JP2640789B2 - Disk handling mechanism of sputtering equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an in-line type sputtering apparatus for forming a magnetic film or the like on a disk substrate by using a sputtering technique. And a disk handling mechanism for mounting a large number of disk substrates on the disk.

[0002]

2. Description of the Related Art FIG. 8 schematically shows a conventional sputtering apparatus for manufacturing a magnetic disk, wherein (A) is a plan view, (B) is a front view, and 51 is an unload / load position of the disk. Here, a magnetic disk having a plurality of magnetic coatings attached to a disk holder 53 fixed on a carrier 52 temporarily removed from the in-line flow of the sputtering apparatus is separated from the disk holder 53 by a robot hand (not shown). Remove the disc and remove the uncoated disc from the disc holder 5
The carrier 52 attached to 3 is put on the in-line flow.

[0003] When the carrier 52 carried in the in-line flow enters a heating chamber described later, it enters a low-vacuum first buffer chamber 54 so as not to affect the degree of vacuum. Enters a heating chamber 55 heated to a high vacuum, where the disk holder 53 on the carrier 52 is placed.
Heat the disc attached to the.

Next, the carrier 52 and the disk holder 53 enter a sputtering chamber 56 in which chromium (Cr) and tantalum (Ta) are sequentially formed on the disk by sputtering, and the chromium (Cr) and the tantalum (T
The coating of a) is sequentially formed on both sides of the disk. Further, after passing through the slit 57, the carbon enters a carbon sputtering chamber 58 in which carbon (C) is formed on the disk by sputtering, where carbon (C) is formed on both surfaces of the disk. The reason for providing the slit 57 is to make carbon sputtering conditions different from other sputtering conditions.

Further, the carrier 52 and the disk holder 53 are placed in a low-vacuum second buffer chamber 59 for preventing the carrier 52 and the disk holder 53 from affecting the degree of vacuum in the sputtering chamber when they exit the sputtering chamber. Get out,
As shown in FIG. 8B, the magnetic disk is moved to the left and returns to the unload / load position 51 again. The magnetic disk on which the magnetic coating is formed is taken out of the disk holder 53, and the uncoated disk is removed from the disk holder. Attach to 53.

In such a conventional sputtering apparatus, for example, there are 24 carriers 52, and it takes 48 minutes for one carrier 52 to go around the sputtering apparatus. Therefore, the tact time for manufacturing a magnetic disk is 2 minutes. That is, in the sputtering process, the time during which the carrier 52 is stopped is 1.5 minutes,
The travel time is 0.5 minutes.

FIG. 9A is a perspective view of a carrier 52 and a disk holder 53 mounted on the carrier 52, and FIG. 9B is a detailed view of a part of the disk holder 53. In order to mount a large number of uncoated disks 60 on a disk holder 53 mounted on the carrier 52, a plurality of disk mounting holes 61 slightly larger than the disks 60 are aligned and formed in the disk holder 53. The disk mounting groove 6 is formed in a substantially semicircular portion below the inner wall of the mounting hole 61.
1a, and the disk 6 is inserted into the disk mounting groove 61a.
The disk 60 is mounted in the mounting hole 61 by fitting the lower semicircular portion 60 a of the disk 60 into the mounting hole 61. Mounting hole 61 of this disk 60
The magnetic disk on which the magnetic film was formed was removed from the mounting hole 61 by a robot hand (not shown).

[0008]

However, recently, in the conventional sputtering apparatus for manufacturing a magnetic disk, for example, a magnetic disk having a diameter of 2.5 inches has been frequently manufactured. In some cases, for example, 35 disks 60 each having a diameter of 2.5 inches formed are mounted. For this purpose, a magnetic disk on which a large number of magnetic coatings are formed from the disk holder 53 at an unloading / loading position 51 of the disk is used. A major issue is how to remove and mount a large number of uncoated disks 60 to the disk holder 53 quickly.

In particular, as described above, when the number of mounting holes of a disk formed in the disk holder is increased, the disk holder is deformed due to heat, and it is difficult to maintain flatness. The displacement of each mounting hole from the reference position tended to increase.

On the other hand, the laser displacement meter, which is a sensor as a robot's eye, may cause an error due to the brightness or scratches on the disk surface, so that the robot hand inserts the disk 60 into the mounting hole 61 and further mounts the mounting groove 61a. In some cases, it took time to drop them into the area.

According to the present invention, recently, in a sputtering apparatus for manufacturing a magnetic disk, it is possible to shorten the tact time for manufacturing the magnetic disk, and accordingly, the manufactured magnetic disk is removed from the disk holder, and the disk is removed. In order to shorten the time for mounting the uncoated disk on the holder and improve the manufacturing efficiency of the magnetic disk, the disk holder is deformed due to heat and the flatness is incorrect, and the standard for each mounting hole provided in the disk holder It is an object of the present invention to accurately and quickly mount a disk in a mounting groove of a mounting hole of a disk holder even if the displacement from the position is large, thereby improving the manufacturing efficiency of a magnetic disk.

[0012]

To achieve the above objects SUMMARY OF THE INVENTION This invention, as shown in FIG. 1, the disk handling mechanism in-line sputtering apparatus, conveyance stop state when detaching and mounting of the disk A vertical moving plate 9 that moves up and down along the back of the disk holder 1 is provided, and a plurality of contact linear displacement meters 8 are arranged in a row on the vertical moving plate 9, and the tip of the sensor section 8 a of each contact linear displacement meter is provided. Is brought into contact with the vicinity of the mounting groove 2a at the lower end of the mounting hole 2 for mounting each disk of the disk holder 1, and the displacement of the mounting groove 2a from the reference position is detected for each row of the mounting hole 2. Displacement data to robot controller 17
A disk handling mechanism for a sputtering apparatus, wherein a hand 23, 24 of a robot 22 for inputting a disk and mounting the disk in the mounting groove 2a of the mounting hole is controlled based on the data . Things.

Further, in order to achieve the above objects, another aspect of the present invention, as shown in FIG. 7, in the disk handling mechanism in-line sputtering apparatus, a disk
Vertical plate 3 approached parallel to the disk holder 1 on the back of the disk holder 1 in the transport stopped state when removing and attaching
The same number of contact linear displacement meters 8 as the number of mounting holes 2 of the disk are provided on the vertical plate 33, and the tip of the sensor portion 8 a is brought into contact with the vicinity of the mounting groove 2 a of the mounting hole 2. 2, the displacement of the mounting groove 2a from the reference position is detected, the data of the displacement is input to the robot controller 17, and the hands 23, 24 of the robot 22 for mounting the disk in the mounting groove 2a of the mounting hole are determined based on the data. This is a disk handling mechanism of a sputtering apparatus characterized by being configured to be controlled.

[0014]

According to the disk handling mechanism of the sputtering apparatus of the present invention, the disk is transported when the disk is removed or mounted.
The tip of the sensor portion 8a of the contact type linear displacement meter 8 provided on the vertically movable plate 9 which moves up and down along the back surface of the stopped disk holder 1 is provided on the disk holder 1 as the vertically movable plate 9 is lowered. The displacement of the mounting groove 2a of the mounting hole 2 of the disc from the reference position is detected, and the data of the displacement is detected.
Is input to the robot controller 17 and the hands 23 and 24 of the robot 22 are controlled based on the data to mount the disk in the mounting groove 2a of the mounting hole .

When the displacement data of the mounting groove 2a of the mounting hole 2 of the disk provided on the disk holder 1 from the reference position is large, as shown in FIG. The same number of contact type linear displacement meters 8 as 2 are provided on the vertical plate 33, and the tip of the sensor section 8a of the contact type linear displacement meter 8 is brought into contact with the vicinity of the mounting groove 2a of each mounting hole 2 at multiple points at the same time. Of the mounting groove 2a of the mounting hole 2 from the reference position is detected, and the data of the displacement is detected.
Is input to the robot controller 17 and the hands 23 and 24 of the robot 22 are controlled based on the data to mount the disk in the mounting groove 2a of the mounting hole .

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of a disk handling mechanism of a sputtering apparatus according to the present invention will be described below in detail with reference to FIGS. In FIG. 1, reference numeral 1 denotes a disk holder, 2 denotes a disk mounting hole formed in the disk holder 1, and 2a denotes a disk mounting groove formed in the lower half of the mounting hole 2. In the case of this embodiment, A disc mounting hole 2 is provided in the disc holder 1 so that a total of 35 discs, 7 in width and 5 in length, can be mounted.

As shown in FIG. 2, the disc holder 1 is fixed to the upper surface of
A wheel 4 is provided below the wheel, and the wheel 4 rides on a rail (not shown) so that the disk holder 1 moves in an in-line type sputtering apparatus. Further, a V-shaped groove 5 is formed in the bottom surface of the carrier 3 in the longitudinal direction, and a V-shaped groove 6 is formed in a middle portion of the bottom surface of the carrier 3 in a direction perpendicular to the longitudinal direction. I have.

Reference numeral 7 denotes a cross-shaped engaging member which engages with both the V-shaped groove 5 and the V-shaped groove 6 at the same time, and when the carrier 3 moves to the unload / load position. The cross-shaped engaging member 7 rises as shown by the arrow,
This simultaneously engages with both the V-shaped grooves 5 and 6 to lift and hold the carrier 3 from the rail to a predetermined height. The state at that time is the disk holder 1 shown in FIG. 1, and in this figure, the illustration of the carrier to which the disk holder 1 is fixed is omitted.

As described above, after the disc holder 1 is held at the predetermined position in the unload / load position, the disc holder 1 is inserted into the mounting hole 2 formed in the disc holder 1.
The disk is gripped and inserted by a robot hand as described later, and is fitted into the mounting groove 2 a at the lower end of the mounting hole 2. However, as described above, the flatness of the disk holder 1 is deviated due to heat during sputtering. FIG. 3 is a cross-sectional view of one uppermost row of mounting holes 2 formed in the disc holder 1 as viewed along the arrow line AA in FIG. FIG. 3 shows the plane of the disc holder 1 in an exaggerated manner for the sake of explanation.

In order to detect the displacement of the mounting groove 2a at the lower end of each of the plurality of mounting holes 2 from the reference position due to the deviation of the flatness of the disk holder 1, FIGS. 1, 3 and 4 show. As shown, the sensor portion 8a is located at the center of the mounting groove 2a at the lower end of each mounting hole 2 and near the mounting groove 2a.
The contact type linear displacement meter 8 in a row so that the tips of
Arrange multiple units .

The data of the displacement of the mounting groove 2a of each mounting hole 2 from the reference position is transmitted to the control unit 16 and the robot controller.
The robot D is input to the controller 17 and the robot hand is controlled based on the data . The disk D grasped by the robot hand is attached to the mounting hole 2 from the opposite side of the sensor 8a.
In the mounting groove 2a . As shown in FIG. 4, the position of the mounting groove 2a with respect to the mounting hole 2 is accurately known from the dimensions a and b in the thickness direction of the disc holder 1, so that the data of the position of the mounting groove 2a from the reference position is obtained. The disk D grasped by the hand of the robot, which moves while being controlled based on the above, comes exactly on the mounting groove 2a. Mounting hole 2
The width of the mounting groove 2a is sufficiently larger than the thickness of the disk D, so that the disk D is fitted into the mounting groove 2a even if the mounting groove 2a is slightly inclined in plan view.

As shown in FIG. 1, the contact type linear displacement meter 8 corresponds to the vicinity of the center of the mounting groove 2a of each mounting hole 2 formed in the disk holder 1 on the vertical moving plate 9. Are fixed as described above. The vertical moving plate 9 has a female screw portion 11 which is screwed with a screw rod 10 at the center thereof. The screw rod 10 is connected to a pulse motor 12, and both ends of the vertical moving plate 9 It has sliding holes 14, 14 through which the guide rods 13, 13 are slidably penetrated. In addition, the pulse motor 1 is provided on the lower side facing the vertical moving plate 9.
2 and the guide rods 13, 13 are fixed,
A bottom plate 15 for loosely inserting the screw bar 10 is provided.

FIG. 1 shows the mounting groove 2a of the uppermost mounting hole 2 of the disk holder 1 in a direction Y perpendicular to the disk holder surface.
FIG. 4 is a diagram showing the displacement of the reference linear position with respect to the reference position. Data of the displacement in the Y direction detected by each contact linear displacement meter 8 is input to the control unit 16. When detecting the displacement in the Y direction of the mounting groove 2a of the mounting hole 2 at the second stage from the uppermost stage, the pulse motor 12 is rotated by a predetermined number of revolutions,
The vertical movement plate 9 stops at a predetermined position by rotating the screw rod 10 by a predetermined rotation.

The contact type linear displacement meter 8 is configured to retract and return to the reference position so that the tip of the sensor portion 8a is not caught in the mounting hole 2 while the vertical moving plate 9 is moving. . When the vertical moving plate 9 is lowered to a position where the displacement of the mounting groove 2a of the second mounting hole 2 in the Y direction can be detected from above, the vertical moving plate 9 stops, and the sensor 8a of the contact type linear displacement meter 8 is turned off. , The displacement of the mounting groove 2 a of the mounting hole 2 in the Y direction is detected, and the data is input to the control unit 16. In the case of this embodiment, the vertical moving plate 9 is rotated five times and the Y of the mounting grooves 2a of all the mounting holes 2 is set.
The direction displacement data is input to the control unit 16.

In this embodiment, the displacement of the mounting hole 2 of the disk holder 1 in the Y direction is detected step by step. As a second embodiment, as shown in FIG.
A vertical plate 33 is provided in parallel on the rear surface of the disk holder 1, and 35 contact type linear displacement meters 8 are provided on the vertical plate 33. These sensor portions 8 a are attached to the mounting grooves 2 a of the mounting holes 2 from the rear surface of the disk holder 1. 35 mounting holes 2 at a time by contacting the vicinity
Of the mounting groove 2a in the Y direction can be input to the control unit 16 at one time.

Reference numeral 18 ₁ denotes a wiring for inputting data from each contact type linear displacement meter 8 to the control unit 16. In the second embodiment, since the data from each contact type linear displacement meter 8 is input to the control unit 16 at a time, the data processing capability of the control unit 16 must be large.

The data from each contact type linear displacement meter 8 is as follows:
First, a control unit 1 composed of a D / A converter and the like
6, the data is processed, and further input to the robot controller 17. Reference numeral 19 denotes a CCD camera, which photographs a reference hole 20 formed in the lower side edge of the disk holder 1, performs image processing with an image processing device 21, and processes the image in a longitudinal direction X and a vertical direction Z along the surface of the disk holder 1. Detect the position. During the image processing apparatus 21 and between the robot controller 17, and control unit 16 and the robot controller 17 are connected with each wiring 18 _2, 18 _3.

A robot 22 has two hands 23 and 24 at the tip, and each hand has 5 hands in this embodiment.
I try to grab individual disks. Details of this hand are shown in FIGS. In FIG. 5, only the hand 23 is illustrated. The hand 24 has the same structure as the hand 23 and is not shown.

The hand 23 includes the index finger 23a and the thumb 2
3b, the base of the index finger 23a enters the hand support 25 of the robot, and is driven by a drive mechanism 26 inside the hand support 25 to show arrows R and S shown in the figure.
Can be pointed in any direction like a gun barrel. Therefore, the index finger 23a is
A loose fitting hole 27 is provided at the place where the index finger 23a can move freely right and left and up and down.

The base of the thumb body 23b is fixed to a block body 28, and a square hole is vertically penetrated in the center of the block body 28, and the inside of the square hole extends downward from the base end of the index finger 23a. The guide 29 fixed to the slidably moves. The block body 28 is constantly pulled toward the index finger 23a by a towing spring (not shown), while the block body 28 is a traction member 31 connected to an air cylinder 30 fixed to the hand support 25.
Traction force against the traction spring.

[0031] Thus, by the action of the air cylinder 30, the thumb member 23b is moved in the vertical direction along the guide 29, the disc D is held central hole is fitted into and the index finger body 23a and a thumb member 23b . Air cylinder 3
Numeral 0 is fixed to the hand support 25, while the block 28 at the base of the thumb 23b moves up, down, left and right, so that the traction member 31 uses a flexible wire-like material.

When the hand 23 grasps the disk D,
After the upper portion of the center hole of the disc D is fitted into the plurality of grooves 32a formed at predetermined intervals on the upper surface of the index finger 23a, the block 28 at the base of the thumb 23b is lowered by the action of the air cylinder 30. The lower side of the center hole of the disk D fits into a plurality of grooves 32b formed at predetermined intervals on the lower surface of the thumb body 23b. Therefore, the hand 23 can reliably grip the disk D.

When the disk D is mounted in the mounting groove 2a of the mounting hole 2 of the disk holder 1, the hand 23 gripping a plurality of disks D as described above receives the data input to the robot controller 17, ie, The disc D is positioned above the mounting groove 2a based on the displacement of the mounting groove 2a of the mounting hole 2 formed in the disk holder 1 with respect to the reference position in the Y direction.

Next, when the hand 23 is lowered, the lower end of the disk D is fitted into the mounting groove 2a. Since the width of the mounting groove 2a is sufficiently larger than the thickness of the disk D, the disk D fits into the mounting groove 2a even if the disk D is inclined to some extent with respect to the mounting groove 2a. When the lower end of the disc D fits into the mounting groove 2a, the operation of the air cylinder 30 is stopped, and the thumb 23b is raised by a traction spring (not shown).

Accordingly, the lower side of the center hole of the disk D is formed with a plurality of grooves 32 formed at predetermined intervals on the lower surface of the thumb body 23b.
Remove from b. When the hand 23 is retracted from the position of the mounting hole 2, the mounting of the disk D into the mounting groove 2 a formed in the mounting hole 2 is completed. By repeating the above operation, a plurality of disks D can be mounted in the mounting grooves 2a of the plurality of mounting holes 2 formed in the disk holder 1 in a short time.

As described above, the mounting grooves 2a of the plurality of mounting holes 2 formed by drilling the plurality of disks D in the disk holder 1.
When the operation of mounting the carrier 3 is completed, the cross-shaped engaging member 7 which is fitted in the V-shaped grooves 5 and 6 formed on the lower surface of the carrier 3 of the disk holder 1 and lifts the carrier 3 shown in FIG. Is lowered, the wheels 4 provided on the carrier 3
Moves on the rail (not shown) of the in-line type sputtering apparatus and moves to the next step. As described above, the displacement of the mounting grooves 2a of the plurality of mounting holes 2 provided in the disk holder 1 with respect to the reference position is detected, and the plurality of disks D are inserted into the mounting grooves 2a of the plurality of mounting holes 2. Installation takes approximately 1.5 minutes.

[0037]

As described above, the disk handling mechanism of the sputtering apparatus according to the present invention comprises a disk
A vertical moving plate that moves up and down along the back of the disk holder when the transfer is stopped during removal and mounting of the device, and a plurality of contact linear displacement meters are arranged on this vertical moving plate in rows The tip of the sensor part of the above is brought into contact with the vicinity of the mounting groove at the lower end of the mounting hole for mounting each disk of the disk holder, and the displacement of the mounting groove from the reference position is detected for each row of the mounting hole, and this is detected. Robot control using displacement data
The controller is configured to control the robot hand that inputs the data to the mounting groove of the mounting hole by inputting the data into the mounting groove on the basis of the data . Also, another invention is directed to disc taking.
Provide a vertical plate close to the disk holder parallel to the disk holder on the back side of the disk holder when transporting is stopped outside / mounting, and provide the same number of contact type linear displacement gauges as the number of disk mounting holes on this vertical plate. The tip is brought into contact with the vicinity of the mounting groove of the mounting hole, the displacement of the mounting groove of each mounting hole from the reference position is detected, and the data of this displacement is sent to the robot controller.
The robot is configured to input and control the hand of a robot for mounting a disk in a mounting groove of a mounting hole based on the data . According to the inventions configured as described above, even if the flatness of the disk holder is disturbed by the heat generated by sputtering and the positions of the mounting grooves of the plurality of mounting holes formed in the disk holder are displaced from the reference positions, The tip of the sensor part of the contact type linear displacement meter arranged on the back of the holder is brought into contact with the vicinity of the mounting groove of each mounting hole to accurately detect the displacement data from the reference position of the mounting groove of the mounting hole and input to the robot controller controls the movement of the robot hand on the basis of the data of the displacement, is positioned exactly on top of the mounting groove of the disc grabbed the hand of the robot mounting holes, mounting the disk It can be fitted into the mounting groove of the hole . Therefore, even if the flatness of the disc holder is disturbed by the heat generated by the sputtering and the positions of the mounting grooves of the plurality of mounting holes formed in the disk holder are displaced from the reference positions, the disc is inserted into the mounting groove of the mounting hole of the disk holder. It can be installed accurately in a short time. Also, depending on the flatness of the disc holder,
Mechanism to detect the mounting groove of the mounting hole of the disc holder
And the robot hand is not mechanically connected
The robot hand can be reduced in weight,
Power consumption can be reduced and the disk
Work to detect the mounting groove in the mounting hole of the
Insert the disc gripped by hand into the disc holder mounting hole.
Since the work of mounting in the mounting groove is performed individually,
In addition, parallel work is possible, and when handling disks
The time can be shortened. In addition, in robot hand
Since the contact type linear displacement meter is not connected, the robot
Display with a contact type linear displacement meter
While looking for the mounting groove in the mounting hole on the holder,
There is no need to install it in the mounting groove of the mounting hole.
Into the mounting groove of the mounting hole of the disc holder quickly and accurately
Can be installed.

[Brief description of the drawings]

FIG. 1 is a perspective view of a disk handling mechanism of a sputtering apparatus according to the present invention.

FIG. 2 is a perspective view showing a means for fixing a carrier of the disk holder.

FIG. 3 is a cross-sectional view taken along line AA of FIG. 1;

FIG. 4 is a perspective view showing a relationship between a contact linear displacement meter and a mounting groove of a mounting hole.

FIG. 5 is a detailed perspective view of the robot hand.

FIG. 6 is a side view taken along the line BB in FIG. 5;

FIG. 7 is a perspective view of a second embodiment of the present invention.

FIG. 8 is a diagram showing an outline of a conventional in-line type sputtering apparatus, where (A) is a plan view and (B) is a front view.

FIG. 9A is a perspective view of a carrier and a disc holder used in a conventional sputtering apparatus, and FIG.
FIG. 3 is an enlarged perspective view of a part of the disk holder.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Disc holder 2 Mounting hole 2a Mounting groove 3 Carrier 4 Wheel 5 V-shaped groove 6 V-shaped groove 7 Cross-shaped engaging member 8 Contact-type linear displacement meter 8a Sensor part 9 Vertical moving plate 10 Screw rod 11 Female Screw part 12 Pulse motor 13 Guide rod 14 Sliding hole 16 Control part 17 Robot controller 18 ₁ wiring 18 ₂ wiring 18 ₃ wiring 19 CCD camera 20 Reference hole 21 Image processing device 22 Robot 23 Hand 23a Pointing finger 23b Thumb 24 Hand 25 Hand support 26 Drive mechanism 27 Play hole 28 Block 29 Guide 30 Air cylinder 31 Traction member 32a Groove 32b Groove 33 Vertical plate D disk 51 Unload / load position 52 Carrier 53 Disk holder 54 First buffer chamber 55 Heating chamber 56 Spattery Ring chamber 57 slit 58 carbon sputtering chamber 59 second buffer chamber 60 disk 60a lower semicircle 61 disk mounting hole 61a mounting groove

Claims (2)

(57) [Claims] In a disk handling mechanism of an in-line sputtering apparatus, a disk is detached and mounted.
A vertically moving plate (9) that moves up and down along the back surface of the disk holder (1) in a transport stopped state is provided, and a plurality of contact type linear displacement meters (8) are arranged in a row on the vertically moving plate (9). The tip of the sensor part (8a) of each contact type linear displacement meter is brought into contact with the vicinity of the mounting groove (2a) at the lower end of the mounting hole (2) for mounting each disk of the disk holder (1). The displacement of the mounting groove (2a) from the reference position is detected for each row of the hole (2), and the data of this displacement is transferred to the robot controller.
Controller (17), and mounts the disc in the mounting groove (2a) of the mounting hole.
3. A disk handling mechanism for a sputtering apparatus, wherein the disk handling mechanism is configured to perform the control based on the data . 2. In a disk handling mechanism of an in-line type sputtering apparatus, a disk is removed and mounted.
Plate (3) approached parallel to the disk holder (1) on the back of the disk holder (1) in the transport stopped state
The vertical plate (33) is provided with the same number of contact type linear displacement meters (8) as the number of mounting holes (2) for the disk, and the tip of the sensor part (8a) is attached to the mounting groove of the mounting hole (2). (2
a) and the mounting groove (2) of each mounting hole (2).
a) The displacement from the reference position is detected, and the data of this displacement is detected.
Is input to the robot controller (17) and the disk is
A disk handling mechanism for a sputtering apparatus, wherein a hand (23, 24) of a robot (22) to be mounted in a mounting groove (2a) of a mounting hole is controlled based on the data .