JP2644277B2 - Adhesive sheet sticking holding device - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a pressure-sensitive adhesive sheet sticking and holding device, and in particular, to pressure-sensitive adhesive sheet sticking for sticking a sheet with an adhesive to a flat ring for holding a wafer or the like. Related to a holding device.

[Conventional technology]

Conventionally, as a means for positioning and holding a silicon wafer, a sheet with an adhesive (hereinafter simply referred to as a label) is adhered to a flat ring (wafer ring), and the wafer is supplied and adhered to the sheet for positioning. A system called a frame mounter device is known. In this type of device, first, a step of attaching a label in a state where the label is spread on a wafer ring is required.

By the way, in the conventional case, the wafer ring is adhered in a state where tension is applied to the tape with the adhesive having a width larger than the outer diameter of the wafer ring, and thereafter, the label is cut out from the tape along the outer diameter of the wafer ring, A labeled wafer ring was obtained.

[Problems to be solved by the invention]

However, in the conventional label sticking apparatus as described above, since the label is cut out from the tape with the adhesive in order to stick it to the wafer ring in a state where the label is spread, the adhesive tape after the cut is Not only wasted waste, but also a label cutting process following the sticking process was required, and a means for cutting out the sticking device was added as the device, making a series of devices more complicated. .

It is an object of the present invention to pay attention to the above-mentioned conventional problems, and to solve the problem, does not require a cutting step, and can hold a pressure-sensitive adhesive sheet that can be stuck to a wafer ring while maintaining a uniform tension. It is to provide a device.

[Means for solving the problem]

In order to achieve this object, the present invention relates to a pressure-sensitive adhesive sheet sticking and holding device for holding a sheet with an adhesive for sticking to another object, wherein the ring is divided into a plurality of arc-shaped portions. A suction member having a plurality of air suction holes disposed on each upper surface, a moving means for moving each suction member outward in the radial direction, and an inner side surrounded by the plurality of suction means. And a suction means for sucking air from a plurality of air suction holes, wherein the heating means heats the pressure-sensitive adhesive sheet from below, and a peripheral end portion of the pressure-sensitive adhesive sheet is provided. The suction member is moved outward while the suction member is held on the upper surfaces of the plurality of suction members, and the pressure-sensitive adhesive sheet is held in an extended state.

(Operation)

According to the present invention, the pressure-sensitive adhesive sheet is heated from below by the heating means, and the suction members are simultaneously moved outward by the moving means while keeping the pressure-sensitive adhesive sheet and the peripheral end portion adsorbed by the suction members. Since the adhesive sheet can be kept in a tension state where it can be attached to another object, the attaching work can be easily performed, especially in the case of a flat ring such as a wafer ring where other objects are difficult to attach. The adhesive sheet can be held as possible.

〔Example〕

Hereinafter, embodiments of the present invention will be described in detail and specifically with reference to the drawings.

1A and 1B show an embodiment of the present invention. In these figures, 1A to 1D are suction members which are divided into four parts in the circumferential direction and form a ring shape as a whole, and suction holes 2 are formed in a thin rubber plate on each suction surface along the circumferential direction. Thus, air can be simultaneously sucked from these suction holes 2 via the common suction path 3. Reference numeral 4 denotes a sliding member which is attached to each of the suction members 1A to 1D and is slidable on a pedestal 5 in a radial direction, 6 denotes a roller supported by the individual sliding member 4, and 7 denotes a sliding member. This spring is interposed between the pedestal 5 and keeps the roller 6 ready for the peripheral surface of the truncated cone-shaped operating member 8.

Reference numeral 9 denotes an air cylinder mounted on the pedestal 5. The air cylinder 9 has a plunger portion of a truncated conical operating member 8.
8A is fitted up and down freely, and the operating member 8 is pushed upward from the state shown in FIG. 1B by air pressure transmitted from an air supply device (not shown), thereby sliding the roller 6 while rolling. The suction members 1A to 1D are connected to the spring 7 via the moving member 4.
Can be simultaneously moved outward against the spring force.

Reference numeral 10 denotes a moving guide which is provided in parallel with the plunger portion 8A and moves up and down in the socket 11 in accordance with the vertical movement of the plunger portion 8A. Reference numeral 12 denotes a disk-shaped disk heater mounted on the base 5. As is apparent from FIG.1A, the disk heater 12 is fixed to the center of the suction members 1A to 1D arranged in a ring shape, and a label positioned and mounted on the suction members 1A to 1D. It serves to warm and support its expansion.

The sticking operation in the pressure-sensitive adhesive sheet sticking and holding device thus configured will be described. The label holding device is supplied from above the suction members 1A to 1D and the disc heater 12 by the label supply means (not shown) in a state where the label 20 is positioned with the bonding surface facing upward. The suction members 1A to 1D are not moved radially outward,
It is in the state shown in FIG. 1B.

Therefore, when the label is mounted with the label positioned on the suction member, the label 20 is warmed by the disk heater 12 and is kept in a stretchable form. At the same time each suction member
In 1A to 1D, air is sucked by the pump through the suction hole 2, and the periphery of the label 20 is sucked by the suction member. Then, by raising the operating member 8 by the air cylinder 9, each of the suction members 1A to 1D can be uniformly moved outward as shown in FIG. Can be held by the sticking holding device in a stretched state.

Thus, since the label 20 is stretched and held with the side on which the adhesive is attached facing up, the label 20 is placed in the state described above.
The label 20 can be attached to the wafer ring simply by positioning the wafer ring from above and superimposing the wafer ring while maintaining the above.

In the pressure-sensitive adhesive sheet holding device described above,
A suction member having a shape obtained by dividing the ring into four equal parts is provided, and these are moved outward in the radial direction. However, the shape of the suction member is not limited to this. It is needless to say that any shape may be used as long as the shape is divided into an appropriate arc shape, and these may be cooperatively moved outward at the same time.

Further, in the above-described embodiment, in order to attach a label with an adhesive to a wafer ring on which a wafer is mounted, it was used to hold such a label in an easily attachable state. The application is not limited to this, and it goes without saying that the present invention can be widely applied to means for holding a circular label in an expanded state and holding the surface opposite to the holding surface so as to be attached to an object.

〔The invention's effect〕

As described above, according to the present invention, a suction member having a shape obtained by equally dividing a ring into a plurality of circular arcs, and a plurality of air suction holes provided on each upper surface, Means for moving the suction member outward in the radial direction, disk-shaped heating means concentric with the ring provided inside the ring formed by the plurality of suction members, and a plurality of suction holes A suction means for sucking air from the suction means, while heating the label from below by the heating means, moving the suction member outward while holding the end of the label to the suction member by the suction means, and applying the label. Since the label is kept in a stretchable state, it is possible to keep the label in a stretched state as in the past by attaching a wafer ring, for example, to a roll-shaped adhesive tape and then labeling the label along the outer periphery of the wafer ring. Is cut off from the tape This eliminates the need for complicated procedures, and allows the label with the adhesive to be directly attached to another object, for example, a wafer ring, while being held by the adhesive sheet attaching and holding device of the present invention. Was.

[Brief description of the drawings]

FIG. 1A is a top view showing an example of the pressure-sensitive adhesive sheet sticking and holding device of the present invention, FIG. 1B is a cross-sectional view taken along the line AA of FIG. 1A, and FIG. It is a perspective view. 1A to 1D: suction member, 2: suction hole, 4: sliding member, 5: pedestal, 6: roller, 7: spring, 8: operating member, 9: air cylinder, 12: … Disc heater, 20 …… label.

Claims (1)

(57) [Claims] 1. A pressure-sensitive adhesive sheet sticking and holding device for holding a sheet with a pressure-sensitive adhesive for sticking to another object, wherein the ring has a shape obtained by equally dividing a ring into a plurality of circular arcs, A suction member provided with a plurality of air suction holes, a moving means for moving each of the suction members outward in the radial direction, and an inner ring surrounded by a plurality of the suction means. A disk-shaped heating means arranged concentrically, and suction means for sucking air from the plurality of air suction holes, and a peripheral end of the pressure-sensitive adhesive sheet while heating the pressure-sensitive adhesive sheet from below by the heating means Characterized in that the suction member is moved outward while the suction member is held on the upper surfaces of the plurality of suction members, and the pressure-sensitive adhesive sheet is held in an extended state.