JP2738876B2 - Information recording and / or reproducing apparatus and information recording carrier - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in a recording / reproducing apparatus to which a scanning tunnel microscope is applied.

[Conventional technology]

In recent years, a scanning tonnel microscope (hereinafter abbreviated as STM) capable of directly observing the electronic structure on and near the surface of a substance has been developed, and has been developed [G. Binnig et al., Helvetica Physica Acta, 55, 72].
6 (1982)] High resolution of real space images can be measured regardless of whether it is single crystal or amorphous, and it has the advantage that it can be observed at low power without damaging the medium due to current. Since it operates not only in ultra-high vacuum but also in air and in solution, and can be used for various materials, it is expected to be widely applied.

Recently, a recording / reproducing apparatus applying this STM [Japanese Unexamined Patent Publication No.
3-161552 and 63-161553] have also been developed.

These conventional recording / reproducing devices use a configuration as shown in FIG.

In these devices, a probe electrode (probe) 6 and a recording medium 8 that make the tunnel current constant while applying a DC voltage to the extent that a tunnel current flows to the recording medium 8 using a voltage applying device 5 are used. And the control of the distance to the vehicle. Then, by applying a pulse voltage to the recording medium 8 having a switching memory effect with respect to the electric characteristics at the recording position, a portion having a different electric resistance is locally created at the recording portion.

During reproduction, a current amplifier 7 is applied while applying a weak voltage.
The distance between the probe 6 and the recording layer is controlled to be constant using the servo circuit 3 and the three-dimensional drive mechanism 2. And XY scanning drive circuit 4
The three-dimensional drive mechanism 2 is used to scan the surface of the recording medium and probe the probe 6 so that the detected current is constant. The recorded information is reproduced from the position of the probe in the inside. These controls are performed by the microcomputer 1. The tunnel current starts to flow only when the probe electrode 6
Since the distance between the probe electrode 6 and the recording medium 8 is close to about 1 nm, the fine movement control portion between the probe electrode 6 and the recording medium 8 requires high-precision processing and production technology.

[Problems to be solved by the invention]

However, in the conventional recording / reproducing apparatus, the surface of the recording medium and the surface of the probe electrode were exposed to the atmosphere.
For this reason, in some cases, reproduction errors and S / N ratios are severely deteriorated due to changes in the characteristics of the recording medium surface and probe electrodes over time due to moisture and oxygen in the atmosphere, and the recording medium surface is damaged or stained by atmospheric dust. There is a possibility that an error may occur in recording and reproduction due to adhesion.

The present invention is an application of the above-mentioned prior art, which prevents deterioration of the surface of a recording medium and a probe electrode, maintains a highly accurate and highly reliable function, and is capable of recording and / or recording that can sufficiently cope with the advanced information society. Another object is to provide a reproducing apparatus and an information recording carrier.

[Means for solving the problem]

The present invention relates to an apparatus for recording and / or reproducing information on and from a recording medium, a probe for recording information on the recording medium and / or reproducing information from the recording medium, and information between the probe and the recording medium. A voltage applying means for applying a voltage for recording and / or reproduction; a sealing means for hermetically containing at least the probe and the recording medium; and a device main body holding the sealing means. The device main body and the sealing means are detachable from the device main body, and the device main body and the sealing means each have a contact electrode for electrically connecting the voltage applying means and at least one of the probe and the recording medium. The electrodes are arranged so as to be in contact with each other when the sealing means is attached to the apparatus main body, thereby achieving the above-mentioned objective information recording and / or reproducing apparatus. That.

Further, the present invention provides an information recording carrier on which information is to be recorded and / or reproduced by an information recording and / or reproducing apparatus, wherein a recording medium on which the information is to be recorded and / or the information is recorded; A probe that performs information recording on the recording medium by applying a voltage between the recording medium and / or reproduces information from the recording medium, and a sealing frame that seals the recording medium and the probe; The closed frame is detachable from the information recording and / or reproducing apparatus and has a contact electrode for applying a voltage from the information recording and / or reproducing apparatus. Alternatively, the information recording medium described above is achieved by being arranged so as to be in contact with a position to which a voltage is applied when the information recording medium is mounted on a reproducing apparatus.

〔Example〕

FIG. 1 is a schematic view showing a first embodiment of the present invention.
In FIG. 1, reference numeral 401 denotes a micro computer for controlling the entire system. 402 is a three-dimensional drive mechanism comprising a cylindrical piezoelectric element, 403 is a servo circuit, 404 is an xy scan drive circuit, 405
Is a voltage applying device for applying a voltage between the probe electrode and the recording medium, 406 is a probe electrode formed by processing a platinum wire by electropolishing, 407 is a current amplifier, and 408 is SOAZ (squarylium-bis-6- A recording medium with four layers of octyl azulene), 409 is an undersubstrate in which 50 mm of Cr is deposited by a vacuum evaporation method, and 300 μm of Au is further evaporated on the substrate, 410 is a quartz glass substrate, 411 is a laminated piezoelectric element. A coarse movement mechanism, 412 is a coarse movement mechanism drive circuit, 413 is an xy stage, 414 is an xy stage drive circuit, and 415 is a closed container constituting a closed structure, in which dried and purified nitrogen gas is sealed. I have.

To record information on the recording medium 408, the recording medium 408 is brought closer to the probe electrode 406 using the coarse movement mechanism 411, and a rectangular pulse voltage having a height of 3.5 V and a width of 50 ns is applied by the voltage application device 405. This causes a change in the characteristics of the recording medium 408 to generate a portion (corresponding to 1 bit) having a low electric resistance. Recording can be performed by applying a pulse to a desired position while scanning the probe electrode 406 and the recording medium 408 using the three-dimensional drive mechanism 402 and the xy stage 413.

To perform the reproduction, the current detected by using the current amplifier 407 and the servo circuit 403 is set to 0 while applying a DC voltage of 200 mV lower than the recording voltage to the probe electrode 406 and the recording medium 408.
Two-dimensional scanning is performed on the surface of the recording medium in the Z direction (the direction of the distance between the probe electrode 406 and the recording medium 408) by feedback control so that the three-dimensional driving mechanism 402 becomes constant at 1 nA. The feedback amount (Z-direction drive amount) at this time corresponds to the recording information on the recording medium, and reproduction is performed by associating with the recording position. These controls are performed by the micro computer 401.

FIG. 2 is an external view of the sealed container 415 removed from the recording / reproducing apparatus according to the first embodiment of the present invention. In this container, a probe electrode and a recording medium are disposed opposite to each other, and dried and cleaned nitrogen gas is contained therein, and the locking plate 418 and the probe electrode are scanned to prevent contact and collision between the probe electrode and the recording medium. A probe socket 419 having a D-shaped hole in contact with the three-dimensional drive mechanism is formed.
The D-shaped hole is on the central axis of the cylindrical sealing frame 416.
Next, the setting to the apparatus will be described with reference to the drawing including the cross section of the sealed container 415.

3 and 4 show a closed container 415 according to a first embodiment of the present invention.
FIG. 3 shows a state before setting the closed container, and FIG. 4 shows a state after setting. The closed frame 416 is a main component of the closed container, and has a cylindrical shape made of aluminum. Reference numeral 417 denotes an elastic film made of rubber which constitutes a sealed portion disposed on the upper and lower surfaces of the sealed frame. The probe socket 419 fixes the probe electrode and also serves as an extraction electrode from the probe electrode. 420 is a probe pin mechanically and electrically connected to the probe socket, and 421 is a substrate that fixes the recording medium and also serves as an extraction electrode from a recording medium base electrode (not shown).
A socket for a recording medium as 410. The ends of the elastic film are inserted and fixed in recesses provided in the closed frame 417 and the sockets 419 and 421. 422 is a recording medium pin mechanically and electrically connected to the recording medium socket;
Is a scanner frame that fixes a three-dimensional drive mechanism 402 composed of a cylindrical piezoelectric element, a probe pin is fixed at the tip, and an xy stage 413 is fixed inside the stage frame 424, Coarse movement mechanism 41 on xy stage
1. Further, a recording medium pin 422 is fixed. Closed container 41
The center axis of the outer diameter portion of the closed frame 416 constituting 5, and the center axes of the socket 419 for the probe and the socket 421 for the recording medium are aligned and assembled. Skyana
The fitting portion 425 of the frame 423 is dimensioned to fit with the outer diameter portion of the closed frame 416, and is configured coaxially with the probe pin 420. Stage frame 424 mating part 4
26 has a size to be fitted to the outer diameter portion of the closed frame 416, and is formed coaxially with the recording medium pin 422.
D-shaped holes as shown in FIG. 2 are formed on the center axis of the socket 419 for the probe and the socket 421 for the recording medium, and each of the sockets for the probe has a convex portion formed so as to fit in each hole. The pin 420 and the recording medium pin 422 are coupled without play.

In FIG. 3, when the hermetic container 415 is pushed into the fitting portion 426 of the stage frame 424, the recording medium socket 4 is simultaneously pressed.
21, Pin 422 is connected.

Next, the fitting portion 42 of the scanner
5 and press in, and at the same time, probe socket 419,
The pin 420 is connected. FIG. 4 shows a state in which the lock plate 418 is released by being moved by an actuator (not shown). The elastic film 417 does not restrain the movement of the probe electrode 406 or the recording medium 408 at all, and the movement of the three-dimensional drive mechanism 402, the coarse movement mechanism 411, and the xy stage 413 directly
And the recording medium 408. The probe pin 420 and the recording medium pin 422 are electrically connected to the voltage applying device 405 and the current amplifier 407 through a signal line (not shown) via a frame. The probe socket 406, the recording medium 408, the voltage applying device 405, and the current amplifying circuit 407 are electrically connected by coupling and connecting the medium socket 421 and the recording medium pin, respectively.
The wiring shown in the figure is completed. By operating the coarse movement mechanism 411, the distance between the probe electrode 406 and the recording medium 408 is controlled. At the time of recording / reproduction, this distance is
Of the recording medium 408
The three-dimensional drive mechanism 402 performs in-plane scanning and position control of the probe electrode 406 in the axial direction (vertical direction in the drawing).

When recording and reproduction are not performed, the contact between the probe electrode and the recording medium is prevented again by the lock plate.

In this embodiment, only the probe electrode 406, the recording medium 408, and the like are housed in the closed frame 416, and the closed frame is detachable from the apparatus main body. It is not necessary to change the sealed state of the medium for medium exchange. Also, the probe electrode 40
6 and the recording medium 408 can be exchanged in a state where they are close to each other to some extent, so that it is possible to speed up the alignment between the probe electrode 406 and the recording medium 408 after the frame is inserted.

Further, if the structure of this embodiment is used, the probe electrode 406
The coarse movement part, the circuit, and the relatively less accurate part are required because the part of the recording medium 408 requiring the precision is unitized.
Since it can be manufactured in a process different from the interface portion, the assembling of the device is facilitated and the productivity is improved. In addition, since the high-precision part can be replaced by attaching and detaching the unit, maintenance becomes easy with respect to damage due to an accident or the like.

In particular, in the first embodiment, only the probe electrode and the recording medium are accommodated in a sealed container, and the driving means is not in the sealed space. Therefore, the structure of the sealed container is simple, easy to assemble, and can be reduced in size. It is possible to provide a highly reliable device with less possibility of generation of dust inside the container.

In this embodiment, only one probe electrode is shown.
Multiple configurations may be used.

A second embodiment of the present invention will be described with reference to FIGS. FIG. 5A is an external view of the sealed container 515, and FIG. 5B is a sectional view. In FIG. 5A, 527 is an electrode electrically connected to the probe electrode 506, the recording medium 508, and the three-dimensional drive mechanism in the closed container, and 530 is xy.
The stage electrode 528 is a D-shaped notched fitting part for positioning when set in the apparatus main body, and 519 is a socket having a square hole for making a mechanical connection of a coarse movement mechanism. In FIG. 5B, reference numeral 502 denotes a three-dimensional driving mechanism including a cylindrical piezoelectric element, reference numeral 506 denotes a probe electrode, reference numeral 560 denotes a probe base for attaching the probe electrode 506 to the three-dimensional driving mechanism 502, reference numeral 508 denotes a recording medium, and reference numeral 513 denotes a recording medium. An xy stage composed of a cylindrical piezoelectric element, 580 is a medium base for attaching a recording medium to the xy stage 513, 517 is an elastic film made of a stainless steel diaphragm, 560 is an xy stage 513 that fixes the outer periphery of the elastic film 517 and will be described later. A frame that forms the container with the same outer diameter as the fixing screw, 510 is a differential screw for coarsely approaching the probe electrode 506 and the recording medium 508, 531 is a fixing screw that forms a fitting part, and 512 is an elastic film. A moving screw for fixing the inner periphery of the 517 and fixing the end of the three-dimensional drive mechanism 502. Sealed part is probe base 560, three-dimensional drive mechanism 502, moving screw
A region surrounded by 512, an elastic film 517, a frame 560, an xy stage 513, and a medium base 580 is filled with dried and cleaned nitrogen gas. The probe electrode 506 is brought closer to the recording medium 508 by rotating the differential screw 510.

FIG. 6 shows a state where the closed container 515 of the second embodiment of the present invention is set in the apparatus main body 30 and the probe electrode is brought close to the recording medium. Reference numeral 511 denotes a coarse movement mechanism using a stepping motor, which transmits a rotational force to a differential screw 510 via a socket 519, and rotates the differential screw to move the moving screw 512.
To move the probe electrode 506 closer to the recording medium 508.

Reference numeral 529 denotes an electrode connection portion having an electrode end electrically connected to a voltage application device, a current amplifier, an xy scanning drive circuit, a servo circuit, an xy stage drive circuit, etc. With the 515 set in the apparatus main body 30, the electrodes 527 and xy stage electrodes 530 are arranged at positions where they come into contact with each other. By the contact of the electrode connection portion 529 with the electrode 527 and the xy stage electrode 530, the same wiring as that shown in FIG. 1 is completed, and the application of a voltage between the probe electrode 506 and the recording medium 508, Tunnel current detection and three-dimensional drive mechanism 502 at that time, xy stage 513
Control signal transmission to the

At the time of recording / reproduction, the probe electrode 506 is
The distance between the recording medium 508 and the recording medium 508 is reduced so as to be within the control range of the three-dimensional driving mechanism 502, and scanning in the recording medium plane and position control in the probe electrode axis direction are performed using the three-dimensional driving mechanism 502.

In this embodiment, only one probe electrode is shown, but a plurality of probe electrodes may be used.

In the second embodiment described above, similarly to the first embodiment, only the probe electrode 506, the recording medium 508, and the like are housed in the sealed frame 515, and the sealed frame is detachable from the apparatus main body. At this time, the entire sealed frame can be replaced, and there is no need to change the sealed state in the frame for medium exchange. In addition, since the probe electrode 506 and the recording medium 508 can be exchanged while being brought close to a certain extent, it is possible to speed up the positioning of the probe electrode 506 and the recording medium 508 after the frame is inserted.

Further, if the structure of this embodiment is used, the probe electrode 506
And coarse-motion parts, circuits, and circuits that do not require relatively high precision because the parts of the recording medium 508 that require precision are united.
Since it can be manufactured in a process different from the interface portion, the assembling of the device is facilitated and the productivity is improved. In addition, since the high-precision part can be replaced by attaching and detaching the unit, maintenance becomes easy with respect to damage due to an accident or the like.

A third embodiment of the present invention will be described with reference to FIGS.

FIG. 7 is an external view of a card-type unit including a closed structure, 627 is an electrode for exchanging signals with the apparatus main body, and 731 is a window into which a mechanism for xy driving the medium is inserted.

FIG. 8 is a schematic diagram of a mechanism for driving the probe electrode in the Z-axis direction (perpendicular to the surface of the recording medium). 606 is a probe, 800 is a bimorph beam, and 802 is a drive wiring area. The bimorph beam 800 and the probe electrode 606 were manufactured by a known method called micromechanics or micromachining.

[References: KEPetersen, Proc, IEEE 70,420 (1982) and TRAlbrecht, et al., 4th International conference
on STM / STS (STM'89) P1-29 , S10-2 ] cross-sectional configuration of the beam 800 is an upper electrode (Au) / insulating film (Si ₃ N ₄₎ / piezoelectric (ZnO) / insulating film (Si ₃ N ₄ ) / Middle electrode (Au) / insulating film (Si ₃ N ₄ ) / piezo (ZnO) / insulating film (Si ₃ N ₄ ) / lower electrode (Au), dimensions are 750 μm in length, 150 μm in width,
The thickness is 7.5 μm. + On the upper electrode with respect to the middle electrode
(-), The tip of the bimorph beam 800, that is, the probe electrode is displaced in the Z-axis direction by applying a voltage having a polarity opposite to that of-(+) to the lower electrode, and the value is about 5 μm at ± 15V. The wiring from the tungsten probe electrode 606 passes through the bimorph beam 800 to the circuit on the wiring region 802, and is finally connected to one of the electrodes 627.
A circuit for guiding a control signal for each bimorph beam 800 from the electrode 627 is also formed on the wiring region 802.

FIG. 9 is a sectional view showing the positional relationship between the probe electrode and the recording medium. 801 is a base for fixing the bimorph beam 800,
Reference numeral 616 denotes a hermetically sealed frame that forms a card-type unit by adhering and fixing the base, 608 denotes a recording medium, and 700 denotes a base for fixing the recording medium and connecting to an xy drive mechanism described later.

FIG. 10 shows a state in which the card type unit of the third embodiment of the present invention is set in the apparatus main body 630, and an xy drive mechanism 732 having a piezoelectric element in an inch worm structure is inserted into a window 731 by an up-down mechanism 733. ing. Base for fixing recording media
700 is an xy drive mechanism 732 on the surface opposite to the recording medium 608.
631 is a drive circuit including a selector for driving each bimorph beam 800 and selecting a probe electrode 606, and 629 is a card type unit for transmitting signals and power from a control system in the apparatus main body. Reference numeral 770 denotes a packing formed of a mechanical seal that forms a hermetically sealed structure and keeps the distance between the recording medium 608 and the base 801 constant. The sealed portion is an area surrounded by the base 801, the sealed frame 616, the packing 770, the base 700, and the recording medium 608, in which purified paraffin oil is sealed.

The card type unit is detachable from the apparatus main body 630 in the direction of the arrow. When attaching and detaching, the vertical mechanism 733 is the xy drive mechanism 7
Lower 32 to a position where it will not interfere with the removal of the card unit. When the card type unit is inserted into the apparatus main body 630, the electrode contact portions 629 and the electrodes 627 come into contact with each other and are electrically connected.

The xy scanning drive circuit shown in FIG.
Connected to the drive mechanism 732, a servo circuit is provided corresponding to each of the plurality of bimorph beams 800, and connected to each of the bimorph beams, and a voltage application device and a current amplification device are provided for each bimorph beam. , Coarse drive circuit and xy
What is necessary is just to consider the wiring diagram of the form which omitted the stage drive circuit.

The contact between the electrode 627 and the electrode connection portion 629 completes such a wiring. During recording and reproduction, the voltage applied to each bimorph beam 800 is controlled to control each probe electrode 606 and recording medium 608.
And xy for scanning in the plane of the recording medium 608
It is performed all at once by the drive mechanism 732.

In the present embodiment, the probe electrode 606,
Since only the recording medium 608 and the like are housed in the card-type unit and the card-type unit is detachable from the main body of the apparatus, the card-type unit can be exchanged when exchanging the recording medium, and the sealed state in the unit can be changed. There is no need to change for replacement. In addition, since the probe electrode 606 and the recording medium 608 can be exchanged with the recording medium 608 approaching to some extent, it is possible to speed up the alignment between the probe electrode 606 and the recording medium 608 after the frame is inserted.

Further, if the structure of this embodiment is used, the probe electrode 606
Coarse parts, circuits, and circuits that do not require relatively high precision because the parts of the recording medium 608 that require precision are united.
Since it can be manufactured in a process different from the interface portion, the assembling of the device is facilitated and the productivity is improved. In addition, since the high-precision part can be replaced by attaching and detaching to and from the unit, maintenance can be facilitated with respect to damage due to an accident or the like.

In the third embodiment described above, since the probe electrode, the bimorph beam, and the like are manufactured by the micromechanics method, the accuracy can be improved, and the drive circuit and the like can be assembled on the same substrate as the bimorph beam. In addition, the paraffin oil enclosed in the sealed part has the effect of attenuating micromotion due to the vibration of the bimorph beam 800 and making it move stably,
It also functions to prevent contact between the probe electrode 606 and the recording medium 608.

What is shown as the recording / reproducing device in the above-described embodiments may be a device having only a recording or reproducing function.

〔The invention's effect〕

As described above, according to the present invention, recording and / or reproduction can be performed while the probe and the recording medium are protected from the outside air, and the probe and the recording medium can be stored while the probe and the recording medium are protected from the outside air. The adverse effects such as damage are eliminated.

[Brief description of the drawings]

FIG. 1 is a schematic view of a recording / reproducing apparatus according to a first embodiment of the present invention, FIG. 2 is an external view of a closed container in the embodiment, and FIGS. 3 and 4 are diagrams of setting of the closed container in the embodiment. FIG. 5 (a) is an external view of a sealed container according to a second embodiment of the present invention, FIG. 5 (b) is a sectional view thereof, and FIG. 6 is a description of a setting state of the sealed container according to the embodiment. FIG. 7, FIG. 7 is an external view of a card type unit in a third embodiment of the present invention, FIG. 8 is a schematic diagram of a probe electrode driving mechanism in the embodiment, and FIG. FIG. 10 is an explanatory view of a setting state of the card type unit in the embodiment, and FIG. 11 is an explanatory view of a conventional example. 401 ... microcomputer 402 ... three-dimensional drive mechanism 405 ... voltage applying device 406,506,606 ... probe electrode 408,508,608 ... recording medium 413,513 ... xy stage 415,515 ... closed container 616 ... closed frame 419,421 … Socket 527, 627… Electrode

 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Miya ▲ saki ▼ Toshihiko 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc. (72) Inventor Takahiro Oguchi 3-30-2 Shimomaruko, Ota-ku, Tokyo No. Canon Inc. (56) References JP-A-2-16404 (JP, A) JP-A-62-189639 (JP, A)

Claims (18)

(57) [Claims] An apparatus for recording and / or reproducing information on / from a recording medium, comprising: a probe for recording information on the recording medium and / or reproducing information from the recording medium; and a probe between the probe and the recording medium. Voltage applying means for applying a voltage for information recording and / or reproduction, sealing means for hermetically containing at least the probe and the recording medium, and a recording and / or reproducing apparatus main body holding the sealing means Wherein the sealing means is detachable from the apparatus main body, and the apparatus main body and the sealing means each have a contact electrode for electrically connecting the voltage applying means, the probe, and the recording medium. The information recording and / or reproducing apparatus, wherein the contact electrodes are arranged so as to contact each other when the sealing means is attached to the apparatus main body. 2. The information reproducing apparatus according to claim 1, wherein a tunnel current flowing between the probe and the recording medium is detected by the voltage applied by the voltage applying means to reproduce information from the recording medium. An information recording and / or reproducing device according to the description. 3. The apparatus according to claim 1, further comprising driving means for relatively moving the probe and the recording medium such that the recording medium is scanned by the probe.
An information recording and / or reproducing apparatus according to the item. 4. The information recording and / or reproducing apparatus according to claim 3, wherein said sealing means also seals said driving means. 5. An information recording apparatus according to claim 1, wherein said sealed space of said sealing means is set to an atmosphere for preventing a change in characteristics over time of at least one of said probe and a recording medium. And / or a playback device. 6. An information recording and / or reproducing apparatus according to claim 5, wherein said sealed space is in a high vacuum state. 7. The information recording and / or reproducing apparatus according to claim 5, wherein said sealed space is filled with a purified gas. 8. The information recording and / or reproducing apparatus according to claim 5, wherein said sealed space is filled with dry nitrogen gas. 9. The information recording and / or reproducing apparatus according to claim 5, wherein said sealed space is filled with paraffin oil. 10. An information recording carrier containing a recording medium on which information is to be recorded and / or reproduced by an information recording and / or reproducing apparatus, wherein a voltage is applied between the recording medium and the recording medium. A probe that records information on and / or reproduces information from a recording medium, and a sealed frame that seals the recording medium and the probe. The sealed frame is detachable from an information recording and / or reproducing device. And a contact electrode for applying a voltage from an information recording and / or reproducing device, wherein the contact electrode is arranged so as to come into contact when the closed frame is attached to the information recording and / or reproducing device. An information record carrier, characterized in that: 11. A patent wherein information is reproduced from a recording medium by detecting a tunnel current flowing between the probe and the recording medium when a voltage is applied between the probe and the recording medium. An information recording carrier according to claim (10). 12. The apparatus according to claim 1, further comprising driving means for relatively moving the probe and the recording medium so that the recording medium is scanned by the probe.
0) An information recording carrier according to the item. 13. The information recording carrier according to claim 12, wherein said sealing frame also seals said driving means. 14. The information recording apparatus according to claim 10, wherein said sealed space of said sealed frame is set in an atmosphere for preventing a change in characteristics with time of at least one of said probe and said recording medium. Carrier. 15. The information recording carrier according to claim 14, wherein said sealed space is in a high vacuum state. 16. The information recording carrier according to claim 14, wherein said sealed space is filled with a purified gas. 17. The method according to claim 14, wherein said sealed space is filled with nitrogen gas in a dry state.
An information record carrier according to the item. 18. The information recording carrier according to claim 14, wherein said sealed space is filled with paraffin oil.