JP2942014B2 - Recording and / or reproducing method and information recording carrier - Google Patents

Recording and / or reproducing method and information recording carrier

Info

Publication number
JP2942014B2
JP2942014B2 JP19412791A JP19412791A JP2942014B2 JP 2942014 B2 JP2942014 B2 JP 2942014B2 JP 19412791 A JP19412791 A JP 19412791A JP 19412791 A JP19412791 A JP 19412791A JP 2942014 B2 JP2942014 B2 JP 2942014B2
Authority
JP
Japan
Prior art keywords
recording
recording medium
probe
layer
information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP19412791A
Other languages
Japanese (ja)
Other versions
JPH0540970A (en
Inventor
俊彦 宮▲崎▼
亮 黒田
清 ▲瀧▼本
邦裕 酒井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP19412791A priority Critical patent/JP2942014B2/en
Application filed by Canon Inc filed Critical Canon Inc
Priority to DE69230198T priority patent/DE69230198T2/en
Priority to AT92112106T priority patent/ATE186151T1/en
Priority to DE69232806T priority patent/DE69232806T2/en
Priority to EP98111158A priority patent/EP0871165B1/en
Priority to EP92112106A priority patent/EP0523676B1/en
Priority to ES92112106T priority patent/ES2137167T3/en
Priority to AT98111158T priority patent/ATE225557T1/en
Priority to CA002073919A priority patent/CA2073919C/en
Publication of JPH0540970A publication Critical patent/JPH0540970A/en
Priority to US08/381,289 priority patent/US5461605A/en
Priority to US08/483,862 priority patent/US5610898A/en
Application granted granted Critical
Publication of JP2942014B2 publication Critical patent/JP2942014B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、たとえば高密度かつ大
容量を有する情報記録担体及びそれに対する記録及び/
又は再生方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an information recording carrier having a high density and a large capacity, and a recording and / or recording medium for the information recording carrier.
Or, it relates to a reproduction method.

【0002】[0002]

【従来の技術】近年においてメモリ素子およびメモリシ
ステムの用途は、コンピユータおよびその関連機器、ビ
デオデイスク、デイジタルオーデイオデイスク等、多岐
にわたり、エレクトロニクス産業の中核を成している。
従来は磁気メモリや半導体メモリが主流であったが、最
近のレーザー技術の進展に伴い、安価で高密度な記録媒
体を用いた光メモリ素子などが登場してきた。しかし、
今後のホームユースでのコンピユータ利用や画像を中心
とした情報産業化が進む上で、さらに容量を大きく、か
つ容積を小さくしたメモリ装置あるいは方法の具現化が
切望されている。
2. Description of the Related Art In recent years, memory devices and memory systems have been used in a wide variety of applications, such as computers and related equipment, video disks, digital audio disks, and the like, and are at the core of the electronics industry.
Conventionally, magnetic memories and semiconductor memories have been the mainstream, but with the development of laser technology in recent years, optical memory devices using inexpensive and high-density recording media have appeared. But,
With the advance of computer use in home use and the information industry centering on images in the future, the realization of a memory device or method with a larger capacity and a smaller volume is desired.

【0003】一方、近年において、導体の表面原子の電
子構造を直接観察できる走査型トンネル顕微鏡(以後、
STMと略す)が開発され、→[G.Binniget
al.,Helvetica Physica Act
a.,55.726(1982)]単結晶、非晶質を問
わず実空間で高い分解能の測定ができるようになった。
STMは、金属の探針と導電性物質の間に電圧を加え
て、1nm程度の距離まで近づけるとトンネル電流が流
れることを利用している。この電流は両者の距離変化に
非常に敏感であり、トンネル電流を一定に保つように探
針を操作することにより実空間の表面像を描くことがで
きる。STMを用いた測定は導電性材料に限られるが、
導電性材料の表面に薄く形成された絶縁膜の構造解析に
も応用され初めている。更に、STMは微少電流を検知
する方法を用いているため、測定材料に損傷を与えず
に、かつ低電力で観察できる利点をも有する。また、超
高真空中のみならず大気中、溶液中でも動作し、種々の
材料に対して用いることができるため広範囲な応用が期
待されている。
On the other hand, in recent years, a scanning tunneling microscope (hereinafter, referred to as a “tunneling microscope”) capable of directly observing the electronic structure of surface atoms of a conductor has been proposed.
STM) was developed and → [G. Binnget
al. , Helvetica Physica Act
a. , 55.726 (1982)]. It has become possible to perform high-resolution measurement in real space irrespective of single crystal or amorphous.
The STM utilizes the fact that a tunnel current flows when a voltage is applied between a metal probe and a conductive material to approach a distance of about 1 nm. This current is very sensitive to a change in the distance between the two, and a surface image in real space can be drawn by operating the probe so as to keep the tunnel current constant. Measurement using STM is limited to conductive materials,
It has begun to be applied to the structural analysis of an insulating film formed thinly on the surface of a conductive material. Further, since the STM uses a method for detecting a minute current, it has an advantage that observation can be performed with low power without damaging the measurement material. Further, since it operates not only in an ultra-high vacuum but also in the air and in a solution and can be used for various materials, a wide range of applications is expected.

【0004】特に、資料中に高分解能で情報を書き込む
記録装置、又資料中に書き込まれた情報を高分解能で読
出す再生装置としての応用が進められている。このよう
にSTM技術を応用した装置では、プローブ電極と記録
媒体とを約1nm程度まで近づけるため、高度な精密制
御技術が必要とされている。
In particular, applications as a recording device for writing information at high resolution in a material and a reproducing device for reading information written at high resolution in a material have been advanced. As described above, in the apparatus to which the STM technique is applied, an advanced precision control technique is required to bring the probe electrode and the recording medium closer to about 1 nm.

【0005】[0005]

【発明が解決しようとしている課題】しかしながら、上
記STMの原理を応用した従来技術において、プローブ
電極と記録媒体表面との距離をnmオーダーで精密に制
御する必要がある。そのために今までは複雑な制御回路
・機構などが必要であった。
However, in the prior art applying the principle of the STM, it is necessary to precisely control the distance between the probe electrode and the surface of the recording medium in the order of nm. Until now, complicated control circuits and mechanisms were required.

【0006】本発明は、上述従来例の応用発明であり記
録又は再生時のプローブと記録媒体との間隔制御をより
容易かつ確実なものとした記録及び/又は再生方法及び
情報記録担体を提供する事を目的とする。
The present invention provides a recording and / or reproducing method and an information recording carrier which make it easier and more reliable to control the distance between the probe and the recording medium during recording or reproduction, which is an application of the above-mentioned conventional example. For the purpose.

【0007】[0007]

【課題を解決するための手段】上述目的を達成する為本
発明は、情報記録媒体にプローブを介して情報を記録及
び/又は再生する方法で、前記情報記録媒体の記録層と
プローブとの間に記録層・プローブ間隔を設定するため
の間隔設定層を設け、該間隔設定層を挾んだ状態で前記
プローブを介して前記記録層に情報を記録及び/又は再
生する様にしている。
According to the present invention, there is provided a method for recording and / or reproducing information on an information recording medium via a probe, comprising the steps of: An interval setting layer for setting an interval between the recording layer and the probe is provided, and information is recorded and / or reproduced on the recording layer via the probe with the interval setting layer interposed therebetween.

【0008】又、本発明は記録層に対向したプローブを
介して情報を記録及び/又は再生される情報記録担体
で、前記記録層上に該記録層とプローブとの間隔を設定
するための間隔設定層を設けている。
Further, the present invention relates to an information recording carrier on which information is recorded and / or reproduced via a probe facing a recording layer, wherein an interval for setting an interval between the recording layer and the probe on the recording layer. A setting layer is provided.

【0009】[0009]

【実施例】図1は本発明の第1実施例を用いた情報記録
再生装置を表わす図面である。同図において、1は電解
研磨法で作成したタングステン製のプローブ電極、2は
プローブ電極をxy方向には拘束しz方向には可動とす
るように支持する弾性支持機構、3はプローブ電極をz
方向に粗動させるz方向粗動機構である。4は記録媒体
で、xy面に平行な表面を有する。40はマイカをへき
開して得られた平滑な基板、41は基板40の上にAu
をエピタキシヤル成長させた下地電極、42は電気メモ
リー効果を有するスクアリリウム−ビス−6−オクチル
アズレン(以下SOAZと略す)をLB法により8層累
積した記録層、43はポリイソブチルメタクリレートを
LB法により1層付けた間隔設定層である。記録媒体4
は基板40、下地電極41、記録層42、間隔設定層4
3から構成されている。5は記録媒体4をxy方向に操
作させるxy方向走査機構である。6は記録再生装置の
外部装置との接続を行なうインターフエースである。イ
ンターフエース6と外部装置との間では書き込み読み出
し情報、ステータス信号、記録再生装置の制御信号、ア
ドレス信号などがやりとりされる。60は記録再生装置
内の各ブロツク間の相互動作の集中制御を行なう制御回
路、61は書き込み読み出し情報(データ)を制御回路
60からの指示により書き込んだり読み出したりする書
き込み読み出し回路、62は書き込み読み出し回路61
からの指令信号により、プローブ電極1と記録媒体4と
の間に、記録時にはデータを書き込むためのパルス状電
圧を印加し、かつ再生時には読み出し電圧を印加する電
圧印加回路、63はプローブ電極1と記録媒体4との間
に流れる電流を増幅する電流増幅回路である。68は後
述する弾性支持機構3に取り付けられたセンサーからプ
ローブ電極1と記録媒体4との接触を検出し、またxy
方向走査機構5の駆動状態からプローブ電極1の記録媒
体4上でのxy方向走査位置を検出する為の位置検出回
路である。64は制御回路60などの指示により電流増
幅回路63や位置検出回路68の信号を基にプローブ電
極1や記録媒体4の位置を決定する位置決め回路、65
は位置決め回路64からのサーボ信号を基にプローブ電
極1と記録媒体4の位置をサーボ制御するサーボ回路、
66は位置決め回路64の信号に従いプローブ電極1の
z方向粗動機構を駆動するz方向駆動回路、67はサー
ボ回路65の信号に従い記録媒体4が取り付けられてい
るxy方向走査機構5を駆動するxy方向駆動回路であ
る。
FIG. 1 is a diagram showing an information recording / reproducing apparatus using a first embodiment of the present invention. In the drawing, reference numeral 1 denotes a tungsten probe electrode formed by an electropolishing method, 2 denotes an elastic support mechanism for supporting the probe electrode in an xy direction and supporting the probe electrode so as to be movable in a z direction, and 3 denotes a probe electrode formed by z.
This is a z-direction coarse movement mechanism that coarsely moves in the direction. Reference numeral 4 denotes a recording medium having a surface parallel to the xy plane. 40 is a smooth substrate obtained by cleaving mica, 41 is Au on the substrate 40
Is a recording layer in which eight layers of squarylium-bis-6-octylazulene (hereinafter abbreviated as SOAZ) having an electric memory effect are accumulated by the LB method, 43 is polyisobutyl methacrylate by the LB method This is an interval setting layer with one layer. Recording medium 4
Denotes a substrate 40, a base electrode 41, a recording layer 42, a spacing layer 4
3 is comprised. Reference numeral 5 denotes an xy direction scanning mechanism for operating the recording medium 4 in the xy directions. Reference numeral 6 denotes an interface for connecting the recording / reproducing apparatus to an external device. Write / read information, a status signal, a control signal of a recording / reproducing device, an address signal, and the like are exchanged between the interface 6 and the external device. Reference numeral 60 denotes a control circuit for centrally controlling the mutual operation between the blocks in the recording / reproducing apparatus, 61 a write / read circuit for writing / reading write / read information (data) in accordance with an instruction from the control circuit 60, and 62 a write / read circuit. Circuit 61
A voltage application circuit for applying a pulse voltage for writing data during recording and applying a read voltage during reproduction between the probe electrode 1 and the recording medium 4 in response to a command signal from This is a current amplifying circuit that amplifies a current flowing between the recording medium 4. 68 detects contact between the probe electrode 1 and the recording medium 4 from a sensor attached to the elastic support mechanism 3 described later,
This is a position detection circuit for detecting the scanning position of the probe electrode 1 in the xy direction on the recording medium 4 from the driving state of the direction scanning mechanism 5. Reference numeral 64 denotes a positioning circuit which determines the positions of the probe electrode 1 and the recording medium 4 based on signals from the current amplification circuit 63 and the position detection circuit 68 according to instructions from the control circuit 60 and the like.
A servo circuit for servo-controlling the positions of the probe electrode 1 and the recording medium 4 based on the servo signal from the positioning circuit 64;
Reference numeral 66 denotes a z-direction drive circuit that drives the z-direction coarse movement mechanism of the probe electrode 1 in accordance with a signal from the positioning circuit 64, and reference numeral 67 denotes an xy drive that drives the xy-direction scanning mechanism 5 on which the recording medium 4 is mounted in accordance with a signal from the servo circuit 65. It is a direction drive circuit.

【0010】図2を用いて弾性支持機構2の説明をす
る。同図において、1は直径25μmのタングステンを
電解研磨法で尖らせたプローブ電極、20は長さ1mm
幅0.2mm厚さ10μmのAu箔からなる弾性部材、
11はプローブ電極1と弾性部材20とを固定する導電
製の接着剤からなる接着部、21は弾性部材20のプロ
ーブ電極1と反対側の端部を固定するベースで、更にベ
ース21は不図示のz方向粗動機構と接着される。22
は弾性部材20の撓みを表面の歪みから検出する撓みセ
ンサーである。
The elastic support mechanism 2 will be described with reference to FIG. In the figure, 1 is a probe electrode obtained by sharpening tungsten having a diameter of 25 μm by electropolishing, and 20 is a length of 1 mm.
An elastic member made of Au foil having a width of 0.2 mm and a thickness of 10 μm,
Reference numeral 11 denotes an adhesive portion made of a conductive adhesive for fixing the probe electrode 1 and the elastic member 20. Reference numeral 21 denotes a base for fixing the end of the elastic member 20 on the side opposite to the probe electrode 1. Further, the base 21 is not shown. And the z-direction coarse movement mechanism. 22
Is a bending sensor for detecting the bending of the elastic member 20 from the distortion of the surface.

【0011】発明装置の動作説明を行なう。The operation of the invention device will be described.

【0012】プローブ電極1は記録媒体設置時等に記録
媒体4との衝突を避けるために離れているので、z方向
粗動機構3によって両者を接近させる。手順は、まずz
方向粗動機構3を駆動して弾性支持機構2に取り付けら
れた撓みセンサー22がプローブ電極1と記録媒体4と
の接触を検出(弾性部材20の撓みの発生をもって接触
有と判定)するまでプローブ電極1を近づけることで行
なう。この時、プローブ電極1は弾性部材20が撓むこ
とによる弾性力で記録媒体4に押し付けられている。ま
た、プローブ電極1の先端と記録媒体の記録層42との
間隔は間隔設定層43によって決まっており、この間隔
はポリイソブチルメタクリレートの1層の厚さで約1n
mである。ここでz方向粗動機構3を保持し、プローブ
電極1と記録媒体の下地電極41との間に電圧印加回路
62から0.1Vのバイアス電圧を印加しながら、プロ
ーブ電極1に対し記録媒体4をxy方向走査機構5を用
いて走査することで、プローブ電極1と記録媒体の下地
電極41との間隔を一定に保ちながら記録再生が可能な
状態になる。実際にこの状態で読み出し情報を見たとこ
ろ情報は何もはいっていなかった。更に詳しくは、記録
媒体4を走査しながら得られる電流増幅回路63の出力
値はプローブ電極1と記録媒体4の下地電極41の間に
流れる電流に換算して1pA以下の値であった。
Since the probe electrode 1 is separated to avoid collision with the recording medium 4 when the recording medium is installed, the two are brought close by the z-direction coarse movement mechanism 3. The procedure is z
The probe is driven until the deflection sensor 22 attached to the elastic support mechanism 2 drives the direction coarse movement mechanism 3 to detect contact between the probe electrode 1 and the recording medium 4 (determining that the elastic member 20 has been bent when the elastic member 20 is bent). This is performed by bringing the electrode 1 closer. At this time, the probe electrode 1 is pressed against the recording medium 4 by the elastic force caused by the elastic member 20 being bent. The distance between the tip of the probe electrode 1 and the recording layer 42 of the recording medium is determined by the distance setting layer 43, and the distance is about 1 n in the thickness of one layer of polyisobutyl methacrylate.
m. Here, while holding the z-direction coarse movement mechanism 3 and applying a bias voltage of 0.1 V from the voltage application circuit 62 between the probe electrode 1 and the base electrode 41 of the recording medium, the recording medium 4 is applied to the probe electrode 1. Is scanned using the xy-direction scanning mechanism 5, so that recording and reproduction can be performed while maintaining a constant distance between the probe electrode 1 and the base electrode 41 of the recording medium. When the read information was actually viewed in this state, no information was found. More specifically, the output value of the current amplifying circuit 63 obtained while scanning the recording medium 4 was 1 pA or less in terms of the current flowing between the probe electrode 1 and the base electrode 41 of the recording medium 4.

【0013】記録は、記録媒体4を走査しながらプロー
ブ電極1が記録領域の書き込み位置にきたら電圧印加回
路62で書き込み電圧を印加して行なう。この書込み電
圧は電気メモリー効果を有する記録層42がON(低抵
抗)状態に変化するのに充分な電圧である。この時のプ
ローブ電極1と記録媒体4の関係を示すのが図3(xz
断面図)で、7は記録ビツト(記録層のON部分)、8
は記録媒体4の走査方向(この図においてはx方向)を
示す矢印である。書き込みのタイミング等は制御回路6
0の制御信号による。記録媒体4をx方向に移動しなが
ら記録が行なわれ、x方向1列分の記録が終了すると、
y方向に一段ずれて次の列で同様にx方向1列分の記録
が行なわれる。記録媒体4の走査中に、記録媒体4上の
各電圧印加位置で、書き込み電圧が加えられる。これに
より記録ビツト7が形成されていく。
Recording is performed by applying a write voltage by a voltage application circuit 62 when the probe electrode 1 comes to the write position in the recording area while scanning the recording medium 4. This write voltage is a voltage sufficient for the recording layer 42 having the electric memory effect to change to the ON (low resistance) state. FIG. 3 (xz) shows the relationship between the probe electrode 1 and the recording medium 4 at this time.
7 is a recording bit (ON portion of the recording layer), 8
Is an arrow indicating the scanning direction of the recording medium 4 (x direction in this figure). The write timing and the like are controlled by the control circuit 6.
It depends on the control signal of 0. Recording is performed while moving the recording medium 4 in the x direction, and when recording for one column in the x direction is completed,
Similarly, printing is performed for one row in the x direction in the next row, shifted one step in the y direction. During scanning of the recording medium 4, a writing voltage is applied at each voltage application position on the recording medium 4. As a result, the recording bit 7 is formed.

【0014】再生は、プローブ電極1と記録媒体の下地
電極41の間に例えば0.1vの読み出し電圧を電圧印
加回路62で印加しながらxy方向走査機構5を用いて
記録媒体4を記録時と同様の経路で走査して、電流増幅
回路63で電流変化を見ることで行なう。印加電圧は記
録層42が抵抗状態の変化をおこさない充分小さな値に
する。実際に記録媒体4を走査しながら得られる電流増
幅回路63の出力値はプローブ電極1と記録媒体4の下
地電極41の間に流れる電流に換算して、記録ビツト7
の位置では0.1nAであり、その他の場所は1pA以
下の値であった。この電流変化は書き込み読み出し回路
61によって読み出し情報となりインターフエース6を
通して上位装置へ伝えられる。読み出しのタイミング等
は制御回路60の制御信号による。
The reproduction is performed when the recording medium 4 is recorded by using the xy direction scanning mechanism 5 while applying a read voltage of, for example, 0.1 V between the probe electrode 1 and the base electrode 41 of the recording medium by the voltage application circuit 62. Scanning is performed in a similar path, and the current amplification circuit 63 checks the change in current. The applied voltage is set to a sufficiently small value so that the recording layer 42 does not change the resistance state. The output value of the current amplifying circuit 63 obtained while actually scanning the recording medium 4 is converted into a current flowing between the probe electrode 1 and the base electrode 41 of the recording medium 4 to obtain a recording bit 7.
The position was 0.1 nA at the position, and the value at other positions was 1 pA or less. This current change becomes read information by the write / read circuit 61 and is transmitted to the host device through the interface 6. The read timing and the like depend on the control signal of the control circuit 60.

【0015】記録再生どちらの時も、プローブ電極先端
と記録層との距離は間隔設定層によって精度良く決まっ
ており、安定した記録再生ができた。記録ビツトの寸法
は直径90nmであった。
In both recording and reproduction, the distance between the tip of the probe electrode and the recording layer was accurately determined by the interval setting layer, and stable recording and reproduction could be performed. The dimensions of the recording bit were 90 nm in diameter.

【0016】本実施例で使用したプローブ電極は、タン
グステン棒を電解研磨したものであったが白金−ロジウ
ムや白金−イリジウムなどの棒を電解研磨あるいは機械
研磨して用いてもかまわない。
Although the probe electrode used in this embodiment is obtained by electrolytically polishing a tungsten rod, a rod of platinum-rhodium or platinum-iridium may be subjected to electrolytic polishing or mechanical polishing.

【0017】図4は、本発明の他の実施例を示す図面で
あり、同図において、1はプローブ電極、22は2本の
プローブ電極のユニツトが取り付けられている支持体、
30は支持体を介してプローブ電極1をz方向へ動かす
z方向粗動機構(チルト機構も含んでいる)、23はプ
ローブ電極1をr方向(記録媒体の半径方向)へ動かす
キヤリツジ、24はキヤリツジ23を駆動するr方向駆
動機構である。4は記録媒体で、研磨したガラス円板上
にAuをスパツタ法により付けて下地電極とした後、電
気メモリー効果を有するSOAZをLB法で8層累積し
記録層とし、更にポリイソブチルメタクリレートをLB
法により1層付け間隔設定層としてある。44は記録媒
体4を固定し回転させるスピンドル、45はスピンドル
44を回転させるモータ、46はモータ45の回転をス
ピンドル44に伝えるベルトである。この様に本実施例
では記録媒体を回転させ、この回転の円周方向に情報記
録及び再生を行なう。回路まわりのブロツクは全実施例
とほぼ同じであるが、特に制御回路60がモータ45の
回転の始動停止制御を行なう事、及び回路62からの記
録用電圧を2本のプローブ電極に切り替えて印加する
為、及び2本のプローブ電極からの信号を電流増幅回路
63が切り替えて増幅して回路61に送信する為の不図
示の切り替え器が設けられていることと、記録媒体4が
円板形状をしているため、座標系がスピンドル44の回
転中心を基準にr、θ、zとなっている(図6参照)こ
と、及び符番69で示した、サーボ回路65の信号に従
いプローブ電極1が取り付けられているキヤリツジ23
をr方向(回転の半径方向)に駆動するr方向駆動機構
に駆動信号を発するr方向駆動回路を設けている事が異
なっている。
FIG. 4 is a view showing another embodiment of the present invention, in which 1 is a probe electrode, 22 is a support on which a unit of two probe electrodes is attached,
Reference numeral 30 denotes a z-direction coarse movement mechanism (including a tilt mechanism) for moving the probe electrode 1 in the z-direction via the support, 23 denotes a carriage for moving the probe electrode 1 in the r-direction (radial direction of the recording medium), and 24 denotes a carriage. An r-direction drive mechanism for driving the carriage 23. Reference numeral 4 denotes a recording medium. Au is applied on a polished glass disk by a spatter method to form a base electrode, and then eight layers of SOAZ having an electric memory effect are accumulated by an LB method to form a recording layer.
It is provided as a one-layer interval setting layer by the method. 44 is a spindle for fixing and rotating the recording medium 4, 45 is a motor for rotating the spindle 44, and 46 is a belt for transmitting the rotation of the motor 45 to the spindle 44. As described above, in this embodiment, the recording medium is rotated, and information recording and reproduction are performed in the circumferential direction of the rotation. The blocks around the circuit are almost the same as those in all the embodiments, except that the control circuit 60 controls the start and stop of the rotation of the motor 45, and the recording voltage from the circuit 62 is applied by switching to two probe electrodes. And a switching device (not shown) for switching and amplifying signals from the two probe electrodes and transmitting the amplified signals to the circuit 61 is provided. Therefore, the coordinate system is r, θ, z with reference to the rotation center of the spindle 44 (see FIG. 6), and the probe electrode 1 according to the signal of the servo circuit 65 indicated by reference numeral 69. Carriage 23 with attached
The difference is that an r-direction drive circuit for generating a drive signal is provided in an r-direction drive mechanism for driving the r-direction in the r-direction (radial direction of rotation).

【0018】図5は本実施例の記録再生装置に用いた2
本のプローブ電極まわりの斜視図であり、1Aと1Bは
プローブ電極、12Aと12Bはプローブ電極の信号を
引出すためのAu製の引き出し電極、20Aと20Bは
長さ0.8mm幅0.1mm厚さ5μmのSiからなる
弾性部材、21は支持体22に固定するためのベースで
ある。不図示であるが、弾性部材20Aと20Bには第
1実施例と同様弾性部材の撓みを検出するセンサーが形
成されている。プローブ電極1Aと1Bや弾性部材20
Aと20Bは、いわゆるマイクロメカニクス技術→
[K.E.Petersen,Proc.IEEE7
0,420(1982)]で製作するので、同じ形状の
ものを精度良く作ることが可能である。
FIG. 5 shows the structure of the recording / reproducing apparatus according to the present embodiment.
1A and 1B are probe electrodes, 12A and 12B are Au extraction electrodes for extracting signals from the probe electrodes, 20A and 20B are 0.8 mm long and 0.1 mm thick An elastic member 21 made of Si having a thickness of 5 μm is a base for fixing to the support 22. Although not shown, sensors for detecting bending of the elastic members are formed on the elastic members 20A and 20B as in the first embodiment. Probe electrodes 1A and 1B and elastic member 20
A and 20B are the so-called micromechanics technologies →
[K. E. FIG. Petersen, Proc. IEEE7
0, 420 (1982)], so it is possible to accurately produce the same shape.

【0019】図4と図6を用いて本発明装置の動作説明
を行なう。最初、プローブ電極1は記録媒体4との衝突
を避けるために離れている。まず、モータ45を駆動
し、スピンドル44を回転させ、記録媒体4を回転させ
る。この回転方向9は、図6に示すように弾性部材の固
定部が回転上流になる方向にする。記録媒体の回転が安
定したら、弾性部材20Aと20Bに取り付けられたセ
ンサーがプローブ電極1Aと1Bとが共に記録媒体との
接触を検出するまで、即ち、2つの撓み検出センサーが
共に撓みを検出するまで、z方向粗動機構(チルト機
構)30を駆動しプローブ電極を記録媒体に接近させ
る。この時、プローブ電極1Aと1Bは、それぞれ弾性
部材20Aと20Bが撓むことによる弾性力で記録媒体
4に押し付けられており、プローブ電極1Aと1Bの先
端と記録媒体の記録層との間隔はポリイソブチルメタク
リレートの1層の厚さ約1nmとなっている。ここでz
方向粗動機構3を保持し、プローブ電極をr方向駆動機
構を用いて記録媒体上を動かすことで記録再生ができ
る。
The operation of the apparatus according to the present invention will be described with reference to FIGS. First, the probe electrode 1 is separated to avoid collision with the recording medium 4. First, the motor 45 is driven, the spindle 44 is rotated, and the recording medium 4 is rotated. As shown in FIG. 6, the rotation direction 9 is a direction in which the fixed portion of the elastic member becomes upstream of rotation. When the rotation of the recording medium is stabilized, the sensors attached to the elastic members 20A and 20B until both the probe electrodes 1A and 1B detect contact with the recording medium, that is, the two deflection detection sensors detect the deflection together. Until then, the z-direction coarse movement mechanism (tilt mechanism) 30 is driven to bring the probe electrode close to the recording medium. At this time, the probe electrodes 1A and 1B are pressed against the recording medium 4 by the elastic force due to the elastic members 20A and 20B being bent, and the distance between the tips of the probe electrodes 1A and 1B and the recording layer of the recording medium is The thickness of one layer of polyisobutyl methacrylate is about 1 nm. Where z
Recording and reproduction can be performed by holding the direction coarse movement mechanism 3 and moving the probe electrode on the recording medium using the r-direction drive mechanism.

【0020】記録再生方法については、前記実施例と同
様である。この時のプローブ電極1Aと記録媒体4の関
係を示すのが図7(θz断面図)で、7は記録ビツト
(記録層のON部分)、9は記録媒体4の回転方向を示
す矢印である。
The recording / reproducing method is the same as in the above embodiment. FIG. 7 (θz sectional view) shows the relationship between the probe electrode 1A and the recording medium 4 at this time, where 7 is a recording bit (ON portion of the recording layer), and 9 is an arrow indicating the rotation direction of the recording medium 4. .

【0021】以上述べたように、LB膜一層で間隔設定
層が構成されているので、記録媒体上を均一な厚さの間
隔設定層が強い力で付いている。そのため、記録領域全
面で安定したプローブ電極先端と記録層との距離を設定
維持することができ、また、プローブの接触に対しても
充分な強度を有している。
As described above, since the interval setting layer is composed of one layer of the LB film, the interval setting layer having a uniform thickness is applied to the recording medium with a strong force. Therefore, a stable distance between the tip of the probe electrode and the recording layer can be set and maintained over the entire recording region, and the probe has sufficient strength against contact with the probe.

【0022】間隔設定層の材料としては、ポリイソブチ
ルメタクリレートを実施例では用いたが、他にポリメチ
ルメタクリレートやポリエチレン、ポリ塩化ビニル、ポ
リイソブチレンなども使用可能であり、他にも均一な約
1nmの厚さに成膜でき、電気メモリー効果を有しない
材料ならば、本発明の間隔設定層に用いることができ
る。
As the material for the interval setting layer, polyisobutyl methacrylate was used in the embodiment, but other materials such as polymethyl methacrylate, polyethylene, polyvinyl chloride and polyisobutylene can also be used. Any material that can be formed into a film having a thickness of and has no electric memory effect can be used for the interval setting layer of the present invention.

【0023】また、前記両実施例の間隔設定層は、記録
媒体側に設定していたがプローブ電極側でも良い(図8
参照)。更に、記録層としてSOAZを例にあげたが電
気メモリー効果を有する他の材料でも用いることができ
る。そして、装置は記録再生装置であったが、記録と再
生の一方の機能だけの装置でも良い。
The interval setting layer in both embodiments is set on the recording medium side, but may be set on the probe electrode side (FIG. 8).
reference). Further, although the SOAZ is taken as an example of the recording layer, other materials having an electric memory effect can be used. The apparatus is a recording / reproducing apparatus, but may be an apparatus having only one of recording and reproducing functions.

【0024】[0024]

【発明の効果】以上説明によれば、プローブと記録媒体
との距離の設定が複雑な回路を必要とせずに行なえ、か
つより正確になり、情報の記録再生が簡単かつ確実に行
なえるようになった。
As described above, according to the present invention, the distance between the probe and the recording medium can be set without requiring a complicated circuit and more accurately, and the recording and reproduction of information can be performed easily and reliably. became.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1実施例を用いた記録再生装置の概
略ブロツク図である。
FIG. 1 is a schematic block diagram of a recording / reproducing apparatus using a first embodiment of the present invention.

【図2】第1実施例のプローブ電極と弾性部材部分の斜
視図である。
FIG. 2 is a perspective view of a probe electrode and an elastic member according to the first embodiment.

【図3】記録時のプローブ電極と記録媒体の位置関係を
示す説明断面図である。
FIG. 3 is an explanatory sectional view showing a positional relationship between a probe electrode and a recording medium during recording.

【図4】本発明他の実施例を用いた記録再生装置の概略
ブロツク図である。
FIG. 4 is a schematic block diagram of a recording / reproducing apparatus using another embodiment of the present invention.

【図5】2本のプローブ電極と弾性部材部分の斜視図で
ある。
FIG. 5 is a perspective view of two probe electrodes and an elastic member.

【図6】円板状の記録媒体と2本の弾性部材との位置関
係を示す斜視図である。
FIG. 6 is a perspective view showing a positional relationship between a disk-shaped recording medium and two elastic members.

【図7】記録再生時のプローブ電極と記録媒体の位置関
係を示す断面図である。
FIG. 7 is a cross-sectional view showing a positional relationship between a probe electrode and a recording medium during recording and reproduction.

【図8】本発明の更に他の実施例の説明図である。FIG. 8 is an explanatory view of still another embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 プローブ電極 2 弾性支持機構 3 z方向粗動機構 4 記録媒体 5 XY方向走査機構 6 インターフエース 20 弾性部材 22 撓みセンサー 41 下地電極 42 記録層 43 間隔設定層 62 電圧印加回路 63 電流増幅回路 DESCRIPTION OF SYMBOLS 1 Probe electrode 2 Elastic support mechanism 3 Z direction coarse movement mechanism 4 Recording medium 5 XY direction scanning mechanism 6 Interface 20 Elastic member 22 Flexure sensor 41 Base electrode 42 Recording layer 43 Interval setting layer 62 Voltage application circuit 63 Current amplification circuit

フロントページの続き (72)発明者 酒井 邦裕 東京都大田区下丸子3丁目30番2号キヤ ノン株式会社内 (58)調査した分野(Int.Cl.6,DB名) G11B 9/00 G11B 9/04 Continuation of the front page (72) Kunihiro Sakai, Incorporated Canon Inc., 3-30-2 Shimomaruko, Ota-ku, Tokyo (58) Field surveyed (Int.Cl. 6 , DB name) G11B 9/00 G11B 9 / 04

Claims (6)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 情報記録媒体にプローブを介して情報を
記録及び/又は再生する方法で、前記情報記録媒体の記
録層とプローブとの間に記録層・プローブ間隔を設定す
るための間隔設定層を設け、該間隔設定層を挾んだ状態
で前記プローブを介して前記記録層に情報を記録及び/
又は再生することを特徴とする情報記録及び/又は再生
方法。
An interval setting layer for setting an interval between a recording layer and a probe between a recording layer of the information recording medium and a probe in a method for recording and / or reproducing information on an information recording medium via a probe. Information is recorded on the recording layer via the probe while sandwiching the interval setting layer, and / or
Or an information recording and / or reproducing method characterized by reproducing.
【請求項2】 前記間隔設定層は前記情報記録媒体の記
録層の上に設けられることを特徴とする請求項1の記録
及び/又は再生方法。
2. The recording and / or reproducing method according to claim 1, wherein the interval setting layer is provided on a recording layer of the information recording medium.
【請求項3】 前記間隔設定層はLB膜であることを特
徴とする請求項1または2の記録及び/又は再生方法。
3. The recording and / or reproducing method according to claim 1, wherein the interval setting layer is an LB film.
【請求項4】 前記間隔設定層の厚さは1nmであるこ
とを特徴とする請求項1乃至3の記録及び/又は再生方
法。
4. The recording and / or reproducing method according to claim 1, wherein the thickness of the interval setting layer is 1 nm.
【請求項5】 前記プローブを前記間隔設定層に押し付
けた状態で前記プローブによって前記情報記録媒体を操
作しながら記録及び/又は再生を行なうことを特徴とす
る請求項1乃至4の記録及び/又は再生方法。
5. The recording and / or reproducing method according to claim 1, wherein recording and / or reproducing are performed while operating said information recording medium by said probe while said probe is pressed against said interval setting layer. Playback method.
【請求項6】 記録層に対向したプローブを介して情報
を記録及び/又は再生される情報記録担体で、前記記録
層上に該記録層とプローブとの間隔を設定するための間
隔設定層を設けたことを特徴とする情報記録担体。
6. An information recording carrier on and / or from which information is recorded and / or reproduced via a probe facing a recording layer, wherein an interval setting layer for setting an interval between the recording layer and the probe is provided on the recording layer. An information recording carrier, characterized by being provided.
JP19412791A 1991-07-17 1991-08-02 Recording and / or reproducing method and information recording carrier Expired - Fee Related JP2942014B2 (en)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP19412791A JP2942014B2 (en) 1991-08-02 1991-08-02 Recording and / or reproducing method and information recording carrier
CA002073919A CA2073919C (en) 1991-07-17 1992-07-15 Multiple probe electrode arrangement for scanning tunnelling microscope recording and reading
DE69232806T DE69232806T2 (en) 1991-07-17 1992-07-15 Information recording / reproducing apparatus or method for information recording / reproducing on / from an information recording medium using a plurality of probe electrodes
EP98111158A EP0871165B1 (en) 1991-07-17 1992-07-15 Information recording/reproducing apparatus and method for recording and/or reproducing information on information recording carrier by use of probe electrode
EP92112106A EP0523676B1 (en) 1991-07-17 1992-07-15 Information recording/reproducing apparatus for recording and/or reproducing information on information recording carrier by use of a probe electrode.
ES92112106T ES2137167T3 (en) 1991-07-17 1992-07-15 APPARATUS FOR THE RECORDING / REPRODUCTION OF INFORMATION, FOR THE RECORDING AND / OR REPRODUCTION OF INFORMATION ON A SUPPORT FOR RECORDING INFORMATION BY MEANS OF A PROBE ELECTRODE.
DE69230198T DE69230198T2 (en) 1991-07-17 1992-07-15 Information recording / reproducing apparatus for recording and / or reproducing information on / from an information recording medium by using a probe.
AT92112106T ATE186151T1 (en) 1991-07-17 1992-07-15 INFORMATION RECORDING/REPRODUCING DEVICE FOR RECORDING AND/OR REPRODUCING INFORMATION TO/FROM AN INFORMATION RECORDING MEDIUM BY USING A PROBE.
AT98111158T ATE225557T1 (en) 1991-07-17 1992-07-15 INFORMATION RECORDING/REPRODUCING APPARATUS OR METHOD FOR RECORDING/REPRODUCING INFORMATION TO/FROM AN INFORMATION RECORDING MEDIUM USING A MULTIPLE PROBE ELECTRODES
US08/381,289 US5461605A (en) 1991-07-17 1995-01-31 Information recording/reproducing method, recording carrier and apparatus for recording and/or reproducing information on information recording carrier by use of probe electrode
US08/483,862 US5610898A (en) 1991-07-17 1995-06-07 Information recording/reproducing method for recording and/or reproducing information on information recording carrier by use of probe electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19412791A JP2942014B2 (en) 1991-08-02 1991-08-02 Recording and / or reproducing method and information recording carrier

Publications (2)

Publication Number Publication Date
JPH0540970A JPH0540970A (en) 1993-02-19
JP2942014B2 true JP2942014B2 (en) 1999-08-30

Family

ID=16319361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19412791A Expired - Fee Related JP2942014B2 (en) 1991-07-17 1991-08-02 Recording and / or reproducing method and information recording carrier

Country Status (1)

Country Link
JP (1) JP2942014B2 (en)

Also Published As

Publication number Publication date
JPH0540970A (en) 1993-02-19

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