JPH0789056B2 - CMM - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a coordinate measuring machine, and more specifically, as a guide member for a total of three sliders that can be displaced in respective directions of three orthogonal axes. The present invention relates to improvement of a rail holding mechanism in a coordinate measuring machine using a rail.

[Background technology]

Conventionally, as a device for measuring the size, shape, etc. of an object to be measured,
Various coordinate measuring machines are widely used. Some three-dimensional measuring machines of this type use, for example, a rail as a guide member for guiding the slider in its moving direction, and an example of a conventional structure thereof is shown in FIG.

That is, in FIG. 6, the coordinate measuring machine 1 includes a base 2 placed on the floor, and an object W to be measured is placed on the upper surface 2A of the base 2 and the length of the base 2 is increased. Rails 3 and 4 are fixed so as to be substantially parallel to each other along the direction. On these rails 3 and 4, there is provided a Y-axis slider 5 which can be displaced in the arrow Y direction which is one of the three orthogonal axes of X, Y and Z.

An X-axis slider 6 is mounted on the horizontal portion 5A of the Y-axis slider 5 so as to be displaceable in the arrow X direction which is another direction of the three orthogonal axes. Inside the X-axis slider 6, there is provided a Z-axis slider 7 which is displaced in the arrow Z direction which is another direction of the three orthogonal axes, and a detector 8 is detachably attached to the tip of the Z-axis slider 7. Be attached.

When the dimension, shape, etc. of the object to be measured W are measured by the coordinate measuring machine 1 configured as described above, the Y-axis slider 5 is moved in the arrow Y direction, the X-axis slider 6 is moved in the arrow X direction, and Z is moved. The shaft sliders 7 are appropriately displaced in the arrow Z direction.

As a result, a plurality of detectors 8 can be brought into contact with an arbitrary point of the object to be measured W, the dimension of the object to be measured W can be measured, and the detector 8 is slid on the object to be measured W. By doing so, the shape can be measured.

Therefore, it is possible to measure all dimensions, all shapes, etc. of the object to be measured W.

[Problems to be Solved by the Invention]

However, in the conventional coordinate measuring machine as described above, depending on external conditions such as temperature and humidity, either one or both of the rails 3 and 4 may be indicated by the arrow X or Z.
Bending or distortion may occur in the direction.

When the Y-axis slider 5 is displaced in the X direction along with bending or distortion in the arrow X direction, so-called yawing is caused. Therefore, even if the detector 8 is brought into contact with the object to be measured W or slid along the object to be measured W, it becomes difficult to measure the accurate size and shape of the object to be measured W, and The defect that the work of correcting the bending and distortion becomes very complicated is exposed.

In addition, since both the rails 3 and 4 are involved in the bending and distortion, it is possible to clearly detect how much the one rail 3 or 4 is deformed or how much the both rails 3 and 4 are deformed. Can not. Therefore, the coordinate measuring machine 1
Improving the measurement accuracy of is almost impossible.

On the other hand, when the rails 3 and 4 are bent or distorted in the arrow Z direction due to external conditions, the deformed rails 3 and 4 are
Since the Y-axis slider 5 is displaced in the direction of the arrow Z along
So-called rolling occurs on the Y-axis slider 5. As a result, even if the detector 8 is brought into contact with the object to be measured W, the accurate dimension of the object to be measured W cannot be measured in the same manner as described above.
Moreover, it becomes almost impossible to correct bending and distortion,
The inconvenience that precise measurement becomes difficult occurs.

Further, even when the rails 3 and 4 are fixedly mounted on the base 2, maintaining the straightness of the rails 3 and 4 on the order of micrometers is not possible because there is no adjusting means.
It presents a very difficult drawback.

An object of the present invention is to provide a rail that guides a slider that is displaceable in each of the three directions of X, Y, and Z orthogonal axes, even if bending, distortion, etc. in the X, Y, and Z directions occur. It is an object of the present invention to provide a three-dimensional measuring machine that can quickly eliminate such bending and distortion and enable precise measurement.

[Means for Solving the Problems]

According to the present invention, a detector is attached via a total of three sliders that are displaceable in respective directions of three orthogonal axes with respect to a base, and the detector is three-dimensionally involved in an object to be measured. In the coordinate measuring machine for measuring the size, shape, etc. of the object to be measured, a rail for guiding a slider is provided on at least one surface of at least one of the bases supporting the sliders, The rail is provided with positioning means capable of adjusting and positioning the position of each part with respect to the base, and one end is supported by a slider that slides along the rail, and the other end is fitted to the rail. An absorbing means is provided, and the positioning means is fixed to a base along the rail and has a long fastening member whose side surface facing the rail side is an inclined surface, and between the fastening member and the rail. A plurality of blocks that are interposed and fixed to the base so that the mounting position can be adjusted, and that have a slant surface corresponding to the slant surface of the fastening member. The coordinate measuring machine is characterized by having rigidity and being displaceable in a direction orthogonal to the moving direction.

[Action]

In the three-dimensional coordinate measuring machine of the present invention configured as described above, the bending of the rail in the width direction is corrected by the positioning means. In addition, even if there is bending in the rail thickness direction,
This bending or the like is absorbed by the displacement absorbing means. Therefore, rolling or yawing of the slider due to bending of the rail does not occur.

Furthermore, when each slider of the X, Y, and Z axes is displaced in a predetermined direction, even if rolling, yawing, etc. occur on each slider due to changes in external conditions, adjustment and displacement by the positioning means Due to the presence of the absorbing means, the rolling, yawing and the like can be promptly corrected and the sliders can be displaced substantially linearly. Therefore, it is possible to accurately measure the size, shape, etc. of the object to be measured.

[Embodiment] Next, a preferred embodiment of the coordinate measuring machine according to the present invention will be described in detail with reference to the accompanying drawings.

In FIG. 1, reference numeral 10 indicates a coordinate measuring machine according to this embodiment. The coordinate measuring machine 10 includes a pair of bases 11 and 12 each having a rectangular parallelepiped shape and arranged side by side in parallel to each other on the floor. One base 11 is rotatable in the direction of arrow R. A table 13 is provided, and the object to be measured W is placed on the rotary table 13.

In the other base 12, one vertical side surface 12A as one surface thereof and an upper surface 12B which is an adjacent surface orthogonal to the one side surface 12A are arranged in the longitudinal direction, in the present embodiment, X, Y, Rails 20A, 20 along the direction of arrow X, which is one of the three axes orthogonal to Z
Each B is supported via a plurality of bolts 21.
On both sides along the longitudinal direction of these rails 20A, 20B,
Positioning means 30A, 30B are provided respectively.

As shown in FIG. 2, one positioning means 30A includes a plurality of pairs of blocks 31 that hold the rail 20A from both sides and a fastening member 32 that supports the blocks 31.

The block 31 is, for example, an inclined surface that is inclined on the outer surface by a predetermined angle θ (preferably about 10 degrees) with respect to the straight line L.
It has a substantially trapezoidal shape by having 31A, and this block 3
It is supported by the base 12 by passing through 1 and screwing a bolt 33 to one side 12A of the base 12. On the other hand, the inner side surface of the block 31 is a vertical surface 31B parallel to the straight line L, and is in contact with each side surface of the rail 20A in the width direction.

In addition, the fastening member 32 is an inclined surface 31A of the block 31.
Has a sloped surface 32A corresponding to the shape of
It is composed of a long member arranged over substantially the entire length of 0A, and is held on the base 12 by screwing a bolt 34 to one side surface 12A of the base 12.

Therefore, each of the inclined surfaces of the block 31 and the fastening member 32 is fastened by fastening the plurality of bolts 33 with a predetermined torque.
By the action of 31A and 32A, the block 31 moves back and forth in the direction of the arrow Z, which is the other direction of the three orthogonal axes. Therefore, due to the pressing force of this block 31, a slight positioning in the width direction of the rail 20A, in other words, bending , And is capable of correcting bends and the like.

Since the other positioning means 30B provided along the rail 20B on the upper surface 12B is also formed of the same constituent elements as the positioning means 30A, the same reference numerals are used for the same constituent elements as the positioning means 30A. Reference numerals are given and detailed description thereof is omitted.

A fixed base 41 is provided at the rear end of the upper surface 12B in FIG. 1, and a motor 42 is attached to the fixed base 41.
The motor 42 has an output shaft 43 rotatable in the direction of arrow S, and one end of a ball screw shaft 44 is fixed to the output shaft 43. The ball screw shaft 44 is provided substantially parallel to the rail 20B, and the other end of the ball screw shaft 44 is rotatably supported by a mounting plate 46 via a bearing 45.

The ball screw shaft 44 is screwed with a nut member 48 that is movable in the direction of the arrow X, and an X-axis slider 50 is integrally held by the nut member 48. Here, the motor 42, the ball screw shaft 44, the nut member 48, and the like constitute the X-axis drive means 40.

A substantially U-shaped fitting member 61 is provided below one end of the X-axis slider 50 so as to surround the rail 20B.

Further, a cutout portion 51 is defined on one side surface of the X-axis slider 50, and one end side of the displacement absorbing means 70 is attached to the cutout portion 51. The displacement absorbing means 70 includes a bracket 71 and bolts 72A, 72 as shown in FIGS. 3 and 4.
Including substantially trapezoidal adjustment members 73, 74 connected via B,
These adjusting members 73 and 74 are connected to the X
A stop plate 76 attached to the shaft slider 50 prevents the X-axis slider 50 from being detached from the X-axis slider 50 and supports it.

Further, between the one adjusting member 73 and the upper edge of the cutout 51,
An elastic body 77 made of a rubber plate or the like is interposed.

Further, one end of a flat plate-shaped displacement body 79 is attached to the flat surface portion of the cutout portion 51 via a spacer 78 made of a synthetic resin plate or the like via a bolt 81. The upper end of the displacement body 79 is brought into contact with the lower surface of the adjusting member 74, while the left and right ends are
Holding plate 82 for preventing displacement of displacement body 79 in the direction of arrow X
Is provided. These presser plates 82 are
It is fixed to the notch 51 by 83.

On the inner and outer surfaces of the displacement body 79, two pieces are provided at positions facing each other.
Notch grooves 84A to 84D each having a U-shaped cross section at a total of four places are X
It is defined along the arrow X direction which is the moving direction of the shaft slider 50, and the notch grooves 84A to 84D are deformed in the arrow Y direction so that the displacement body 79 can be displaced in the same direction. There is. At this time, the displacement body 79 is made to have sufficient rigidity in the X direction, which is the moving direction of the X axis slider 50, and when the X axis slider 50 moves, the rail 20A moves in the linear direction of the X axis slider 50. It is supposed to be a guide.

A mounting member 86 having a substantially L-shaped cross section is attached to the other end and the lower end of the displacement body 79 via four bolts 85. The mounting member 86 has a cross section through four bolts 87. A substantially U-shaped fitting member 88 is attached. The fitting member 88 is arranged so as to surround the rail 20A, and the inner surface side of the fitting member 88 is fitted to the rail 20A via a ball bearing 89.

On the other hand, as shown in FIG. 1, a pillar-shaped base 53 is erected on the upper surface of the X-axis slider 50, and one surface of this base 53, for example, facing the front left side in the figure. The rails 20C and 20D are respectively attached to the front surface 53A and the opposing surface, for example, the surface 53B.
Are arranged along the longitudinal direction thereof, that is, the Z direction which is one direction of the three orthogonal axes.

Here, the same positioning means (not shown) as the positioning means 30A is also attached to these rails 20C and 20D, but since the drawings are complicated, detailed description and illustration thereof are omitted here. To do.

Further, a box 91 is planted in the upper part of the right front surface 53C of the base 53 in the figure, and a rotary shaft (not shown) rotatable in the arrow R direction is provided in the box 91. Motor having
92 is provided. One end of a ball screw shaft 94 is fixed to the rotating shaft of the motor 92, and the other end of the ball screw shaft 94 is attached to a base plate 53 via a bearing 95.
Held in. A nut member 98, which is displaceable in the direction of arrow Z, is screwed onto the ball screw shaft 94, and the Z-axis slider 100 is supported integrally with the nut member 98. Here, the motor 92, the ball screw shaft 94, the nut member 98 and the like constitute a Z-axis drive means 90.

A protrusion 101 protruding toward the base 53 is provided at one end of the Z-axis slider 100, and the rail 20 is attached to the protrusion 101.
A substantially U-shaped fitting member 111 surrounding C is fixed.

A notch 102 is defined at the other end of the Z-axis slider 100, and the notch 102 is provided with a displacement absorbing means 120 having the same constituent elements as the displacement absorbing means 70. The detailed description and illustration thereof are omitted here.

On the upper surface of the base 53 of the Z-axis slider 50, there are four pulleys 55
Is rotatably provided in the direction of arrow T via a mounting plate 56, and each of the two pulleys 55 is provided with one wire 57, a total of two wires 57. One ends of these two wires 57 are fixed to the Z-axis slider 100,
The other end is fixed to the balancer 58.

As shown in FIG. 5, the balancer 58 is a fitting member 131A, 131B surrounding the rails 20E, 20F arranged in parallel on the surface 53D of the base 53.
The balancer 58 moves back and forth in the arrow Z direction along the rails 20E and 20F via the fitting members 131A and 131B. Therefore, when the Z-axis slider 100 is displaced in the arrow Z ₁ direction, the balancer 58 moves in the arrow Z ₂ direction opposite to the Z ₁ direction via the wire 57,
It is configured to maintain a weight balance between the Z-axis slider 100 and the balancer 58.

On the other hand, the Z-axis slider 100 is provided with a rectangular parallelepiped base 103 fixed in the Y direction, and one surface of the base 103, for example, an upper surface 103A and an opposite surface thereof, for example, a lower surface 10 are provided.
Rails 20G and 20H are respectively arranged on 3B.

Positioning means (not shown) having the same components as the positioning means 30A are provided at both ends of these rails 20G, 20H, but detailed description and illustration thereof are omitted here.

Further, a box 141 is planted on one side surface 103C on the right front side of the base 103 in the figure, and in the box 141,
A motor 142 having a rotation shaft (not shown) that is rotatable in the direction of arrow T is provided. One end of a ball screw shaft 144 is fixed to the rotating shaft of the motor 142, and the other end of the hole screw shaft 144 is supported by a mounting plate 146 via a bearing 145. A nut member 148 that is displaceable in the arrow Y direction is screwed onto the ball screw shaft 144, and a substantially T-shaped Y-axis slider 150 is fixedly mounted on the nut member 148. Here, the motor 142, the ball screw shaft 144, the nut member 148 and the like constitute the Y-axis driving means 140.

Displacement absorbing means 160 having the same components as the displacement absorbing means 70 is mounted on the upper surface 150A of the Y-axis slider 150. The displacement absorbing means 160 is the displacement absorbing means 7 described above.
Since it is the same as 0, detailed description and illustration thereof are omitted here.

A rail is provided on the bottom upper surface 150B, 150C of the Y-axis slider 150.
Two fitting members (not shown) surrounding 20H are fixed.

Further, a supporting base 151 is provided below the Y-axis slider 150, and a cylindrical body 152 is fixedly mounted on the supporting base 151, and a detector 170 is detachably attached to the cylindrical body 152. .

The coordinate measuring machine 10 according to the present embodiment is basically configured as described above, and its operation will be described next.

In the coordinate measuring machine 10 of this embodiment, the rail 20 is mounted on the base 12.
The case of assembling A and 20B will be described by taking the rail 20A as an example.

First, the rail 20A is fixed to the one side surface 12A of the base 12 with the bolt 21, and the bolt 21 is initially tightened slightly loosely from the completely tightened state. On the other hand, the fastening member 32 of the positioning means 30A is sufficiently fastened to the base 12 with the bolt 34.

In this state, the block 31 is sequentially tightened with the bolt 33 between the rail 20A and the fastening member 32. At this time, rail 20
When A has a bend, a bend, a distortion, etc., the tightening amount in the upper and lower blocks 31 of each pair of blocks 31 sandwiching the rail 20A is adjusted so as to correct the bend and the like. That is, in FIG. 2, assuming that the rail 20A is bent downward, by tightening the lower block 31 more, the inclined surfaces 31A and 32A of the block 31 and the fastening member 32 serve to lower the lower block 31. The block 31 is slightly displaced upward. This allows rails 20 that are not completely fixed.
A is displaced upward by a small amount to correct the bend.

After the bends are corrected in this way over the entire length of the rail 20A, tighten the bolts 21 completely to
Fix 20A.

Further, even when the rail 20A is bent due to changes in external conditions such as temperature and humidity, the rail 20A is corrected in the same manner as described above.

After the rail 20A is straightened, the other rails 20B to 20H are straightened and the measurement work is started.

First, when measuring the size, shape, etc. of the object to be measured W, the measurement work is performed by moving the X-axis slider 50 in the direction of the arrow X and moving the Y-axis slider.
150 is displaced in the direction of the arrow Y and Z-axis slider 100 is displaced in the direction of the arrow Z by the rotating action of the ball screw shafts 44, 94, 144, respectively, and a plurality of detectors 170 are brought into contact with arbitrary points on the object to be measured W. The dimensions of the object to be measured W can be measured by calculating the contact position data obtained by this contact with a calculator (not shown).

Further, similarly to the above, by displacing the sliders 50, 150, 100 of the X, Y, Z axes respectively in predetermined directions and sliding the detector 170 along the surface of the object to be measured W, its shape can be measured.

As a result, all dimensions, all shapes, etc. of the object to be measured W can be measured.

When measuring the object to be measured W, the surfaces 12A, 12B, 53A, 53B, 53D, 10 on which the rails 20A to 20H are mounted are attached to the rails 20A to 20H.
When a bend or the like is generated in the direction orthogonal to 3A, 103B, these are absorbed by the displacement absorbing means 70, 120, 160.

That is, the displacement absorbing means 70 will be described as an example. If the rail 20A has a bend in a direction orthogonal to the one side surface 12A, that is, in the Y direction, the fitting member 88 is displaced in the Y direction in response to the bend, and the fitting member 86 integrated with the fitting member 88 is attached. Displace in the direction. The displacement of the mounting member 86 is transmitted to the tip of the displacement body 79 of the displacement absorbing means 70. Since the displacement body 79 has the cutout grooves 84A to 84D, the cutout grooves 84A to 84D are formed.
The displacement body 79 is bent at the 4D portion, whereby the displacement amount of the mounting member 86 is absorbed. Therefore, the displacement due to the bending of the rail 20A is not transmitted to the X-axis slider 50 which is the base end side of the displacement body 79.

On the other hand, since the displacement body 79 has sufficient rigidity in the X direction orthogonal to the Y direction, it is used as a guide for the X axis slider 50 in the X direction when the X axis drive means 40 is driven. Is
It will work well.

In the guide of the X-axis slider 50 by the displacement absorbing means 70 and the rail 20A, the adjusting members 73 and 74 adjust the positions of the fitting member 88 of the displacement absorbing means 70 and the rail 20A in the Z direction.

That is, in FIGS. 3 and 4, the bolt 81 of the displacement body 79 is slightly loosened, and the bolt 81 is arranged in the notch 51 of the X-axis slider 50 and is connected via the bracket 71 and the bolts 72A and 72B. With respect to the adjusting member 73, the other adjusting member 74 is displaced in the X direction via the bolt 72B. Then, the adjusting member 74 is moved back and forth in the Z direction by the action of the inclined surfaces 73A and 74A formed on the mating surfaces of the adjusting members 73 and 74. By moving the adjusting member 74 back and forth, the displacement body 79 is also displaced in the Z direction, and further, the fitting member 88 is displaced in the Z direction via the mounting member 86 to adjust the position with the rail 20A.

After the position adjustment is performed in this way, the bolt 81 of the displacement body 79 is tightened to fix the displacement body 79 to the X-axis slider 50, and the adjustment work is completed.

After the adjustment work of each part described above is completed, the measurement work is continued in the same manner as described above.

According to this embodiment as described above, there are the following effects.

That is, when the rail 20A is bent or distorted in the direction of the arrow Y while the X-axis slider 50 is moving due to external conditions such as temperature and humidity, the warp or distortion is displaced by the displacement absorbing means 70. Deformation of the cutout grooves 84A to 84D of the body 79 allows rapid absorption. As a result, the X-axis slider 50 can be displaced substantially linearly, and as a result, the measurement accuracy of the coordinate measuring machine 10 can be dramatically improved.

Further, when the rail 20A is bent or distorted in the arrow Z direction, the X-axis slider 50 moves in the arrow Z direction while slightly tilting, so-called rolling occurs.

However, even in this case, in the present embodiment, the portion of the rail 20A, such as the bending and distortion, is positioned by the positioning means 30A.
Since the adjustment work can be quickly performed with, the rolling can be eliminated and the X-axis slider 50 can be displaced substantially linearly. From this point as well, the measurement accuracy of the coordinate measuring machine 10 can be improved. It is possible to improve.

Further, this time, when the rail 20B provided on the upper surface 12B of the base 12 is bent or distorted in the arrow Y direction while the X-axis slider 50 is moving, the X-axis slider 50 moves in the arrow Y direction. So-called yawing occurs, which moves while making a slight displacement.

However, even in this case, in the present embodiment, the portion of the rail 20B, such as bending and distortion, is positioned by the positioning means 3
It can be adjusted quickly with 0B, which allows the X-axis slider 50 to be displaced substantially linearly. As a result, it is possible to obtain an effect that the measurement error of the coordinate measuring machine 10 is almost eliminated and the precise measurement can be performed.

Further, even when assembling the rails 20A to 20H, in the case of the present embodiment, since the positioning means 30A and 30B corresponding to the rails 20A to 20H are provided, it is possible to easily adjust them by adjusting them. Straightness on the order of micrometers can be maintained. Therefore, the X-axis slider 50,
Since it becomes possible to displace the Y-axis slider 150 and the Z-axis slider 100 substantially linearly, also from this point, it is possible to improve the measurement accuracy.

Further, in the present embodiment, not only the positioning means 30A, 30B and the displacement absorbing means 70, but also other positioning means (not shown) and displacement absorbing means 120, 160 are provided. Of course, the same effect as described above can be obtained.

Although the present invention has been described with reference to the preferred embodiments, the present invention is not limited to these embodiments, and various improvements and design changes can be made without departing from the scope of the present invention. Of course.

For example, in the present embodiment, the base 12 has a substantially rectangular parallelepiped shape, but in addition to this, the base may be formed into a trapezoidal shape and rails may be provided on the inclined surface thereof.

Further, in the above embodiment, the positioning means and the displacement absorbing means are X, Y, Z axis sliders 50, 150, 100 and these sliders 50,
Although the rails 20A to 20H for guiding the 150 and 100, respectively, are provided, the present invention is not limited to this and may be provided only on a part of the rails as necessary.

Further, it is not always necessary to provide two or more rails 20A to 20H for one base 12, 53, 103, and one rail may be provided for each.
However, if two or more sliders are provided, there is an advantage that the sliders 50, 150, 100 can be guided more linearly.

〔The invention's effect〕

The present invention provides a rail on one surface of the base,
Positioning means for holding the rail and displacement absorbing means provided on the slider are provided.

As a result, even if the slider is bent or deformed in a predetermined direction, the bending, distortion or the like can be promptly eliminated, yawing, rolling, etc. can be easily corrected, and the slider can be displaced substantially linearly. It becomes possible. As a result, the measurement error can be almost eliminated, and the precision measurement can be performed.

[Brief description of drawings]

FIG. 1 is a perspective view showing the overall configuration of a coordinate measuring machine according to an embodiment of the present invention, FIG. 2 is an enlarged cross-sectional view with partial omission taken along the line II-II in FIG. 1, and FIG. FIG. 1 is an enlarged front view of the displacement absorbing means as seen from the direction of arrow III, and FIG. 4 is IV-IV of FIG.
FIG. 5 is a cross-sectional view taken along the line, FIG. 5 is a partially omitted plan view of the three-dimensional measuring machine of FIG. 1 as seen from the direction of arrow V, and FIG. 6 is a perspective view of the conventional three-dimensional measuring machine. 10 …… Coordinate measuring machine, 11,12,53,103 …… Base, 12A, 12B,
53A, 53B, 53D, 103A, 103B ... surface, 20A-20H ... rail, 3
0A, 30B ... Positioning means, 31 ... Block, 32 ... Fastening member, 31A, 32A ... Slope, 50 ... X-axis slider, 70,12
0,160 …… Displacement absorption means, 73,74 …… Adjustment member, 79 …… Displacement body, 84 …… Notched portion, 100 …… Z-axis slider, 150 …… Y
Axis slider, 170 ... Detector, W ... Object to be measured.

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Susumu Yoshioka 2200 Shimoguri Town, Utsunomiya City, Tochigi Prefecture Mitutoyo Microcode Headquarters (72) Inventor Tetsuhiko Kubo 2200 Shimoguri Town, Utsunomiya City, Tochigi Prefecture Mitutoyo Microcode Headquarters Co., Ltd. (72) Inventor Yu Tonozaki 2200 Shimoguri-cho, Utsunomiya City, Tochigi Prefecture Mitutoyo Microcode Headquarters (72) Inventor Teruyuki Ito 1-1 Asahi-cho, Kariya City, Aichi Toyota Koki Co., Ltd. (72) Invention Osamu Ohara 1 Toyota Town, Toyota City, Aichi Prefecture Toyota Motor Co., Ltd. (72) Inventor Tetsuhiko Nomura 1 Toyota Town, Toyota City, Aichi Prefecture Toyota Motor Co., Ltd. (72) Inventor Takamitsu Shibata Toyota City, Aichi Prefecture Toyota Town No. 1 Toyota Motor Corporation (56) References Japanese Patent Laid-Open No. Sho 60 224010 (JP, A)

Claims (2)

[Claims] 1. A detector is mounted via a total of three sliders which are respectively displaceable in respective directions of three orthogonal axes with respect to a base, and the detector is three-dimensionally involved in an object to be measured. In the coordinate measuring machine for measuring the size, shape, etc. of the object to be measured, at least one surface of at least one of the bases supporting the sliders is provided with a rail for guiding a slider. , A positioning means capable of adjusting and positioning the position of each part of the rail with respect to the base, and having one end supported by a slider sliding along the rail and the other end fitted to the rail Displacement absorbing means is provided, and the positioning means is
A long fastening member that is fixed to the base along the rail and has an inclined side surface facing the rail, and the mounting position can be adjusted on the base by being interposed between this fastening member and the rail. And a plurality of blocks each having an inclined surface corresponding to the inclined surface of the fastening member, wherein the displacement absorbing means has rigidity with respect to the moving direction of the slider and is orthogonal to this moving direction. A coordinate measuring machine characterized in that it can be displaced in any direction. 2. The coordinate measuring machine according to claim 1, wherein the displacement absorbing means includes a displacement body formed in a flat plate shape and having a notch groove along a moving direction of the slider. 3D measuring machine.