JP2814999B2 - Electrode structure of organic thin film electroluminescent display - Google Patents
Electrode structure of organic thin film electroluminescent displayInfo
- Publication number
- JP2814999B2 JP2814999B2 JP8258467A JP25846796A JP2814999B2 JP 2814999 B2 JP2814999 B2 JP 2814999B2 JP 8258467 A JP8258467 A JP 8258467A JP 25846796 A JP25846796 A JP 25846796A JP 2814999 B2 JP2814999 B2 JP 2814999B2
- Authority
- JP
- Japan
- Prior art keywords
- transparent electrode
- organic thin
- pattern
- thin film
- conductive metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title claims description 33
- 229910052751 metal Inorganic materials 0.000 claims description 27
- 239000002184 metal Substances 0.000 claims description 27
- 238000005401 electroluminescence Methods 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 8
- 238000002347 injection Methods 0.000 description 7
- 239000007924 injection Substances 0.000 description 7
- 239000010410 layer Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000010408 film Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8051—Anodes
- H10K59/80516—Anodes combined with auxiliary electrodes, e.g. ITO layer combined with metal lines
Landscapes
- Electroluminescent Light Sources (AREA)
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【発明の属する技術分野】本発明は、有機薄膜エレクト
ロルミネッセンス（ＥＬ）表示装置の電極構造に関し、
特に有機薄膜ＥＬ表示装置の陽極として用いる透明電極
の構造に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrode structure of an organic thin film electroluminescence (EL) display device,
In particular, the present invention relates to a structure of a transparent electrode used as an anode of an organic thin film EL display device.
【０００２】[0002]
【従来の技術】有機薄膜ＥＬ素子は、有機薄膜中に正孔
と電子を注入し、両キャリアの再結合エネルギーによっ
て有機薄膜を発光させるものであり、その構造例は特開
平６−３１４５９４号公報の図１〜図３に開示されてい
る。すなわち、透光性の基板上に、陽極，ｍ層からなる
ホール注入輸送層，発光層，ｎ層からなる電子注入輸送
層（ｍ，ｎは自然数），陰極とを順次形成したもの、あ
るいは前記構造からホール注入輸送または有機電子注入
輸送層を除いたものである。2. Description of the Related Art An organic thin film EL device is one in which holes and electrons are injected into an organic thin film and the organic thin film emits light by recombination energy of both carriers. 1 to 3 are disclosed. That is, an anode, a hole injection / transport layer composed of m layers, a light emitting layer, an electron injection / transport layer composed of n layers (m and n are natural numbers), and a cathode formed in this order on a translucent substrate; The hole injection transport or organic electron injection transport layer is excluded from the structure.
【０００３】陽極に用いる材料は、有機薄膜へ正孔を効
率良く注入するために有機薄膜とのエネルギー障壁が低
いこと、すなわち仕事関数が高いこと、光を基板側に取
り出すために透光性を有することが必要であり、一般に
は、インジウム・錫酸化物（以下、ＩＴＯという）など
に代表される透明電極を用いることが多い。The material used for the anode has a low energy barrier with the organic thin film in order to efficiently inject holes into the organic thin film, that is, has a high work function, and has a light transmitting property for extracting light to the substrate side. It is necessary to use a transparent electrode generally represented by indium tin oxide (hereinafter referred to as ITO) or the like in many cases.
【０００４】ところで、基板上に陽極や陰極を適当にパ
ターニングして、前記有機薄膜ＥＬ素子構造を複数箇所
に形成し、これらを発光画素とする表示装置を製造する
にあたっては、前記陽極に関わるいくつかの不具合が生
じる。[0004] By the way, an anode or a cathode is appropriately patterned on a substrate to form the organic thin-film EL element structure at a plurality of locations. Such a problem occurs.
【０００５】まず、パターニングされた陽極の上に形成
する有機薄膜の膜厚は、概ね１５０ｎｍ程度以下であっ
て、これは一般に陽極として使用する透明電極の膜厚と
同等以下であり、透明電極のパターンエッジが基板に対
して切り立っていると、有機薄膜がこれをカバーしきれ
ずに段差切れを起こしてしまう。そして有機薄膜を挾ん
で陽極すなわち透明電極と陰極とが交差する箇所では、
両電極がショートしてしまう。従来の技術では、この不
具合を、透明電極のパターンエッジをテーパー状に加工
することで対策していた。First, the thickness of an organic thin film formed on a patterned anode is generally about 150 nm or less, which is generally equal to or less than the thickness of a transparent electrode generally used as an anode. If the pattern edge is steep with respect to the substrate, the organic thin film cannot completely cover the edge, causing a step to be cut. Then, at the place where the anode, that is, the transparent electrode and the cathode intersect with the organic thin film interposed,
Both electrodes are short-circuited. In the prior art, this problem was counteracted by processing the pattern edge of the transparent electrode into a tapered shape.
【０００６】また、透明電極は、電気抵抗が一般の良導
電性金属よりも高いので、パターン幅が細く配線調が長
くなる場合には、電圧降下によって各発光面画素に輝度
差が生じたり、消費電力や発熱量が増加するという不具
合もある。この不具合に対しては、特開昭６２−３４１
３０号公報の第１図や、特開平２−１６５２９号公報の
図１に構造が開示されているように、透明電極のパター
ンの側面に良導電性の金属のパターンを併設して低抵抗
化するという提案があった。Further, since the transparent electrode has a higher electric resistance than a general good conductive metal, when the pattern width is small and the wiring tone is long, a difference in luminance occurs between pixels on each light emitting surface due to a voltage drop, There is also a problem that power consumption and heat generation increase. To deal with this problem, Japanese Patent Laid-Open No. 62-341
As disclosed in FIG. 1 of Japanese Patent Publication No. 30 and FIG. 1 of Japanese Patent Application Laid-Open No. Hei 2-16529, a pattern of a highly conductive metal is provided on the side surface of a transparent electrode pattern to reduce resistance. There was a proposal to do so.
【０００７】[0007]
【発明が解決しようとする課題】第１の問題点は、有機
薄膜の段差切れ対策として透明電極のパターンエッジを
テーパー状に加工するのは、煩雑であり、製造コスト増
にもなることである。The first problem is that it is cumbersome to process the pattern edge of the transparent electrode into a tapered shape as a measure against the breakage of the step in the organic thin film, which also increases the manufacturing cost. .
【０００８】その理由は、特開昭６１−４２３３号公報
の第１図に開示されている、透明電極の上にモリブデン
を主成分とする金属薄膜を形成した後でフォトリソグラ
フィーを行い、金属薄膜と透明電極との同一エッチャン
トに対するエッチングレートの差を利用する方法や、特
開昭６２−５５８９６号公報の第１図〜第４図に開示さ
れているように、性質の異なる２種類のエッチャントを
用いて２段階にエッチングする方法は、いずれも新たな
工程の追加と、エッチングレートの精密な制御を要する
からである。特に、透明電極をそれ自体で少しでも低抵
抗化するために、膜厚を大きくしたり、或いは多結晶化
したりしている場合には、より高度な加工技術を要す
る。The reason is that photolithography is performed after forming a metal thin film containing molybdenum as a main component on a transparent electrode, as disclosed in FIG. 1 of JP-A-61-4233. A method utilizing the difference in etching rate for the same etchant between a transparent electrode and a transparent electrode, and two kinds of etchants having different properties as disclosed in FIGS. 1 to 4 of JP-A-62-55896. This is because any of the two-stage etching methods requires addition of a new process and precise control of the etching rate. In particular, when the thickness of the transparent electrode is increased or the thickness of the transparent electrode is reduced in order to lower the resistance of the transparent electrode, a more advanced processing technique is required.
【０００９】第２の問題点は、透明電極を低抵抗化する
手段として、透明電極のパターンの側面に良導電性金属
のパターンを併設する場合において、従来の技術では、
良導電性金属のパターンの断面形状と材料を限定してい
ないことである。The second problem is that when a good conductive metal pattern is provided on the side of the transparent electrode pattern as a means for lowering the resistance of the transparent electrode, the conventional technique has a problem.
This is that the cross-sectional shape and material of the pattern of the good conductive metal are not limited.
【００１０】その理由は、透明電極のパターン側面に良
導電性金属のパターンを併設すれば、透明電極のパター
ンエッジで生じた有機薄膜の段差切れ問題が、良導電性
金属のパターンエッジにおいても同様に発生するためで
ある。[0010] The reason is that if a pattern of a good conductive metal is provided alongside the pattern side surface of the transparent electrode, the problem of step breakage of the organic thin film caused at the pattern edge of the transparent electrode also occurs at the pattern edge of the good conductive metal. It is because it occurs.
【００１１】また、良導電性金属の材料として、その仕
事関数が透明電極の仕事関数以上のものを使用すると、
良導電性金属のパターン部分からも有機薄膜へ正孔注入
が起こり、その直下で発光した直接光は、一般に透光性
ではない良導電性の金属に阻まれ外部には放出されず、
駆動電流に対する発光効率が低下するためである。Further, when a material having a work function higher than that of a transparent electrode is used as a material of a good conductive metal,
Hole injection also occurs from the pattern part of the good conductive metal into the organic thin film, and the direct light emitted immediately below is generally blocked by the good conductive metal which is not translucent and is not emitted to the outside,
This is because the luminous efficiency with respect to the drive current decreases.
【００１２】本発明の目的は、有機薄膜ＥＬ表示装置の
電極構造において、特に高度なエッチング技術を用いず
に、陽極のパターンエッジにおける有機薄膜の段差切れ
に起因する陽極と陰極とのショートを防止する加工が可
能で、また、不要箇所からの正孔注入によって発光効率
を損なうことのない陽極構造を提供することにある。SUMMARY OF THE INVENTION It is an object of the present invention to prevent a short circuit between an anode and a cathode caused by a break in a step of an organic thin film at a pattern edge of an anode in an electrode structure of an organic thin film EL display device without using a particularly advanced etching technique. It is another object of the present invention to provide an anode structure which can be processed in such a manner that the luminous efficiency is not impaired by hole injection from an unnecessary portion.
【００１３】[0013]
【課題を解決するための手段】前記目的を達成するた
め、本発明に係る有機薄膜エレクトロルミネッセンス表
示装置の電極構造は、透光性の基板上に、陽極と、少な
くとも有機発光薄膜を１層以上含む単層または複数の有
機積層薄膜と、陰極とを順次積層形成された有機薄膜エ
レクトロルミネッセンス素子構造からなる発光画素を複
数箇所に有する有機薄膜エレクトロルミネッセンス表示
装置であって、前記陽極は、透明電極からなるパターン
と、良導電性金属からなるパターンとで構成され、良導
電性金属のパターンは、前記透明電極パターンの両側面
に接して設けられ、その高さが透明電極の高さ以下で、
外側のパターンエッジがテーパ状で断面形状が三角形で
ある。 In order to achieve the above object, an electrode structure of an organic thin-film electroluminescence display device according to the present invention comprises an anode, at least one organic light-emitting thin film on a light-transmitting substrate. An organic thin-film electroluminescence display device having a plurality of light-emitting pixels having an organic thin-film electroluminescence element structure in which a single layer or a plurality of organic multilayer thin films including a cathode are sequentially formed, the anode being a transparent electrode And a pattern made of a good conductive metal, the good conductive metal pattern is provided in contact with both side surfaces of the transparent electrode pattern , the height of which is equal to or less than the height of the transparent electrode,
The outer pattern edge is tapered and the cross section is triangular
is there.
【００１４】[0014]
【発明の実施の形態】以下、本発明の実施の形態を図に
より説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to the drawings.
【００１５】図１は、本発明の一実施形態に係る有機薄
膜ＥＬ表示装置の電極構造を示す斜視図である。[0015] Figure 1 is a perspective view showing an electrode structure of the organic thin film EL display device according to an embodiment of the present invention.
【００１６】図において、透光性を有する基板１上に透
明電極２がパターニングされている。パターニングされ
た透明陽極２は、そのパターンエッジをテーパー状にす
る必要はなく、断面形状を概ね長方形に形成している。In the figure, a transparent electrode 2 is patterned on a light-transmitting substrate 1. The patterned transparent anode 2 does not need to have its pattern edge tapered, and has a substantially rectangular cross section.
【００１７】断面形状が略長方形状の透明電極２の両側
には、良導電性金属３が併設されている。良導電性金属
３は図１に示すように、パターンの高さが透明電極２の
高さ以下であり、透明電極２のパターンの両側面に接
し、透明電極２に対して外側の良導電性金属３のパター
ンエッジ３ａは、テーパー状に加工され、良導電性金属
３の断面形状は三角形状となっている。 A good conductive metal 3 is provided on both sides of the transparent electrode 2 having a substantially rectangular cross section. As shown in FIG. 1, the good conductive metal 3 has a pattern height equal to that of the transparent electrode 2.
The pattern edge 3a of the good conductive metal 3 which is not more than the height, is in contact with both side surfaces of the pattern of the transparent electrode 2 and is outside the transparent electrode 2 is processed into a tapered shape, and the cross-sectional shape of the good conductive metal 3 Has a triangular shape.
【００１８】図１に示すように、透明電極２のパターン
の側面に接して併設する良導電性金属３のパターンの高
さは、透明電極２の膜厚（高さ）より低く、透明電極２
と良導電性金属３の高さの違いによる段差に起因して有
機薄膜に段差切れが生ずるのを防止するためには、良導
電性金属３の高さは、透明電極２の膜厚（高さ）の７割
程度の高さに設定することが望ましい。As shown in FIG. 1 , the height of the pattern of the good conductive metal 3 provided adjacent to the side surface of the pattern of the transparent electrode 2 is lower than the film thickness (height) of the transparent electrode 2.
In order to prevent the occurrence of a step in the organic thin film due to a step due to the difference in height between the conductive metal 3 and the conductive metal 3, the height of the conductive metal 3 is determined by the thickness of the transparent electrode 2. It is desirable to set the height to about 70% of the height.
【００１９】[0019]
【発明の効果】以上説明したように本発明によれば、陽
極上に積層する有機薄膜の段差切れに起因する陽極と陰
極とのショートを防止するための陽極パターンエッジの
テーパー加工を容易に行うことができる。As described above, according to the present invention, the anode pattern edge can be easily tapered to prevent a short circuit between the anode and the cathode due to the breakage of the organic thin film laminated on the anode. be able to.
【００２０】その理由は、陽極を、透明電極からなるパ
ターンと、該透明電極からなるパターンの両側面に併設
した良導電性金属からなるパターンとから構成し、パタ
ーンエッジにおけるテーパー加工を、手間のかかる透明
電極に代えて容易に行える良導電性金属に対して行なう
ことができるためである。The reason for this is that the anode is composed of a pattern made of a transparent electrode and a pattern made of a good conductive metal provided on both side surfaces of the pattern made of the transparent electrode. This is because it can be performed on a good conductive metal which can be easily performed instead of such a transparent electrode.
【００２１】さらに、良導電性金属のパターンの高さは
透明電極以下で、外側のパターンエッジがテーパ状で断
面形状が三角形であるため、発光部分の有機薄膜と良導
電性金属との距離を大きくし、良導電性金属から有機薄
膜への不要な正孔の注入を抑えることができ、かつ段差
での絶縁破壊を防止できる。 Further, the height of the good conductive metal pattern is
Below the transparent electrode, the outer pattern edge is tapered and cut.
Since the surface shape is triangular, it is well connected to the organic thin film of the light emitting part
Increase the distance from conductive metals to reduce the
Unnecessary hole injection into the film can be suppressed, and a step
Can prevent dielectric breakdown.
【図１】本発明の一実施形態に係る有機薄膜ＥＬ表示装
置の電極構造を示す斜視図である。1 is a perspective view showing an electrode structure of the organic thin film EL display device according to an embodiment of the present invention.
１ 基板 ２ 透明電極 ３ 良導電性金属 1 Substrate 2 Transparent electrode 3 Good conductive metal
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) H05B 33/26──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) H05B 33/26
Claims (1)
有機発光薄膜を１層以上含む単層または複数の有機積層
薄膜と、陰極とを順次積層形成された有機薄膜エレクト
ロルミネッセンス素子構造からなる発光画素を複数箇所
に有する有機薄膜エレクトロルミネッセンス表示装置で
あって、 前記陽極は、透明電極からなるパターンと、良導電性金
属からなるパターンとで構成され、 良導電性金属のパターンは、前記透明電極からなるパタ
ーンの両側面に接して設けられ、その高さが透明電極の
高さ以下で、外側のパターンエッジがテーパ状で断面形
状が三角形であることを特徴とする有機薄膜エレクトロ
ルミネッセンス表示装置の電極構造。1. An organic thin-film electroluminescent element structure comprising a light-transmitting substrate, an anode, a single or a plurality of organic laminated thin films including at least one organic light-emitting thin film, and a cathode sequentially laminated. An organic thin film electroluminescence display device having a plurality of luminescent pixels at a plurality of positions, wherein the anode is composed of a pattern made of a transparent electrode and a pattern made of a good conductive metal, and the pattern of the good conductive metal is The transparent electrode is provided in contact with both sides of the pattern , and its height is
Below the height, the outer pattern edge is tapered and cross-sectional
An electrode structure of an organic thin-film electroluminescence display device having a triangular shape .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8258467A JP2814999B2 (en) | 1996-09-30 | 1996-09-30 | Electrode structure of organic thin film electroluminescent display |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8258467A JP2814999B2 (en) | 1996-09-30 | 1996-09-30 | Electrode structure of organic thin film electroluminescent display |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10109448A Division JP2848391B2 (en) | 1998-04-20 | 1998-04-20 | Method for manufacturing electrode structure in organic thin film electroluminescence display device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10106751A JPH10106751A (en) | 1998-04-24 |
| JP2814999B2 true JP2814999B2 (en) | 1998-10-27 |
Family
ID=17320641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8258467A Expired - Fee Related JP2814999B2 (en) | 1996-09-30 | 1996-09-30 | Electrode structure of organic thin film electroluminescent display |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2814999B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9813326D0 (en) | 1998-06-19 | 1998-08-19 | Cambridge Display Tech Ltd | Backlit displays |
| KR100620849B1 (en) | 2004-03-23 | 2006-09-13 | 엘지전자 주식회사 | Organic Electro Luminescence Device and Fabricating Method Thereof |
| KR102303214B1 (en) * | 2015-01-16 | 2021-09-17 | 삼성디스플레이 주식회사 | Touch screen panel and manufacturing method thereof |
| CN107123745B (en) * | 2017-04-27 | 2018-12-14 | 上海天马有机发光显示技术有限公司 | Pixel array and preparation method thereof, display panel and display device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6234130A (en) * | 1985-08-08 | 1987-02-14 | Ricoh Co Ltd | Substrate atached with transparent electroconductive film |
| JPH01309289A (en) * | 1988-06-06 | 1989-12-13 | Matsushita Electric Ind Co Ltd | Formation of pattern of transparent conductive film |
| JPH0216529A (en) * | 1988-07-05 | 1990-01-19 | Seiko Epson Corp | Method of lowering resistance of transparent electrode |
| JPH0482197A (en) * | 1990-07-25 | 1992-03-16 | Hitachi Ltd | Thin film electroluminescent (el) element |
-
1996
- 1996-09-30 JP JP8258467A patent/JP2814999B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10106751A (en) | 1998-04-24 |
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