JP2782288B2 - 電気抵抗材料 - Google Patents
電気抵抗材料Info
- Publication number
- JP2782288B2 JP2782288B2 JP3176146A JP17614691A JP2782288B2 JP 2782288 B2 JP2782288 B2 JP 2782288B2 JP 3176146 A JP3176146 A JP 3176146A JP 17614691 A JP17614691 A JP 17614691A JP 2782288 B2 JP2782288 B2 JP 2782288B2
- Authority
- JP
- Japan
- Prior art keywords
- atomic
- zirconium
- resistance
- concentration
- electric resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000463 material Substances 0.000 title claims description 23
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 37
- 229910052726 zirconium Inorganic materials 0.000 claims description 37
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 24
- 229910052760 oxygen Inorganic materials 0.000 claims description 24
- 239000001301 oxygen Substances 0.000 claims description 24
- 239000010409 thin film Substances 0.000 claims description 20
- 239000011651 chromium Substances 0.000 claims description 14
- 229910052782 aluminium Inorganic materials 0.000 claims description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 12
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 11
- 229910052796 boron Inorganic materials 0.000 claims description 11
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 9
- 229910052804 chromium Inorganic materials 0.000 claims description 9
- 229910002059 quaternary alloy Inorganic materials 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 2
- 241000723368 Conium Species 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 24
- 229910002058 ternary alloy Inorganic materials 0.000 description 18
- 239000010408 film Substances 0.000 description 12
- 239000000203 mixture Substances 0.000 description 12
- 238000007651 thermal printing Methods 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 230000007423 decrease Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910000521 B alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 2
- 229910018540 Si C Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910007746 Zr—O Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 150000003482 tantalum compounds Chemical class 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/06—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material including means to minimise changes in resistance with changes in temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/006—Thin film resistors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3176146A JP2782288B2 (ja) | 1991-06-19 | 1991-06-19 | 電気抵抗材料 |
| TW080108053A TW223126B (enExample) | 1991-06-19 | 1991-10-12 | |
| US07/816,673 US5227231A (en) | 1991-06-19 | 1992-01-03 | Electrical resistive material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3176146A JP2782288B2 (ja) | 1991-06-19 | 1991-06-19 | 電気抵抗材料 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04370901A JPH04370901A (ja) | 1992-12-24 |
| JP2782288B2 true JP2782288B2 (ja) | 1998-07-30 |
Family
ID=16008469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3176146A Expired - Fee Related JP2782288B2 (ja) | 1991-06-19 | 1991-06-19 | 電気抵抗材料 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US5227231A (enExample) |
| JP (1) | JP2782288B2 (enExample) |
| TW (1) | TW223126B (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5367179A (en) * | 1990-04-25 | 1994-11-22 | Casio Computer Co., Ltd. | Thin-film transistor having electrodes made of aluminum, and an active matrix panel using same |
| IL122476A0 (en) * | 1997-12-07 | 1998-06-15 | Amt Ltd | Electrical heating elements and method for producing same |
| TWI426826B (zh) | 2009-11-02 | 2014-02-11 | Sunonwealth Electr Mach Ind Co | 燈具之驅動控制電路 |
| WO2015005934A1 (en) | 2013-07-12 | 2015-01-15 | Hewlett-Packard Development Company, L.P. | Thermal inkjet printhead stack with amorphous metal resistor |
| KR102239330B1 (ko) | 2019-06-12 | 2021-04-12 | 엘지전자 주식회사 | 제어된 산화막을 가지는 면상 발열체 및 그 제조방법 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62165302A (ja) * | 1986-01-16 | 1987-07-21 | 進工業株式会社 | 高抵抗材料 |
| EP0251036B1 (en) * | 1986-06-25 | 1991-05-08 | Kabushiki Kaisha Toshiba | Thermal head |
| JPH0287501A (ja) * | 1988-09-24 | 1990-03-28 | Susumu Kogyo Kk | 電気抵抗材料 |
-
1991
- 1991-06-19 JP JP3176146A patent/JP2782288B2/ja not_active Expired - Fee Related
- 1991-10-12 TW TW080108053A patent/TW223126B/zh not_active IP Right Cessation
-
1992
- 1992-01-03 US US07/816,673 patent/US5227231A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04370901A (ja) | 1992-12-24 |
| TW223126B (enExample) | 1994-05-01 |
| US5227231A (en) | 1993-07-13 |
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