JP2701093B2 - Ultrasonic linear slide mechanism - Google Patents

Ultrasonic linear slide mechanism

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Publication number
JP2701093B2
JP2701093B2 JP3044135A JP4413591A JP2701093B2 JP 2701093 B2 JP2701093 B2 JP 2701093B2 JP 3044135 A JP3044135 A JP 3044135A JP 4413591 A JP4413591 A JP 4413591A JP 2701093 B2 JP2701093 B2 JP 2701093B2
Authority
JP
Japan
Prior art keywords
moving body
elastic body
projection
piece group
slide mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3044135A
Other languages
Japanese (ja)
Other versions
JPH04265671A (en
Inventor
小松  徹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murakami Corp
Original Assignee
Murakami Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murakami Corp filed Critical Murakami Corp
Priority to JP3044135A priority Critical patent/JP2701093B2/en
Publication of JPH04265671A publication Critical patent/JPH04265671A/en
Application granted granted Critical
Publication of JP2701093B2 publication Critical patent/JP2701093B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本願発明は、圧電セラミック振動
子、特に筒型の圧電セラミック振動子を使用したリニア
スライド機構に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric ceramic vibrator, and more particularly to a linear slide mechanism using a cylindrical piezoelectric ceramic vibrator.

【0002】[0002]

【従来の技術】従来例を図6に基づいて説明する。この
事例は、定在波型超音波モーターを示すものでランジュ
バン型振動子50に取り付けた振動片51の先端に、ロータ
ー52面を少し傾斜して接触させている。それによって、
振動片51が長さ方向に往復運動すると、ローター52の円
周方向に生じる分力によってローター52を回転させるも
のである。
2. Description of the Related Art A conventional example will be described with reference to FIG. In this case, a standing wave type ultrasonic motor is shown, in which the tip of a vibrating piece 51 attached to a Langevin type vibrator 50 is brought into contact with the rotor 52 with a slightly inclined surface. Thereby,
When the vibrating piece 51 reciprocates in the length direction, the rotor 52 is rotated by a component force generated in the circumferential direction of the rotor 52.

【0003】さらに、図7は移動体60の一端に圧電素子
61を固定し、この圧電素子61の急速変形に伴う反作用を
利用してしゃくとり虫式に行う事例である。すなわち、
移動体60に圧電素子61を介して慣性体62を取り付け、案
内面63に移動体60を摩擦力で保持する構造を有してい
る。移動体60は、案内面63上に置かれて摩擦力で保持さ
れている。そして、移動体60の一端に結合された圧電素
子61の印加電圧パターンを制御することで慣性体62に適
当な加速度を与え、その反作用によって移動体60の微小
距離、例えばμmオーダーの移動を得るものである。
FIG. 7 shows a piezoelectric element at one end of a moving body 60.
This is an example in which the fixing of the piezoelectric element 61 is carried out in a worm-like manner by utilizing a reaction accompanying the rapid deformation of the piezoelectric element 61. That is,
The inertial body 62 is attached to the moving body 60 via the piezoelectric element 61, and the moving body 60 is held on the guide surface 63 by a frictional force. The moving body 60 is placed on the guide surface 63 and held by frictional force. Then, by controlling the applied voltage pattern of the piezoelectric element 61 coupled to one end of the moving body 60, an appropriate acceleration is given to the inertial body 62, and a small distance of the moving body 60, for example, the order of μm is obtained by the reaction. Things.

【0004】[0004]

【発明が解決しようとする課題】前記従来例は、リニア
スライドではなく、また振動片とローターの接点で摩耗
が生じやすいという課題があり、実用化には至っていな
いという課題がある。また、第2の従来例は、移動距離
がnmからμmの範囲であり、微小距離の移動のみに用
途が限定されるという問題点がある。
The above-mentioned conventional example has a problem that it is not a linear slide, and a problem that the contact point between the vibrating reed and the rotor is apt to occur, so that it has not been put to practical use. Further, the second conventional example has a problem that the moving distance is in the range of nm to μm, and the application is limited to only a small distance of movement.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するた
め、本願請求項1に記載の発明は、筒型形状を成す2個
の圧電セラミックスをスペーサを挟んで同軸的に連結
し、前記各圧電セラミックスの中央開口部内に筒型形状
の弾性体をそれぞれ配設し、一方の弾性体の内周面には
中心軸に対して所定角度傾斜した複数の突起片から成る
第1の突起片群が形成され、他方の弾性体の内周面には
前記第1の突起片群とは反対の方向に傾斜した複数の突
起片から成る第2の突起片群が形成され、更に、前記各
弾性体の中央開口部には前記第1の突起片群及び第2の
突起片群と接触するパイプ形状の移動体が挿通され、前
記各圧電セラミックスのいずれか一方に交番電圧を印加
して超音波振動を発生させ、前記移動体を軸方向に可逆
的にスライド可能としたことが特徴である。また、請求
項2に記載の発明は、筒型形状を成す2個の圧電セラミ
ックスをスペーサを挟んで同軸的に連結し、各圧電セラ
ミックスの中央開口部にパイプ状の移動体を挿通させ、
前記圧電セラミックスの周囲部及び前記移動体を覆装す
る2段円筒構造を成す弾性体を前記各圧電セラミックス
毎に配置し、一方の弾性体と移動体との接触部には移動
体の軸方向に対して傾斜した複数の突起片から成る第1
の突起片群を形成し、他方の弾性体と移動体との接触部
には前記第1の突起片群とは反対の方向に傾斜した複数
の突起片から成る第2の突起片群を形成し、前記各圧電
セラミックスのいずれか一方に交番電圧を印加して超音
波振動を発生させ、前記移動体を軸方向に可逆的にスラ
イド可能としたことを特徴とする。請求項3に記載の発
明は、筒型形状を成す圧電セラミックスの中央開口部内
に筒型形状の弾性体を配設し、更に、この弾性体の中央
開口部にパイプ状の移動体を挿入し、前記圧電セラミッ
クスに交番電圧を印加して超音波振動を発生させ、前記
移動体を軸方向にスライドさせる超音波リニアスライド
機構において、前記移動体の周囲部に、該移動体の軸方
向に対して所定の方向に傾斜した突起片を複数個形成し
たことを特徴とする。
In order to achieve the above-mentioned object, the invention according to claim 1 of the present application is directed to a two-piece type having a cylindrical shape.
Piezoelectric ceramics coaxially connected with a spacer in between
And a cylindrical shape in the central opening of each of the piezoelectric ceramics.
Are disposed, and the inner peripheral surface of one of the elastic bodies
Consists of a plurality of protrusions inclined at a predetermined angle to the central axis
A first projection piece group is formed, and on the inner peripheral surface of the other elastic body,
A plurality of protrusions inclined in a direction opposite to the first protrusion piece group.
A second group of projections made of raised pieces is formed.
In the central opening of the elastic body, the first projection piece group and the second
A pipe-shaped moving body that comes into contact with the projections
Alternating voltage applied to one of the piezoelectric ceramics
To generate ultrasonic vibrations and reversibly move the moving body in the axial direction.
It is characterized by being able to slide. Also, billing
The invention described in Item 2 is the two piezoelectric ceramics having a cylindrical shape.
Are connected coaxially with a spacer
Insert a pipe-shaped moving body through the center opening of the mix,
Covering the periphery of the piezoelectric ceramic and the moving body
Each of the above-mentioned piezoelectric ceramics
And move to the contact part between one elastic body and the moving body
A first projection comprising a plurality of projections inclined with respect to the axial direction of the body;
And a contact portion between the other elastic body and the moving body.
Has a plurality of projections inclined in the direction opposite to the first projection piece group.
Forming a second projection group consisting of the projection pieces of
An alternating voltage is applied to one of the ceramics to produce a supersonic
Wave vibration is generated, and the moving body is reversibly slid in the axial direction.
It is characterized by being able to perform id. Claim 3
Akira is in the center opening of a cylindrical piezoelectric ceramic.
A cylindrical elastic body is provided at the center of the elastic body.
Insert a pipe-shaped moving body into the opening, and
To generate an ultrasonic vibration by applying an alternating voltage to the
Ultrasonic linear slide that slides the moving body in the axial direction
In the mechanism, an axial direction of the moving body is provided around the moving body.
Forming a plurality of projecting pieces inclined in a predetermined direction with respect to the
It is characterized by having.

【0006】[0006]

【発明の作用】本願発明は、筒型の圧電セラミックスの
上下面に設けた電極に電界を印加するとその印加電圧パ
ターンによって制御される振動が発生する超音波振動子
を利用したリニアスライド機構である。すなわち、前記
電極に電界を印加すると、長さ方向と幅方向の横効果お
よび厚み方向の縦効果による共振が得られるが、本願発
明では、圧電セラミックスを径方向に振動させることに
より圧電セラミックスの透孔内に配置した弾性体を同様
に径方向に振動させ、その突起を軸方向に振動させて、
それと摩擦接合している移動体を直線移動(リニアスラ
イド)させる。
The present invention is a linear slide mechanism using an ultrasonic vibrator that generates vibration controlled by an applied voltage pattern when an electric field is applied to electrodes provided on the upper and lower surfaces of a cylindrical piezoelectric ceramic. . That is, when an electric field is applied to the electrodes, resonance is obtained by a transverse effect in the length direction and the width direction and a longitudinal effect in the thickness direction. However, in the present invention, the piezoelectric ceramic is vibrated in the radial direction to make the piezoelectric ceramic transparent. Similarly, the elastic body arranged in the hole is vibrated in the radial direction, and the protrusion is vibrated in the axial direction,
The moving body frictionally joined to the moving body is moved linearly (linear slide).

【0007】[0007]

【実施例】本願発明を図示の一実施例に基づいて説明す
る。図1は、本願発明のリニアスライド機構1を示すも
ので、平面円形を呈し中央に透孔2を有する筒型圧電セ
ラミックス3の透孔2内に弾性体4を配設する。この筒
型圧電セラミックス3は、一例として酸化ジルコン、酸
化チタンおよび酸化鉛の粉末原料に適当な添加物を微量
加え、加圧機で成形し、1200℃前後で焼成することによ
って得られるジルコン・チタン酸鉛セラミックス(PZ
Tセラミックス)などの使用をするがそれに限定するも
のではない。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described based on one embodiment shown in the drawings. FIG. 1 shows a linear slide mechanism 1 according to the present invention, in which an elastic body 4 is arranged in a through hole 2 of a cylindrical piezoelectric ceramic 3 having a plane circular shape and having a through hole 2 in the center. As an example, the cylindrical piezoelectric ceramic 3 is made of zircon-titanate obtained by adding a small amount of an appropriate additive to zircon oxide, titanium oxide, and lead oxide powder raw materials, molding with a press, and firing at about 1200 ° C. Lead ceramics (PZ
T ceramics) or the like, but is not limited thereto.

【0008】また、前記弾性体4は、金属、天然ゴムま
たは合成ゴムなどのゴム、ABS樹脂などの硬質プラス
チックあるいは炭素繊維やガラス繊維の積層体または金
属との複合体などで耐摩耗性に優れた材質を適宜使用す
る。
The elastic body 4 is made of metal, rubber such as natural rubber or synthetic rubber, hard plastic such as ABS resin, a laminate of carbon fiber or glass fiber, or a composite with metal, and has excellent wear resistance. Use the appropriate material.

【0009】そして、上記弾性体4は、圧電セラミック
ス3の透孔2内に一体に固定し、特に次述の移動体5を
スライドする突起6を内壁面に配設している。移動体5
は、金属または前記弾性体と同様の材質で構成してい
る。前記突起6は、移動体5と接触する箇所を若干下方
に傾斜して方向性を持たせている。
The elastic body 4 is integrally fixed in the through hole 2 of the piezoelectric ceramic 3, and a projection 6 for sliding the moving body 5 described below is provided on the inner wall surface. Moving object 5
Is made of metal or the same material as the elastic body. The protrusion 6 has a direction by inclining a portion in contact with the moving body 5 slightly downward.

【0010】に、圧電セラミックス3に電界を印加す
るための電極を厚さ方向の上下に接続し、それそれ上部
電極7、下部電極8を形成し、それを図示省略の駆動回
路に接続している。
[0010] Further, the connecting electrodes for applying an electric field to the piezoelectric ceramic 3 and below the thickness direction, it it the upper electrode 7, forming the lower electrode 8, and connect it to the drive circuit (not shown) ing.

【0011】図3は、上記実施例と同様のものをスペー
サを介して上下に配置した事例であって、特に前記突起
6の傾斜が対称的になるように配置して、上下何れか一
方の圧電セラミックスの電極に電界を印加すると前記と
同様の作用によっていずれかの傾斜の向きの方向に移動
体を可動するものである。
FIG. 3 shows an example in which the same components as those in the above-described embodiment are arranged vertically with a spacer interposed therebetween. When an electric field is applied to the piezoelectric ceramic electrode, the moving body can be moved in any direction of the inclination by the same action as described above.

【0012】また、図4は本発明の他の実施例を示す構
成図であり、同図に示すようにこの実施例では圧電セラ
ミックス10,11を上下2段に配置し、この周囲部に
2段円筒構造の弾性体14,15を配置している。そし
て、この弾性体14,15の狭径部と移動体16との間
には突起12,13がそれそれ配置されている。そし
て、各突起12,13は移動体16の長手方向に対して
逆方向に傾斜している。
FIG. 4 shows another embodiment of the present invention.
In this embodiment, as shown in FIG.
Mixes 10 and 11 are arranged in upper and lower tiers,
Elastic bodies 14 and 15 having a two-stage cylindrical structure are arranged. Soshi
Between the narrow diameter portions of the elastic bodies 14 and 15 and the moving body 16.
Are provided with projections 12 and 13, respectively. Soshi
Therefore, each of the projections 12 and 13 is positioned with respect to the longitudinal direction of the moving body 16.
Slant in the opposite direction.

【0013】図5は、更に他の実施例の構成を示す説明
図であり、この実施例では弾性体22側に突起22を形
成するのではなく移動体20の外周部に鋸歯状の突起2
1を形成することにより、弾性体を振動させたときに移
動体が所定の方向にスライドし得るように構成したもの
である。
FIG . 5 is a diagram showing the configuration of still another embodiment.
In this embodiment, a projection 22 is formed on the elastic body 22 side.
Instead of being formed, a serrated protrusion 2
By moving the elastic body 1, when the elastic body is vibrated,
Structured so that a moving body can slide in a predetermined direction
It is.

【0014】図4に示す実施例は、筒型の圧電セラミッ
クスに電極を介して電界を印加すると、径方向の振動が
発生し、その振動が弾性体に伝達して、突起の傾斜方向
との分力によって送り方向に移動体を直線移動させる。
図において、上側の電極を架電すると下方に、下側の電
極を架電すると上方に移動体を送る大きな駆動力が得ら
れるものである。
In the embodiment shown in FIG. 4, when an electric field is applied to a cylindrical piezoelectric ceramic through an electrode, radial vibrations are generated, and the vibrations are transmitted to the elastic body, and the vibrations with respect to the inclination direction of the projections are generated. The moving body is moved linearly in the feed direction by the component force.
In the figure, when the upper electrode is charged, a large driving force for sending the moving body downward is obtained by charging the lower electrode, and when the lower electrode is charged, a large driving force is obtained.

【0015】[0015]

【発明の効果】本願発明は、前述のように極めてコンパ
クトでありながら超音波振動子の特徴である省電力高ト
ルクを利用した可逆的なリニアスライド機構であり、し
かもスライド時でも静音であり、例えば、バックミラー
に搭載されるアクチェータのような駆動機構への採用を
可能にしてる。
As described above, the present invention is a reversible linear slide mechanism that utilizes the power saving and high torque characteristic of an ultrasonic vibrator while being extremely compact as described above. For example, rearview mirror
It is enabling adoption to the driving mechanism such as the actuator to be mounted on.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本願発明の作動状態を説明する断面図。FIG. 1 is a sectional view illustrating an operation state of the present invention.

【図2】同上斜視図。FIG. 2 is a perspective view of the same.

【図3】同上第2の実施例を示す断面図。FIG. 3 is a sectional view showing a second embodiment of the same.

【図4】同上第3の実施例を示す断面図。FIG. 4 is a sectional view showing a third embodiment of the same.

【図5】同上第4の実施例の一部を示す断面図。FIG. 5 is a sectional view showing a part of the fourth embodiment;

【図6】第1の従来例を示す説明図。FIG. 6 is an explanatory view showing a first conventional example.

【図7】第2の従来例を示す説明図。FIG. 7 is an explanatory diagram showing a second conventional example.

【符号の説明】[Explanation of symbols]

1…リニアスライド機構、2…透孔、3…筒型圧電セラ
ミックス4…弾性体、5…移動体、6…突起、7…上部
電極、8…下部電極
DESCRIPTION OF SYMBOLS 1 ... Linear slide mechanism, 2 ... Through-hole, 3 ... Cylindrical piezoelectric ceramics 4 ... Elastic body, 5 ... Moving body, 6 ... Projection, 7 ... Upper electrode, 8 ... Lower electrode

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 筒型形状を成す2個の圧電セラミックス
をスペーサを挟んで同軸的に連結し、前記各圧電セラミ
ックスの中央開口部内に筒型形状の弾性体をそれぞれ配
設し、一方の弾性体の内周面には中心軸に対して所定角
度傾斜した複数の突起片から成る第1の突起片群が形成
され、他方の弾性体の内周面には前記第1の突起片群と
は反対の方向に傾斜した複数の突起片から成る第2の突
起片群が形成され、更に、前記各弾性体の中央開口部に
は前記第1の突起片群及び第2の突起片群と接触するパ
イプ形状の移動体が挿通され、 前記各圧電セラミックスのいずれか一方に交番電圧を印
加して超音波振動を発生させ、前記移動体を軸方向に可
逆的にスライド可能としたことを特徴とする 超音波リニ
アスライド機構。
1. Two piezoelectric ceramics having a cylindrical shape
Are connected coaxially with a spacer in between, and the piezoelectric ceramics
A cylindrical elastic body is placed in the center opening of the box.
A predetermined angle with respect to the central axis on the inner peripheral surface of one elastic body.
A first projection piece group formed of a plurality of projection pieces inclined at an angle is formed.
On the inner peripheral surface of the other elastic body, the first projection piece group is provided.
Is a second projection consisting of a plurality of projections inclined in opposite directions.
A raised piece group is formed, and furthermore, at the central opening of each elastic body.
Is a pattern that comes into contact with the first projection piece group and the second projection piece group.
A moving body in the shape of an arrow is inserted, and an alternating voltage is applied to one of the piezoelectric ceramics.
To generate ultrasonic vibrations to move the moving body in the axial direction.
Ultrasonic linear slide mechanism characterized by being slidable in reverse .
【請求項2】 筒型形状を成す2個の圧電セラミックス
をスペーサを挟んで同軸的に連結し、圧電セラミック
スの中央開口部にパイプ状の移動体を挿通させ、前記圧
電セラミックスの周囲部及び前記移動体を覆装する2段
円筒構造を成す弾性体を前記各圧電セラミックス毎に配
置し、一方の弾性体と移動体との接触部には移動体の軸
方向に対して傾斜した複数の突起片から成る第1の突起
片群を形成し、他方の弾性体と移動体との接触部には前
記第1の突起片群とは反対の方向に傾斜した複数の突起
片から成る第2の突起片群を形成し、 前記各圧電セラミックスのいずれか一方に交番電圧を印
加して超音波振動を発生させ、前記移動体を軸方向に可
逆的にスライド可能としたことを特徴とする超音波リニ
アスライド機構。
2. A piezoelectric body having a cylindrical shape is connected coaxially with a spacer interposed therebetween, and a pipe-shaped moving body is inserted through a central opening of each piezoelectric ceramic.
Two steps covering the periphery of the electroceramics and the moving body
An elastic body having a cylindrical structure is provided for each of the piezoelectric ceramics.
And the contact point between one elastic body and the moving body is the axis of the moving body.
A first projection comprising a plurality of projection pieces inclined with respect to a direction
One group is formed, and the contact part between the other elastic body and the moving body is
A plurality of projections inclined in a direction opposite to the first projection piece group;
Forming a second projection piece group consisting of a piece , applying an alternating voltage to one of the piezoelectric ceramics to generate ultrasonic vibration, and allowing the moving body to slide reversibly in the axial direction. Ultrasonic linear slide mechanism characterized by the following.
【請求項3】 筒型形状を成す圧電セラミックスの中央
開口部内に筒型形状の弾性体を配設し、更に、この弾性
体の中央開口部にパイプ状の移動体を挿入し、前記圧電
セラミックスに交番電圧を印加して超音波振動を発生さ
せ、前記移動体を軸方向にスライドさせる超音波リニア
スライド機構において、 前記移動体の周囲部に、該移動体の軸方向に対して所定
の方向に傾斜した突起片を複数個形成したことを 特徴と
する超音波リニアスライド機構。
3. A central pressure conductive ceramics to forming a tubular shape
A cylindrical elastic body is arranged in the opening, and
Insert a pipe-shaped moving object into the central opening of the
An ultrasonic vibration is generated by applying an alternating voltage to the ceramics.
, The ultrasonic linear to slide the moving body in the axial direction
In the slide mechanism, a predetermined portion is provided around the moving body with respect to the axial direction of the moving body.
An ultrasonic linear slide mechanism characterized by forming a plurality of protrusions inclined in the direction of .
JP3044135A 1991-02-16 1991-02-16 Ultrasonic linear slide mechanism Expired - Fee Related JP2701093B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3044135A JP2701093B2 (en) 1991-02-16 1991-02-16 Ultrasonic linear slide mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3044135A JP2701093B2 (en) 1991-02-16 1991-02-16 Ultrasonic linear slide mechanism

Publications (2)

Publication Number Publication Date
JPH04265671A JPH04265671A (en) 1992-09-21
JP2701093B2 true JP2701093B2 (en) 1998-01-21

Family

ID=12683186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3044135A Expired - Fee Related JP2701093B2 (en) 1991-02-16 1991-02-16 Ultrasonic linear slide mechanism

Country Status (1)

Country Link
JP (1) JP2701093B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2838175B1 (en) * 2002-04-04 2004-10-08 Jean Claude Lauzeille REPTATION MOTORIZATION PROCESS FOR ALLOWING PRECISE MOVEMENT AND POSITIONING OF LOADS, AND DEVICE FOR IMPLEMENTING SAME
JP5256463B2 (en) * 2008-03-17 2013-08-07 国立大学法人東京農工大学 Flexible actuator
CN104454774B (en) * 2014-11-04 2016-06-08 哈尔滨工业大学 The low frictional behavior cylinder of piezoelectric pile activation rod seal circle radial vibration
EP3537595A1 (en) 2018-03-09 2019-09-11 ETA SA Manufacture Horlogère Suisse Long-stroke linear piezoelectric motor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS602082A (en) * 1984-05-01 1985-01-08 Shinsei Kogyo:Kk Straight line drive device utilizing supersonic vibration
JPH01126180A (en) * 1987-11-10 1989-05-18 Nec Corp Ultrasonic motor
JPH01133580A (en) * 1987-10-21 1989-05-25 Philips Gloeilampenfab:Nv Rotary or linear motor whose armature is driven by ultrasonic vibration

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02129193U (en) * 1989-03-30 1990-10-24

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS602082A (en) * 1984-05-01 1985-01-08 Shinsei Kogyo:Kk Straight line drive device utilizing supersonic vibration
JPH01133580A (en) * 1987-10-21 1989-05-25 Philips Gloeilampenfab:Nv Rotary or linear motor whose armature is driven by ultrasonic vibration
JPH01126180A (en) * 1987-11-10 1989-05-18 Nec Corp Ultrasonic motor

Also Published As

Publication number Publication date
JPH04265671A (en) 1992-09-21

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