JPH03214009A - Three-dimensional measuring machine - Google Patents

Abstract

PURPOSE:To displace a slider approximately linearly and to perform precise measurement by providing rails on one surface of a base stage, and providing positioning means for holding the rails and a displacement absorbing means provided on the slider. CONSTITUTION:Base stages 12, 53 and 103 support sliders 50, 150 and 100 for three axes of X, Y and Z which are orthogonally intersected. Rails 20A and 20B for guiding sliders are provided on at least one surface of at least one base stage of the stages 12, 53 and 103, e.g. surface 12A and 12B. At the same time, positioning means, e.g. the means 30A and 30B are provided. A displacement absorbing means, e.g. the means 70, is provided so that one end is supported with the slider which is slid along the rails and the other end is coupled with the rails. The positioning means are fixed to the base stage along the rails. A block is provided between a tightening member and the rails and fixed so that its position can be adjusted. The displacement absorbing means has rigidly in the moving direction of the slider and constituted so that the means can be displaced in perpendicular to the moving direction.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a three-dimensional measuring machine, and more specifically, as a guide member for a total of three sliders that can be displaced in one direction of three orthogonal axes. , relates to an improvement of a rail holding mechanism in a coordinate measuring machine using a rail.

[Background technology]

Conventionally, as a device for measuring the dimensions, shape, etc. of a measured object,
Various coordinate measuring machines are widely used. Among this type of three-dimensional measuring machines, for example, there is one that uses a rail as a guide member for guiding the slider in its movement direction, and an example of the conventional structure thereof is shown in FIG.

That is, in FIG. 6, the three-dimensional measuring machine 1 includes a base 2 placed on the floor, and the object W to be measured is placed on the upper surface 2A of the base 2. Rails 3 and 4 are fixedly installed so as to be substantially parallel to each other along the direction. A Y-axis slider 5 is provided on these rails 3.4 and is movable in the direction of arrow Y, which is one of the three orthogonal axes X, Y, and Z.

An X-axis slider 6 is mounted on the horizontal portion 5A of the Y-axis slider 5 and is movable in the direction of arrow X, which is the other direction of the orthogonal three axes. Inside this X-axis slider 6,
A Z-axis slider 7 is provided which is displaced in the direction of arrow X, which is one of the other directions of the orthogonal three axes, and a detector 8 is detachably attached to the tip of the Z-axis slider 7.

When measuring the dimensions, shape, etc. of the object to be measured W using the coordinate measuring machine 1 configured as described above, the Y-axis slider 5 is moved in the direction of the arrow Y, the X-axis slider 6 is moved in the direction of the arrow X, and the X-axis slider 6 is moved in the direction of the arrow The shaft sliders 7 are appropriately displaced in the directions of the arrows X, respectively.

Thereby, the detector 8 can be brought into contact with a plurality of arbitrary points on the object W to be measured, so the dimensions of the object W to be measured can be measured, and the detector 8 can be slid on the object W to be measured. This allows the shape to be measured.

Therefore, all dimensions, all shapes, etc. of the object W to be measured can be measured.

[Problem to be solved by the invention]

However, in the conventional three-dimensional measuring machine as described above, depending on external conditions such as temperature and humidity, one or both of the rails 3 and 4 may be bent or distorted in the direction of arrow X or X. This may occur.

When bending, distortion, etc. occur in the direction of the arrow X, the Y-axis slider 5 is displaced in the X direction along the bending, resulting in so-called yawing. For this reason, even if the detector 8 is brought into contact with or slides along the object W to be measured, it becomes difficult to measure the exact dimensions and shape of the object W to be measured. This exposes the drawback that correction work for deflections, distortions, etc. is extremely complicated.

In addition, since both rails 3 and 4 are involved in the deflection, distortion, etc., it is possible to clearly detect how much one of the rails 3 and 4 has deformed, or how much both rails have deformed. Can not.

For this reason, it is almost impossible to improve the measurement accuracy of the coordinate measuring machine 1.

On the other hand, if the rails 3, 4 are bent or distorted in the direction of the arrow X due to external conditions, the deformed rails 3.
4, the Y-axis slider 5 is displaced in the direction of the arrow X, so that so-called rolling occurs in the Y-axis slider 5. As a result, even if the detector 8 is brought into contact with the object to be measured W, the exact dimensions of the object to be measured W cannot be measured, and furthermore, it is almost impossible to correct the deflection, distortion, etc. This causes an inconvenience that makes precise measurement difficult.

Furthermore, even during the work of fixing the rails 3 and 4 on the base 2, it is very difficult to maintain the straightness of each rail 3 and 4 on the order of micrometers, since there is no means for adjusting it. Difficult shortcomings are exposed.

An object of the present invention is to provide a rail that guides a slider that can be displaced in each of the three orthogonal axes of X, Y, and Z.
To provide a three-dimensional measuring machine capable of quickly eliminating deflection, distortion, etc. in the X direction and enabling precision measurement even if the deflection, distortion, etc. occur in the X direction.

[Means to solve the problem]

In the present invention, a detector is attached to a base via a total of three sliders that are movable in each direction of three orthogonal axes, and the detector is three-dimensionally involved in the object to be measured. In the three-dimensional measuring machine for measuring the dimensions, shape, etc. of the object to be measured, a rail for guiding the slider is provided on at least one surface of at least one of the bases supporting each slider; A positioning means capable of adjusting and positioning each part of the rail with respect to the base is provided, and one end is supported by a slider that slides along the rail, and the other end is displaced by being fitted into the rail. Absorbing means is provided, and the positioning means includes a long fastening member that is fixed to the base along the rail and has an inclined side surface facing the rail, and an intervening member between the fastening member and the rail. The displacement absorbing means has a plurality of blocks fixed to the base so that the position thereof can be adjusted and has an inclined surface corresponding to the inclined surface of the fastening member, and the displacement absorbing means is This three-dimensional measuring machine is characterized in that it has rigidity and can be displaced in a direction perpendicular to the direction of movement.

[Effect]

In the three-dimensional measuring machine of the present invention configured in this manner, the deflection of the rail in the width direction is corrected by the positioning means. Further, even if there is a deflection or the like in the thickness direction of the rail, this deflection or the like is absorbed by the displacement absorbing means. Therefore, rolling, yawing, etc. of the slider due to deflection of the rail, etc. do not occur.

Furthermore, when each slider on the X, Y, and Z axes is displaced in a predetermined direction, even if rolling, yawing, etc. occur in each slider due to a change in external conditions,
Due to the adjustment by the positioning means and the presence of the displacement absorbing means, rolling, yawing, etc. can be quickly corrected, and each slider can be displaced substantially linearly.

Therefore, it is possible to accurately measure the dimensions, shape, etc. of the object to be measured.

〔Example〕

Next, preferred embodiments of the coordinate measuring machine according to the present invention will be described in detail with reference to the accompanying drawings.

In FIG. 1, reference numeral 10 indicates a coordinate measuring machine according to this embodiment. This three-dimensional measuring machine IO consists of a pair of rectangular parallelepiped bases 11 that are arranged parallel to each other on the floor.
．． 12, a rotary table 13 is provided on one base 11 and is rotatable in the direction of arrow R, and the object W to be measured is placed on this rotary table 13.

In the other base 12, one side surface 12A in the vertical direction as one surface and an upper surface 12B which is an adjacent surface perpendicular to the negative side surface 12A have a longitudinal direction, in this example, X, Y, The rail 20A runs along the arrow X direction, which is one direction of the three orthogonal axes Z.

20B are supported via a plurality of bolts 21, respectively. Positioning means 3GA and 30B are provided on both sides of the rails 20A and 20B in the longitudinal direction, respectively.

One of the positioning means 30A, as shown in FIG. 2, includes a plurality of pairs of blocks 31 that sandwich the rail 20A from both sides, and a fastening member 32 that supports the blocks 31.

The block 31 has a substantially trapezoidal shape, for example, by having an inclined surface 31A inclined at a predetermined angle θ (preferably approximately 10 degrees) with respect to the straight line on the outer surface, and One side 1 of the base 12 with the bolt 33
It is supported by the base 12 by being screwed onto the 2A side. On the other hand, the inner surface of the block 31 is a vertical surface 31B parallel to the straight line, and is in contact with each side surface of the rail 20A in the width direction.

Further, the fastening member 32 has an inclined surface 32A corresponding to the shape of the inclined surface 31A of the block 31, and is composed of a long member disposed over substantially the entire length of the rail 2OA, and the bolt 34 is attached to the base of the fastening member 32. It is held on the base 2 by being screwed onto one side 12A of the base 12.

Therefore, by tightening the plurality of bolts 33 with a predetermined torque, the block 31 is moved in the other direction of the orthogonal three axes by the action of the inclined surfaces 31A and 32A of the block 31 and the fastening member 32. Since the rail 2OA moves forward and backward in the Z direction, it is configured such that the pressing force of the block 31 allows minute positioning of the rail 2OA in the width direction, in other words, correction of deflection, bending, etc.

Note that since the other positioning means 30B provided along the rail 20B on the upper surface 12B is also formed of the same components as the positioning means 30A, the positioning means 3
Components that are the same as those in 0A are given the same reference numerals and detailed explanations thereof will be omitted.

At the rear end of the upper surface 12B in FIG.
A motor 42 is attached to the fixed base 41. This motor 42 includes an output shaft 43 that is rotatable in the direction of arrow S, and this output shaft 43 has a ball screw shaft 44.
One end is fixed. This ball screw shaft 44 is provided substantially parallel to the rail 20B, and the other end of this ball screw shaft 44 is connected to the mounting plate 4 through a bearing 45.
6 is rotatably supported.

A nut member 48 that is movably moved back and forth in the direction of arrow X is screwed onto the ball screw shaft 44.
8, an X-axis slider 50 is integrally held.

Here, an X-axis driving means 40 is constituted by a motor 42, a ball screw shaft 44, a nut member 48, and the like.

A substantially U-shaped fitting member 61 is provided below one end of the X-axis slider 50 so as to surround the rail 20B.

Furthermore, a notch 51 is provided on one side of the X-axis slider 50.
is defined, and a displacement absorbing means 70 is provided in this notch 51.
One end of the is attached. As shown in FIGS. 3 and 4, this displacement absorbing means 70 includes substantially trapezoidal adjustment members 73 and 74 connected via a bracket 71 and bolts 72A and 72B.
is supported by a stop plate 76 attached to the X-axis slider 50 via two bolts 75 to prevent it from coming off the X-axis slider 50.

Furthermore, an elastic body 77 made of a rubber plate or the like is interposed between one adjustment member 73 and the upper edge of the notch 5I. 3. Further, one end of a flat plate-shaped displacement body 79 is attached to the flat surface of the notch 51 via a bolt 81 via a spacer 78 made of a synthetic resin plate or the like. This displacement body 79
The upper end is in contact with the lower surface of the adjustment member 74, and presser plates 82 are provided at both left and right ends to prevent displacement of the displacement body 79 in the direction of the arrow X. Both presser plates 82
are fixed to the notch 51 with bolts 83, respectively.

On the inner and outer surfaces of the displacement body 79, there are four cutout grooves 84A to 84 with a U-shaped cross section, two grooves each at opposing positions.
D is defined along the arrow X direction which is the moving direction of the X-axis slider 50, and these notch grooves 84A to 84
It is configured such that when D is displaced in the direction of arrow Y, the displacement body 79 can be displaced in the same direction. At this time, the displacement body 79
is made to have sufficient rigidity in the X direction, which is the moving direction of the X-axis slider 50, so that when the X-axis slider 50 moves, the rail 2OA serves as a guide for the X-axis slider 50 in the linear direction. is being used.

A mounting member 86 having an oval-shaped cross section is attached to the other end, the lower end, of the displacement body 79 via four bolts 85.
A fitting member 88 having a substantially U-shaped cross section is attached to this attachment member 86 via four bolts 87 . This fitting member 88 is arranged so as to surround the rail 2OA,
The inner surface of the fitting member 88 is fitted to the rail 20A via a ball bearing 89.

On the other hand, on the upper surface of the X-axis slider 50, as shown in FIG. 1, a pillar-shaped base 53 is erected. Ita side 53
Rails 20C and 20D are disposed on A and its opposing surface, for example, surface 53B, respectively, along the longitudinal direction thereof, which is the Z direction, which is one direction of the three orthogonal axes.

Here, the same positioning means (not shown) as the positioning means 30A is attached to these rails 20C and 20D, but since the drawings are complicated, detailed explanation and illustration thereof will be omitted here. do.

Furthermore, a box 91 is installed in the upper part of the right front surface 53C of the base 53 in the figure, and inside this box 91,
A motor 92 having a rotating shaft (not shown) that is rotatable in the direction of arrow R is provided. One end of a ball screw shaft 94 is fixed to the rotating shaft of this motor 92, and the other end of the ball screw shaft 94 is held by a mounting plate 96 fixed to the base 53 via a bearing 95. A nut member 98 that is movable in the direction of the arrow Z is screwed onto the ball screw shaft 94, and the nut member 98 is integrally displaceable in the Z direction.
A shaft slider 100 is supported. Here, the motor 92, the ball screw shaft 94, the nut member 98, etc. constitute a Z-axis driving means 90.

A protrusion lot protruding toward the base 53 is provided at one end of the Z-axis slider 100, and a substantially U-shaped fitting member 111 surrounding the rail 20C is fixed to this protrusion 101. .

Furthermore, a notch 102 is provided at the other end of the Z-axis slider 100.
A displacement absorbing means 120 having the same components as the displacement absorbing means 70 is attached to this notch 102, but detailed explanation and illustration thereof will be omitted here.

Four pulleys 55 are provided on the upper surface of the base 53 of the Z-axis slider 50 so as to be rotatable in the direction of arrow T via a mounting plate 56, and each two of these pulleys 55 have a One wire 57, a total of two wires, is stretched. One end of these two wires 57 is connected to the Z-axis slider 1, respectively.
00, and the other end is fixed to the balancer 58.

As shown in FIG.
It has fitting members 131A and 131B that surround the rails 20E and 20F arranged in parallel in 3D, and the balancer 58 connects to the rail 2 via these fitting members 131A and 131B.
It moves forward and backward in the direction of arrow Z along 0E and 20F. Therefore, when the Z-axis slider 100 is displaced in the direction of arrow Z1, the balancer 58 moves in the direction of arrow Z! opposite to the direction of Z1 via the wire 57. By moving in the force direction,
It is configured to maintain weight balance between the Z-axis slider 100 and the balancer 58.

On the other hand, a rectangular parallelepiped base 103 that is long in the Y direction is fixed to the Z-axis slider 100, and one surface of this base 103, for example, a top surface 103A, and the opposite surface, for example, a bottom surface 103B. and have rails of 20G and 20, respectively.
H is arranged.

Note that positioning means (not shown) having the same components as the positioning means 30A are provided at both ends of these rails 20G and 20H, but detailed explanation and illustration thereof will be omitted here.

Further, a box 141 is installed on one side 103C of the right front side of the base 103 in the figure.
A motor 142 having a rotating shaft (not shown) that is rotatable in the direction of arrow T is provided within the motor 41 . One end of a ball screw shaft 144 is fixed to the rotating shaft of this motor 142, and the other end of this ball screw shaft 144 is supported by a mounting plate 146 via a bearing 145. This ball screw shaft 144 has an arrow Y
A nut member 148 that can be freely displaced in the direction is screwed together, and a substantially T-shaped Y-axis slider 15 is attached to this nut member 148.
0 is fixed. Here, the motor 142
, a ball screw shaft 144, a nut member 148, and the like constitute a Y-axis driving means 140.

On the upper surface 150A of the Y-axis slider 150, a displacement absorbing means 1 having the same components as the displacement absorbing means 70 is provided.
60 is attached. Since this displacement absorbing means 160 is the same as the displacement absorbing means 70 described above, detailed explanation and illustration thereof will be omitted here.

Bottom upper surface 150B of the Y-axis slider 150.

Two fitting members (not shown) that surround the rail 20H are fixed to 150c.

Furthermore, a support stand 151 is provided at the bottom of the Y-axis slider 150, and a cylindrical body 152 is fixedly installed on this support stand 151, and a detector 170 is detachably attached to this cylindrical body 152. .

The three-dimensional measuring machine IO according to this embodiment is basically constructed as described above, and its operation will be explained next.

In the coordinate measuring machine 10 of this embodiment, the case where the rails 2OA and 20B are assembled to the base 12 will be explained by taking the rail 2OA as an example.

First, the rail 2OA is fixed to one side surface 12A of the base 12 with bolts 21, but the bolts 21 are initially tightened slightly less than they should be completely tightened. On the other hand, the fastening member 32 of the positioning means 30A is sufficiently fastened to the base 12 with the bolt 34.

In this state, the blocks 31 are sequentially tightened between the rail 20A and the fastening member 32 with bolts 33. On this occasion,
If the rail 20A is bent, bent, distorted, etc., the amount of tightening of the upper and lower blocks 31 of each pair of blocks 31 sandwiching the rail 2OA is adjusted so as to correct the bending. That is, in FIG. 2, if the rail 2 OA is bent downward, by tightening the lower block 31 more, the block 3
The lower block 31 is slightly displaced upward by the action of the inclined surfaces 31A and 32A of the fastening member 32 and the lower block 31. As a result, the rail 20A, which is not completely fixed, is displaced upward by a slight amount, and the above-mentioned point is corrected.

After the bends and the like are corrected over the entire length of the rail 20A in this way, the bolts 21 are completely tightened to fix the rail 20A.

Further, even if the rail 20A is bent due to changes in external conditions such as temperature and humidity, the rail 20A is corrected in the same manner as described above.

Once the rail 20A has been straightened, the other rails 20B~
After 20H correction, the measurement work begins.

In the measurement work, first, when measuring the dimensions, shape, etc. of the object to be measured W, the X-axis slider 50 is moved in the direction of arrow X, the Y-axis slider 150 is moved in the direction of arrow Y, and the Z-axis slider 100 is moved in the direction of arrow Z.
The detector 170 is brought into contact with a plurality of arbitrary points on the object W by being displaced in the directions under the rotational action of the ball screw shafts 44, 94, and 144, respectively. By calculating the contact position data obtained by this contact using a calculation device (not shown), the dimensions of the object W to be measured can be measured.

In addition, as described above, each slider 50.1 of the x, y, and z axes
50 and 100 in predetermined directions and slide the detector 170 along the surface of the object W to be measured, the shape of the object W can be measured.

Thereby, all dimensions, all shapes, etc. of the object W to be measured can be measured.

When measuring the object to be measured W, the surfaces 12A and 1 to which the respective rails 20A to 208 are attached are attached to the respective rails 20A to 20H.
2B, 53A, 53B, 53D.

If bending or the like occurs in a direction perpendicular to 103A, 103B, these bends will occur in each displacement absorbing means 70, 1.
Absorbed by 20,160.

That is, the explanation will be given by taking the displacement absorbing means 70 as an example. A direction perpendicular to one side 12A of the rail 2OA, that is, Y
If there is a bend in the direction, the fitting member 88 is displaced in the Y direction in accordance with the bend, and the fitting member 86 integrated with the fitting member 88 is displaced in the same direction. The displacement of the mounting member 86 is transmitted to the tip of the displacement body 79 of the displacement absorbing means 70, but since the displacement body 79 has notched grooves 84A to 84D, The displacement body 79 is bent, thereby absorbing the amount of displacement of the mounting member 86. Therefore, the displacement caused by the bending of the rail 20A is not transmitted to the X-axis slider 50, which is the base end side of the displacement body 79.

On the other hand, since the displacement body 79 has sufficient rigidity in the X direction perpendicular to the Y direction, the X-axis driving means 4
This function is sufficient to guide the X-axis slider 50 in the X direction when the X-axis slider 50 is driven.

When the X-axis slider 50 is guided by the displacement absorbing means 70 and the rail 2OA, adjustment members 73 and 74 adjust the position of the fitting member 88 of the displacement absorbing means 70 and the rail 2OA in the Z direction.

That is, in FIGS. 3 and 4, the bolt 8 of the displacement body 79
1 is placed in the notch 51 of the X-axis slider 50, with the bracket 71 and the pole 72A,
With respect to one adjustment member 73 connected via 72B, the other adjustment member 74 is displaced in the X direction via bolt 72B.

Then, the adjustment member 74 is moved back and forth in the Z direction by the action of the inclined surfaces 73A and 74A formed on the mating surfaces of both adjustment members 73 and 74. As the adjustment member 74 moves back and forth, the displacement body 79 is also displaced in the Z direction, and the fitting member 88 is further displaced in the Z direction via the attachment member 86 to adjust its position with respect to the rail 2 OA.

After the position is adjusted in this way, the bolt 81 of the displacement body 79 is tightened to fix the displacement body 79 to the X-axis slider 50, thereby completing the adjustment work.

After completing the adjustment work for each part described above, the measurement work will be continued in the same manner as described above.

According to this embodiment as described above, there are the following effects.

That is, due to external conditions such as temperature and humidity, the rail 2OA may be deflected in the direction of the arrow X while the X-axis slider 50 is moving.
When distortion or the like occurs, the distortion or the like is absorbed by the notch grooves 84A to 84 of the displacement body 79 in the displacement absorbing means 70.
By deforming D, it can be absorbed quickly. Thereby, the X-axis slider 50 can be displaced substantially linearly, and as a result, it is possible to dramatically improve the measurement accuracy of the coordinate measuring machine IO.

Further, when the rail 20A is bent or distorted in the direction of arrow Z, the X-axis slider 50 moves in the direction of arrow Z while being slightly tilted, which is so-called rolling.

However, even in this case, in this embodiment, the deflection, distortion, etc. that occur in the rail 20A can be quickly adjusted by the positioning means 30A, so that rolling can be eliminated and the X-axis slider 50
can be displaced substantially linearly, and from this point as well, it is possible to improve the measurement accuracy of the three-dimensional measuring machine IO.

Furthermore, this time, while the X-axis slider 50 is moving, the base 12
When deflection, distortion, etc. occur in the rail 20B provided on the upper surface 12B, the so-called yawing occurs in which the X-axis slider 50 moves while being slightly displaced in the arrow X direction.

However, even in this case, in this embodiment, the deflection, distortion, etc. that occur in the rail 20.8 can be quickly adjusted by the positioning means 30B, thereby making it possible to displace the X-axis slider 50 approximately linearly. I can do it. As a result, the effect of almost eliminating measurement errors of the three-dimensional measuring machine 10 and enabling precise measurement is obtained.

Also, during the assembly work of the respective rails 20A to 20H, in the case of this embodiment, the rails 20A to 20H are assembled.
Since the positioning means 30A and 30B corresponding to 0H are provided, by adjusting these, straightness on the order of micrometer can be easily maintained. Therefore, it is possible to displace the X-axis slider 50, Y-axis slider 150, and Z-axis slider 100 substantially linearly, and from this point as well, it is possible to improve measurement accuracy.

Furthermore, in this embodiment, not only the positioning means 30A, 30B and the displacement absorbing means 70 but also the positioning means (
Since displacement absorbing means 120° and 160 (not shown) are provided, it goes without saying that basically the same effect as described above can be obtained with these means.

Although the present invention has been described above with reference to preferred embodiments, the present invention is not limited to these embodiments, and various improvements and changes in design can be made without departing from the gist of the present invention. Of course.

For example, in this embodiment, the base 12 has a substantially rectangular parallelepiped shape, but it is also possible to make the base a trapezoid and provide rails on its inclined surface.

Further, in the embodiment described above, the positioning means and the displacement absorbing means are the X, Y, and Z axis sliders 50, 150° 100 and these sliders 50. iso, i.

Although the guide rails 20A to 20H are provided on all of the rails 20A to 20H, the present invention is not limited to this, and may be provided on only some of the rails as necessary.

Furthermore, the rails 20A to 20H also have one base 12°53.
It is not necessarily necessary to provide two or more for each 103, and one for each may be sufficient. However, if two or more sliders are provided, there is an advantage that each slider 50, 150, 100 can be guided more linearly.

〔Effect of the invention〕

The present invention provides a rail on one surface of the base, and
It includes positioning means for holding the rail and displacement absorbing means provided on the slider.

As a result, even if the slider is deflected, distorted, etc. in a predetermined direction, the deflection, distortion, etc. can be quickly resolved, yawing, rolling, etc. can be easily corrected, and the slider can be displaced substantially linearly. becomes possible. As a result, measurement errors can be almost eliminated, which has the effect of enabling precise measurements.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing the overall configuration of a coordinate measuring machine according to an embodiment of the present invention, FIG. 2 is a partially omitted enlarged sectional view taken along the line ■-■ in FIG. 1, and FIG. Fig. 1 is an enlarged front view of the displacement absorbing means seen from the direction of arrow ■, and Fig. 4 is an enlarged front view of Fig. 3.
5 is a partially omitted plan view of the coordinate measuring machine of FIG. 1 viewed from the direction of arrow V, and FIG. 6 is a perspective view of the prior art coordinate measuring machine. 10-E dimension measuring machine, 11, 12, 53, 103...
Base, 12A, '12B, 53A, 53B, 53D, 1
03A, l03B-... Surface, 20A to 20H... Rail, 30A, 30B... Positioning means, 31...
Block, 32... Fastening member, 31A, 32A...
Inclined surface, 50-X axis slider, 70, 120, 160・
...Displacement absorbing means, 73.74...Adjustment member, 79.
... Displacement body, 84... Notch, 100... Z-axis slider, 150... Y-axis slider, 170... Detector, W... Measured object.

Claims (2)

[Claims] (1) By attaching a detector to the base via a total of three sliders that are movable in each direction of three orthogonal axes, and making this detector three-dimensionally involved in the object to be measured. In the three-dimensional measuring machine that measures the dimensions, shape, etc. of the object to be measured, among the bases that support each of the sliders,
A rail for guiding a slider is provided on at least one surface of at least one base, and positioning means capable of adjusting and positioning each part of the rail with respect to the base is provided, and the slider slides along the rail. Displacement absorbing means is provided with one end supported by the slider and the other end fitted into the rail, and the positioning means is fixed to the base along the rail and has a side surface facing the rail side that is inclined. A plurality of blocks are interposed between the fastening member and the rail and fixed to the base so that the position can be adjusted, and each block has an inclined surface corresponding to the inclined surface of the fastening member. The displacement absorbing means has rigidity in the direction of movement of the slider,
A three-dimensional measuring machine characterized by being configured to be able to be displaced in a direction perpendicular to this direction of movement. (2) The three-dimensional measuring machine according to claim 1, wherein the displacement absorbing means is formed in the shape of a flat plate and includes a displacement body having a notched groove along the moving direction of the slider. Original measuring machine.