotated around the exit axis is scanned along the processing line such that the exit axis of the deflecting/rotating means moves at a larger radius than the curved portion of the processing line. The workpiece processing apparatus using laser light according to the first aspect of the invention, wherein the deflecting/rotating means comprises: a first dovetail and a second dovetail arranged to face each other; and a rotating means The first and second wedge-shaped turns rotate around the injection axis; and the collecting lens condenses the laser light on the workpiece. Processing of workpieces using laser light as described in item 2 of the patent application In the apparatus, the rotating means of the deflecting/rotating means includes: a first motor for rotating the first dovetail around the injection shaft; and a second motor for causing the second wedge to be The above-mentioned injection shaft rotates around. The workpiece machining apparatus using laser light according to the second aspect of the invention, wherein the rotation device of the deflection/rotation means is a hollow motor in which the first and second wedge-shaped turns are disposed. The workpiece processing apparatus using laser light according to the first aspect of the invention, wherein the scanning control means controls the machine in the x direction by the machine driving means when scanning the linear processing line. Or moving in the y direction, when scanning the curved processing line, the above-mentioned machine driving means controls the movement of the machine in the x direction or the y direction, and the laser light is rotated by the above-described deflection/rotation means. The workpiece processing apparatus using laser light according to the fifth aspect of the invention, wherein the deflecting/rotating means comprises: a first dovetail and a second dovetail arranged to face each other; and a rotating means The first and second dovetails rotate around the injection axis; and a collecting lens for concentrating the laser light on the workpiece, wherein the scanning control means scans the laser beam along the processing line including the straight portion and the curved portion, and when scanning the straight portion of the processing line, the machine is The table driving means controls the movement of the machine table in the x direction or the y direction, and when the curve portion of the processing line is scanned, the machine driving means controls the movement of the machine table in the x direction or the y direction while making the above The first and second dovetails rotate in the same direction around the exit axis. The workpiece processing apparatus using laser light according to claim 5, wherein the deflection/rotation means has a first dovetail and a second dovetail arranged to face each other; and a rotating means The first and second wedge-shaped turns are rotated around the injection axis; and the condensing lens condenses the laser light on the workpiece, wherein the scanning control means scans the ray along the processing line including the straight portion and the curved portion When the light is emitted, when the straight portion of the processing line is scanned, the machine driving means controls the movement of the machine in the x direction or the y direction, and when scanning the curved portion of the processing line, the machine driving means is used. And controlling the movement of the machine in the x direction or the y direction, and rotating the first and second dovetails in opposite directions around the injection shaft. The workpiece processing apparatus using laser light according to any one of the items 1 to 7, wherein the concentrating point rotating mechanism is provided to rotate the light collecting point of the laser light. Between the above-mentioned laser light output portion and the above-described deflection/rotation means, a pair of wedge-shaped turns and a hollow motor in which the pair of wedge-shaped turns are disposed are provided.