JP2763412B2 - Liquid jet recording head, base for liquid jet recording head, and liquid jet recording apparatus - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention discharges a recording liquid,
The present invention relates to a liquid jet recording head that records an image such as a character using a discharged liquid. The present invention also relates to a substrate for a liquid jet recording head used for forming the head. Further, the present invention relates to a liquid jet recording apparatus including the head.

[0002]

2. Description of the Related Art Various types of liquid jet recording systems (hereinafter also referred to as "inkjet recording systems") have been proposed in the past. Among such proposals, the liquid jet recording systems described in, for example, U.S. Pat. No. 4,723,129 and U.S. Pat. No. 4,740,796 have recently attracted attention as typical ones. In short, this method discharges a recording liquid (hereinafter, also referred to as “ink”) using thermal energy, and performs recording with the discharged liquid. Such a liquid jet recording method has the advantages that high-density, high-definition, and high-quality recording can be performed at high speed, and that the head and apparatus can be relatively easily made compact relatively easily. Have.

As a head to which a liquid jet recording system utilizing this thermal energy is applied, a discharge port for discharging liquid, and a discharge port which communicates with the discharge port and is used for discharging liquid from the discharge port. A liquid passage having, as a part of the configuration, a heat acting portion that is a portion where heat energy acts on the liquid,
An electrothermal converter, which is provided corresponding to the liquid path and is a means for generating thermal energy used for discharging the liquid, is typical. The electrothermal transducer generally includes a pair of electrodes and a heat-generating resistor layer provided so as to be connected to the pair of electrodes and having a region (heat generating portion) that generates heat between the pair of electrodes. And An upper protective layer for protecting the electrothermal converter from the recording liquid is usually provided on the electrothermal converter. FIGS. 1A and 1B show an example of a liquid jet recording head base used to form such a liquid jet recording head.

FIG. 1A is a schematic plan view of a main portion of an example of a substrate for a liquid jet recording head (a part of the substrate is shown in a perspective view for explanation), and FIG. FIG. 2 is a schematic cross-sectional view of FIG. 1A cut along a portion indicated by a chain line XY.

1A and 1B, a substrate 101 for a liquid jet recording head comprises a support 105, a lower layer 106, a heating resistor layer 107, a pair of electrode layers 103, 1 and 2.
04, first upper protective layer 108, second upper protective layer 10
9, the third upper protective layer 110 is sequentially laminated. The portion of the heating resistance layer 107 between the electrodes 103 and 104 serves as the heat generating section 111. Each of these components will be described later in detail.

[0006] Such a base body 101 for a liquid jet recording head.
The material used to form the upper protective layer is appropriately selected depending on the required properties such as heat resistance, liquid resistance, thermal conductivity, and insulation. The main role of the first upper protective layer 108 is to maintain insulation between the electrode 103 and the electrode 104. The main role of the second upper protective layer is
Reinforcement of liquid resistance and mechanical strength. The main role of the third upper protective layer is a liquid permeation prevention property and a liquid resistance action. According to the respective required characteristics, the first upper protective layer is made of an inorganic insulating material, the second upper protective layer is made of an inorganic material (particularly, a metal material), and the third upper protective layer is made of an organic material. It is often formed using a material.

A liquid jet recording head having relatively high reliability has been manufactured using such a liquid jet recording head substrate, and a liquid jet recording apparatus having this liquid jet recording head has been commercialized. I have.

[0008]

However, as for the liquid jet recording apparatus, there is a social demand that the recording speed be further improved and the image quality of the recorded image be further improved. One of the ideal liquid jet recording heads that can satisfy such social demands basically has as many liquid ejection ports as possible and has a high density, and can withstand long-term use. You can say things.

However, in providing such a liquid jet recording head, the following items have emerged as problems to be solved. That is, when a liquid jet recording head having a large number of ejection ports arranged at high density is frequently used repeatedly or continuously used for a long time, an electrothermal transducer such as an electrode is gradually turned by the recording liquid. The problem is that it can be corroded.

[0010] This problem is that in the case of a head having a relatively small number of discharge ports and a disposition density thereof is not so high, it has not been regarded as a problem and can be compromised as such (a problem may occur). It is presumed that the number of locations was not so large and the likelihood of occurrence was not so high), but as the number of discharge ports was increased and the density was increased, it became difficult to neglect. In particular, a large number of high-density discharge ports are provided over the entire width of the recording region of the recording member on which recording is performed, and a large number of electrothermal transducers are densely arranged on the substrate corresponding to the large number of discharge ports. In a so-called full line type liquid jet recording head, this is a remarkable technical problem.

[0011]

SUMMARY OF THE INVENTION The main object of the present invention is to provide:
It is an object of the present invention to solve the above-mentioned technical problem, and to provide a liquid jet recording head which is excellent in durability and reliability even after frequent repetitive use or continuous use for a long time.

Another object of the present invention is to solve the above-mentioned technical problems and to improve reliability by devising an upper protective layer of a liquid jet recording head of a type in which ink is ejected using thermal energy. It is an object of the present invention to provide a liquid jet recording head which can be improved.

Still another object of the present invention is that it tends to appear in a liquid jet recording head in which a plurality of electrothermal transducers for generating thermal energy used for discharging liquid are arranged on a substrate at high density. An object of the present invention is to provide a liquid jet recording head which can solve the above-mentioned technical problem with a relatively simple structural device.

Another object of the present invention is to provide a large number of ejection ports for ejecting liquid over the entire width of a recording area of a recording member on which recording is to be performed. A liquid that can solve the above-mentioned technical problem that is more likely to be manifested in a full-line type liquid jet recording head in which a large number of electrothermal transducers are arranged on a substrate with a relatively simple structure. An object is to provide an ejection recording head.

Still another object of the present invention is to provide a liquid jet recording head substrate used for forming the head and a liquid jet recording apparatus including the head.

The present inventor has conducted detailed investigations and studies in order to solve these problems and achieve these objects. As a result, there is a liquid jet recording head in which the coverage with the upper protective layer is not always good at the step portion of the patterned electrode layer, or a defect such as a pinhole occurs in the upper protective layer. When used continuously for a long time, mobile ions such as sodium ions and chlorine ions contained in the recording liquid penetrate into the upper protective layer and reach the electrothermal converter such as electrodes through the upper protective layer. Finally, it has been found that corrosion is likely to occur in the electrothermal converter.

The present inventor has made further studies based on this point, and as a result, has obtained the following knowledge. That is, by including the ion exchanger in the upper protective layer covering the electrothermal transducer, the ion exchange reaction can be effectively applied to the liquid jet recording head, and as a result, sodium ions, chlorine ions, etc. Can be trapped in the upper protective layer.

The present inventors have tried to apply this knowledge to a liquid jet recording head. As a result, corrosion of an electrothermal transducer such as an electrode has been significantly reduced as compared with a conventional liquid jet recording head. Further, the obtained liquid jet recording head was mounted on the apparatus main body, and recording was performed by actually discharging liquid. As a result, it was found that the liquid jet recording head sufficiently achieves the above-mentioned object of the present invention.

Thus, the present invention has been completed. A liquid jet recording head according to the present invention includes an electrothermal transducer having a support, a heating resistor layer provided on the support, and an electrode electrically connected to the heating resistor layer; and an electrothermal transducer. An upper protective layer provided so as to cover the ion-exchanger,
A liquid path communicating with a discharge port for discharging liquid is provided on a substrate for a liquid jet recording head having, corresponding to a heat generating portion of the electrothermal transducer. .

The present invention further includes a substrate for a liquid jet recording head used to form the head and a liquid jet recording apparatus including the head.

[0021]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One preferred embodiment of the present invention will be described in detail with reference to the drawings.

In the substrate 101 for a liquid jet recording head shown in FIGS. 1A and 1B, reference numeral 105 denotes a support made of metal such as silicon, glass or ceramic. On the support 105, a lower layer 106 is provided for appropriately controlling the generated thermal energy to make the entire substrate uniform. This lower layer 106 is formed from an insulating material such as silicon oxide.

On the lower layer 106, a heating resistance layer 10 for generating thermal energy used for discharging liquid is provided.
7 are provided. As a material for forming the heating resistance layer 107, a material that generates desired heat when energized can be appropriately used. Specific examples of such materials include tantalum nitride, nichrome, silver-palladium alloy, silicon semiconductor, or hafnium, lanthanum, zirconium, titanium, tantalum, tungsten,
Examples thereof include metals such as molybdenum, niobium, chromium, and vanadium, alloys thereof, and borides thereof. The heating resistance layer 107 is formed by a sputtering method,
It can be formed by a gas phase reaction method such as a CVD method and a vapor deposition method.

On the heating resistor layer 107, a pair of electrode layers 10 for applying an electric signal to the heating resistor layer 107 is provided.
3 and 104 are provided. This pair of electrode layers 103
The heating resistance layer 107 located between the first and second layers 104 and 104 serves as a heat generating unit 111 that generates heat energy used for discharging the liquid. As a material for forming the electrode layers 103 and 104, many commonly used electrode materials can be used. Specifically, for example, Al, Ag,
Metals such as Au, Pt, and Cu can be given. This electrode layer can be formed by a gas phase reaction method such as a sputtering method, a CVD method, or an evaporation method.

The heating resistor layer 107 and the pair of electrode layers 1
03, 104 for the purpose of protecting the electrothermal converter,
Various upper protective layers are provided on the electrothermal converter.
The material used to form the upper protective layer is appropriately selected depending on the required properties such as heat resistance, liquid resistance, thermal conductivity, and insulation.

The main role of the first upper protective layer 108 is as follows.
As described above, the purpose is to maintain insulation between the electrodes 103 and 104. The first upper protective layer 108 is made of an inorganic insulating material such as an inorganic oxide such as SiO ₂ or an inorganic nitride such as Si ₃ N ₄ . The first upper protective layer 108 can be formed by a gas phase reaction method such as a sputtering method, a CVD method, or a vapor deposition method, or a liquid coating method.

The main role of the second upper protective layer 109 is as follows.
As described above, this is to provide reinforcement of liquid resistance and mechanical strength. The second upper protective layer 109 is sticky, has relatively excellent mechanical strength, and has an adhesive property to the first upper protective layer 108, for example, the first I of the periodic table such as Sc or Y.
Group IIa element, Group IVa element such as Ti, Zr, Hf, Group Va element such as V, Nb, Ta, Cr, M
Examples include Group VIa elements such as o and W, Group VIII elements such as Fe, Co, and Ni, alloys, borides, carbides, silicides, and nitrides of these metals. The second upper protective layer 109 is formed by a sputtering method, a CVD method,
It can be formed by a gas phase reaction method such as a vapor deposition method.

The main role of the third upper protective layer is, as described above, the liquid permeation prevention and the liquid resistance. In this embodiment,
The third upper protective layer 110 is formed using a material containing an inorganic ion exchanger and an organic material as a main component, that is, an organic material substantially containing an inorganic ion exchanger. As the base material containing the ion exchanger,
Organic materials are preferred over inorganic materials. The reason is that mobility of ions is higher in an organic material than in an inorganic material. This third upper protective layer 1
10 can be formed by a liquid coating method or the like.

The organic materials used here include, for example, silicone resin, fluorine resin, aromatic polyamide, addition polymerization type polyimide, polybenzimidazole, metal chelate polymer, titanate, epoxy resin, phthalate resin, thermosetting Phenolic resin, P-vinylphenol resin, siloc resin, triazine resin, BT resin (triazine resin / bismaleimide addition polymerization resin), polyxylylene resin and derivatives thereof. Further, polyimide isoindoloquinazolinedione (trade name: 'PIQ', manufactured by Hitachi Chemical Co., Ltd.), polyimide resin (trade name: 'PYRALIN', manufactured by DuPont), cyclized polybutadiene resin (trade name: 'JSR-CBR') ,
A photosensitive polyimide resin such as Nippon Synthetic Rubber Co., Ltd., and Photo Nice (trade name, manufactured by Toray Industries Co., Ltd.) is preferably used because it has particularly excellent high-precision fine workability.

As the ion exchanger, an inorganic ion exchanger is preferably used. The reason for being contained in the recording liquid and causing the above-described inconvenience is that most are inorganic mobile ions such as sodium ions and chlorine ions. As such an inorganic ion exchanger, 'IX
E ',' Grade IX-100 ',' Grade IXE '
-200 ',' grade IX-300 ',' grade IX-400 ',' grade IX-500 ',' grade IX-600 ',' grade IXE-70 '
0 ',' Grade IXE-800 ',' Grade IXE '
-900 ',' Grade IX-1000 ',' Grade IXE-1100 ',' Grade IX-120 '
0 ',' grade IXE-1300 '
Toa Gosei Chemical Industry Co., Ltd.). Among them, 'grade IXE-600', 'grade IXE-1200' and 'grade IXE-1300'
Is preferred.

Such an ion exchanger contains mobile ions such as sodium ions and chlorine ions which penetrate from the liquid flowing through the liquid path of the liquid jet recording head, by utilizing ion exchange reaction or the like to contain itself. It is considered that they have the effect of trapping in the protective layer and suppressing mobile ions from reaching the lower layer. And by this action, the corrosion of the electrothermal converter can be prevented.

Such an ion exchanger is contained in an upper protective layer containing 1 to 5 wt. %. 1 wt. %, The trapping action of the mobile ions becomes insufficient, and the mobile ions that cannot be completely trapped may reach the electrothermal converter and cause corrosion. 5 wt. %, It is segregated without being uniformly dispersed in the base material, thereby deteriorating properties such as hardness, strength, and adhesion, or lowering the photosensitivity when the base material has photosensitivity. This is because there are times.

The state in which the ion exchanger is contained in the material that is the main component is most preferably in a dispersed state. As a method for producing the same, a method in which the ion exchanger is dispersed in a solution and then cured in layers or a method in which the ion exchanger is dispersed in a solid by adding and solidifying the ion exchanger in a melting medium, and thereafter, an evaporation method or Although a method of forming a layer using a sputtering method or the like can be mentioned, the former manufacturing method is more preferable from the viewpoint of uniformity of dispersion in the layer of the ion exchanger and mass productivity.

In particular, when an upper protective layer made of a material containing an ion exchanger is used in the vicinity of a thermal energy generating portion of a liquid jet recording head in which thermal energy is used as energy used for discharging a liquid. Can make the effect of the present invention stand out. The reason is that the recording liquid, which is one of the causes of corrosion of the electrothermal transducer, is relatively hot near the thermal energy generating section, and mobile ions in the liquid penetrate and diffuse into the upper protective layer. This is because the trapping of mobile ions by the ion exchanger is facilitated.

The embodiment in which the third upper protective layer 110 is formed using an organic material containing an ion exchanger has been described above, but the present invention is not limited to this embodiment. That is, the present invention encompasses all materials in which at least a part of the upper protective layer provided to cover the electrothermal converter is made of a material containing an ion exchanger. For example, a head in which the first upper protective layer 108 is formed using an inorganic material containing an ion exchanger may be used.

In this case, for example, R _n Si (OH) _4-n , Si (OH) ₄ , H _n together with a vitreous forming agent or an organic binder composed of compounds such as P, B, Al, As, Zn and Ti. Si (OH) _4-n , (RO)
_n Silicon (OH) _{4-n and} other silicon compounds are dissolved in an organic solvent containing an alcohol as a main component, such as esters and ketones, and further an ion exchanger is dissolved therein, and then spin-coated, roll-coated, As an example, a manufacturing method such as forming an inorganic upper protective layer containing SiO ₂ as a main component by applying and baking by an application method such as dipping, spraying, or brush application is adopted.

Further, the layer structure of the upper protective layer and the material used to form them are not limited to the above-described embodiments. For example, the third upper protective layer 110 may be formed using an inorganic material containing an ion exchanger, or the first upper protective layer 108 may be formed as follows.
The present invention also includes a case where the electrode is formed using an organic material containing an ion exchanger. In addition, for example, in some cases, as an upper protective layer covering the electrothermal converter,
The present invention includes a mode in which only the first upper protective layer 108 formed using a material containing an ion exchanger is provided. However, the aspect described earlier is the most preferable in the present invention in terms of the functional balance of the layer structure and the like.

FIG. 2 is a schematic perspective view showing a main part of an example of a liquid jet recording head formed using the above-described base for a liquid jet recording head. A wall 200 of a liquid passage 201 is provided on a base 101 on which a heat-generating portion (hatched portion) of the electrothermal converter is arranged, and a top plate 205 is further provided thereon. The liquid is supplied from a liquid reservoir (not shown) to the liquid supply port 20.
6 to the common liquid chamber 204. Common liquid chamber 20
4 is supplied to the liquid passage 201 by a so-called capillary phenomenon.
Is formed at a discharge port 202 communicating with the liquid path 201, and is stably held. Then, when the heat generating portion of the electrothermal converter generates heat, the liquid on the heat generating portion is rapidly heated, bubbles are formed in the liquid in the liquid passage 201, and the liquid is discharged from the discharge port 202 based on the bubble. This figure shows a main part of a liquid jet recording head having, for example, 128 discharge ports provided at a high arrangement density of 8 / mm.

FIG. 3 is a schematic perspective view showing a main part of an example of a liquid jet recording apparatus provided with the liquid jet recording head shown in FIG.

In FIG. 3, reference numeral 320 denotes a removable cartridge type integrated recording liquid storage unit integrally provided with a plurality of ink ejection ports facing a recording surface of a recording paper (not shown) conveyed on a platen 324. This is a liquid jet recording head. Reference numeral 316 denotes a carriage on which the liquid jet recording head 320 is mounted. The carriage 316 is connected to a part of a drive belt 318 that transmits the driving force of the drive motor 317, and has two guide shafts 329A and 329B
Is slidable. Thus, the liquid jet recording head 320 can reciprocate over the entire width of the recording paper.

Reference numeral 326 denotes a recovery device for recovering and preventing liquid ejection failure from the liquid jet recording head 320, and is provided at a predetermined position in the moving range of the liquid jet recording head 320, for example, at a position facing the home position. . The recovery device 326 caps the ejection port of the liquid jet recording head 320 by the driving force of the motor 322 via the transmission mechanism 323. The cap 32 of this recovery device 326
In connection with the capping operation of the ejection port of the liquid ejection recording head 320 by 6A, suction of liquid from the ejection port by an appropriate suction means (not shown) provided in the recovery device 326,
Alternatively, liquid pressure feeding is performed by an appropriate pressurizing means (not shown) provided in a liquid supply path to the liquid jet recording head. Thus, a recovery process is performed in which the liquid is forcibly discharged from the discharge port and foreign substances such as thickened ink inside the discharge port are removed.

A blade 330 is disposed on the side surface of the recovery device 326 and is made of silicon rubber and serves as a wiping member. The blade 330 is held in a cantilever form by a blade holding member 330A, and the recovery device 32
As in the case of No. 6, it is operated by the motor 322 and the transmission mechanism 323 to enable engagement with the ejection port surface of the liquid jet recording head 320. Thus, for example, at an appropriate timing during the recording operation of the liquid jet recording head 320, or after a recovery process using the recovery device 326, the blade 330 is projected into the moving range of the liquid jet recording head 320, With the movement of the ejection recording head 320,
Condensation adhering to the ejection port surface of the liquid jet recording head 320,
Foreign substances such as wet or dust can be wiped off.

Recording paper conveying means of the liquid jet recording apparatus,
The driving of the carriage and the recovery device, the driving of the recording head, and the like are controlled based on commands and signals output from control means including a CPU in the apparatus main body, for example.

FIG. 4 is a schematic perspective view schematically showing a liquid jet recording apparatus equipped with a full-line type liquid jet recording head 32. In this drawing, reference numeral 65 denotes a transport belt for transporting a recording member such as paper. The transport belt 65 transports a recording member (not shown) as the transport roller 64 rotates. The lower surface of the liquid jet recording head 32 is an ejection port surface 31 in which a plurality of ejection ports are arranged corresponding to the entire width of the recording area of the recording member.

Embodiment 1 As shown in FIGS. 1A and 1B, a lower layer 106 (layer thickness: 5 μm) of SiO ₂ is formed on a support 105 made of a Si single crystal wafer by thermal oxidation. did. Next, sputtering is performed in a vacuum chamber with HfB ₂ (purity of 99.9% or more) as a target to form the lower layer 1.
HfB ₂ layer (layer thickness: 1
300 °). The conditions for this sputtering are:
It was as follows.

Sputtering conditions Target area: 8 inch φ High frequency power: 1 kW Support set temperature: 100 ° C. Film formation time: 10 minutes Base pressure: 1 × 10 ⁻⁴ Pa or less Sputtering gas: argon Sputtering gas pressure: 0.5 Pa A Ti layer (layer thickness: 50 °) serving as an adhesion layer (not shown) was formed on the HfB ₂ layer by electron beam evaporation. The conditions for this electron beam evaporation were as follows.

Electron beam deposition conditions Support set temperature: 150 ° C. Base pressure: 1 × 10 ⁻⁴ Pa or less (Controlled to have the above-mentioned layer thickness with a quartz crystal thickness gauge.) Subsequently, electrons were deposited on the Ti layer. Electrode layer 10 by beam evaporation
An Al layer (layer thickness: 5000 °) to be 3,104 was formed. The conditions for this electron beam evaporation were as follows.

Electron beam deposition conditions Support set temperature: 150 ° C. Base pressure: 1 × 10 ⁻⁴ Pa or less (Controlled to have the above-mentioned layer thickness with a quartz layer thickness gauge) Subsequently, _two layers of HfB and Ti The layer and the Al layer were patterned by photolithography as follows. First, a photoresist (trade name: OF) is placed on the Al layer.
PR800, manufactured by Tokyo Ohkasha Co., Ltd. in layers (layer thickness: 1.3 μm)
m) Coating, and exposure, development and baking were performed on the coating in a conventional manner. Next, a mixed solution of acetic acid, phosphoric acid, and nitric acid (acetic acid 9% by weight, phosphoric acid 73% by weight, nitric acid 2% by weight, balance 16% by weight) was used as an etching solution,
The l layer was etched. Thereafter, reactive etching of the HfB ₂ layer and the Ti layer was performed in a vacuum chamber, and the photoresist was removed to complete patterning (pattern width: 12 μm, number of patterns: 64).
The conditions of this reactive etching were as follows.

Reactive etching conditions High frequency power: 450 W Etching time: 5 minutes Base pressure: 1 × 10 ⁻³ Pa or less Etching gas: BCl ₃ etching gas pressure: 3 Pa In this manner, the HfB ₂ layer, the Ti layer, and the Al layer By performing patterning of HfB ₂ , the heating resistance layer 107 of HfB ₂ is formed.
And Ti adhesion layer (not shown) and Al electrode layer 103, 1
04 was formed. In this embodiment, the electrode layer 103 is used as a selection electrode, and the electrode layer 104 is used as a common electrode.

On the laminated structure of the thin films formed as described above, SiO ₂ (purity 99.9%
By carrying out sputtering with the above as a target, an SiO ₂ layer (layer thickness: 1.0 μm) as the first upper protective layer 108 was formed.

Next, Ta (purity 9) is placed in a vacuum chamber.
By performing sputtering using 9.9% or more as a target, a Ta layer (thickness: 0.3 μm) to be the second upper protective layer 109 was formed. Subsequently, reactive etching of the Ta layer was performed in a vacuum chamber, and FIG.
(A) and (b), a second upper protective layer 109 having a pattern covering the upper portion of the heat generating portion 111 was formed. The conditions of this reactive etching were as follows.

Reactive etching conditions High frequency power: 500 W Etching time: 10 minutes Base pressure: 1 × 10 ⁻³ Pa or less Etching gas: CF ₄ , O ₂ Etching gas pressure: 10 Pa or more Lamination of thin films formed as above Photosensitive polyimide (trade name: 'Photo Nice', manufactured by Toray) on the structure
3 wt. Of an inorganic ion exchanger (trade name: 'IXE', manufactured by Toa Gosei Chemical Industry Co., Ltd.). % Mixed material was applied in layers (layer thickness: 3 μm). This was exposed, developed and baked. The conditions of exposure, development and baking were as follows.

Exposure, development and baking conditions Pre-bake: 90 ° C., 30 minutes Exposure: UV rays 200 mJ / cm ² Development: Dedicated developer 25 ° C., 1 minute Post-bake: 140 ° C., 30 minutes, then 300 ° C., 60
In this way, the electrode layer 1 shown in FIGS.
A third upper protective layer 110 having a pattern covering the upper portions of the third and the third layers was formed. Thus, the manufacture of the substrate 101 for a liquid jet recording head according to the present embodiment was completed.

On the substrate 101 for the liquid jet recording head, a liquid path 201 communicating with the discharge port 202 and the common liquid chamber 20 are provided.
4 is formed using photolithography of a photosensitive resin layer (layer thickness: 50 μm), and a glass top plate is further formed thereon via an epoxy-based adhesive (not shown). By providing 1106, a liquid jet recording head schematically shown in FIG. 2 was obtained. This liquid jet recording head has 64 ejection ports corresponding to the above-mentioned heat generating portions. Reference numeral 206 denotes the common liquid chamber 204
Ink supply port to the

In the present embodiment, 100 liquid jet recording heads were manufactured in total.

Example 2 An inorganic ion exchanger (trade name: 'IXE', manufactured by Toa Gosei Chemical Industry Co., Ltd.) was added in an amount of 3 wt. % Of OCD (trade name, manufactured by Tokyo Ohkasha Co., Ltd.) is applied to a thickness of 1 μm by spin coating (3000 rpm), and then baked at 450 ° C. for 30 minutes to form an ion exchanger containing SiO ₂ as a main component. Forming an inorganic material layer to be the first upper protective layer 108 containing, and a photosensitive polyimide containing no inorganic ion exchanger as a material of the third upper protective layer 110 (trade name: Photo Nice, Toray Industries, Inc.) )), Except that a substrate for a liquid jet recording head and a liquid jet recording head provided with the substrate were manufactured in the same manner as in Example 1 described above.

Also in this embodiment, a total of 100 liquid jet recording heads were manufactured.

COMPARATIVE EXAMPLE The material of the third upper protective layer 110 was the same as that of the above-described embodiment except that a photosensitive polyimide containing no inorganic ion exchanger (trade name: Photonice, manufactured by Toray Industries, Inc.) was used. In the same manner as in Example 1, a substrate for a liquid jet recording head and a liquid jet recording head provided with the substrate were manufactured.

Also in this comparative example, a total of 100 liquid jet recording heads were manufactured.

COMPARATIVE EXPERIMENTS Each of the 100 substrates for a liquid jet recording head obtained in Examples 1 and 2 and Comparative Example was inspected for the occurrence of electrode corrosion. As a result, the occurrence rate of corrosion was significantly reduced on average in Examples 1 and 2 as compared with the comparative example.

Further, each of the 100 liquid jet recording heads obtained in Examples 1 and 2 and the comparative example were mounted on the liquid jet recording apparatus main body shown in FIG. Recording was performed by discharging.

Composition of Recording Liquid Used CI Food Black: 3.0 wt. % (CI Food Black has one sodium ion
0 wt. % Included. That is, 0.3 wt. %included. ) Triethylene glycol: 10 wt. % Diethylene glycol: 20 wt. % Pure water: 67 wt. % As a result, the liquid jet recording heads according to Examples 1 and 2 exhibited superior recording quality as compared with the comparative example. This is thought to be mainly due to the fact that the reliability of the liquid jet recording heads according to the first and second embodiments was improved due to the decrease in the incidence of corrosion of the electrothermal transducer including the electrodes as described above. Can be

The present invention has an excellent effect in a recording head and a recording apparatus of a type in which ink is ejected using thermal energy.

The typical configuration and principle are described in, for example, US Pat. Nos. 4,723,129 and 4,740.
It is preferable to use the basic principle disclosed in the specification of Japanese Patent No. 796. This method can be applied to both the so-called on-demand type and the continuous type. In particular, in the case of the on-demand type, liquid (ink)
By applying at least one drive signal corresponding to the recorded information and providing a rapid temperature rise exceeding nucleate boiling, to the electrothermal transducer disposed corresponding to the sheet or the liquid path in which is held, This is effective because thermal energy is generated in the electrothermal transducer, and the film is boiled on the heat-acting surface of the recording head. As a result, bubbles in the liquid (ink) can be formed in one-to-one correspondence with the drive signal. The liquid (ink) is ejected through the ejection opening by the growth and contraction of the bubble to form at least one droplet. When the drive signal is formed into a pulse shape, the growth and shrinkage of the bubble are performed immediately and appropriately, so that the ejection of liquid (ink) having particularly excellent responsiveness can be achieved, which is more preferable. Examples of the drive signal in the form of a pulse include those described in U.S. Pat.
Suitable are those described in US Pat. No. 45,262. If the conditions described in U.S. Pat. No. 4,313,124 relating to the temperature rise rate of the heat acting surface are adopted, more excellent recording can be performed.

As the configuration of the recording head, in addition to the combination of a discharge port, a liquid path, and an electrothermal converter (a linear liquid flow path or a right-angled liquid flow path) as disclosed in the above-mentioned respective specifications, U.S. Pat. No. 4,558,333 and U.S. Pat.
A configuration using the specification of Japanese Patent No. 459600 is also included in the present invention. In addition, Japanese Unexamined Patent Publication (Kokai) No. 123670/1984 discloses a configuration in which a common slit is used as a discharge portion of an electrothermal converter for a plurality of electrothermal converters, and an aperture for absorbing pressure waves of thermal energy. The present invention is also effective as a configuration based on JP-A-59-138461 which discloses a configuration corresponding to a discharge unit.

Further, as a full-line type recording head having a length corresponding to the maximum recording medium width that can be recorded by the recording apparatus, the combination of a plurality of recording heads as disclosed in the above-mentioned specification makes the length longer. The present invention can exhibit the above-mentioned effects more effectively, although it may be either a configuration that satisfies the above requirements or a configuration as a single recording head formed integrally.

In addition, the print head is exchangeable with a print head of the chip type, which can be electrically connected to the main body of the apparatus or supplied with ink from the main body of the apparatus, or is integrated with the print head itself. The present invention is also effective when a cartridge-type recording head provided in a fixed manner is used.

It is preferable to add recovery means for the print head, preliminary auxiliary means, and the like provided as components of the printing apparatus of the present invention since the effects of the present invention can be further stabilized. To be more specific, a capping unit, a cleaning unit, a pressure or suction unit, a preheating unit using an electrothermal converter, another heating element, or a combination thereof, for the recording head. ,
Performing a preliminary ejection mode in which ejection is performed separately from printing is also effective for performing stable printing.

Further, the recording mode of the recording apparatus is not limited to the recording mode of only the mainstream color such as black, but may be a single recording head or a combination of plural recording heads. The present invention is also very effective for an apparatus provided with at least one of full colors by color mixture.

In the embodiments of the present invention described above, liquid ink is used. However, in the present invention, ink which is solid at room temperature or ink which is softened at room temperature is used. Can be used. In general, in the above-described ink jet device, the temperature of the ink itself is adjusted within a range of 30 ° C. or more and 70 ° C. or less to control the temperature so that the viscosity of the ink is in a stable ejection range. It is sufficient if the ink is in a liquid state.
In addition, positively prevent the temperature rise due to thermal energy by using the energy of the state change of the ink from the solid state to the liquid state, or use ink that solidifies in a standing state to prevent evaporation of the ink. In any case, heat energy is applied by heat energy, such as one in which ink is liquefied and ejected as an ink liquid by application of heat energy according to a recording signal, or one which already starts to solidify when reaching a recording medium. The use of an ink that liquefies for the first time is also applicable to the present invention. In such a case, as described in JP-A-54-56847 or JP-A-60-71260, the ink is held as a liquid or solid in a concave portion or through hole of a porous sheet, It is good also as a form which opposes an electrothermal transducer. In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

[0071]

As described above, according to the present invention, the ion exchange reaction can be effectively performed on the liquid jet recording head by including the ion exchanger in the upper protective layer covering the electrothermal transducer. It can be applied, and as a result, corrosion of an electrothermal converter such as an electrode can be significantly reduced. As a result, it is possible to provide a liquid jet recording head having excellent durability and reliability even after frequent repetitive use or continuous use for a long time. Further, it is possible to provide a liquid jet recording head base used for forming the head and a liquid jet recording apparatus including the head.

[Brief description of the drawings]

1A is a schematic plan view of a main part of an example of a substrate for a liquid jet recording head, and FIG. 1B is a schematic view of FIG. 1A cut along a portion indicated by a dashed line XY. It is sectional drawing.

FIG. 2 is a schematic perspective view showing a main part of an example of a liquid jet recording head formed using the above-described base for a liquid jet recording head.

FIG. 3 is a schematic perspective view illustrating a main part of an example of a liquid jet recording apparatus including the liquid jet recording head illustrated in FIG. 2;

FIG. 4 is a schematic perspective view schematically showing a liquid jet recording apparatus equipped with a full-line type liquid jet recording head.

[Explanation of symbols]

 Reference Signs List 101 Base for liquid jet recording head 103, 104 Electrode layer 105 Support 106 Lower layer 107 Heating resistance layer 108 First upper protective layer 109 Second upper protective layer 110 Third upper protective layer 111 Heat generating section 200 Liquid path Wall 201 Liquid path 202 Discharge port 204 Common liquid chamber 205 Top plate 206 Liquid supply port 316 Carriage 317 Drive motor 318 Drive belt 320 Liquid ejection recording head 322 Motor 323 Transmission mechanism 324 Platen 326A Cap 329 Guide shaft 330 Blade 330A Blade holding member

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁶ , DB name) B41J 2/05 B41J 2/16

Claims (20)

(57) [Claims] An electrothermal converter having a support, a heat-generating resistor layer provided on the support, and an electrode electrically connected to the heat-generating resistor layer, and an electrothermal converter covering the electrothermal converter. A liquid passage communicating with a discharge port for discharging a liquid corresponding to a heat generating portion of the electrothermal transducer on a substrate for a liquid jet recording head having an upper protective layer containing an ion exchanger. A liquid jet recording head, comprising: 2. The liquid jet recording head according to claim 1, wherein said ion exchanger is an inorganic ion exchanger. 3. The method according to claim 1, wherein the ion exchanger contains 1 to 5 wt. 2. The liquid jet recording head according to claim 1, wherein 4. The liquid jet recording head according to claim 1, wherein the ion exchanger is dispersed and contained in the upper protective layer. 5. The liquid jet recording head according to claim 1, wherein a base material of the upper protective layer containing the ion exchanger is an organic material. 6. The liquid jet recording head according to claim 1, wherein a base material of the upper protective layer containing the ion exchanger is an inorganic material. 7. The liquid jet recording head according to claim 1, wherein a lower layer is interposed between the support and the electrothermal transducer. 8. The liquid jet recording head according to claim 1, wherein the liquid contains movable ions. 9. The liquid jet recording head according to claim 8, wherein said movable ions are sodium ions. 10. The liquid jet recording head according to claim 8, wherein said movable ions are chlorine ions. 11. A liquid jet recording head according to claim 1, wherein said ejection port is a full line type in which a plurality of said ejection ports are provided over the entire width of a recording area of a recording member on which recording is performed by the liquid ejected from said ejection ports. . 12. An electrothermal converter having a support, a heat-generating resistor layer provided on the support, and an electrode electrically connected to the heat-generating resistor layer. A substrate for a liquid jet recording head, comprising: an upper protective layer provided with an ion exchanger. 13. The substrate for a liquid jet recording head according to claim 12, wherein the ion exchanger is an inorganic ion exchanger. 14. The method according to claim 1, wherein the ion exchanger contains 1 to 5 wt. The substrate for a liquid jet recording head according to claim 12, wherein 15. The substrate for a liquid jet recording head according to claim 12, wherein said ion exchanger is dispersed and contained in said upper protective layer. 16. The substrate for a liquid jet recording head according to claim 12, wherein the base material of the upper protective layer containing the ion exchanger is an organic material. 17. The substrate for a liquid jet recording head according to claim 12, wherein the base material of the upper protective layer containing the ion exchanger is an inorganic material. 18. The substrate for a liquid jet recording head according to claim 12, wherein a lower layer is interposed between the support and the electrothermal transducer. 19. An electrothermal converter having a support, a heat-generating resistor layer provided on the support, and an electrode electrically connected to the heat-generating resistor layer, and a cover for covering the electrothermal converter. A liquid passage communicating with a discharge port for discharging a liquid corresponding to a heat generating portion of the electrothermal transducer on a substrate for a liquid jet recording head having an upper protective layer containing an ion exchanger. A liquid jet recording apparatus comprising: a liquid jet recording head provided with a recording medium; and a transport unit for transporting a recording member on which recording is performed by the liquid discharged from the discharge port. 20. The liquid jet recording apparatus according to claim 19, wherein the liquid jet recording head is a full line type in which a plurality of the ejection ports are provided over the entire width of a recording area of the recording member.