JP2665054B2 - Semiconductor integrated circuit - Google Patents

Semiconductor integrated circuit

Info

Publication number
JP2665054B2
JP2665054B2 JP3003000A JP300091A JP2665054B2 JP 2665054 B2 JP2665054 B2 JP 2665054B2 JP 3003000 A JP3003000 A JP 3003000A JP 300091 A JP300091 A JP 300091A JP 2665054 B2 JP2665054 B2 JP 2665054B2
Authority
JP
Japan
Prior art keywords
transistor
internal circuit
pad
pads
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3003000A
Other languages
Japanese (ja)
Other versions
JPH05172896A (en
Inventor
俊明 大島
Original Assignee
山形日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 山形日本電気株式会社 filed Critical 山形日本電気株式会社
Priority to JP3003000A priority Critical patent/JP2665054B2/en
Publication of JPH05172896A publication Critical patent/JPH05172896A/en
Application granted granted Critical
Publication of JP2665054B2 publication Critical patent/JP2665054B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は半導体集積回路に関し、
特に外部端子からその特性を測定可能な特性チェック用
モニタトランジスタを有する半導体集積回路に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor integrated circuit,
In particular, the present invention relates to a semiconductor integrated circuit having a characteristic check monitor transistor capable of measuring the characteristic from an external terminal.

【0002】[0002]

【従来の技術】従来、半導体集積回路(IC)チップに
内蔵される特性チェック用モニタトランジスタは、IC
チップ内部の内部回路とは別に設けられて測定用パッド
に接続され、その特性を測定するには、測定用パッドに
ICテスタの探針をあて測定している。
2. Description of the Related Art Conventionally, a monitor transistor for characteristic check built in a semiconductor integrated circuit (IC) chip is an IC transistor.
It is provided separately from the internal circuit inside the chip and is connected to a measurement pad. To measure the characteristics, a probe of an IC tester is applied to the measurement pad.

【0003】[0003]

【発明が解決しようとする課題】この従来のIC特性チ
ェック用モニタトランジスタでは、ウェーハまたはチッ
プとしての半導体単体での測定は可能であるが、完成品
のICとなってからはあらかじめ外部端子として特性チ
ェックトランジスタ専用のチェック用端子を用意してお
かないと測定が不可能であるという問題点があった。
With the conventional monitor transistor for checking IC characteristics, it is possible to measure a single semiconductor as a wafer or a chip. There is a problem that measurement is impossible unless a check terminal dedicated to the check transistor is prepared.

【0004】本発明の目的は専用のチェック用端子なし
で外部端子からモニタトランジスタの測定ができる半導
体集積回路を提供することにある。
An object of the present invention is to provide a semiconductor integrated circuit capable of measuring a monitor transistor from an external terminal without a dedicated check terminal.

【0005】[0005]

【課題を解決するための手段】本発明の半導体集積回路
は、複数の電源用および外部端用のパッドと、特性チェ
ック用のモニタトランジスタと、前記複数のパッドに接
続されている内部回路を有する半導体集積回路におい
て、前記電源用及び外部端用パッドと前記内部回路との
間にそれぞれドレイン・ソースが挿入されたスイッチ用
トランジスタを有し、前記モニタトランジスタのゲート
は前記電源用のパッドに接続されソース・ドレイン間は
前記外部端用のパッド間に挿入されて、前スイッチ用ト
ランジスタのゲートに前記電源用パッドから制御信号を
入力して前記モニタトランジスタを前記内部回路から切
離して構成されている。
A semiconductor integrated circuit according to the present invention has a plurality of pads for power supply and external terminals, a monitor transistor for checking characteristics, and an internal circuit connected to the plurality of pads. In the semiconductor integrated circuit, a switch transistor having a drain and a source inserted between the power supply and external terminal pads and the internal circuit is provided, and a gate of the monitor transistor is connected to the power supply pad. A source and a drain are inserted between the pads for the external terminal, and a control signal is input from the power supply pad to the gate of the front switching transistor to separate the monitor transistor from the internal circuit.

【0006】[0006]

【実施例】次に本発明について図面を参照して説明す
る。図1は本発明の一実施例の回路図である。ICは電
源用パッド1および外部端子パッド3a〜3bと内部回
路と間にそれぞれスイッチ用のPチャンネルトランジス
タ6a〜6cのドレイン・ソースを接続し、GND供給
端パッド2と内部回路との間にそれぞれスイッチ用のn
チャンネルトランジスタ7a〜7cのドレイン・ソース
を接続し、外部パッド3a,3b間にPチャンネル特性
チェック用モニタトランジスタ5の、またパッド3c,
3d間にnチャンネル特性チェック用モニタトランジス
タ4のドレイン・ソースをそれぞれ接続している。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. FIG. 1 is a circuit diagram of one embodiment of the present invention. In the IC, the drains and sources of P-channel transistors 6a to 6c for switching are connected between the power supply pad 1 and the external terminal pads 3a to 3b and the internal circuit, respectively, and between the GND supply terminal pad 2 and the internal circuit. N for switch
The drains and sources of the channel transistors 7a to 7c are connected, and the monitor transistor 5 for checking the P-channel characteristic and the pads 3c and 3c are connected between the external pads 3a and 3b.
The drain and source of the n-channel characteristic check monitor transistor 4 are connected between 3d.

【0007】通常の内部回路動作時はVDD供給端パッド
1とGND供給端パッド2から内部回路に電源電圧を供
給する。この時モニタトランジスタ6a〜6c及びモニ
タトランジスタ7a〜7cはスイッチ・オン状態とな
り、トランジスタ5とトランジスタ4はスイッチ・オフ
状態となり、外部端パッド3aと3b及び3cと3d
は、内部回路から独立状態となって通常の内部回路動作
が行われる。
During normal internal circuit operation, a power supply voltage is supplied from the VDD supply terminal pad 1 and the GND supply terminal pad 2 to the internal circuit. At this time, the monitor transistors 6a to 6c and the monitor transistors 7a to 7c are turned on, the transistors 5 and 4 are turned off, and the external end pads 3a and 3b and 3c and 3d
Is independent of the internal circuit and normal internal circuit operation is performed.

【0008】特性チェック用モニタトランジスタ4又は
5の測定時は、VDD供給端パッド1にGNDレベルを、
GND供給端子パッド2にVDDレベルを供給することに
よって、Pチャンネルトランジスタ6a〜6c及びnチ
ャンネルトランジスタ7a〜7cはスイッチ・オフ状態
となり、内部配線8a〜8fを切断してVDD供給端パッ
ド1とGND供給端パッド2及び外部端パッド3a〜3
dを、内部回路から独立させる。
When the characteristic check monitor transistor 4 or 5 is measured, the GND level is applied to the V DD supply terminal pad 1,
By supplying the V DD level to the GND supply terminal pad 2, the P-channel transistors 6a to 6c and the n-channel transistors 7a to 7c are turned off, the internal wirings 8a to 8f are cut off, and the V DD supply terminal pad 1 is cut off. And GND supply end pad 2 and external end pads 3a-3
d is made independent of the internal circuit.

【0009】例えばPチャンネル特性チェック用モニタ
トランジスタ5の測定は上記の状態で外部端子3aと3
bを用いて行い、nチャンネル特性チェック用モニタト
ランジスタ4の測定は外部端子3cと3dを用いて内部
回路と独立に行う。
For example, the measurement of the monitor transistor 5 for checking the P-channel characteristic is carried out in the above-described state with the external terminals 3a and 3
b, and the measurement of the n-channel characteristic check monitor transistor 4 is performed independently of the internal circuit using the external terminals 3c and 3d.

【0010】[0010]

【発明の効果】以上説明したように本発明は半導体IC
の通常の電源供給用端子とGND端子及び外部端子を用
いて特性チェックトランジスタの特性測定を行えるよう
にしたので、半導体装置完成後も通常の端子を用いて外
部から特性チェック用モニタトランジスタの測定が行え
るという効果を有する。又内部回路の外部端子を測定に
用いるため、内部回路の試験時等に特性チェック用モニ
タトランジスタの特性測定を容易に自動測定できるとい
う効果も有する。
As described above, the present invention relates to a semiconductor IC.
Since the characteristics of the characteristic check transistor can be measured using the normal power supply terminal, the GND terminal, and the external terminal, even after the semiconductor device is completed, the characteristic check monitor transistor can be externally measured using the normal terminal. It has the effect of being able to do it. Further, since the external terminals of the internal circuit are used for the measurement, there is an effect that the characteristic measurement of the characteristic check monitor transistor can be easily and automatically measured when the internal circuit is tested.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例の回路図である。FIG. 1 is a circuit diagram of one embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 VDD供給端パッド 2 GND供給端パッド 3a〜3d 外部端パッド 4 nチャンネル特性チェック用モニタトランジスタ 5 Pチャンネル特性チェック用モニタトランジスタ 6a〜6c Pチャンネルトランジスタ 7a〜7c nチャンネルトランジスタ 8a〜8f 内部配線DESCRIPTION OF SYMBOLS 1 VDD supply end pad 2 GND supply end pad 3a-3d External end pad 4 Monitor transistor for n-channel characteristic check 5 Monitor transistor for P-channel characteristic check 6a-6c P-channel transistor 7a-7c n-channel transistor 8a-8f Internal wiring

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 複数の電源用および外部端用のパッド
と、特性チェック用のモニタトランジスタと、前記複数
のパッドに接続されている内部回路を有する半導体集積
回路において、前記電源用及び外部端用パッドと前記内
部回路との間にそれぞれドレイン・ソースが挿入された
スイッチ用トランジスタを有し、前記モニタトランジス
タのゲートは前記電源用のパッドに接続されソース・ド
レイン間は前記外部端用のパッド間に挿入されて、前ス
イッチ用トランジスタのゲートに前記電源用パッドから
制御信号を入力して前記モニタトランジスタを前記内部
回路から切離すことを特徴とする半導体集積回路。
1. A semiconductor integrated circuit having a plurality of power supply and external end pads, a characteristic check monitor transistor, and an internal circuit connected to the plurality of pads, wherein the power supply and the external end are provided. A switch transistor having a drain and a source inserted between the pad and the internal circuit, wherein the gate of the monitor transistor is connected to the power supply pad and the source and drain are between the pads for the external end; Wherein a control signal is input from the power supply pad to the gate of the front switch transistor to disconnect the monitor transistor from the internal circuit.
JP3003000A 1991-01-16 1991-01-16 Semiconductor integrated circuit Expired - Fee Related JP2665054B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3003000A JP2665054B2 (en) 1991-01-16 1991-01-16 Semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3003000A JP2665054B2 (en) 1991-01-16 1991-01-16 Semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPH05172896A JPH05172896A (en) 1993-07-13
JP2665054B2 true JP2665054B2 (en) 1997-10-22

Family

ID=11545106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3003000A Expired - Fee Related JP2665054B2 (en) 1991-01-16 1991-01-16 Semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JP2665054B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3214556B2 (en) 1998-08-25 2001-10-02 日本電気株式会社 Integrated circuit device, semiconductor wafer, circuit inspection method
DE10029835C1 (en) * 2000-06-16 2001-10-25 Infineon Technologies Ag Integrated circuit with test facility has test switch closed by applied test signal to allow test voltage to be applied to irreversible programmable switches

Also Published As

Publication number Publication date
JPH05172896A (en) 1993-07-13

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