JP2608477C - - Google Patents

Info

Publication number

JP2608477C

JP2608477C JP2608477C JP 2608477 C JP2608477 C JP 2608477C JP 2608477 C JP2608477 C JP 2608477C

Authority

JP

Japan

Prior art keywords

protective layer

ozone

discharge

capacitance

electrode

Prior art date

1999-09-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

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• CBENFWSGALASAD-UHFFFAOYSA-N ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 38
• 239000011241 protective layer Substances 0.000 claims description 35
• 239000010410 layer Substances 0.000 claims description 27
• 230000001939 inductive effect Effects 0.000 claims description 13
• 239000003990 capacitor Substances 0.000 claims 1
• 239000000919 ceramic Substances 0.000 description 20
• 239000000463 material Substances 0.000 description 7
• PNEYBMLMFCGWSK-UHFFFAOYSA-N AI2O3 Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
• WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
• 229910052721 tungsten Inorganic materials 0.000 description 4
• 239000010937 tungsten Substances 0.000 description 4
• 238000004519 manufacturing process Methods 0.000 description 3
• ZOKXTWBITQBERF-UHFFFAOYSA-N molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
• 229910052750 molybdenum Inorganic materials 0.000 description 3
• 239000011733 molybdenum Substances 0.000 description 3
• ODINCKMPIJJUCX-UHFFFAOYSA-N calcium monoxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 2
• 238000005229 chemical vapour deposition Methods 0.000 description 2
• 239000011521 glass Substances 0.000 description 2
• CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
• 229910052863 mullite Inorganic materials 0.000 description 2
• GWEVSGVZZGPLCZ-UHFFFAOYSA-N titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
• 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
• 229910004298 SiO 2 Inorganic materials 0.000 description 1
• GFQYVLUOOAAOGM-UHFFFAOYSA-N Zirconium(IV) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
• 238000004061 bleaching Methods 0.000 description 1
• 229910010293 ceramic material Inorganic materials 0.000 description 1
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1
• 238000004332 deodorization Methods 0.000 description 1
• 230000002542 deteriorative Effects 0.000 description 1
• 238000007599 discharging Methods 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 230000003628 erosive Effects 0.000 description 1
• 238000010304 firing Methods 0.000 description 1
• 229910052839 forsterite Inorganic materials 0.000 description 1
• 238000010030 laminating Methods 0.000 description 1
• 230000001590 oxidative Effects 0.000 description 1
• 230000001954 sterilising Effects 0.000 description 1
• 238000004659 sterilization and disinfection Methods 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1
• KNXVOGGZOFOROK-UHFFFAOYSA-N trimagnesium;dioxido(oxo)silane;hydroxy-oxido-oxosilane Chemical compound [Mg+2].[Mg+2].[Mg+2].O[Si]([O-])=O.O[Si]([O-])=O.[O-][Si]([O-])=O.[O-][Si]([O-])=O KNXVOGGZOFOROK-UHFFFAOYSA-N 0.000 description 1
• 229910052845 zircon Inorganic materials 0.000 description 1
• 229910052846 zircon Inorganic materials 0.000 description 1