JP2659978B2 - Moving table equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial application field) The present invention relates to a moving table device suitable for being incorporated as a sample stage of a semiconductor exposure apparatus or the like.

(Prior art) Yawing (meandering) in a moving table of a semiconductor stepper device requiring high positioning accuracy
If the accuracy is poor, even if the LSI is positioned at a certain point at the center of the chip with high accuracy, a pattern shift occurs around the chip and good transfer is not performed.

Conventionally, as a structure of a moving table using a linear guide, there has been a structure as shown in FIGS.
That is, the pair of rails 4 is pressed onto the base 1 with the screw 6 against the reference surface 20 of the base 1. In this case, the straightness of the rail 4 follows the reference surface 20 of the base 1. That is, the yawing accuracy is determined by the processing accuracy of the reference surface 20 of the base 1 and cannot be corrected. Actually, as the length of the rail 4 becomes longer, it becomes more difficult to process the reference surface 20 with high accuracy. In practice, when the rail length is about 600 mm, it becomes difficult to process the straightness and parallelism of the reference plane to 10 μm or less. As a result, even if high-precision machining is performed, a yawing error occurs for about 3 to 4 seconds, and there has been a problem that practically good positioning cannot be performed.

(Problems to be Solved by the Invention) As described above, the yawing accuracy of the conventional moving table follows the processing accuracy of the base reference surface, and it is difficult to correct the yawing accuracy. Therefore, good positioning has not been performed.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a moving table device which can easily mount a linear guide rail and can adjust yawing accuracy.

[Configuration of the invention]

(Means for Solving the Problems) A moving table device according to the present invention includes a base, a rail arranged on the base, a moving table movable along the rail, and a moving table for moving the moving table. A moving table device comprising a driving unit and a pressing unit for applying a pressing force to an arbitrary portion of the rail, wherein the rail is temporarily fixed so that its position can be freely adjusted by the pressing unit. The pressing means is composed of a plurality of pressing members provided on both sides of the rail so as to face each other, and adjusts the pressing force of the pressing member at an arbitrary position among the plurality of pressing members. Thereby, the bent state of an arbitrary position of the rail can be adjusted.

(Operation) In the configuration described above, since any pressing force can be applied to both side surfaces of the rail on the base, the bending at any position of the rail can be adjusted and corrected. In the case of a pair of linear guide rails, straightness of the rails, that is, highly accurate yawing correction can be performed.

(Embodiment) An embodiment of the present invention will be described below with reference to the drawings.

As shown in FIGS. 1 to 3, a moving table 2 is provided on a base 1 with a pair of linear guides (bearings 3, rails 4).
And a rolling element 9). The moving table 2 includes a drive motor 10
And a feed screw 11.

This moving table device is mounted on a base 1 with a linear guide composed of rails 4, bearings 3 and rolling elements 9 temporarily fixed. The blocks 5 and 7 are fixed to the moving table 1, and the blocks 5 and 7 are arranged over a length substantially equal to the movable range of the moving table 2 on the rail 4. A plurality of pressure adjusting screws 6, 8 are attached to each of the blocks 5, 7 at an arbitrary interval. This pressure adjusting screw 6,
Numerals 8 are arranged so as to oppose the side surfaces of the rails 4 from different directions to apply pressure.

Next, a method for adjusting the deviation of the straightness of the rail 4 will be described with reference to FIG.

As described above, the adjustment mechanism has a structure in which the right and left sides of the rail 4 are pushed by the pressure adjustment screws 6 and 8. For the straightness and parallelism of the two rails 4, for example, an electric micrometer 17 was attached to a measuring section 16 of a three-dimensional measuring device 15. 3D measuring device 15
For example, the X-axis and the longitudinal direction of the rail 4 are precisely aligned,
The Y-axis and the Z-axis are locked so as not to move while the tracing stylus 18 is in contact with the side surface of the rail 4, and the stylus 18 is fixed at a constant speed in the X-axis direction.
, The straightness of the rail 4 can be measured.

Here, the straightness of the rail 4 is measured assuming that the side surface of the rail 4 and the rolling surface of the bearing 3 are sufficiently parallel, but for confirmation, the side surface of the rail 4 and the rolling of the bearing 3 are checked. The parallelism of the surface was also measured using the three-dimensional measuring device 15 and the electric micrometer 6 in the same manner as described above. In other words, the bearing 3 is moved along the rail 4 while the tracing stylus 18 is in contact with the side surface of the bearing 3,
As a result, the results of the straightness of the rail 4 were compared. As a result, it was confirmed that the measured results of the two were qualitatively very well matched, and it was found that the side surface of the rail 4 and the rolling surface of the bearing 3 had sufficient parallelism.

After measuring the straightness and parallelism of the two rails 4 in this way, apply a tracing stylus 18 to a place where the straightness is largely deviated, and refer to the scale of the micrometer 17 to fix the rail 4 with the screws 6 and 8 Press from the side to make correction.

After correcting the straightness and parallelism of the rail 4 in this way, when the yaw was measured by the autocollimator, a yaw accuracy of about 1 second was confirmed. In the conventional method of aligning the rail with the reference plane, the yawing of 3 to 4 seconds has been a limit, but by correcting as in the present invention, highly accurate table positioning can be realized.

In the above embodiment, a one-axis moving table is shown, but the present invention can be applied to a two-axis or three-axis moving table.

Further, the interval and the number of the pressing screws 6 and 8 can be appropriately selected according to the required accuracy.

As described above, the present invention can be variously modified and used without departing from the gist thereof.

〔The invention's effect〕

As described in detail above, according to the present invention, the bend at any position of the linear guide rail can be adjusted,
Highly accurate yawing correction is possible.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of the moving table apparatus of the present invention, FIG. 2 is a plan view thereof, FIG. 3 is a front view thereof, and FIG.
FIG. 1 is an explanatory view showing a rail bending measuring method according to the present invention, FIG. 5 is a plan view showing a configuration of a conventional moving table device, and FIG. 6 is a front view thereof. DESCRIPTION OF SYMBOLS 1 ... Base, 2 ... Moving table 3 ... Bearing, 4 ... Rail 5 ... Block, 6 ... Screw 7 ... Block, 8 ... Screw 9 ... Rolling element, 10 ... Drive motor 11 ... … Lead screw, 15… 3D measuring instrument 17… Electric micrometer

Claims (2)

(57) [Claims] 1. A base, a rail disposed on the base, a movable table movable along the rail,
A moving table device comprising a driving means for moving the moving table and a pressing means for applying a pressing force to an arbitrary portion of the rail, wherein the rail can be freely moved by the pressing means. The pressing means is constituted by a plurality of pressing members provided opposite to both side surfaces of the rail, respectively, and can be adjusted at any position among the plurality of pressing members. A moving table device wherein a bending state of an arbitrary position of the rail can be adjusted by adjusting a pressing force of a pressing member. 2. A block fixed to the base over substantially the entire range of movement of the moving table and along both side surfaces of the rail, the pressing means comprising: a block fixed to the block at substantially equal intervals on both sides of the rail; 2. The moving table device according to claim 1, comprising a plurality of screws attached to face each other, and adjusting the pressing force by tightening or loosening the screws.