JP2600250B2 - Solid-state imaging device and video camera - Google Patents
Solid-state imaging device and video cameraInfo
- Publication number
- JP2600250B2 JP2600250B2 JP63039009A JP3900988A JP2600250B2 JP 2600250 B2 JP2600250 B2 JP 2600250B2 JP 63039009 A JP63039009 A JP 63039009A JP 3900988 A JP3900988 A JP 3900988A JP 2600250 B2 JP2600250 B2 JP 2600250B2
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- Japan
- Prior art keywords
- light
- solid
- imaging device
- state imaging
- video camera
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【発明の詳細な説明】 「産業上の利用分野」 本発明は、ビデオカメラ等に用いられる集光効果を持
つ固体撮像装置に関し、特にマイクロレンズアレイの使
用によるシェーディングを補正することができる固体撮
像装置およびビデオカメラに関するものである。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid-state imaging device having a light-collecting effect used for a video camera or the like, and more particularly, to a solid-state imaging device capable of correcting shading due to use of a microlens array. The present invention relates to an apparatus and a video camera.
［発明の概要］ 本発明は、光信号を画素毎の電気信号に変換する固体
撮像装置およびビデオカメラにおいて、 固体撮像素子の受光部側に配設する集光効果を持つ集
光部のピッチを、受光部のピッチよりも小さいピッチで
配列して、周辺部の受光部における斜め方向の入射光を
受光部へ集光させることにより、 集光されない無効光を減少させてシェーディングを補
正し、感度ムラを低減させるとともに、その感度を向上
させるようにしたものである。[Summary of the Invention] The present invention relates to a solid-state imaging device and a video camera that convert an optical signal into an electric signal for each pixel. By arranging light at a pitch smaller than the pitch of the light receiving unit, and condensing obliquely incident light at the light receiving unit in the peripheral area to the light receiving unit, the ineffective light that is not collected is reduced, shading is corrected, and sensitivity is improved. In addition to reducing unevenness, the sensitivity is improved.
［従来の技術］ 従来より、ビデオカメラや電子スチルカメラ等におい
て、CCDやMOS素子で構成した固体撮像装置が広く使用さ
れている。一般に固体撮像装置の受光部は、縦横（ライ
ンセンサーでは横のみ）に画素毎に所定ピッチで設けら
れ、その１画素の受光部の周囲には転送領域等が設けら
れるため、それらの領域に入射する光は全く無駄なもの
となり、固体撮像装置の感度は非常に低いものとなって
いた。[Prior Art] Conventionally, a solid-state imaging device including a CCD or a MOS element has been widely used in a video camera, an electronic still camera, and the like. Generally, the light receiving section of the solid-state imaging device is provided at a predetermined pitch for each pixel in the vertical and horizontal directions (only horizontal in the case of the line sensor), and a transfer area or the like is provided around the light receiving section of one pixel. The generated light is wasted at all, and the sensitivity of the solid-state imaging device is very low.
この問題点を解決するため、受光部以外の領域に入射
する光を集光する集光手段を設け、その固体撮像装置の
高感度化を図る技術として、特公昭60−59752号公報に
開示される様な半球状の集光体を受光部上に形成する技
術や、特公昭60−19181号公報に開示される様な画素と
同じピッチでレンチキュラーレンズを形成する技術が提
案されたが、直接、固体撮像素子チップ上に半球状の集
光体やレンチキュラーレンズ等の集光手段を設ける構造
としていることから、そのチップの製造行程が複雑化す
ることになり、また、その再現性も十分ではなく、安定
して生産することが困難であった。In order to solve this problem, Japanese Patent Publication No. 60-59752 discloses a technique for providing a condensing means for condensing light incident on an area other than the light receiving section and improving the sensitivity of the solid-state imaging device. A technique for forming a hemispherical light collector on the light-receiving part and a technique for forming a lenticular lens at the same pitch as the pixels as disclosed in Japanese Patent Publication No. 60-19181 have been proposed. However, since a light-collecting means such as a hemispherical light collector or a lenticular lens is provided on the solid-state image sensor chip, the manufacturing process of the chip becomes complicated, and its reproducibility is not sufficient. And it was difficult to produce it stably.
そこで、提案された従来の技術に、第２図に示すよう
に、直接、固体撮像素子に集光手段を形成せず、集光手
段としてその固定撮像素子の受光部101側のパッケージ1
02の一部に、各受光部101に対向する集光部103aを持つ
平板マイクロレンズアレイ103を配設することにより、
その集光効果によって開口率を向上させて装置の高感度
化を図ると共に安定した生産等を実現する固体撮像装置
があった。Therefore, as shown in FIG. 2, the proposed prior art does not directly form the light-collecting means on the solid-state imaging device, but uses the package 1 on the light receiving section 101 side of the fixed imaging device as the light-collecting means.
By arranging a flat microlens array 103 having a light condensing part 103a facing each light receiving part 101 in a part of 02,
There has been a solid-state imaging device that improves the aperture ratio by the light-collecting effect to increase the sensitivity of the device and realizes stable production and the like.
［発明が解決しようとする課題］ しかしながら、上記従来の技術における第２図に示す
固体撮像装置では、斜めからの入射光のうちで無効にな
る入射光のあること（シェーディング）が原因となっ
て、感度ムラの発生することが解決すべき課題となって
いた。上記シェーディングの原因を詳しく説明したもの
が、第３図（ａ），（ｂ）の説明図と第４図の感度ムラ
の発生を示すビデオ出力信号の波形図である。[Problems to be Solved by the Invention] However, in the solid-state imaging device shown in FIG. 2 in the above-described conventional technique, there is incident light (shading) which becomes invalid among oblique incident lights. However, the occurrence of uneven sensitivity has been a problem to be solved. FIGS. 3 (a) and 3 (b) are explanatory diagrams of the cause of the shading and FIGS. 4 (a) and 4 (b) are waveform diagrams of a video output signal showing the occurrence of sensitivity unevenness.
第３図（ａ）において、絞り106を有する撮影光学系1
05で被写体ＡをＡ′に結像させる場合、絞りによって形
成される射出瞳距離が有限であるため、光学系の中心か
ら周辺部へ遠ざかるに従って主光線が傾く。上記結像
Ａ′を第２図のマイクロレンズアレイを配設して成る固
定撮像装置によって受光する場合、中央部の受光部101
では主光線即ち入射光の傾きが小さく、ほとんどが集光
部で集光されて有効光となるが、第３図（ｂ）に示す周
辺部の受光部101では、主光線はある傾きを持って入射
するため、対応する集光部103aの中心に向う入射光束
B1,B1′のうちB1′は受光部101から外れて無効光とな
り、一方集光部103a間の境目に向う入射光束B2,B2′の
うちB2′はいずれの集光部101にも入射されない場合が
生じ無効光となる。このように周辺部の受光部101で
は、集光された主光線の光束が外側にズレ込むため、中
心部分から外れた位置で受光することになり、シェーデ
ィングが発生する。In FIG. 3A, a photographing optical system 1 having an aperture 106
When an image of the subject A is formed on A 'in 05, since the exit pupil distance formed by the stop is finite, the principal ray is inclined as the distance from the center of the optical system to the peripheral part increases. When the above-mentioned image A 'is received by the fixed imaging device having the microlens array shown in FIG.
In FIG. 3B, the inclination of the principal ray, that is, the incident light, is small, and almost all of the light is condensed by the condenser section to become effective light. However, in the light receiving section 101 in the peripheral portion shown in FIG. 3B, the principal ray has a certain inclination. Incident light beam, the incident light flux toward the center of the corresponding light collecting section 103a
B 1, B 1 'B 1 of the' become ineffective light out from the light receiving unit 101, one condensing incident light toward the boundary between the light portion 103a beams B 2, B 2 'B 2 of' are all condensing In some cases, the light is not incident on the portion 101, and becomes invalid light. As described above, in the light receiving section 101 in the peripheral portion, the light flux of the converged principal ray shifts outward, so that the light is received at a position deviated from the central portion, and shading occurs.
第４図は低照度，全白撮像時の１水平走査期間（1H）
におけるビデオ出力信号の波形図を示し、実線は平板マ
イクロレンズアレイのない場合を示し、破線は平板マイ
クロレンズアレイを設けた場合を示している。平板マイ
クロレンズアレイがない場合には、感度は低いが、固体
撮像素子の中央部と周辺部とで一様な感度が得られる。
これに対し、平板マイクロレンズアレイを設けた場合に
は、全体的には感度が向上するものの、周辺部でシェー
ディングが生じて感度が中央部より低下し、感度ムラが
発生していることがわかる。Fig. 4 shows one horizontal scanning period (1H) for low illuminance and full white imaging
5 shows a waveform diagram of a video output signal in FIG. 5, a solid line shows a case where there is no flat microlens array, and a broken line shows a case where a flat microlens array is provided. When there is no flat microlens array, the sensitivity is low, but uniform sensitivity is obtained at the center and the periphery of the solid-state imaging device.
On the other hand, when the flat microlens array is provided, although sensitivity is improved as a whole, shading occurs at the peripheral portion, the sensitivity is lower than at the central portion, and sensitivity unevenness occurs. .
本発明は、上記課題を解決するために創案されたもの
で、固定撮像素子のシェーディングを補正し感度ムラを
低減するとともに、その感度を向上させるようにした固
体撮像装置を提供することを目的とする。The present invention has been made in order to solve the above-described problem, and has an object to provide a solid-state imaging device that corrects shading of a fixed imaging element to reduce sensitivity unevenness and improves the sensitivity. I do.
［課題を解決するための手段］ 上記の目的を達成するための本発明の固体撮像装置の
構成は、複数の受光部を有する固体撮像素子の該受光部
上に集光部を配設した固体撮像装置において、上記集光
部のピッチが上記受光部のピッチよりも小さく形成され
たことを特徴とする。[Means for Solving the Problems] To achieve the above object, a solid-state imaging device according to the present invention has a configuration in which a solid-state imaging device having a plurality of light-receiving units and a light-collecting unit disposed on the light-receiving units. In the imaging device, a pitch of the light-collecting unit is smaller than a pitch of the light-receiving unit.
また、同じく本発明のビデオカメラの構成は、複数の
受光部の各々に対して集光部を配設した固体撮像素子
と、該固体撮像素子へ光を導く撮像光学系とを有するビ
デオカメラにおいて、上記固体撮像素子の周辺部では、
上記集光部の配設される位置が上記受光部に対し中心方
向にずれていることを特徴とする。The video camera according to the present invention is also configured as a video camera having a solid-state imaging device in which a light-collecting unit is disposed for each of a plurality of light-receiving units, and an imaging optical system that guides light to the solid-state imaging device. In the peripheral portion of the solid-state imaging device,
The position where the light-collecting unit is provided is shifted from the light-receiving unit toward the center.
［作用］ 本発明は、固体撮像素子の受光部に対向する集光部の
ピッチを、上記受光部のピッチよりも小さくすることに
より、周辺部の集光部へ傾いて入射する主光線がその集
光部に対応する周辺部の受光部の中心部分へ集光するよ
うにして、受光部へ集光されない無効光をなくし、マイ
クロレンズアレイの使用によるシェーディングを補正す
る。[Operation] According to the present invention, the pitch of the light-collecting portion facing the light-receiving portion of the solid-state imaging device is made smaller than the pitch of the light-receiving portion, so that the chief ray incident obliquely to the light-collecting portion in the peripheral portion is formed. The light is condensed on the central portion of the light receiving portion in the peripheral portion corresponding to the light condensing portion, thereby eliminating invalid light that is not condensed on the light receiving portion and correcting shading due to the use of the microlens array.
［実施例］ 以下、本発明の実施例を図面に基づいて詳細に説明す
る。Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings.
第１図（ａ），（ｂ）は本発明の一実施例を示す固体
撮像装置の構成図であり、（ａ）は平面図を示す、
（ｂ）は側面から見た図を示している。本実施例は、図
略のパッケージに収容される固体撮像素子１と、この固
体撮像素子の所定ピッチで配列した受光部２側に対向し
て配設されたマイクロレンズアレイ３とから成る。ここ
で、マイクロレンズアレイ３には、各受光部２に対向す
る集光部3aが設けられ、その集光部3aのピッチｒは中心
より遠ざかるに従って受光部２のピッチｒ′より小さく
されて配設されたものとする。1 (a) and 1 (b) are configuration diagrams of a solid-state imaging device showing an embodiment of the present invention, and (a) is a plan view,
(B) shows the figure seen from the side. The present embodiment includes a solid-state imaging device 1 housed in a package (not shown), and a microlens array 3 disposed opposite to the light receiving unit 2 arranged at a predetermined pitch of the solid-state imaging device. Here, the microlens array 3 is provided with a light condensing portion 3a facing each light receiving portion 2, and the pitch r of the light converging portions 3a is smaller than the pitch r 'of the light receiving portion 2 as the distance from the center increases. It shall be established.
マイクロレンズアレイ３は、例えば平板なガラス基板
において、外部からこのガラス基板に電界を与えて高屈
折率イオンとイオン交換を行うプロセスにより、基板中
のイオンを追い出す形で高屈折率イオンを注入して高屈
折領域を形成し、この領域を集光部3aとする。なお、マ
イクロレンズアレイは、上記に限定するものではなく、
集光効果を有する部分を制御性よく前述のピッチで形成
できるものであれば、種々の材料を用いた成形や微細加
工により形成したものなどであっても良い。上記マイク
ロレンズアレイがガラス基板である場合、パッケージの
シールガラスを兼ねることもできる。また、本実施例に
おいては、受光部に対応する集後部としてマイクロレン
ズアレイ３を用いたが、チップ上に直接形成するオンチ
ップレンズに本発明を適用し得ることは勿論である。The microlens array 3 is formed by implanting high-refractive-index ions in a flat glass substrate, for example, by exchanging ions with high-refractive-index ions by applying an electric field to the glass substrate from the outside to perform ion exchange with the high-refractive-index ions. To form a high-refractive-index region, and this region is used as a light-collecting portion 3a. The micro lens array is not limited to the above,
As long as the portion having the light-condensing effect can be formed with the above-mentioned pitch with good controllability, it may be formed by molding using various materials or fine processing. When the microlens array is a glass substrate, it can also serve as a seal glass for a package. Further, in this embodiment, the microlens array 3 is used as the collecting part corresponding to the light receiving part. However, it is needless to say that the present invention can be applied to an on-chip lens formed directly on a chip.
以上のように構成した実施例の作用を述べる。従来の
技術で説明したように、ビデオカメラ等の撮影光学系を
経て固体撮像装置に入射される主光線は射出瞳距離が有
限であるため、周辺部ほど傾く。すなわち、マイクロレ
ンズアレイ３の中心から遠ざかる周辺部ほど主光線が傾
いて入射され、集光された光束も中心から遠くなる周辺
部ほど外側にズレ込んで、受光されない無効光が増大し
てくる。そこで、本実施例では、各集光部3aのピッチを
小さくすることで、周辺部の集光部3aで集光された主光
線の光束を内側に寄せ、対応する受光部２の中心部分で
受光できるようにする。The operation of the embodiment configured as described above will be described. As described in the related art, a chief ray incident on a solid-state imaging device via a photographing optical system such as a video camera has a finite exit pupil distance, and thus is inclined toward the periphery. That is, the principal ray is inclined and incident on the peripheral portion farther from the center of the microlens array 3, and the converged light flux also shifts outward as the peripheral portion is farther from the center, and the invalid light that is not received increases. Therefore, in the present embodiment, by reducing the pitch of each light condensing part 3a, the luminous flux of the principal ray condensed by the light condensing part 3a in the peripheral part is brought inward, and the central part of the corresponding light receiving part 2 Make it possible to receive light.
本実施例のマイクロレンズアレイ３が以上のように作
用する結果、第３図（ｂ）における周辺部の集光部の中
心に向う入射光束の無効部分B1′は受光部の中心部分で
受光されて有効光となり、また、周辺部の集光部の境目
に向う入射光束B2,B2′のいずれもがそれぞれの集光部
に対応する受光部の中心方向へ集光されて有効光に変わ
り、シェーディングが補正され、第４図の感度ムラが低
減する。それと同時に入射光の無効部分が有効光に加わ
るので、感度がアップする。As a result of the operation of the microlens array 3 of the present embodiment as described above, the ineffective portion B 1 ′ of the incident light beam toward the center of the peripheral light collecting portion in FIG. 3B is received by the central portion of the light receiving portion. Then, both of the incident light fluxes B 2 and B 2 ′ directed to the boundary between the condensing portions in the peripheral portion are condensed toward the center of the light receiving portions corresponding to the respective condensing portions, and thus become effective light. , The shading is corrected, and the sensitivity unevenness shown in FIG. 4 is reduced. At the same time, the ineffective part of the incident light is added to the effective light, so that the sensitivity is improved.
なお、本発明の固体撮像装置は、イメージセンサー等
であっても、ラインセンサー等であっても適用できるこ
とはいうまでもない。また、固体撮像素子として、従来
のように集光手段をチップ上に直接形成した固体撮像素
子に本発明を適用して高感度化を図るようにすることも
可能である。このように、本発明はその主旨に沿って種
々に応用され、種々の実施態様を取り得るものである。Needless to say, the solid-state imaging device of the present invention can be applied to an image sensor or the like or a line sensor or the like. Further, as the solid-state imaging device, it is also possible to increase the sensitivity by applying the present invention to a solid-state imaging device in which a condensing unit is formed directly on a chip as in the related art. As described above, the present invention can be variously applied according to the gist and can take various embodiments.
［発明の効果］ 以上の説明で明らかなように、本発明の固体撮像装置
およびビデオカメラは以下のような効果を奏する。[Effects of the Invention] As is clear from the above description, the solid-state imaging device and the video camera of the present invention have the following effects.
（１）周辺部の入射光を各画素の受光部の中心部分へ集
光できるので、シェーディングを補正し、感度ムラをな
くすことができる。(1) Since the incident light at the peripheral portion can be focused on the central portion of the light receiving portion of each pixel, shading can be corrected and sensitivity unevenness can be eliminated.
（２）周辺部の入射光が有効に受光できるようになり、
感度の向上が図れる。(2) The incident light at the periphery can be effectively received,
The sensitivity can be improved.
第１図（ａ），（ｂ）は本発明の一実施例を示す固体撮
像装置の構成図、第２図は従来技術の固体撮像装置の構
成図、第３図（ａ），（ｂ）はシェーディング発生の説
明図、第４図は感度ムラの発生を示すビデオ出力信号の
波形図である。 １……固体撮像素子、２……受光部、３……マイクロレ
ンズアレイ、3a……集光部。1 (a) and 1 (b) are configuration diagrams of a solid-state imaging device showing an embodiment of the present invention, FIG. 2 is a configuration diagram of a conventional solid-state imaging device, and FIGS. 3 (a) and 3 (b). FIG. 4 is an explanatory diagram of shading occurrence, and FIG. 4 is a waveform diagram of a video output signal showing occurrence of sensitivity unevenness. 1 ... solid-state image sensor, 2 ... light receiving unit, 3 ... microlens array, 3a ... condensing unit.
Claims (2)
光部上に集光部を配設した固体撮像装置において、 上記集光部のピッチが上記受光部のピッチよりも小さく
形成されたことを特徴とする固体撮像装置。1. A solid-state imaging device having a light-collecting unit disposed on a light-receiving unit of a solid-state imaging device having a plurality of light-receiving units, wherein a pitch of the light-collecting unit is formed smaller than a pitch of the light-receiving unit. A solid-state imaging device characterized by the above-mentioned.
した固体撮像素子と、該固体撮像素子へ光を導く撮像光
学系とを有するビデオカメラにおいて、 上記固体撮像素子の周辺部では、上記集光部の配設され
る位置が上記受光部に対し中心方向にずれていることを
特徴とするビデオカメラ。2. A video camera comprising: a solid-state imaging device in which a light-collecting unit is disposed for each of a plurality of light-receiving units; and an imaging optical system for guiding light to the solid-state imaging device. In a video camera, a position where the light condensing unit is disposed is shifted in a center direction with respect to the light receiving unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63039009A JP2600250B2 (en) | 1988-02-22 | 1988-02-22 | Solid-state imaging device and video camera |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63039009A JP2600250B2 (en) | 1988-02-22 | 1988-02-22 | Solid-state imaging device and video camera |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01213079A JPH01213079A (en) | 1989-08-25 |
| JP2600250B2 true JP2600250B2 (en) | 1997-04-16 |
Family
ID=12541105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63039009A Expired - Lifetime JP2600250B2 (en) | 1988-02-22 | 1988-02-22 | Solid-state imaging device and video camera |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2600250B2 (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6690049B2 (en) | 1999-12-02 | 2004-02-10 | Nikon Corporation | Solid-state image sensor, production method of the same, and digital camera |
| US7060961B2 (en) | 2003-12-12 | 2006-06-13 | Canon Kabushiki Kaisha | Image sensing element and optical instrument having improved incident light use efficiency |
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