JP2600902B2 - Socket for semiconductor device - Google Patents

Socket for semiconductor device

Info

Publication number
JP2600902B2
JP2600902B2 JP1123083A JP12308389A JP2600902B2 JP 2600902 B2 JP2600902 B2 JP 2600902B2 JP 1123083 A JP1123083 A JP 1123083A JP 12308389 A JP12308389 A JP 12308389A JP 2600902 B2 JP2600902 B2 JP 2600902B2
Authority
JP
Japan
Prior art keywords
semiconductor element
recess
socket
semiconductor device
anisotropic conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1123083A
Other languages
Japanese (ja)
Other versions
JPH02301979A (en
Inventor
政仁 谷口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1123083A priority Critical patent/JP2600902B2/en
Publication of JPH02301979A publication Critical patent/JPH02301979A/en
Application granted granted Critical
Publication of JP2600902B2 publication Critical patent/JP2600902B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Connecting Device With Holders (AREA)

Description

【発明の詳細な説明】 〔概要〕 電気試験を行うためLSIやICなどを収納実装する半導
体素子用ソケットに関し、 収納実装した試験済みの半導体素子を容易に取り替え
できることを目的とし、 平坦な底面に半導体素子の平面電極に対応する配線電
極を形成し底面に向かってすぼむ傾斜側面を有するくぼ
みと、外形の一側縁に設けたヒンジにより回動開閉し弾
性ゴムを内側に突設する押さえ蓋とを備える絶縁性ソケ
ット本体と、前記配線電極に接触するように載せる異方
導電性ゴムシートと、挿入した半導体素子外形と嵌合す
る枠孔を有し該半導体素子外形と前記くぼみの傾斜側面
との間に押入するくさび部を突出する位置決め枠とから
なり、半導体素子を前記くぼみに挿入して異方導電性ゴ
ムシート上に載せ、前記位置決め枠のくさび部を押し込
んで電極同士を合わせ、前記押さえ蓋を閉じて半導体素
子を弾性ゴムで押圧しロックする。
DETAILED DESCRIPTION OF THE INVENTION [Summary] The present invention relates to a socket for a semiconductor element for storing and mounting an LSI or an IC for conducting an electrical test. Holder that forms a wiring electrode corresponding to the plane electrode of the semiconductor element and has a sloped side that slopes toward the bottom surface, and a hinge that opens and closes by rotating a hinge on one side edge of the outer shape to project elastic rubber inward. An insulating socket body having a lid, an anisotropic conductive rubber sheet placed so as to be in contact with the wiring electrode, and a frame hole for fitting the inserted semiconductor element outer shape; A semiconductor device is inserted into the recess and placed on the anisotropic conductive rubber sheet, and the wedge portion of the positioning frame is pushed. Nde combined electrodes together to lock presses the semiconductor element with elastic rubber to close the pressing lid.

〔産業上の利用分野〕[Industrial applications]

本発明は電気試験を行うためLSIやICなどを収納する
半導体素子用ソケットに関する。
The present invention relates to a socket for a semiconductor element that accommodates an LSI, an IC, and the like for performing an electrical test.

半導体素子を試験あるいは実験する際、試験後に容易
に取り替えることのできる半導体素子用ソケットが要望
されている。
When testing or experimenting a semiconductor device, there is a demand for a semiconductor device socket that can be easily replaced after the test.

〔従来の技術〕[Conventional technology]

従来は第3図の実装状態を示す要部斜視図に示すよう
に、半導体素子用ソケットを用いることなく半導体素子
12の平面電極12aを試験用基板11の配線電極11aにワイヤ
13でワイヤボンディングにより実装した後、半導体素子
12の試験(あるいは実験)を行っている。
Conventionally, as shown in a perspective view of a main part showing a mounting state of FIG. 3, a semiconductor device without using a semiconductor device socket is used.
Wire the 12 flat electrodes 12a to the wiring electrodes 11a of the test substrate 11.
After mounting by wire bonding in 13
We have 12 tests (or experiments).

また、図示はしないが基板に複数の試験用マイクロプ
ローブを配設し、各プローブの接触針を基板に装着した
半導体素子の平面電極にそれぞれ圧接して試験を行って
いる。
Although not shown, a plurality of test microprobes are provided on the substrate, and the test is performed by pressing the contact needles of each probe against the flat electrodes of the semiconductor element mounted on the substrate.

〔発明が解決しようとする課題〕[Problems to be solved by the invention]

しかしながら、このような上記実装構造によれば、半
導体素子はワイヤボンディングにより実装すると試験後
の取り替えは簡単にできず試験用基板は試験済みの半導
体素子とともに使い捨てとなって経済性が悪いという問
題や、試験用マイクロプローブによる触針では試験後の
取り替えはできるが、ワイヤボンディング方式に比べて
大形でその設備に費用が掛かるといった問題があった。
However, according to such a mounting structure, when the semiconductor element is mounted by wire bonding, replacement after the test cannot be easily performed, and the test substrate is disposable together with the tested semiconductor element, resulting in a problem of low economical efficiency. Although a stylus using a test microprobe can be replaced after the test, there is a problem that the equipment is large and expensive compared to the wire bonding method.

上記問題点に鑑み、本発明は収納実装した試験済みの
半導体素子を容易に取り替えることのできる半導体素子
用ソケットを提供することを目的とする。
In view of the above problems, an object of the present invention is to provide a semiconductor device socket that can easily replace a semiconductor device which has been mounted and tested and has been tested.

〔課題を解決するための手段〕[Means for solving the problem]

上記目的を達成するために、本発明の半導体素子用ソ
ケットにおいては、平坦な底面に半導体素子の平面電極
に対応する配線電極を形成し底面に向かってすぼむ傾斜
側面を有するくぼみと、外形の一側縁に設けたヒンジに
より回動開閉し弾性ゴムを内側に突設する押さえ蓋とを
備える絶縁性ソケット本体と、前記配線電極に接触する
ように載せる異方導電性ゴムシートと、挿入した半導体
素子外形と嵌合する枠孔を有し該半導体素子外形と前記
くぼみの傾斜側面との間に挿入するくさび部を突出する
位置決め枠とからなり、半導体素子を前記くぼみに挿入
して異方導電性ゴムシート上に載せ、前記位置決め枠の
くさび部を押し込んで電極同士を合わせ、前記押さえ蓋
を閉じて半導体素子を弾性ゴムで押圧しロックする。
In order to achieve the above object, in a semiconductor device socket according to the present invention, there is provided a recess having an inclined side surface formed on a flat bottom surface and having a wiring electrode corresponding to a plane electrode of the semiconductor device and which is reduced toward the bottom surface; An insulating socket main body having a holding lid that is opened and closed by a hinge provided at one side edge thereof and is provided with an elastic rubber projecting inward, an anisotropic conductive rubber sheet placed on the wiring electrode so as to be in contact therewith, A positioning frame that has a frame hole that fits into the outer shape of the semiconductor device and that projects a wedge portion inserted between the outer shape of the semiconductor device and the inclined side surface of the recess. The semiconductor element is placed on a conductive rubber sheet, the wedges of the positioning frame are pushed in, the electrodes are aligned, the holding lid is closed, and the semiconductor element is pressed with elastic rubber and locked.

〔作用〕 くぼみの底面に設けた配線電極と半導体素子の平面電
極間に異方導電性ゴムシートを挟み、位置決め枠のくさ
び部を押し込むことにより、半導体素子はくぼみ内に自
動的にセンタリングされて電極同士を一致させることが
でき、さらに弾性ゴムを介して押さえ蓋で押圧すること
により、異方導電性ゴムシートは厚さ方向のみの導電性
を有することから電極同士を電気的に接続することがで
きる。
[Function] The semiconductor element is automatically centered in the recess by sandwiching the anisotropic conductive rubber sheet between the wiring electrode provided on the bottom of the recess and the plane electrode of the semiconductor element and pressing the wedge of the positioning frame. The electrodes can be matched with each other, and furthermore, by pressing with the holding lid via the elastic rubber, the anisotropic conductive rubber sheet has conductivity only in the thickness direction, so that the electrodes can be electrically connected. Can be.

〔実施例〕〔Example〕

以下図面に示した実施例に基づいて本発明の要旨を詳
細に説明する。
Hereinafter, the gist of the present invention will be described in detail based on embodiments shown in the drawings.

第1図の分解した状態を示す組立斜視図及び第2図の
その側断面図に示すように、半導体素子用ソケット1は
2点鎖線で示す半導体素子2を収納するくぼみ1a−1を
備える絶縁性ソケット本体1aと、くぼみ1a−1に挿入す
る異方導電性ゴムシート1bと、電極同士の位置合わせを
行う位置決め枠1cとから構成される。
As shown in the disassembled perspective view of FIG. 1 and its side sectional view of FIG. 2, the semiconductor element socket 1 is provided with a recess 1a-1 for accommodating the semiconductor element 2 indicated by a two-dot chain line. A conductive socket body 1a, an anisotropic conductive rubber sheet 1b inserted into the recess 1a-1, and a positioning frame 1c for positioning the electrodes.

絶縁性ソケット本体1aは、絶縁性合成樹脂材を偏平な
立方体にモールド成形してなり、平坦な底面に半導体素
子2の平面電極2aに対応する配線電極1a−2を形成し底
面に向かってすぼむ傾斜側面1a−3を有し半導体素子2
をほぼ沈め得る深さの逆四角錐台形のくぼみ1a−1を表
面に開口して備える。
The insulative socket body 1a is formed by molding an insulative synthetic resin material into a flat cuboid, forming wiring electrodes 1a-2 corresponding to the planar electrodes 2a of the semiconductor element 2 on a flat bottom surface, and facing the bottom surface. Semiconductor device 2 having concave inclined side surface 1a-3
And a truncated inverted quadrangular pyramid-shaped recess 1a-1 having a depth capable of substantially submerging the surface is provided on the surface.

裏面には配線電極1a−2と接続した外部接続用リード
端子1a−1aを突出し植設成形する。
An external connection lead terminal 1a-1a connected to the wiring electrode 1a-2 is projected and formed on the back surface.

そして、ソケット本体外形の一側縁にヒンジ1a−4を
一体成形し、このヒンジ1a−4により回動開閉する金属
ばね板からなる少なくとも半導体素子2の平面視外形大
きさ(図はソケット本体外形の平面視大きさにしてあ
る)の押さえ蓋1a−5を備える。この押さえ蓋1a−5の
内側には位置決め枠1cの枠孔1c−2を通して半導体素子
2の上面を直接、押さえる角形の弾性ゴム1a−6を貼り
付け突設し、ヒンジ1a−4と反対側縁の一部を直角に折
曲し係合孔1a−7aを開けたつまみ部1a−7を備える。ま
た更に、ヒンジ1a−4と反対側の本体側壁1a−8にはこ
のつまみ部1a−7の係合孔1a−7aを挿入・係止するロッ
ク用突起1a−8aを一体成形備える。
A hinge 1a-4 is integrally formed on one side edge of the outer shape of the socket body, and at least the outer size in plan view of the semiconductor element 2 made of a metal spring plate which is opened and closed by the hinge 1a-4 (FIG. (In plan view). A rectangular elastic rubber 1a-6 for directly holding the upper surface of the semiconductor element 2 through the frame hole 1c-2 of the positioning frame 1c is attached and protruded inside the holding lid 1a-5, and is opposite to the hinge 1a-4. There is provided a knob 1a-7 in which a part of the edge is bent at a right angle to form an engagement hole 1a-7a. Further, a locking projection 1a-8a for inserting and engaging the engaging hole 1a-7a of the knob 1a-7 is integrally formed on the main body side wall 1a-8 opposite to the hinge 1a-4.

異方導電性ゴムシート1bは、厚さ方向にだけ導電性を
有しシート面方向には絶縁性を示すように、例えばシリ
コンゴムシート(フィルムもある)に金属粒子を混合し
たもので、くぼみ1a−1に挿入できる大きさに角形に切
ってあり、くぼみ1a−1に挿入して配線電極1a−2に接
触するように置かれる。
The anisotropic conductive rubber sheet 1b is made by mixing metal particles in a silicon rubber sheet (also a film), for example, so that it has conductivity only in the thickness direction and has insulation in the sheet surface direction. It is cut into a square shape so that it can be inserted into 1a-1, and inserted into the recess 1a-1 and placed so as to be in contact with the wiring electrode 1a-2.

位置決め枠1cは、合成樹脂材を角枠形にモールド成形
してなり、枠孔1c−2は半導体素子2の外形と嵌合し絶
縁性ソケット本体1aのくぼみ1a−1の傾斜側面1a−3
と、くぼみ1a−1に挿入した半導体素子2の外形との間
に押入するくさび部1c−1を四辺下方に突出し成形す
る。
The positioning frame 1c is formed by molding a synthetic resin material into a square frame shape, and the frame hole 1c-2 is fitted with the outer shape of the semiconductor element 2 and the inclined side surface 1a-3 of the recess 1a-1 of the insulating socket body 1a.
And a wedge portion 1c-1 to be inserted between the outer shape of the semiconductor element 2 inserted into the recess 1a-1 and formed to project downward from four sides.

絶縁性ソケット本体1aに半導体素子2を収納実装する
には、半導体素子2をくぼみ1a−1に挿入して異方導電
性ゴムシート1b上に載せ、位置決め枠1cの枠孔1c−2を
半導体素子2に嵌合しながら、くぼみ1a−1の傾斜側面
1a−3との間にくさび部1c−1を押し込み、最後に押さ
え蓋1a−5を閉じて半導体素子2を弾性ゴム1a−6で押
圧し、つまみ部1a−7の係合孔1a−7aをロック用突起1a
−8aに係止しロックする。
In order to house the semiconductor element 2 in the insulating socket body 1a, the semiconductor element 2 is inserted into the recess 1a-1, placed on the anisotropic conductive rubber sheet 1b, and the frame hole 1c-2 of the positioning frame 1c is inserted into the semiconductor hole. The inclined side surface of the recess 1a-1 while fitting to the element 2.
Push the wedge 1c-1 between the pin 1a-3 and the cover 1a-5, and finally press the semiconductor element 2 with the elastic rubber 1a-6 to engage the engaging hole 1a-7a of the knob 1a-7. The lock projection 1a
Lock to -8a.

このように、くぼみに挿入した半導体素子にさらに位
置決め枠を挿入しそのくさび部をくぼみの傾斜側面との
間に押し込むことにより、自動的に電極同士が位置合わ
せされる。そして、くぼみの配線電極と半導体素子の平
面電極の間に異方導電性ゴムシートを介在して置くこと
により、押さえ蓋で弾性押圧することによって電極同士
を電気的に導電接続することができる。
In this manner, the positioning of the electrodes is automatically performed by inserting the positioning frame into the semiconductor element inserted into the recess and pushing the wedge portion between the semiconductor device and the inclined side surface of the recess. Then, by placing an anisotropic conductive rubber sheet between the wiring electrode of the recess and the plane electrode of the semiconductor element, the electrodes can be electrically conductively connected by elastically pressing with a holding lid.

そして、半導体素子のくぼみへの収納実装は挿入・圧
接構造によるため、容易に挿抜することができ、試験後
の半導体素子を簡単に取り替えることができる。また、
本発明の半導体素子用ソケットは従来のワイヤボンディ
ング実装の使い捨てに比べて反復使用することができて
経済性に優れ、マイクロプローブの触針接続構造に比べ
て安価・小形に製作することができる。
Since the semiconductor element is housed and mounted in the recess by the insertion and pressure contact structure, it can be easily inserted and removed, and the semiconductor element after the test can be easily replaced. Also,
The semiconductor device socket of the present invention can be used repeatedly and is more economical than the conventional disposable wire bonding mounting, and can be manufactured at a lower cost and smaller size than the microprobe stylus connection structure.

〔発明の効果〕〔The invention's effect〕

以上、詳述したように本発明によれば、半導体素子を
自由に取り替えることができるため試験後の半導体素子
を簡単に取り替えることができ、構造が簡単なため小形
で安価に製作することができ、とくに半導体素子の試験
用ソケットとして極めて有効である。
As described in detail above, according to the present invention, the semiconductor element can be freely replaced, so that the semiconductor element after the test can be easily replaced.Since the structure is simple, the semiconductor element can be manufactured small and inexpensively. Particularly, it is extremely effective as a test socket for a semiconductor device.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明による一実施例の分解した状態を示す組
立斜視図、 第2図は第1図に半導体素子を収納実装した状態を示す
側断面図、 第3図は従来技術による実装状態を示す要部斜視図であ
る。 図において、 1は半導体素子用ソケット、1a−4はヒンジ、1aは絶縁
性ソケット本体、1a−5は押さえ蓋、1a−1はくぼみ、
1a−6は弾性ゴム、1a−2は配線電極、2は半導体素
子、1a−3は傾斜側面、2aは平面電極、 を示す。
FIG. 1 is an assembled perspective view showing an exploded state of an embodiment according to the present invention, FIG. 2 is a side sectional view showing a state where semiconductor elements are housed and mounted in FIG. 1, and FIG. FIG. In the drawing, 1 is a semiconductor element socket, 1a-4 is a hinge, 1a is an insulating socket body, 1a-5 is a holding lid, 1a-1 is a depression,
1a-6 denotes an elastic rubber, 1a-2 denotes a wiring electrode, 2 denotes a semiconductor element, 1a-3 denotes an inclined side surface, and 2a denotes a plane electrode.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】平坦な底面に半導体素子(2)の平面電極
(2a)に対応する配線電極(1a−2)を形成し底面に向
かってすぼむ傾斜側面(1a−3)を有するくぼみ(1a−
1)と、外形の一側縁に設けたヒンジ(1a−4)により
回動開閉し弾性ゴム(1a−6)を内側に突設する押さえ
蓋(1a−5)とを備える絶縁性ソケット本体(1a)と、 前記配線電極(1a−2)に接触するように載せる異方導
電性ゴムシート(1b)と、 挿入した半導体素子(2)外形と嵌合する枠孔(1c−
2)を有し該半導体素子(2)外形と前記くぼみ(1a−
1)の傾斜側面(1a−3)との間に押入するくさび部
(1c−1)を突出する位置決め枠(1c)とからなり、 半導体素子(2)を前記くぼみ(1a−1)に挿入して異
方導電性ゴムシート(1b)上に載せ、前記位置決め枠
(1c)のくさび部(1c−1)を押し込んで電極(2a,1a
−2)同士を合わせ、前記押さえ蓋(1a−5)を閉じて
半導体素子(2)を弾性ゴム(1a−6)で押圧しロック
するようにしたことを特徴とする半導体素子用ソケッ
ト。
1. A recess having an inclined side surface (1a-3) formed on a flat bottom surface and formed with a wiring electrode (1a-2) corresponding to a plane electrode (2a) of a semiconductor element (2) and tapered toward the bottom surface. (1a-
1) and an insulating socket body comprising a holding lid (1a-5) which is opened and closed by a hinge (1a-4) provided on one side edge of the outer shape and which has an elastic rubber (1a-6) protruding inward. (1a), an anisotropic conductive rubber sheet (1b) placed so as to be in contact with the wiring electrode (1a-2), and a frame hole (1c-
2) having a semiconductor element (2) outer shape and the recess (1a-
1) a positioning frame (1c) protruding a wedge (1c-1) between the inclined side surface (1a-3) and a semiconductor element (2) inserted into the recess (1a-1). And place it on the anisotropic conductive rubber sheet (1b), push in the wedge (1c-1) of the positioning frame (1c) and press the electrodes (2a, 1a).
-2) a semiconductor element socket characterized in that the semiconductor element (2) is locked by pressing the semiconductor element (2) with an elastic rubber (1a-6) by closing the holding lid (1a-5) together.
JP1123083A 1989-05-16 1989-05-16 Socket for semiconductor device Expired - Fee Related JP2600902B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1123083A JP2600902B2 (en) 1989-05-16 1989-05-16 Socket for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1123083A JP2600902B2 (en) 1989-05-16 1989-05-16 Socket for semiconductor device

Publications (2)

Publication Number Publication Date
JPH02301979A JPH02301979A (en) 1990-12-14
JP2600902B2 true JP2600902B2 (en) 1997-04-16

Family

ID=14851779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1123083A Expired - Fee Related JP2600902B2 (en) 1989-05-16 1989-05-16 Socket for semiconductor device

Country Status (1)

Country Link
JP (1) JP2600902B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04117448U (en) * 1991-03-29 1992-10-21 関西日本電気株式会社 Electronic component testing jig
JPH04120233U (en) * 1991-04-11 1992-10-27 富士通株式会社 Semiconductor characteristic evaluation equipment
KR940009571B1 (en) * 1992-03-04 1994-10-15 삼성전자주식회사 Burn in socket
JP2001176617A (en) * 1999-12-20 2001-06-29 Sumitomo Wiring Syst Ltd Connector

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS641252A (en) * 1987-06-24 1989-01-05 Japan Synthetic Rubber Co Ltd Jig for semiconductor element test

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH071456B2 (en) * 1987-06-29 1995-01-11 日立建機株式会社 Multi-layer piezoelectric actuator mounting structure for fine positioning device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS641252A (en) * 1987-06-24 1989-01-05 Japan Synthetic Rubber Co Ltd Jig for semiconductor element test

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