JPH1129853A - Manufacturing device and method of magnetic recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing device and manufacturing method for a thin film type magnetic recording medium which enhances the orientation property of magnetic particles and realizes higher density recording. SOLUTION: The angle of incidence on a substrate surface of ferromagnetic metallic particles is controlled by arranging masks 12, 13 between a base material and an evaporation source, and simultaneously, the scattering of the ferromagnetic metallic particles is prevented by arranging slit plates 14, 15 when the magnetic recording medium, which is constituted by making the ferromagnetic metallic particles emitted from the evaporation source slantly incident on the continuously travelling base material to deposit the particles thereto, thereby forming the ferromagnetic metallic thin film, is manufacture.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for manufacturing a magnetic recording medium in which a ferromagnetic metal thin film serving as a magnetic layer is formed on a substrate in a vacuum.

[0002]

2. Description of the Related Art Conventionally, as a magnetic recording medium, a powder magnetic material such as an oxide magnetic powder or an alloy magnetic powder is coated on a base material by using a vinyl chloride-vinyl acetate copolymer, a polyester resin, a polyurethane resin or the like. Produced by applying and drying a magnetic paint dispersed in an organic binder,
So-called coating type magnetic recording media are widely used.

On the other hand, as the demand for high-density recording has increased, ferromagnetic metal materials such as Co-Ni, Co-Cr and Co have been directly deposited on a substrate by plating or vacuum thin film forming means. A so-called thin film type magnetic recording medium has been proposed and attracts attention.

As means for forming a vacuum thin film, a vacuum evaporation method,
There are a sputtering method, an ion plating method and the like.

This thin film type magnetic recording medium is excellent in coercive force, residual magnetization, squareness ratio, etc., is excellent in electromagnetic conversion characteristics at a short wavelength, and has a very thin magnetic layer. Small thickness loss during reproduction. Further, since there is no need to mix a binder, which is a non-magnetic material, into the magnetic layer, there are many advantages such as a high packing density of the magnetic material and a large magnetization.

Further, in order to improve the electromagnetic conversion characteristics of the thin-film magnetic recording medium and obtain a larger output, the magnetic layer of the thin-film magnetic recording medium is formed by using a ferromagnetic metal material when forming the magnetic layer. So-called oblique deposition, in which light is obliquely incident on a material and is deposited, has been proposed.
mm video tape recorders (hereinafter abbreviated as VTRs) and magnetic tapes for consumer digital VTRs.

[0007]

In order to achieve high-density recording, an even higher reproduction output and a lower noise medium are required. In order to satisfy these requirements in the oblique deposition tape, it is necessary to make the magnetic distribution of the magnetic recording medium more uniform.

Accordingly, the present invention has been proposed in view of the above circumstances, and has an apparatus and a method for manufacturing a thin film type magnetic recording medium which enhances the orientation of magnetic particles and realizes higher density recording. The purpose is to provide.

[0009]

According to the present invention, there is provided an apparatus for producing a magnetic recording medium, comprising: a ferromagnetic metal particle emitted from an evaporation source;
In a magnetic recording medium manufacturing apparatus for manufacturing a magnetic recording medium in which a ferromagnetic metal thin film is formed on a substrate by being obliquely incident on and adhere to a continuously moving substrate, A first mask disposed between the material and the evaporation source; and a second mask disposed between the base material and the evaporation source.
A mask, a first slit plate disposed between the first mask and the evaporation source, and a second slit plate disposed between the second mask and the evaporation source. Prepare.

Then, the ferromagnetic metal particles are made to enter the surface of the base material through a slit formed between the first slit plate and the second slit plate, and are strongly applied to the base material. It is characterized in that a magnetic metal thin film is formed.

The first mask controls the minimum angle of incidence of the ferromagnetic metal particles on the substrate surface. The second mask controls the maximum angle of incidence of the ferromagnetic metal particles on the substrate surface. The first slit plate prevents scattering of the ferromagnetic metal particles. The second slit plate prevents scattering of the ferromagnetic metal particles.

In the magnetic recording medium manufacturing apparatus of the present invention, a heater for heating the first slit plate and the second slit plate may be provided.

Further, the method of manufacturing a magnetic recording medium according to the present invention is characterized in that ferromagnetic metal particles emitted from an evaporation source are obliquely incident on a continuously moving substrate and adhered thereto. When manufacturing a magnetic recording medium having a ferromagnetic metal thin film formed on a material, a first mask is provided between the base and the evaporation source, and a second mask is provided between the base and the evaporation source. , A first slit plate between the first mask and the evaporation source, and a second slit plate between the second mask and the evaporation source.

Then, the ferromagnetic metal particles are made incident on the surface of the base material through a slit formed between the first slit plate and the second slit plate, and the ferromagnetic metal particles are formed on the base material. It is characterized in that a metal thin film is formed.

The minimum incident angle of the ferromagnetic metal particles on the substrate surface is controlled by the first mask. The second mask controls the maximum incident angle of the ferromagnetic metal particles on the substrate surface. The scattering of the ferromagnetic metal particles is prevented by the first slit plate. The scattering of the ferromagnetic metal particles is prevented by the second slit plate.

In the method of manufacturing a magnetic recording medium according to the present invention, the first slit plate and the second slit plate may be heated when forming the ferromagnetic metal thin film on the substrate. .

[0017]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 shows an apparatus for manufacturing a magnetic recording medium according to the present invention.

This manufacturing apparatus includes an exhaust port 2 in a vacuum chamber 1.
, A feed roll 3, a take-up roll 4, a drum 6,
Guide rolls 7, 8, crucible 9, electron gun 11, masks 12, 13, slit plates 14, 15, heater 1
7 and an oxygen gas inlet 18.

The exhaust ports 2 are provided at upper and lower portions of the vacuum chamber 1, respectively, and the inside of the vacuum chamber 1 is evacuated to a predetermined degree of vacuum by an independent exhaust device (not shown).

The feed roll 3 rotates at a constant speed in a counterclockwise direction in the figure, and the winding roll 4 rotates at a constant speed in a counterclockwise direction in the figure. The tape-shaped base material 5 sequentially runs from the feed roll 3 to the take-up roll 4. The feed roll 3 and the take-up roll 4 each have a cylindrical shape having substantially the same length as the width of the substrate 5.

The drum 6 is provided in the middle of the travel of the substrate 5 from the feed roll 3 to the take-up roll 4 so as to pull the substrate 5 downward in the drawing. The drum 6 rotates clockwise in the figure, and the substrate 5 runs along the peripheral surface of the drum 6. The diameter of the drum 6 is larger than the diameters of the feed roll 3 and the take-up roll 4, and has a cylindrical shape having a length substantially equal to the width of the substrate 5.

The guide rolls 7 and 8 are provided between the feed roll 3 and the drum 6 and between the drum 6 and the take-up roll 4 respectively.
It is arranged between and. A predetermined tension is applied to the base material 5 that is sequentially sent out from the feed roll 3, passes through the peripheral surface of the drum 6, and is taken up by the take-up roll 4, and the base material 5 runs smoothly.

The crucible 9 is provided below the drum 6,
The ferromagnetic metal material 10 is filled in the crucible 9.

The electron gun 11 is disposed on a side wall of the vacuum chamber 1 and is mounted at a position where an electron beam emitted from the electron gun 11 is irradiated on the ferromagnetic metal material 10 in the crucible 9. Then, the ferromagnetic metal material 10 in the crucible 9 is heated by the electron beam emitted from the electron gun 11,
It evaporates as ferromagnetic metal particles.

The mask 12 is disposed between the drum 6 and the crucible 9 and close to the drum 6, and covers a predetermined area of the substrate 5 running at a constant speed on the peripheral surface of the drum 6. This mask 12 is made of a ferromagnetic metal particle base material 5 as shown in FIG.
Is controlled at the minimum incident angle θ ₁ on the surface.

The mask 13 is located upstream of the mask 12 in the direction of movement of the substrate 5, is disposed between the drum 6 and the crucible 9 and is close to the drum 6, and has a peripheral surface of the drum 6. It covers a predetermined area of the base material 5 running at a constant speed. This mask 13 is made of a ferromagnetic metal particle base material 5 as shown in FIG.
Is controlled at the maximum incident angle θ ₂ on the surface.

The ferromagnetic metal particles are applied to the masks 12 and 13.
As a result, the light is incident on the substrate 5 within a predetermined angle range, and is adhered obliquely.

However, if only the mask is used, wraparound occurs due to scattering of the ferromagnetic metal particles, and uniform orientation cannot be achieved.

Therefore, in the present invention, by disposing the slit plates 14, 15 between the crucible 9 and the substrate 5, scattering of the ferromagnetic metal particles is prevented, and the orientation is made more uniform.

As shown in FIG. 2, the slit plate 14 is located at a position connecting the peripheral portion of the crucible 9 and the end of the mask 12, and is preferably disposed close to the crucible 9 and the mask 12.

As shown in FIG. 2, the slit plate 15 is located at a position connecting the peripheral portion of the crucible 9 and the end of the mask 13, and is preferably disposed close to the crucible 9 and the mask 13.

A slit 16 is formed between the slit plate 14 and the slit plate 15. The ferromagnetic metal particles emitted from the crucible 9
The light is incident on the surface of the base material 5 through 6.

The slit plates 14 and 15 prevent the scattering of the ferromagnetic metal particles and prevent the ferromagnetic metal particles from entering the surface of the substrate 5 when the ferromagnetic metal particles enter the surface of the substrate 5. By preventing the ferromagnetic metal particles from wrapping around when the ferromagnetic metal particles enter the surface of the substrate 5, the uniformity of the magnetic orientation of the ferromagnetic metal thin film can be improved.

Further, as shown in FIG.
And an angle between a line connecting the peripheral portion of the crucible 9 and the end of the mask 12 or an angle between a slit plate 15 and a line connecting the peripheral portion of the crucible 9 and the end of the mask 13 (hereinafter, referred to as an angle).
When the dispersion angle is 10 ° or less, scattering of the ferromagnetic metal particles can be sufficiently prevented. If the dispersion angle is larger than 10 °, scattering of the ferromagnetic metal particles cannot be sufficiently prevented.

In the present invention, a heater 17 and an oxygen gas inlet 18 may be provided.

The heater 17 is provided near the slit plate, and heats the slit plates 14 and 15 when forming a ferromagnetic metal thin film on the substrate 5. When the slit plates 14 and 15 are heated, the ferromagnetic metal particles
4, 15 can be prevented.

The oxygen gas inlet 18 is provided through the side wall of the vacuum chamber 1. At the time of vapor deposition, oxygen gas is supplied to the surface of the substrate 5 through the oxygen gas inlet 18. Thereby, the magnetic characteristics, durability, and weather resistance of the magnetic layer are improved.

In this vacuum deposition, the inside of the vacuum chamber 1 is evacuated,
This is performed in a state where the pressure is maintained at a predetermined value. The film-shaped base material 5 is sequentially fed from the feed roll 3, passes through the peripheral surface of the drum 6, and travels so as to be wound on the winding roll 4. At this time, a predetermined tension is applied to the base material 5 by the guide rolls 7 and 8, and a stable running state is maintained.

On the other hand, the ferromagnetic metal material 1 for forming the magnetic layer
0 is filled in the crucible 9 near the drum 6. An electron beam is emitted from the electron gun 11 toward the ferromagnetic metal material 10 in the crucible 9. The ferromagnetic metal material 10 is heated by an electron beam and evaporates as ferromagnetic metal particles.

The evaporated ferromagnetic metal particles are supplied to the slit plate 1
It passes through a slit 16 formed by 4 and 15.

At this time, the slit plates 14 and 15 may be heated. By heating the slit plate, adhesion of the ferromagnetic metal particles to the slit plates 14 and 15 can be prevented.

The ferromagnetic metal particles that have passed through the slit 16 adhere to the surface of the substrate 5 that has passed through the peripheral surface of the drum 6 to form a ferromagnetic metal thin film. At this time, the ferromagnetic metal particles are incident on the surface of the substrate 5 within a predetermined angle range by the masks 12 and 13 and are obliquely deposited.

The surface of the substrate 5 passing through the peripheral surface of the drum 6 is covered with a predetermined range by the masks 12 and 13, and the ferromagnetic metal particles adhere only to the areas exposed from the masks 12 and 13. . At the point when the substrate 5 passing through the peripheral surface of the drum 6 is exposed from the mask 13, the application of the ferromagnetic metal particles to the surface of the substrate 5 starts. At this time, the angle of incidence of the ferromagnetic metal particles on the surface of the substrate 5 becomes maximum, and the angle of incidence becomes smaller as the substrate 5 moves. Then, when the substrate 5 is covered with the mask 12 again, the deposition is completed. At this time, the angle of incidence of the ferromagnetic metal particles on the surface of the substrate 5 is minimized.

At the time of forming the ferromagnetic metal thin film, oxygen gas may be supplied to the surface of the substrate 5. By supplying oxygen gas, the magnetic properties and durability of the magnetic layer are improved.

In the present invention, the base material 5 of the ferromagnetic metal particles is used.
It is preferable that the minimum incident angle on the surface be 30 ° or more and 50 ° or less.

If the minimum angle of incidence of the ferromagnetic metal particles on the substrate 5 is less than 30 °, sufficient coercive force and reproduction output cannot be obtained. If the minimum angle of incidence of the ferromagnetic metal particles on the substrate 5 is 50 ° or more, it is necessary to reduce the tape line speed for obtaining a ferromagnetic metal thin film with a predetermined thickness, resulting in poor production efficiency. Become.

The present invention is also applicable to a manufacturing apparatus and a manufacturing method of a magnetic recording medium in which a magnetic layer is formed by causing a ferromagnetic metal particle to be perpendicularly incident on the surface of a substrate and to be deposited.

The magnetic recording medium manufactured according to the present invention comprises:
As shown in FIG. 4, it has a base material 101 and a magnetic layer 102 formed on the base material 101.

As the substrate 101, a known substrate usually used for this type of magnetic recording medium can be used.
For example, polyethylene terephthalate, polyesters such as polyethylene 2,6-naphthalate, polyethylene, polyolefins such as polypropylene, cellulose derivatives such as cellulose triacetate, plastics such as polycarbonate, polyimide, and polyamideimide, and metals such as aluminum are deposited. Plastics and the like.

The magnetic layer 102 is formed by depositing a ferromagnetic metal material on the substrate by vacuum thin film forming means.

As the ferromagnetic metal material, those usually used for thin-film magnetic recording media can be used. For example, ferromagnetic metals such as Fe, Co and Ni, Fe-Co,
Co-Ni, Fe-Co-Ni, Fe-Cu, Co-A
u, Co-Pt, Fe-Cr, Co-Cr, Ni-C
r, Fe-Co-Cr, Co-Ni-Cr, Fe-Co
-Ni-Cr and other ferromagnetic alloys.

These may be a single layer film or a multilayer film. Furthermore, between the substrate and the metal ferromagnetic metal thin film, or in the case of a multilayer film, the adhesion between the layers is improved,
An underlayer or an intermediate layer may be provided for controlling coercive force and the like. Further, for example, the vicinity of the surface of the magnetic layer may be an oxide for improving corrosion resistance and the like.

Means for forming a magnetic layer according to the present invention include:
The vacuum evaporation method of heating and evaporating the ferromagnetic material under vacuum and depositing it on the base material is preferable, but in addition, the ion plating method of evaporating the ferromagnetic metal material in a discharge, mainly containing argon A so-called PVD technique such as a sputtering method in which atoms on the target surface are beaten by argon ions generated by glow discharge in an atmosphere.

Further, as the thickness of the magnetic layer increases, the reproduction output tends to increase. However, if the thickness is more than の of the recording wavelength, the reproduction output cannot be further increased.

Further, if the magnetic layer is too thick, the productivity of the magnetic recording medium will be deteriorated. Therefore, the thickness of the magnetic layer is preferably 100 nm to 250 nm.

A protective film layer may be formed on the magnetic layer.

As the material for the protective film layer, those generally used as materials for the protective film layer can be used.
For example, carbon, CrO ₂ , Al ₂ O ₃ , BN, Co oxide, MgO, SiO ₂ , Si ₃ O ₄ , SiN _x , SiC,
SiN _x —SiO ₂ , ZrO ₂ , TiO ₂ , TiC, and the like. These may be a single layer film, a multilayer film, or a composite film.

An undercoat layer may be provided on one side of the substrate. Thereby, the adhesive strength of the magnetic layer is improved. The present invention may be applied to a magnetic recording medium in which a magnetic layer having the above configuration is formed on the undercoat layer, or a magnetic recording medium in which a back coat layer is formed on the other surface.

Of course, the configuration of the magnetic recording medium is not limited to this, and an undercoat layer may be formed on the base material if necessary, or the surface of the base material on which the ferromagnetic metal thin film is formed. A back coat layer may be provided on the opposite side. Further, a top coat layer made of a lubricant or a rust inhibitor may be formed on the surface of the ferromagnetic metal thin film or the protective film layer.

[0061]

EXAMPLES Examples of the present invention will be described below based on specific experimental results.

First, Examples and Comparative Examples relating to the slit plate will be described.

Example 1 First, an undercoat layer was formed on a substrate. As the substrate, a polyethylene terephthalate film having a thickness of 10 μm and a width of 150 mm was used. The undercoat layer was formed by applying a water-soluble latex containing an acrylic ester as a main component on the substrate so that the density became 10 ⁷ / mm ² .

Next, a magnetic layer was formed on the undercoat layer. The magnetic layer is vacuum-deposited by using Co at a tape line speed of 30 m / min, an oxygen introduction amount of 3.3 × 10 ⁻⁶ m ³ / min, and a vacuum degree of 7 × 10 ⁻² Pa during deposition. It was formed by this.

At this time, the minimum incident angle of the particles was set to 45 ° and the maximum incident angle was set to 90 ° using a mask, and a slit plate was provided to prevent scattering of the particles.

Then, a carbon film was formed on the magnetic layer. The carbon film has a thickness of 10 by a sputtering method.
nm.

A back coat layer was formed on the surface of the substrate opposite to the surface on which the magnetic layer was formed. The back coat layer is
The paint containing carbon and urethane resin has a dry thickness of 0.
It was applied to a thickness of 6 μm and dried.

Further, perfluoropolyether was applied to the surface of the carbon film to form a lubricating layer.

The film on which the magnetic layer and the like were formed was cut into a width of 8 mm to prepare a sample tape.

Comparative Example First, an undercoat layer was formed on a substrate. As the substrate, a polyethylene terephthalate film having a thickness of 10 μm and a width of 150 mm was used. The undercoat layer is
It was formed by applying a water-soluble latex containing an acrylic ester as a main component on a substrate so as to have a density of 10 ⁷ / mm ² .

Next, a magnetic layer was formed on the undercoat layer. The magnetic layer is vacuum-deposited by using Co at a tape line speed of 30 m / min, an oxygen introduction amount of 3.3 × 10 ⁻⁶ m ³ / min, and a vacuum degree of 7 × 10 ⁻² Pa during deposition. It was formed by this.

At this time, the minimum incident angle of the particles was set to 45 ° and the maximum incident angle was set to 90 ° by using a mask.

Then, a carbon film was formed on the magnetic layer. The carbon film has a thickness of 10 by a sputtering method.
nm.

A back coat layer was formed on the surface of the substrate opposite to the surface on which the magnetic layer was formed. The back coat layer is
The paint containing carbon and urethane resin has a dry thickness of 0.
It was applied to a thickness of 6 μm and dried.

Further, a perfluoropolyether was applied to the surface of the carbon film to form a lubricating layer.

A film on which a magnetic layer and the like were formed was cut into a width of 8 mm to prepare a sample tape.

Next, Examples 2 to 4 relating to the dispersion angle of the slit plate will be described.

Example 2 First, an undercoat layer was formed on a substrate. As the substrate, a polyethylene terephthalate film having a thickness of 10 μm and a width of 15 mm was used. The undercoat layer is
It was formed by applying a water-soluble latex containing an acrylic ester as a main component on a substrate so as to have a density of 10 ⁷ / mm ² .

Next, a magnetic layer was formed on the undercoat layer. The magnetic layer is vacuum-deposited by using Co at a tape line speed of 30 m / min, an oxygen introduction amount of 3.3 × 10 ⁻⁶ m ³ / min, and a vacuum degree of 7 × 10 ⁻² Pa during deposition. It was formed by this.

At this time, the minimum incident angle of the particles was set to 45 ° and the maximum incident angle to 90 ° by the mask, and scattering of the particles was prevented by the slit plate.

At this time, the dispersion angle of the slit plate was set to 5 °.

Then, a carbon film was formed on the magnetic layer. The carbon film has a thickness of 10 by a sputtering method.
nm.

A back coat layer was formed on the surface of the substrate opposite to the surface on which the magnetic layer was formed. The back coat layer is
The paint containing carbon and urethane resin has a dry thickness of 0.
It was applied to a thickness of 6 μm and dried.

Further, perfluoropolyether was applied to the surface of the carbon film to form a lubricating layer.

A film on which a magnetic layer and the like were formed was cut into a width of 8 mm to prepare a sample tape.

<Example 3> A sample tape was produced in the same manner as in Example 2 except that the dispersion angle of the slit plate was 10 °.

Example 4 A sample tape was prepared in the same manner as in Example 2 except that the dispersion angle of the slit plate was set to 20 °.

Next, Examples 5 to 10 relating to the minimum angle of incidence of the ferromagnetic metal particles on the substrate surface will be described.

Example 5 First, an undercoat layer was formed on a substrate. As the substrate, a polyethylene terephthalate film having a thickness of 1 μm and a width of 15 mm was used. The undercoat layer was formed by applying a water-soluble latex containing an acrylic ester as a main component on the substrate so that the density became 10 ⁷ / mm ² .

Next, a magnetic layer was formed on the undercoat layer. The magnetic layer is made of Co and has an oxygen introduction amount of 3.3 × 10 ⁻⁶ m ^3.
/ Min, and a vacuum degree of 7 × 10 ⁻² Pa at the time of vapor deposition to perform vacuum vapor deposition.

At this time, the minimum incident angle of the particles was set to 10 ° and the maximum incident angle was set to 90 ° using the mask, and scattering of the particles was prevented by the slit plate.

Then, a carbon film was formed on the magnetic layer. The carbon film has a thickness of 10 by a sputtering method.
nm.

A back coat layer was formed on the surface of the substrate opposite to the surface on which the magnetic layer was formed. The back coat layer is
The paint containing carbon and urethane resin has a dry thickness of 0.
It was applied to a thickness of 6 μm and dried.

Further, perfluoropolyether was applied to the surface of the carbon film to form a lubricating layer.

A film on which a magnetic layer and the like were formed was cut into a width of 8 mm to prepare a sample tape.

Example 6 A sample tape was prepared in the same manner as in Example 5, except that the minimum incident angle of the particles was 20 °.

Example 7 A sample tape was prepared in the same manner as in Example 5, except that the minimum incident angle of the particles was 30 °.

Example 8 A sample tape was produced in the same manner as in Example 5, except that the minimum incident angle of the particles was 40 °.

<Example 9> A sample tape was prepared in the same manner as in Example 5, except that the minimum incident angle of the particles was changed to 50 °.

Example 10 A sample tape was prepared in the same manner as in Example 5, except that the minimum incident angle of the particles was 60 °.

Characteristic Evaluation The sample tape prepared as described above
The electromagnetic conversion characteristics were evaluated.

In the deposition of the magnetic thin film, the sample tape of Example 1 provided with the slit plate and the sample tape of the comparative example not provided with the slit plate had saturation magnetization, coercive force, squareness ratio, residual magnetization,
Each characteristic of the reproduction output was evaluated.

The reproduction output was obtained by recording an information signal at a recording wavelength of 0.5 μm on each sample tape using a modified 8 mm VTR and using the sample tape of Comparative Example 2 as a reference.

Table 1 shows the characteristic evaluation results of Example 1 and Comparative Example.
Shown in

[0105]

[Table 1]

It was found that Example 1 in which the slit plate was provided was superior in all characteristics as compared with Comparative Example in which no slit plate was provided.

By providing not only a mask but also a slit plate, it is possible to prevent sneaking by scattering of ferromagnetic metal particles incident on the surface of the base material, to enhance the uniformity of magnetic orientation of the magnetic recording medium, and to obtain excellent characteristics. It turned out to be obtained.

The coercive force and reproduction output characteristics of the sample tapes of Examples 2 to 4 in which the dispersion angle of the slit plate was changed were evaluated.

The reproduction output was obtained by recording an information signal at a recording wavelength of 0.5 μm on each sample tape using a modified 8 mm VTR, and measuring the sample tape of Example 4 as a reference.

Table 2 shows the characteristic evaluation results of Examples 2 to 4.
Shown in

[0111]

[Table 2]

It was found that when the dispersion angle was 10 ° or less, excellent characteristics were obtained, but when the dispersion angle was 20 °, the characteristics were inferior.

Therefore, when the dispersion angle is less than 10 °, the scattering of the ferromagnetic metal particles can be sufficiently prevented. However, when the dispersion angle is more than 10 °, the effect of preventing the scattering of the ferromagnetic metal particles is not sufficient. It turned out to be enough.

With respect to the sample tapes of Examples 5 to 10 in which the minimum incident angle of the ferromagnetic metal particles to the substrate surface was changed, the characteristics of the coercive force, the reproduction output, and the line speed were evaluated.

The reproduction output was obtained by recording an information signal at a recording wavelength of 0.5 μm on each sample tape using a modified 8 mm VTR and measuring the sample tape of Example 5 as a reference.

The line speed was 200 n for the ferromagnetic metal thin film.
The line speed required to obtain a thickness of m was measured.

Table 3 shows the characteristic evaluation results of Examples 5 to 10.

[0118]

[Table 3]

It has been found that as the minimum angle of incidence increases, the coercive force and reproduction output characteristics improve, but the line speed decreases.

Therefore, it was found that by setting the minimum incident angle to 30 ° or more and 50 ° or less, both magnetic characteristics and productivity can be achieved.

[0121]

According to the present invention, when a magnetic layer is formed by depositing ferromagnetic metal particles on a substrate, the angle of incidence of the ferromagnetic metal particles on the substrate is controlled by a mask, and the ferromagnetic metal particles are strengthened by a slit plate. The scattering of the magnetic metal particles can be prevented, and the uniformity of the orientation when the ferromagnetic metal particles enter the substrate can be improved.

Therefore, the magnetic uniformity of the magnetic layer is improved,
A magnetic recording medium having excellent electromagnetic conversion characteristics can be realized.

[Brief description of the drawings]

FIG. 1 is a diagram schematically showing an apparatus for manufacturing a magnetic recording medium according to the present invention.

FIG. 2 is a diagram illustrating a magnetic recording medium manufacturing apparatus according to the present invention.

FIG. 3 is a diagram illustrating a magnetic recording medium manufacturing apparatus according to the present invention.

FIG. 4 is a cross-sectional view showing a configuration of a magnetic recording medium manufactured according to the present invention.

[Explanation of symbols]

5 substrate, 6 guide roll, 9 crucible, 10
Ferromagnetic metal material, 12, 13 mask, 14, 15
Slit plate, 16 slits, 101 base material, 1
02 Magnetic layer

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁶ Identification code FI C23C 14/56 C23C 14/56 J G11B 5/85 G11B 5/85 Z

Claims (6)

[Claims] 1. A ferromagnetic metal thin film is formed on a substrate by causing obliquely incident ferromagnetic metal particles emitted from an evaporation source on a continuously moving substrate and depositing the same. A magnetic recording medium manufacturing apparatus for manufacturing a magnetic recording medium, wherein a first angle of incidence of the ferromagnetic metal particles on the surface of the base material is controlled between the base material and the evaporation source. A mask, a second mask disposed between the substrate and the evaporation source, the second mask controlling a maximum incident angle of the ferromagnetic metal particles on the surface of the substrate, the first mask and the evaporation source A first slit plate disposed between the second mask and the evaporation source to prevent scattering of the ferromagnetic metal particles, and disposed between the second mask and the evaporation source to prevent scattering of the ferromagnetic metal particles. A second slit plate, the first slit plate and the second slot A magnetic recording medium, wherein the ferromagnetic metal particles are incident on the surface of the base material through a slit formed between the base material and a ferromagnetic metal thin film on the base material. Manufacturing equipment. 2. The apparatus for manufacturing a magnetic recording medium according to claim 1, further comprising heating means for heating said first slit plate and said second slit plate. 3. The method according to claim 1, wherein the first mask has a minimum incident angle of the ferromagnetic metal particles on the substrate surface of 30 ° or more,
2. The apparatus for manufacturing a magnetic recording medium according to claim 1, wherein the angle is set to 50 [deg.] Or less. 4. A ferromagnetic metal thin film is formed on a substrate by causing obliquely incident ferromagnetic metal particles emitted from an evaporation source to a continuously moving substrate and applying the same. In producing a magnetic recording medium, a first mask for controlling the minimum incident angle of the ferromagnetic metal particles on the surface of the base material is disposed between the base material and the evaporation source, A second mask for controlling the maximum incident angle of the ferromagnetic metal particles on the surface of the substrate is provided between the evaporation source and the ferromagnetic metal particles. A first slit plate for preventing scattering of particles is provided, and a second slit plate for preventing scattering of the ferromagnetic metal particles is provided between the second mask and the evaporation source; The magnetic metal particles are mixed with the first slit plate and the second slit plate.
A ferromagnetic metal thin film formed on the substrate by making the light incident on the surface of the substrate via a slit formed between the substrate and the slit plate. 5. The magnetic recording medium according to claim 4, wherein the first slit plate and the second slit plate are heated when the ferromagnetic metal thin film is formed on the base material. Production method. 6. When the ferromagnetic metal particles are incident on the substrate surface, the minimum incident angle of the ferromagnetic metal particles on the substrate surface is set to 30 ° or more by the first mask.
5. The method for manufacturing a magnetic recording medium according to claim 4, wherein the angle is 0 [deg.] Or less.