JP2700086B2 - Film sticking device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film sticking apparatus for sticking a film on the surface of a substrate for printed wiring or the like.

[0002]

2. Description of the Related Art In the process of manufacturing a printed wiring board used for electronic equipment such as a computer, a conductive layer on a surface of a printed wiring board is provided on a light-transmitting support film (usually a resin film represented by polyester). A laminate film having a photosensitive resin layer formed thereon and covered with a cover film is peeled off and pasted on the cover film. After that, a wiring pattern film is overlaid, and the photosensitive resin layer is exposed for a predetermined time through the wiring pattern film and the translucent support film. Next, after the light-transmitting support film is peeled off, the exposed photosensitive resin layer is developed to form an etching mask pattern, and thereafter, unnecessary portions of the conductive layer are removed by etching. A printed wiring board having the above wiring pattern is formed.

[0003] A film sticking apparatus for sticking a laminated film as described above is provided with a photosensitive resin layer on a leading end of a substrate conveyed by a conveying means to a continuous film loaded on a film supply roll. After being guided to the substrate side and temporarily attached to the front end of the substrate by a temporary attaching means capable of moving close to and away from the substrate, the lamination roll presses the film onto the substrate while transferring the substrate. Have been. The film pressure bonding to the substrate is performed so that the bonding length is substantially equal to the substrate length, and the supply film is provided on the film temporary bonding means itself or a member in the vicinity thereof so as to have the length. Cut by the film cutting means. The cover film is
Peeled off before or after the tacking means.

The film temporary attaching means includes a main vacuum plate having a plurality of suction holes (grooves) for adsorbing a film on a surface, as disclosed in, for example, Japanese Patent Application Laid-Open No. 63-117487. An arc-shaped or triangular-shaped film tacking member provided on the leading end side of the main vacuum plate in the film feeding direction is provided. It is designed to move away.

[0005] The film temporary attaching means moves close to the substrate in a state where the film is adsorbed on the surface when the film is supplied and the temporary attaching operation is performed, and when the film supply and the temporary attaching operation are completed, the film is temporarily attached. Is released and moves away from the substrate. When the suction of the film is released, the film is separated from the surface of the film tacking means.

After the temporary attachment, the substrate is transported while the film is pressed against the substrate by the lamination roll. During the film compression operation by the lamination roll, the film is kept away from the surface of the film temporary attaching means. Has become.

When a film is pasted on each of the conveyed substrates, both the operations of supplying and temporarily attaching the film and the pressing operation are repeated for each substrate.

[0008] A heater is provided at the tip of the film temporary attaching member, whereby the film temporary attaching tip is heated so that it can be temporarily attached to the tip of the substrate.

[0009]

However, the heat generated from the heater at the tip of the film tacking member is controlled by disposing a heat insulating material between the main vacuum plate and the main vacuum plate as disclosed in Japanese Patent Application Laid-Open No. 63-117487. Even so, it is transmitted to the main vacuum plate side and heats the film.

For this reason, conventionally, when the heat radiation from the main vacuum plate is insufficient, the laminated film is heated to a high temperature. In particular, when the thickness of the translucent support film layer is 50 μm or less and thin, (1) during the film supply and the tacking operation, while the film is in contact with the surface of the film tacking means, Although the heat affects the photosensitive resin layer, it does not contact the surface of the film temporary attaching means during the pressing, so that the heat from the means does not affect the photosensitive resin layer, and the photosensitive resin The thermal histories provided to the layers are different, which can cause defective wiring patterns formed after exposure and development. Also, (2) the laminated film becomes soft at high temperature and bends by negative pressure at the suction holes and suction grooves of the main vacuum plate to form concave portions following the patterns of these suction holes and suction grooves. The thickness of the conductive resin layer may be uneven.

When the laminate film having the uneven thickness of the photosensitive resin layer is stuck on the substrate, the uneven thickness of the photosensitive resin layer adheres to the substrate. A part of the wiring pattern to be formed may be thin or cut.

This occurs even when the cover film is not peeled off when the main vacuum plate is sucked, but is remarkable when the main vacuum plate is sucked to the main vacuum plate in a peeled state.

Further, when the cover film is peeled off after the main vacuum plate (between the temporary attachment means and the substrate), the viscosity of the photosensitive resin layer becomes unstable due to high temperature, and the above-mentioned (1), ( In addition to the problem of 2), even if the cover film is pulled from the photosensitive resin layer with a constant force in the peeling direction, the peeling point fluctuates, and the photosensitive resin layer is streaked in the film width direction at an irregular interval in the feeding direction. May occur.

Such streaks, as well as differences in the thermal history applied to the photosensitive resin layer and unevenness in the thickness of the photosensitive resin layer that may occur in connection with the concave portions, cause There is a problem that uneven thickness and uneven adhesion to the substrate are generated, and as a result, the wiring pattern of the substrate is thinned or cut, resulting in poor development.

The present invention has been made in view of the above-mentioned conventional problems, and the laminated film is less likely to be heated from the main vacuum plate. It is an object of the present invention to provide a film sticking apparatus which adheres well to a substrate without causing unevenness or streaks and prevents development defects such as thinning and cutting of a wiring pattern.

[0016]

According to the present invention, a continuous film in which a photosensitive resin layer and a cover film are laminated on a light-transmitting support film is drawn out from a film supply roll, and at least the light-transmitting support film and the photosensitive In a state where the resin layer and the resin layer are stacked, the photosensitive resin layer side is guided to the front end of the substrate conveyed by the conveying means such that the photosensitive resin layer side is located on the substrate side, and a temporary attachment that can move close to and away from the substrate. After being temporarily attached to the tip of the substrate by a member, the lamination roll is used to convey the substrate while pressing the film against the substrate, and the temporary attaching member includes a film suction means on the surface along the film path. A main vacuum plate, and a main vacuum plate, which is disposed adjacent to the leading end of the main vacuum plate in the film feeding direction, Continuously curved from the surface, the film tacking member body with a film suction means and the surface,
In a film sticking apparatus in which the vicinity of the front end of the film temporary attaching member in the film feeding direction is heated by a heater, a positioning portion is provided between opposing surfaces of the main vacuum plate and the film temporary attaching member main body. With the exception of providing a gap, the above object is achieved.

The gap is formed by a positioning projection protruding between the main vacuum plate and the film tacking member main body, and a gap is formed from the periphery of the positioning projection. The above object is similarly achieved by providing an open gap communicating to the outside.

Further, the above-mentioned object is achieved similarly by providing the duct through which the cooling air is circulated.

Further, the above-mentioned object is achieved in the same manner by providing the cooling liquid passage through which the cooling liquid flows.

[0020]

According to the first aspect of the present invention, the heat to be transmitted from the film temporary attaching portion main body to the main vacuum plate is radiated in the gap between them, and the main vacuum plate is not heated, so that the leading end of the film is not heated. Even when the film is adsorbed on the main vacuum plate when the film is temporarily attached to the front end of the substrate by the temporary attachment device, the film is not heated by the main vacuum plate, and therefore, the difference in heat history between the photosensitive resin layer and No unevenness in thickness and no streaks are generated, and thus, there is no occurrence of development failure such as thin and cut wiring patterns after exposure and development.

According to the second aspect of the present invention, the main vacuum plate and the film temporary attaching member main body are in contact only by the positioning projections, and the gap between them is released, so that the film temporary attaching member main body has an end. The amount of heat transferred from the provided heater to the main vacuum plate is small, and thereby the temperature rise of the main vacuum plate can be suppressed.

According to the third aspect of the present invention, since the cooling air is passed through the gap, the temperature rise of the film can be further suppressed.

According to the fourth aspect of the present invention, since the cooling liquid is passed through the gap, the temperature rise of the film can be further suppressed.

[0024]

Embodiments of the present invention will be described below with reference to the drawings.

First, a schematic configuration of a film sticking apparatus R to which the present invention is applied will be described with reference to FIG.

The laminate film 1 has a three-layer structure of a translucent support film, a photosensitive resin layer, and a cover film (a non-photosensitive resin protective film), and is continuously wound around a supply roll 2. .

The laminated film 1 from the supply roll 2 is
A film 1 comprising a cover film 1A, a photosensitive resin layer having one surface (adhesion surface) exposed, and a light-transmitting support film through a guide roll 3 and a film separating member 3A.
B.

The separated cover film 1A is configured to be wound by a winding roll 4. The supply roll 2 and the take-up roll 4 are connected to the substrate transport path I
Each pair is provided symmetrically about -I.

The leading end in the supply direction of the other separated film 1B is supplied to the temporary attaching member 6 via guide rolls 5 and 18.

The temporary attaching member 6 is provided with a large number of suction grooves and suction holes (details will be described later) to which a negative pressure is applied so that the film 1B can be adsorbed, and is close to the film attaching position. Move away (moving up and down)
It is configured as follows.

The temporary attachment member 6 is slidably attached to a guide rail 7, and the guide rail 7 is attached to a temporary attachment member support plate 8. The temporary attachment member support plate 8 is provided on a mounting frame (not shown) of the apparatus main body so as to be vertically movable via a rack gear and a pinion gear 10. The rack gear is moved up and down by a drive motor 11.

Further, a film holding member 12 for winding the front end is provided on a mounting frame of the apparatus main body by a front and rear guide rail (not shown).
Slidably and vertically movable.

The film holding member 12 for winding the front end is provided with a suction groove and a suction hole (both not shown) to which a negative pressure is applied.
Only the suction hole is provided in the front end area on the fifth side so that the film 1B can be reliably held by the front end winding film holding member 12. The fixed blade 1
The length of the blade portion 5 is set so as to cover the film width.

Further, the film holding member 12 for winding the leading end is provided.
, A connecting rod 13 is restrained in the advancing and retreating direction with respect to the film 1B, and is slidably fitted in the vertical direction slidably. The connecting rod 13 is attached to a fixed blade support member 14, and further fixed. The fixed blade 15 is supported by the blade support member 14.

The range in which the tip-winding film holding member 12 can be moved up and down is determined by utilizing expansion and contraction of a compression spring (not shown) provided between the film holding member 12 and the fixed blade supporting member 14. Is set.

Reference numeral 17 denotes a rotary blade of a rotary cutter. The rotary blade 17 is provided on the surface of a columnar member arranged in the lateral direction so as to be slightly oblique in the longitudinal direction and to have a length covering the film width. A blade is provided.

Reference numeral 16 in FIG. 2 is a rotary blade support member.
The rotary blade 17 is rotatably supported by the rotary blade support member 16 at a position facing the fixed blade 15 to form a rotary cutter.

Air blow tubes 19 and 20 for blowing air toward the film are provided above and below the rotary blade support member 16, respectively. This air blowing pipe 19, 2
0, an air blowing hole (not shown) is provided on the side facing the film 1B, for example, along the longitudinal direction of each tube.
Many are drilled at mm pitch.

2 is a lamination roll.
22 is a printed wiring board substrate, 23A is a driving roll,
23B denotes a driven roll, 24 denotes a substrate pressing member, and 25 denotes a vacuum bar.

The substrate holding member 24 is composed of a substrate holding roll 24A and an air cylinder 24B for moving the substrate up and down.

The relationship between the lamination rolls 21 and the substrate holding member 24 is as follows.

When the leading end of the printed wiring board substrate 22 is detected by the board leading end detection sensor 27 provided near the substrate transport path, and after a predetermined time, the printed wiring board substrate 22 is transported to the film temporary attachment position. The rotation of the driving roll 23A is stopped. At the same time, the substrate holding member 24
The substrate holding roll air cylinder 24B for moving the substrate holding roll 24A is operated so that the substrate is held down by the pressing operation.

The movement of the printed wiring board substrate 22 is reliably stopped by the board holding roll 24A, and the leading end 30 of the film tacking member body 30 in the tacking member 6 is stopped.
Even if A touches the printed wiring board substrate 22, the printed wiring board substrate 22 does not move, and the temporary attachment of the film 1B is reliably performed.

The pressing of the printed wiring board substrate 22 by the substrate pressing roll 24A is performed by the lamination roll 21.
Is performed until it comes into contact with the printed wiring board substrate 22, and the substrate holding roll air cylinder 24B is released in synchronization with the contact timing of the lamination roll 21.

Reference symbol S1 in FIG.
S2 indicates a substrate rear end detection sensor, and S3 indicates a substrate passage detection sensor.

As shown in FIG. 1, the temporary attaching member 6 is a flat plate parallel to the path of the film 1B and has a main vacuum plate 28 having a film suction groove 28A formed on the surface thereof. Vacuum plate 28
And a film tacking member body 30 continuously curved from the surface of the main vacuum plate 28 and having a film suction groove 30B formed on the surface thereof. In the vicinity of the leading end 30A of the main body 30 in the film feeding direction,
The heater 32 is embedded so as to heat the distal end portion 30A.

A spacer 38A in the film thickness direction and a spacer 38B in the film feed direction are interposed between the main vacuum plate 28 and the film tacking member main body 30 on an opposing surface having a substantially L-shaped cross section. , Set screw 4
When the film temporary attaching member main body 30 is connected to the main vacuum plate 28 by a zero, a gap 42 to be released to the outside around the spacers 38A and 38B serving as positioning members.
Is formed. Here, the spacer 38
The height of A, 38B, that is, the gap 42 is usually 2 mm or more, and preferably 2 to 10 mm for practical use.

The main vacuum plate 28 is located on the path side of the film 1B and has a suction plate 44 having the film suction groove 28A formed on the surface thereof.
And a backup member 50 connected to the opposite side of the film path by a set screw 48 via a frame-shaped heat-resistant rubber packing 46.

As shown in FIG. 3, the frame-shaped heat-resistant rubber packing 46 has a plurality of vacuum spaces 56 in the film width direction, is formed near the center of each vacuum space 56, and has the thickness of the backup member 50. It communicates with a vacuum source (not shown) via a vacuum port 58 penetrating in the vertical direction.

The film suction grooves 28 A of the suction plate 44 extend in a direction perpendicular to the film feeding direction and are formed in a plurality of rows in the film feeding direction. Each of the grooves is located at a position communicating with the vacuum space 56. , A plurality of vacuum holes 28B penetrating toward the vacuum space 56 side. As shown in FIG. 1, the film temporary attaching member main body includes an inclined suction surface 31 which is continuous from the surface of the main vacuum plate 28 and is inclined with respect to the surface.
The film suction grooves 30B are formed in a plurality of rows in a direction perpendicular to the film feeding direction.

The film suction groove 30B has a plurality of vacuum holes 30 formed at appropriate intervals in the longitudinal direction.
C is communicated, and these vacuum holes 30 </ b> C are communicated with a vacuum path 33 in the film tacking member main body 30. The vacuum path 33 is connected to a vacuum source (not shown) via a negative pressure pipe 33A.

The inclined suction surface 31 forms an acute angle with the back surface of the film tacking member main body 30 which is parallel to the surface of the main vacuum plate 28, and has a tip portion 30A.
Is a block member 60 in which the heater 32 is embedded.
Are formed by the lower end in the figure.

The block member 60 is connected to the film temporary attaching member main body 30 via a heat insulating rubber seal 61. Further, in the drawing of the block member 60, the lower end, that is, the distal end portion 30A is mainly composed of a substantially triangular heat-resistant rubber 59.

Here, the block member 60 is fitted and mounted in a plurality of mounting grooves 62 formed on the back surface of the film temporary bonding member main body 30 in the film width direction.

Next, a signal path of a control system of the film sticking apparatus of the embodiment will be described with reference to FIG.

In this control system, each of the sensors S1 to S
Along with 3, the central control unit 70 outputs a control signal for each cylinder solenoid and each motor in accordance with the film winding diameter sensors for the front and rear end detection sensors (not shown) of each cylinder. It also has a counter and timer function.

The central control unit 70 is configured to control the film sticking device R in accordance with the procedure shown in FIG. The central control unit 70 can be constituted by, for example, a programmable control or a relay sequence circuit.

Next, the film sticking apparatus R according to the above embodiment is used.
Will be described with reference to FIG.

The film sticking apparatus R operates mainly according to the procedure shown in FIG.

First, the state in which the film 1B is ready to be stuck is manually set (step 1). That is, the supply roll 2 around which the sufficient laminated film 1 is wound is set in the film sticking apparatus R.

Next, the laminated film 1 is passed from the guide roll 3 to the film separating member 3A to be separated into the cover film 1A and the film 1B composed of the photosensitive resin layer and the translucent resin film. Film separation member 3
The film 1B separated in the step 1 is fixed to the fixed blade 1 from the tacking member 6.
Send up to 5. In this case, the rotary blade 17 can be manually separated from the fixed blade 15, and the rotary blade 17 and the fixed blade 15 can be manually separated.
After passing the film 1B between the rotating blades 1
7 is brought close to the fixed blade 15.

Next, the film 1B is cut by rotating the rotary blade 17 manually (step 2). Next, the tacking member 6, the lamination roll 21 and the like are set as original positions (step 3). In this case, the temporary attaching member 6 is lowered to some extent from the rising end, and the film transport surface of the temporary attaching member 6 and the front end wrapped film holding member 12 are set to be in the same state.

Next, automatic operation is started (step 4). On the other hand, when the printed wiring board 22 is conveyed to the board loading section and the board 22 is detected by the width shift start position sensor S1, the board 22 is shifted by a width adjusting device (not shown). At a predetermined width direction position.

When the printed wiring board 22 is moved in the transport direction and the leading end of the board 22 is detected by the board rear end detection sensor S2 (step 5), the film holding member 12 is moved in the board transport direction. Moving. Thereby, the film 1B is wound around the temporary attachment portion 6A at the tip of the temporary attachment member 6 (step 6).

Next, when the leading edge of the board 22 is detected by the board leading edge detection sensor 27, the central control unit 70 starts counting by the counter according to the detection signal. In this counting, a predetermined time set in advance is counted, and the leading end of the substrate 22 in the transport direction is stopped at the temporary attachment position.

By the time the tacking member 6 advances and is tacked temporarily, the board holding roll 24A is in contact with the board holding member 24.
Is lowered in the direction of the substrate 22 by the
A and the substrate 22 are sandwiched.

Next, the film 1B is temporarily attached to the substrate 22 by advancing the temporary attaching member 6 (step 7).

That is, while the other counter operates,
The upper and lower tacking members 6 are driven by the tacking member drive motor 11 while being synchronized by the pinion gear 10, and the
2 toward the upper and lower surfaces.

In this case, the drive motor 11 is stopped at a position, for example, 2 cm before the upper and lower surfaces of the substrate 22.
Thereafter, the tacking member 6 is advanced by the driving force of the tacking member driving air cylinder (not shown), and the tacking portion 6A is brought closer to the upper and lower surfaces of the substrate 22.

At this time, a pressing force is applied to a pair of air cylinders (not shown) provided at both ends in the width direction (along the width direction of the film 1B) of the tacking member 6.

Next, the tacking member 6 is retracted in a direction away from the substrate 22, and the lamination roll 21 is advanced so as not to interfere with the film tacking member main body 30 of the tacking member 6, and the lamination roll 21 is moved. At 21, pressure bonding of the temporarily attached film 1 </ b> B is started (step 8).

Next, when the pressing of the film 1B by the lamination roll 21 proceeds and the rear end of the film 1B to be stuck to the substrate 22 reaches the position of the cutter,
The film 1B is sucked by the temporary attaching member 6, and the film 1B is cut by the cutter (step 9).

In the above-described film attaching process, the heat transfer from the film temporary attaching member main body 30 to the main vacuum plate 28 in the temporary attaching member 6 is radiated through the gap 42, so that the temperature of the main vacuum plate 28 becomes high. According to the experiment of the present inventor, it has been found that the surface temperature of the suction plate 44 has conventionally been 70 to 120 ° C.
It could be suppressed to about ° C. Therefore, regarding the photosensitive resin layer of the film 1B to be adsorbed, there is no occurrence of a difference in heat history due to a high temperature, unevenness of thickness, and instability of viscosity.

Therefore, there is no undesired difference in heat history, uneven thickness or stripes in the photosensitive resin layer in the thermocompression-laminated thin film, and the wiring pattern formed after exposure and development is thin and cut. No development failure occurs.

In the above-described embodiment, the gap 42 between the main vacuum plate 28 and the film tacking member main body 30 is set as an opening gap. This is the second embodiment of the present invention shown in FIGS. As in the second embodiment, a duct 64 through which cooling air flows may be formed between the main vacuum plate 28 and the film temporary attaching member main body 30.

7 is a compressed air source for supplying compressed air to the duct 64, and 68 is a compressed air source 66.
An air port for allowing pressurized air to flow into the duct 64 from above, an air outlet 71, a wall 72A closing the periphery of the gap 42 having an L-shaped cross section, and a seal 72B also serving as a heat insulating material.

In the case of the second embodiment, the heat transfer from the film temporary attaching member body 30 to the main vacuum plate 28 is more actively dissipated as compared with the embodiment of FIG. The temperature rise of the plate 28 can be more effectively suppressed. The duct 64
For example, as shown by a two-dot chain line in FIG. 6, the air is communicated to the vacuum path 33 through the communication hole 65, and air is sucked from outside by negative pressure. Cooling. Further, a separate exhaust device may be provided.

Next, a third embodiment of the present invention shown in FIGS. 8 and 9 will be described.

In the third embodiment, a cooling water passage 74 is formed between the main vacuum plate 28 and the film tacking member main body 30, and a cooling water source 76 passes through a cooling water port 78 by a pump 77 from the cooling water source 76. Introduce cooling water,
The cooling water whose cooling has been completed is discharged from the drain port 80.

In the case of the third embodiment, since the space between the main vacuum plate 28 and the film attaching member main body 30 is cooled by using cooling water having a large heat capacity, the temperature rise of the main vacuum plate 28 is more reliably suppressed. Not only can the temperature of the cooling water be controlled, but also the temperature of the main vacuum plate 28 can be made constant.

In the third embodiment, the cooling water passage 74 may be formed of a highly corrosion-resistant material, for example, a stainless steel pipe. In this case, the material of the temporary attaching member 6 can be made of a material such as an alumite-treated aluminum material which is more easily corroded than stainless steel but has good thermal conductivity.

In the third embodiment, the water is passed through the cooling water passage 74, but it may be any cooling liquid such as cooling oil or alcohol.

In the second and third embodiments, the temperatures of the cooling air and the cooling water may be set so that the surface temperature of the suction plate 44 of the main vacuum plate 28 becomes 20 to 30 ° C.

In the second and third embodiments, the wall 72
If the rigidity of A is sufficient, the spacers 38A and 38B may be omitted, and this portion may be a gap. By doing so, the amount of heat transferred to the main vacuum plate 28 can be further reduced.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view showing a main part of an embodiment of a film sticking apparatus according to the present invention.

FIG. 2 is a schematic sectional view schematically showing an embodiment of a film sticking apparatus according to the present invention.

FIG. 3 is an enlarged cross-sectional view showing a temporary attaching member which is a main part of the embodiment of the present invention.

FIG. 4 is a block diagram showing a configuration of an electrical signal input / output of the apparatus of the embodiment.

FIG. 5 is a flowchart showing a film crimping procedure for explaining the operation of the embodiment.

FIG. 6 is a sectional view similar to FIG. 3, showing a second embodiment of the present invention;

FIG. 7 is a cross-sectional view including a partial block diagram, taken along line VII-VII of FIG. 6;

FIG. 8 is a sectional view similar to FIG. 3, showing a third embodiment of the present invention;

FIG. 9 is a cross-sectional view along a line IX-IX of FIG. 8, including a partial block diagram.

[Explanation of symbols]

R ... Film sticking device 1 ... Laminated film 1B ... Film consisting of photosensitive resin layer and translucent support film 6 ... Temporary attachment member 21 ... Lamination roll 22 ... Printed wiring board substrate 28 ... Main vacuum plate 28A, 30B ... Film suction groove 30 ... Film temporary attachment member main body 32 ... Heater 38A, 38B ... Spacer 42 ... Gap 58 ... Vacuum port 64 ... Duct 74 ... Cooling water passage

Claims (4)

(57) [Claims] 1. A continuous film in which a photosensitive resin layer and a cover film are laminated on a light-transmitting support film is pulled out from a film supply roll, and at least the light-transmitting support film and the photosensitive resin layer are laminated. The photosensitive resin layer side is guided to the front end of the substrate conveyed by the conveying means such that the photosensitive resin layer side is located on the substrate side, and is temporarily moved to the front end of the substrate by a temporary attaching member that can move toward and away from the substrate. After the attachment, the lamination roll is used to convey the substrate while pressing the film against the substrate, and the temporary attaching member includes a main vacuum plate having a film suction means on the surface thereof along the film path, It is arranged adjacent to the leading end of the vacuum plate in the film feeding direction, continuously curved from the surface of the main vacuum plate, and A film tacking member main body having a film suction means on a surface thereof, wherein the film tacking member body is heated by a heater in the vicinity of a leading end in a film feeding direction, wherein the main vacuum plate and the main vacuum plate A film sticking device, wherein a gap is provided between a surface facing the film temporary attaching member main body except for a positioning portion. 2. The gap according to claim 1, wherein the gap is formed by a positioning projection protruding between the main vacuum plate and the film tacking member main body, and extending from the periphery of the positioning projection to outside the gap. A film sticking device characterized by an open gap communicating with the film. 3. The film sticking apparatus according to claim 1, wherein the gap is a duct through which cooling air flows. 4. The film sticking apparatus according to claim 1, wherein the gap is a coolant passage through which the coolant flows.