JP2812955B2 - Manufacturing method of magnetic recording medium - Google Patents
Manufacturing method of magnetic recording mediumInfo
- Publication number
- JP2812955B2 JP2812955B2 JP63163494A JP16349488A JP2812955B2 JP 2812955 B2 JP2812955 B2 JP 2812955B2 JP 63163494 A JP63163494 A JP 63163494A JP 16349488 A JP16349488 A JP 16349488A JP 2812955 B2 JP2812955 B2 JP 2812955B2
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- JP
- Japan
- Prior art keywords
- magnetic
- recording medium
- support
- magnetic recording
- magnetic material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】 A.産業上の利用分野 本発明は、真空蒸着法により非磁性支持体上に磁性膜
が成膜されてなる磁気記録媒体の製造方法に関する。Description: TECHNICAL FIELD The present invention relates to a method for manufacturing a magnetic recording medium in which a magnetic film is formed on a non-magnetic support by a vacuum evaporation method.
B.発明の概要 本発明は、非磁性支持体上に真空蒸着法により磁性薄
膜を成膜するに際し、前記非磁性支持体の幅方向の中心
と蒸発源の幅方向での中心とが互いに異なるように対向
して配置することにより、該非磁性支持体上に成膜され
る磁性膜の膜厚を均一にし得る磁気記録媒体の製造方法
を提供しようとするものである。B. Summary of the Invention In the present invention, when a magnetic thin film is formed on a non-magnetic support by a vacuum deposition method, the center in the width direction of the non-magnetic support and the center in the width direction of the evaporation source are different from each other. An object of the present invention is to provide a method of manufacturing a magnetic recording medium capable of making the thickness of a magnetic film formed on the nonmagnetic support uniform by arranging the magnetic recording medium on the nonmagnetic support.
C.従来の技術 従来より磁気記録媒体としては、非磁性支持体上に酸
化物磁性粉末或いは合金磁性粉末等の粉末磁性材料を塩
化ビニル−酢酸ビニル系共重合体，ポリエステル樹脂，
ポリウレタン樹脂等の有機バインダー中に分散せしめた
磁性塗料を塗布・乾燥することにより作製される塗布型
の磁気記録媒体が広く使用されている。C. Prior Art Conventionally, as a magnetic recording medium, a powder magnetic material such as an oxide magnetic powder or an alloy magnetic powder is coated on a nonmagnetic support by a vinyl chloride-vinyl acetate copolymer, a polyester resin,
A coating type magnetic recording medium produced by applying and drying a magnetic coating material dispersed in an organic binder such as a polyurethane resin is widely used.
これに対して、高密度磁気記録への要求の高まりとと
もに、Co−Ni合金、Co−Cr合金、Co−Ｏ等の金属磁性材
料を、メッキや真空薄膜形成手段（真空蒸着法やスパッ
タリング法，イオンプレーティング法等）によってポリ
エステルフィルムやポリイミドフィルム等の非磁性支持
体上に直接被着した、いわゆる金属磁性薄膜型の磁気記
録媒体が提案され注目を集めている。この金属磁性薄膜
型の磁気記録媒体は抗磁力や角形比等に優れ、短波長で
の電磁変換特性に優れるばかりでなく、磁性層の厚みを
極めて薄くすることが可能であるため記録減磁や再生時
の厚み損失が著しく小さいこと、磁性層中に非磁性材で
あるバインダーを混入する必要がないため磁性材料の充
填密度を高めることができること等、数々の利点を有し
ている。On the other hand, as the demand for high-density magnetic recording has increased, metal magnetic materials such as Co-Ni alloys, Co-Cr alloys, and Co-O have been used for plating and vacuum thin film forming means (vacuum evaporation, sputtering, A magnetic recording medium of a so-called metal magnetic thin film type, which is directly adhered to a non-magnetic support such as a polyester film or a polyimide film by an ion plating method or the like, has been proposed and attracted attention. This metal magnetic thin film type magnetic recording medium is excellent in coercive force, squareness ratio, etc., and is excellent not only in electromagnetic conversion characteristics at short wavelength, but also in recording demagnetization and It has a number of advantages, such as extremely small thickness loss during reproduction, and the ability to increase the packing density of the magnetic material because there is no need to mix a binder that is a nonmagnetic material into the magnetic layer.
D.発明が解決しようとする課題 ところで、上述のような薄膜形成手段の内、真空蒸着
法により非磁性支持体上に磁性材料を被着形成する磁気
記録媒体の製造方法では、送りロールに巻回されたテー
プ状の非磁性支持体を大径となされたキャンに引き出
し、該キャンの周面を走行させる際に磁性薄膜を被着形
成するようにしている。D. Problems to be Solved by the Invention Among the thin film forming means as described above, in the method of manufacturing a magnetic recording medium in which a magnetic material is formed on a non-magnetic support by a vacuum deposition method, a winding roll is used. The turned tape-shaped non-magnetic support is pulled out to a can having a large diameter, and a magnetic thin film is formed on the can when traveling around the peripheral surface of the can.
しかしながら、上記従来の磁気記録媒体の製造方法で
は、上記非磁性支持体に被着させる磁性材料が収納され
る収納容器が、上記非磁性支持体の幅と略同じ長さから
なるために、この収納容器内に磁性材料を補充すると、
補充された磁性材料付近の温度が下がり該磁性材料の温
度分布が不均一となるために、磁性層となる磁性薄膜が
均一に被着されない場合がある。However, in the conventional method for manufacturing a magnetic recording medium, the storage container for storing the magnetic material to be adhered to the nonmagnetic support has a length substantially equal to the width of the nonmagnetic support. When refilling the magnetic material in the storage container,
Since the temperature near the replenished magnetic material decreases and the temperature distribution of the magnetic material becomes non-uniform, the magnetic thin film serving as the magnetic layer may not be uniformly deposited.
すなわち、従来の磁気記録媒体の製造方法では、この
製造方法に使用される磁性材料の収納容器が非磁性支持
体の幅と略同じ幅であるために均一な膜厚を有する磁気
記録媒体を製造することができず、歩留まりを向上する
ことができない。That is, in the conventional method for manufacturing a magnetic recording medium, the magnetic recording medium having a uniform film thickness is manufactured because the storage container of the magnetic material used in the manufacturing method is substantially the same width as the width of the nonmagnetic support. And the yield cannot be improved.
そこで本発明は、上記従来の技術が有する課題を解決
するために提案されたものであって、非磁性支持体上に
被着形成される磁性膜の膜厚を均一にするとともに歩留
まりを向上し得るようにすることを目的とするものであ
る。Therefore, the present invention has been proposed in order to solve the problems of the above-described conventional technology, and has a uniform thickness of a magnetic film deposited on a non-magnetic support and an improvement in yield. The purpose is to obtain.
E.課題を解決するための手段 本発明は上記目的を達成するために、非磁性支持体上
に真空蒸着法により磁性薄膜を成膜するに際し、上記非
磁性支持体が全幅に亘り蒸発源と対向するとともに、非
磁性支持体の幅方向の中心と蒸発源の幅方向での中心と
が互いに異なるように蒸発源を配置し、上記蒸発源の幅
方向の片側に余熱領域を形成することを特徴とするもの
である。E. Means for Solving the Problems The present invention, in order to achieve the above object, when forming a magnetic thin film on a non-magnetic support by a vacuum evaporation method, the non-magnetic support and the evaporation source over the entire width Opposingly, disposing the evaporation source such that the center in the width direction of the nonmagnetic support and the center in the width direction of the evaporation source are different from each other, and forming a residual heat region on one side in the width direction of the evaporation source. It is a feature.
本発明により製造される磁気記録媒体の磁性材料は、
通常この種の磁気記録媒体の使用されるものであれば何
れの材料でも良いが、好ましくは、金属磁性材料を使用
した方が良い。ここで、磁性薄膜を構成する金属材料と
しては、通常この種の媒体で使用されるものがいずれも
使用可能である。例示すれば、Fe,Co,Ni等の磁性金属
や、Fe−Co,Co−Ni,Fe−Co−Ni,Co−Cr,Fe−Co−Cr,Co
−Ni−Cr,Fe−Co−Ni−Cr等である。The magnetic material of the magnetic recording medium manufactured according to the present invention,
Usually, any material may be used as long as this type of magnetic recording medium is used, but it is preferable to use a metal magnetic material. Here, as the metal material constituting the magnetic thin film, any of those usually used in this type of medium can be used. For example, magnetic metals such as Fe, Co, and Ni, and Fe-Co, Co-Ni, Fe-Co-Ni, Co-Cr, Fe-Co-Cr, Co
-Ni-Cr, Fe-Co-Ni-Cr and the like.
非磁性支持体の材料としても通常使用されるものが使
用でき、例えばポリエチレンテレフタレート，ポリエチ
レン−2,6−ナフタレート等のポリエステル樹脂や芳香
族ポリアミドフィルム，ポリイミド樹脂フィルム等が挙
げられる。As the material of the nonmagnetic support, those usually used can be used, and examples thereof include polyester resins such as polyethylene terephthalate and polyethylene-2,6-naphthalate, aromatic polyamide films, and polyimide resin films.
そして本発明においては、真空蒸着法により前記磁性
材料を上記非磁性支持体上に被着形成するものである。
この真空蒸着法は、真空となされた装置内に、蒸発源と
しての前記磁性材料を所定の収納容器内に充填し、この
充填された磁性材料を加熱手段により加熱蒸発させて、
非磁性支持体に被着形成するようにすれば良いが、上記
蒸発源は、非磁性支持体の幅方向の中心と蒸発源の幅方
向での中心が、互いに異なるように対向して配設するこ
とが必要である。In the present invention, the magnetic material is formed on the non-magnetic support by vacuum deposition.
In this vacuum deposition method, the magnetic material as an evaporation source is filled in a predetermined storage container in a vacuumed apparatus, and the filled magnetic material is heated and evaporated by heating means.
The evaporation source may be formed so as to be adhered to the non-magnetic support. However, the evaporation sources are disposed so as to face each other such that the center in the width direction of the non-magnetic support and the center in the width direction of the evaporation source are different from each other. It is necessary to.
なお、上記真空蒸着法は、非磁性支持体上に斜めに蒸
着させる所謂斜方蒸着に限らず、垂直に蒸着する垂直蒸
着により場合でも良い。Note that the above-described vacuum deposition method is not limited to so-called oblique deposition in which evaporation is performed obliquely on a non-magnetic support, and may be vertical deposition in which deposition is performed vertically.
F.作用 上述のような構成からなる本発明の磁気記録媒体の製
造方法によれば、非磁性支持体の幅方向の中心と蒸発源
の幅方向での中心とが互いに異なるように対向して配置
するようになされているので、新たに補充された蒸発源
と既に充填され加熱されている蒸発源との温度差が蒸発
する蒸発源の量に影響を及ぼすことがない。したがっ
て、非磁性支持体上に被着形成される磁性薄膜は均一と
なされる。F. Action According to the method for manufacturing a magnetic recording medium of the present invention having the above-described configuration, the center in the width direction of the nonmagnetic support and the center in the width direction of the evaporation source are opposed to each other so as to be different from each other. Because of the arrangement, the temperature difference between the newly replenished evaporation source and the already filled and heated evaporation source does not affect the amount of evaporation source evaporated. Therefore, the magnetic thin film deposited on the non-magnetic support is made uniform.
また、蒸発源を幅方向にずらすことで、蒸発源の幅方
向の片側に余熱領域を形成しているので、装置の簡略化
や小型化を図ることができる。Further, since the residual heat region is formed on one side of the evaporation source in the width direction by shifting the evaporation source in the width direction, the device can be simplified and downsized.
G.実施例 以下、本発明を適用した磁気記録媒体の製造方法の実
施例を具体的に説明する。G. Examples Hereinafter, examples of the method for manufacturing a magnetic recording medium to which the present invention is applied will be specifically described.
先ず、本発明に係る磁気記録媒体の製造方法に使用さ
れる製造装置の一例について説明する。First, an example of a manufacturing apparatus used in the method for manufacturing a magnetic recording medium according to the present invention will be described.
この製造装置は、第４図に示すように、内部が真空状
態となされた真空室１内に、テープ状の非磁性支持体２
が、図中反時計回り方向に定速回転する送りロール３か
ら図中反時計回り方向に定速回転するようにされた巻取
りロール４に順次走行するようにされている。As shown in FIG. 4, the manufacturing apparatus includes a tape-shaped non-magnetic support 2 in a vacuum chamber 1 in which the inside is in a vacuum state.
Are sequentially driven from a feed roll 3 rotating at a constant speed in a counterclockwise direction in the figure to a winding roll 4 rotating at a constant speed in a counterclockwise direction in the figure.
そして、上記送りロール３から巻取りロール４側に走
行する中途部には、上記非磁性支持体２を図中下方に引
き出すように配設されるとともに上記各ロール3,4の径
よりも大径となされた冷却キャン５が図中時計回り方向
に定速回転するように設けられている。なお、上記送り
ロール3,巻取りロール４及び冷却キャン５は、それぞれ
非磁性支持体２の幅と略同じ長さからなる円筒状をなす
ものであり、また、上記冷却キャン５には、内部に図示
しない冷却装置が設けられ、上記非磁性支持体２の温度
上昇による変形等を抑制し得るようになされている。The non-magnetic support 2 is disposed in the middle part of the sheet traveling from the feed roll 3 to the take-up roll 4 so as to be pulled out downward in the drawing, and is larger than the diameter of each of the rolls 3 and 4. The cooling can 5 having a diameter is provided so as to rotate at a constant speed in the clockwise direction in the figure. The feed roll 3, the take-up roll 4, and the cooling can 5 each have a cylindrical shape having substantially the same length as the width of the nonmagnetic support 2, and the cooling can 5 has an internal shape. Is provided with a cooling device (not shown) so that deformation and the like of the non-magnetic support 2 due to a rise in temperature can be suppressed.
したがって、上記非磁性支持体２は、送りロール３か
ら順次図中矢印Ａ方向に送り出され、さらに上記冷却キ
ャン５の周面を通過して巻取りロール４に巻取られて行
くようにされている。なお、上記送りローラ３と上記冷
却キャン５との間及び該冷却キャン５と上記巻取りロー
ル４との間にはそれぞれガイドロール6,7が配設され、
上記送りロール３から冷却キャン４及び該冷却キャン５
から巻取りロール４に亘って走行する非磁性支持体２に
所定のテンションをかけ、該非磁性支持体２が円滑に走
行するようになされている。Therefore, the non-magnetic support 2 is sequentially sent out from the feed roll 3 in the direction of arrow A in the figure, and further passes through the peripheral surface of the cooling can 5 and is wound up by the winding roll 4. I have. In addition, guide rolls 6 and 7 are disposed between the feed roller 3 and the cooling can 5 and between the cooling can 5 and the winding roll 4, respectively.
From the feed roll 3 to the cooling can 4 and the cooling can 5
A predetermined tension is applied to the non-magnetic support 2 traveling over the take-up roll 4 so that the non-magnetic support 2 runs smoothly.
また、上記真空室１内には、上記冷却キャン５の下方
に収納容器８が設けられ、この収納容器８内には蒸発源
である金属磁性材料９が充填されている。また、上記冷
却キャン５の側方には加熱手段である電子ビーム銃10が
配設されている。この電子ビーム銃10は、上記収納容器
８内に充填された金属磁性材料９を加熱蒸発させるもの
であり、この電子ビーム銃10によって蒸発した金属磁性
材料９は、上記冷却キャン５の周面を定速走行する非磁
性支持体２上に磁性層として被着形成されるようになさ
れている。A storage container 8 is provided in the vacuum chamber 1 below the cooling can 5, and the storage container 8 is filled with a metal magnetic material 9 as an evaporation source. On the side of the cooling can 5, an electron beam gun 10 as a heating means is provided. The electron beam gun 10 heats and evaporates the metal magnetic material 9 filled in the storage container 8, and the metal magnetic material 9 evaporated by the electron beam gun 10 irradiates the peripheral surface of the cooling can 5. The magnetic layer is formed on the non-magnetic support 2 running at a constant speed.
また、上記冷却キャン５と上記金属磁性材料９の収納
容器８との間であって該冷却キャン５の近傍には、冷却
キャン５の周面と対向するように湾曲形成されたシャッ
タ11が配設されている。このシャッタ11は、上記金属磁
性材料９が上記非磁性支持体２に対して所定角度範囲で
斜めに蒸着されるように該支持体２の所定範囲を覆うも
のである。Further, a shutter 11 is provided between the cooling can 5 and the storage container 8 for the metal magnetic material 9 and in the vicinity of the cooling can 5 so as to face the peripheral surface of the cooling can 5. Has been established. The shutter 11 covers a predetermined range of the nonmagnetic support 2 so that the metal magnetic material 9 is deposited obliquely within a predetermined angle range with respect to the nonmagnetic support 2.
そして、本装置における上記金属磁性材料９が充填さ
れた収納容器８は、第１図に示すように、直方体状とな
されており、この収納容器８の長手方向の幅l2は、上記
冷却キャン５の側面を走行する非磁性支持体２の幅l1よ
りも幅広に形成され、該非磁性支持体２の幅方向の中心
と上記金属磁性膜９が充填された収納容器８の長さ方向
との中心とが互いに異なるようになされている。なお、
上記収納容器８内に充填された金属磁性材料９は、前述
のように、前記電子ビーム銃10による照射されて加熱さ
れ蒸発するようになされているが、この電子ビーム銃10
による電子ビームは、上記非磁性支持体２の幅l1と略同
じ幅l3で照射するように設定されている。The storage container 8 in which the metal magnetic material 9 is filled in this device, as shown in FIG. 1, have been made a rectangular parallelepiped shape, longitudinal width l 2 of the container 8, the cooling can 5 is formed wider than the width l 1 of the non-magnetic support 2 running on the side surface of the non-magnetic support 2, the center in the width direction of the non-magnetic support 2, and the length of the storage container 8 filled with the metal magnetic film 9. Are different from each other. In addition,
As described above, the metal magnetic material 9 filled in the storage container 8 is irradiated with the electron beam gun 10 so as to be heated and evaporated.
Electron beam by is set to irradiate substantially the same width l 3 and width l 1 of the non-magnetic substrate 2.
また、上記収納容器８には、磁性材料補充管12が配設
され、上記収納容器８内から蒸発する金属磁性材料９を
本装置の外部から補充するようになされている。Further, a magnetic material replenishing tube 12 is provided in the storage container 8 so as to replenish the metal magnetic material 9 evaporated from the storage container 8 from outside the present apparatus.
したがって、本装置によれば、磁性材料補充管12によ
り金属磁性材料９が補充されても、該金属磁性材料９の
補充位置から電子ビームが照射される位置までl2−l3の
幅を有し徐々に熱せられるので、電子ビームの照射幅l3
において蒸発する金属磁性材料９の蒸発量は一定になさ
れ、上記冷却キャン５の周面を走行する非磁性支持体２
上には均一な金属磁性膜が被着形成される。Therefore, according to the present apparatus, even if the magnetic metal material 9 is replenished by the magnetic material replenishing tube 12, a width of l 2 -l 3 is provided from the replenishing position of the metal magnetic material 9 to the position where the electron beam is irradiated. Is gradually heated, so the electron beam irradiation width l 3
The amount of evaporation of the metal magnetic material 9 evaporating at the time is made constant, and the non-magnetic support 2 running on the peripheral surface of the cooling can 5
A uniform metal magnetic film is formed thereon.
なお、上記実施例では、斜方蒸着により非磁性支持体
２上に金属磁性膜を被着させる磁気記録媒体の製造方法
に本発明を適用したものについて説明したが、本発明
は、上記実施例に限定されることなく垂直に金属磁性膜
を被着させる垂直蒸着によるものであっても良い。In the above-described embodiment, the description has been given of the case where the present invention is applied to the method of manufacturing a magnetic recording medium in which a metal magnetic film is deposited on the non-magnetic support 2 by oblique vapor deposition. However, the present invention is not limited to this, and may be a method by vertical vapor deposition in which a metal magnetic film is vertically applied.
また、本発明は、さらに第２図に示すように、収納容
器８に充填された金属磁性材料９を蒸発させるための電
子ビームとは別個に、金属磁性材料９の補充位置に電子
ビームを照射する方法を付加して構成したものであって
も良い。Further, according to the present invention, as shown in FIG. 2, an electron beam is applied to the replenishing position of the metal magnetic material 9 separately from the electron beam for evaporating the metal magnetic material 9 filled in the storage container 8. It may be configured by adding a method of performing the above.
すなわち、本装置内に前記電子ビーム銃10とは別個に
補助ビーム銃13を設け、この補助ビーム銃13により、上
記金属磁性材料９の補充位置に電子ビームを照射し収納
容器８内に補充された金属磁性材料９に余熱を与えるよ
うに構成されたものであっても良い。この方法を採用す
ることによって、磁性材料補充管12によって補充された
金属磁性材料９はさらに効率良く熱せられる。That is, an auxiliary beam gun 13 is provided in the apparatus separately from the electron beam gun 10, and the auxiliary beam gun 13 irradiates an electron beam to a replenishing position of the metal magnetic material 9 and is replenished in the storage container 8. It may be configured to give residual heat to the metallic magnetic material 9. By adopting this method, the metal magnetic material 9 replenished by the magnetic material refill tube 12 can be heated more efficiently.
したがって、この余熱が与えられた金属磁性材料９
は、電子ビーム銃10により電子ビームを照射することに
よって、金属磁性材料９が新たに補充された位置側であ
っても、十分熱せられ蒸発量は一定になされるとともに
非磁性支持体２上には一層均一な金属磁性薄膜を被着形
成させることができる。Therefore, the metallic magnetic material 9 given the residual heat
By irradiating the electron beam with the electron beam gun 10, even at the position where the metal magnetic material 9 is newly replenished, the metal magnetic material 9 is sufficiently heated, the evaporation amount is made constant, and the non-magnetic support 2 Can form a more uniform metal magnetic thin film.
そして、本発明者等は、上記金属磁性材料９に余熱を
与えて製造した磁気記録媒体と、上記余熱を与えないで
製造した磁気記録媒体の膜厚の分布状態をそれぞれ測定
したところ、第３図Ａ及び第３図Ｂに示す結果を得るこ
とができた。なお、この第３図Ａは、余熱を与えないて
製造した磁気記録媒体の膜厚の分布を示すものであり、
また第３図Ｂは、余熱を与えて製造した磁気記録媒体の
膜厚の分布を示すものである。The present inventors measured the distribution of the film thicknesses of the magnetic recording medium manufactured by applying the residual heat to the metal magnetic material 9 and the magnetic recording medium manufactured by not applying the residual heat. The results shown in FIG. A and FIG. 3B were obtained. FIG. 3A shows the distribution of the film thickness of the magnetic recording medium manufactured without giving any residual heat.
FIG. 3B shows the distribution of the film thickness of a magnetic recording medium manufactured by applying residual heat.
この第３図Ａ及び第３図Ｂから明らかなように、補充
ビーム銃13により余熱を与えないで金属磁性材料９を蒸
発させた場合の該磁気記録媒体の膜厚は、やや金属磁性
材料９の補充位置側が薄く形成されるのに対し、余熱を
与えた後に蒸発させた場合では、薄く形成される幅は極
めて短く磁気記録媒体の略全体に亘って均一な膜が形成
されていることがわかる。As apparent from FIGS. 3A and 3B, the film thickness of the magnetic recording medium when the metal magnetic material 9 is evaporated without giving any residual heat by the supplementary beam gun 13 is slightly larger than the metal magnetic material 9. In the case where the replenishment position side is formed thin, when the residual heat is applied and then evaporated, the thin formed width is extremely short, and a uniform film is formed over substantially the entire magnetic recording medium. Recognize.
このように、本発明では、非磁性支持体の幅方向の中
心と金属磁性材料からなる蒸発源の幅方向での中心とが
互いに異なるように対向して配置するようになされてい
るので、補充された蒸発源による温度の低下が、磁性材
料の蒸発量に大きく影響することを防止することができ
る。したがって、従来の製造方法によって製造される磁
気記録媒体に比しより均一な膜厚を有する磁気記録媒体
を製造することができる。As described above, in the present invention, the center in the width direction of the non-magnetic support and the center in the width direction of the evaporation source made of the metal magnetic material are arranged to face each other so as to be different from each other. It is possible to prevent a decrease in temperature caused by the evaporation source from greatly affecting the amount of evaporation of the magnetic material. Therefore, it is possible to manufacture a magnetic recording medium having a more uniform film thickness than a magnetic recording medium manufactured by a conventional manufacturing method.
さらに、本発明の構成に加え、補充された蒸発源の近
傍に余熱を与える手段を付加することにより、より一層
均一な膜厚を有する磁気記録媒体を製造することができ
る。Further, in addition to the configuration of the present invention, a magnetic recording medium having a more uniform film thickness can be manufactured by adding a means for giving residual heat near the replenished evaporation source.
H.発明の効果 上記実施例の説明からも明らかなように、本発明の磁
気記録媒体の製造方法によれば、製造される磁気記録媒
体の膜厚を均一になすことができ、歩留まりを向上する
ことができる。H. Effects of the Invention As is clear from the description of the above embodiment, according to the method of manufacturing a magnetic recording medium of the present invention, the thickness of the manufactured magnetic recording medium can be made uniform, and the yield can be improved. can do.
第１図は磁気記録媒体の製造装置の一例を概略的に示す
要部拡大斜視図、第２図は他の例を概略的に示す要部拡
大斜視図、第３図Ａは余熱を与えないで製造された磁気
記録媒体の膜厚分布を示す特性図、第３図Ｂは余熱を与
えて製造された磁気記録媒体の膜厚分布を示す特性図、
第４図は非磁性支持体上に磁性膜を被着させる方法を示
す模式図である。 ２……非磁性支持体 ８……収納容器 ９……金属磁性材料 10……電子ビーム銃FIG. 1 is an enlarged perspective view of a main part schematically showing an example of a manufacturing apparatus for a magnetic recording medium, FIG. 2 is an enlarged perspective view of a main part schematically showing another example, and FIG. FIG. 3B is a characteristic diagram showing a film thickness distribution of a magnetic recording medium manufactured by applying residual heat, and FIG.
FIG. 4 is a schematic view showing a method of depositing a magnetic film on a non-magnetic support. 2 Non-magnetic support 8 Storage container 9 Metallic magnetic material 10 Electron beam gun
Claims (1)
膜を成膜するに際し、 上記非磁性支持体が全幅に亘り蒸発源と対向するととも
に、非磁性支持体の幅方向の中心と蒸発源の幅方向での
中心とが互いに異なるように蒸発源を配置し、上記蒸発
源の幅方向の片側に余熱領域を形成することを特徴とす
る磁気記録媒体の製造方法。When a magnetic thin film is formed on a non-magnetic support by a vacuum evaporation method, the non-magnetic support faces an evaporation source over the entire width, and evaporates with the center in the width direction of the non-magnetic support. A method for manufacturing a magnetic recording medium, comprising: arranging evaporation sources such that the centers of the evaporation sources in the width direction are different from each other; and forming a residual heat region on one side of the evaporation sources in the width direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63163494A JP2812955B2 (en) | 1988-06-30 | 1988-06-30 | Manufacturing method of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63163494A JP2812955B2 (en) | 1988-06-30 | 1988-06-30 | Manufacturing method of magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0214424A JPH0214424A (en) | 1990-01-18 |
| JP2812955B2 true JP2812955B2 (en) | 1998-10-22 |
Family
ID=15774932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63163494A Expired - Fee Related JP2812955B2 (en) | 1988-06-30 | 1988-06-30 | Manufacturing method of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2812955B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4112095A1 (en) * | 1991-04-12 | 1992-10-15 | Basf Magnetics Gmbh | METHOD FOR PRODUCING A MAGNETIC RECORDING CARRIER |
| DE4112094A1 (en) * | 1991-04-12 | 1992-10-22 | Basf Magnetics Gmbh | METHOD FOR PRODUCING A MAGNETIC RECORDING CARRIER |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57150140A (en) * | 1981-03-13 | 1982-09-16 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture for magnetic recording medium |
| JPS5887269A (en) * | 1981-11-20 | 1983-05-25 | Matsushita Electric Ind Co Ltd | Vapor source device |
| JPS5920468A (en) * | 1982-07-27 | 1984-02-02 | Matsushita Electric Ind Co Ltd | Vapor deposition method |
-
1988
- 1988-06-30 JP JP63163494A patent/JP2812955B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0214424A (en) | 1990-01-18 |
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