JP2597042B2 - 差圧測定装置 - Google Patents

差圧測定装置

Info

Publication number
JP2597042B2
JP2597042B2 JP2266593A JP26659390A JP2597042B2 JP 2597042 B2 JP2597042 B2 JP 2597042B2 JP 2266593 A JP2266593 A JP 2266593A JP 26659390 A JP26659390 A JP 26659390A JP 2597042 B2 JP2597042 B2 JP 2597042B2
Authority
JP
Japan
Prior art keywords
sensor
differential pressure
temperature
pressure
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2266593A
Other languages
English (en)
Japanese (ja)
Other versions
JPH03210446A (ja
Inventor
カールハインツ・バンホルツアー
ペーター・ゲルスト
ペーター・ユング
Original Assignee
エンドレス・ウント・ハウザー・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング・ウント・コンパニー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エンドレス・ウント・ハウザー・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング・ウント・コンパニー filed Critical エンドレス・ウント・ハウザー・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング・ウント・コンパニー
Publication of JPH03210446A publication Critical patent/JPH03210446A/ja
Application granted granted Critical
Publication of JP2597042B2 publication Critical patent/JP2597042B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP2266593A 1989-10-06 1990-10-05 差圧測定装置 Expired - Fee Related JP2597042B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3933512.7 1989-10-06
DE3933512A DE3933512A1 (de) 1989-10-06 1989-10-06 Differenzdruckmessgeraet

Publications (2)

Publication Number Publication Date
JPH03210446A JPH03210446A (ja) 1991-09-13
JP2597042B2 true JP2597042B2 (ja) 1997-04-02

Family

ID=6391011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2266593A Expired - Fee Related JP2597042B2 (ja) 1989-10-06 1990-10-05 差圧測定装置

Country Status (5)

Country Link
US (1) US5111698A (en, 2012)
EP (1) EP0421394B1 (en, 2012)
JP (1) JP2597042B2 (en, 2012)
DE (2) DE3933512A1 (en, 2012)
FI (1) FI100361B (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101567399B1 (ko) 2015-01-22 2015-11-10 강유신 체온을 이용한 접촉식 온도제어 압력 안정화장치

Families Citing this family (23)

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US5315884A (en) * 1990-01-08 1994-05-31 The United States Of America As Represented By The United States Department Of Energy Capacitive proximity sensor
US5247834A (en) * 1990-02-09 1993-09-28 Avl Gesellschaft Fuer Verbrennungskraftmaschinen Und Messtechnik Gmbh. Prof. Dr.Dr. H.C. Hans List Density measuring apparatus
DE4124662A1 (de) * 1991-07-25 1993-01-28 Fibronix Sensoren Gmbh Relativdrucksensor
US5237285A (en) * 1991-10-18 1993-08-17 Rosemount Inc. Method and apparatus for capacitance temperature compensation and manufacturability in a dual plate capacitive pressure transmitter
CZ269697A3 (cs) * 1995-02-28 1998-06-17 Rosemount Inc. Zařízení pro měření pracovního tlaku
EP0797084B1 (de) 1996-03-23 2001-01-17 Endress + Hauser GmbH + Co. Verfahren zum Herstellen von kapazitiven, in Nullpunkt-Langzeit-Fehlerklassen sortierten Keramik-Absolutdruck-Sensoren
DE19633630A1 (de) * 1996-08-21 1998-02-26 Endress Hauser Gmbh Co Auswerteeinheit eines Differenzdrucksensors
US5811690A (en) * 1997-03-20 1998-09-22 Hershey; George E. Differential pressure transmitter with highly accurate temperature compensation
FR2764693B1 (fr) * 1997-06-13 1999-08-27 Jaeger Regulation Capteur de mesure de pression
EP1379886A2 (en) * 1999-01-27 2004-01-14 Richard A. Wenman Method and device for measuring the acidity or basicity of insulating fluids, particularly mineral and synthetic oils
US6643610B1 (en) † 1999-09-24 2003-11-04 Rosemount Inc. Process transmitter with orthogonal-polynomial fitting
DE10031135A1 (de) * 2000-06-30 2002-01-17 Grieshaber Vega Kg Druckmeßvorrichtung
US6612175B1 (en) 2000-07-20 2003-09-02 Nt International, Inc. Sensor usable in ultra pure and highly corrosive environments
US7152478B2 (en) * 2000-07-20 2006-12-26 Entegris, Inc. Sensor usable in ultra pure and highly corrosive environments
DE10052053A1 (de) * 2000-10-19 2002-04-25 Endress Hauser Gmbh Co Druckmeßzelle
US6729041B2 (en) * 2000-12-28 2004-05-04 Tokyo Electron Limited Substrate processing apparatus and substrate processing method
DE10117142A1 (de) 2001-04-05 2002-10-10 Endress & Hauser Gmbh & Co Kg Kapazitiver Differenz-Drucksensor
DE10150691A1 (de) * 2001-10-17 2003-04-30 Endress & Hauser Gmbh & Co Kg Druckmeßaufnehmer mit Trennmembran und Temperaturkompensation
US7047811B2 (en) * 2003-02-18 2006-05-23 Ashcroft Inc. Pressure measurement
US7258021B2 (en) * 2004-06-25 2007-08-21 Rosemount Inc. Process transmitter isolation assembly
DE102004053884A1 (de) * 2004-11-04 2006-05-24 Endress + Hauser Gmbh + Co. Kg Messwertaufnehmer mit Temperaturkompensation
US8307714B1 (en) * 2011-06-02 2012-11-13 Freescale Semiconductor, Inc. Dual port pressure sensor
CN103292947B (zh) * 2012-02-22 2016-02-03 福建上润精密仪器有限公司 一种差动金属电容膜盒的电容极板悬浮结构

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1948191B1 (de) * 1969-09-24 1971-01-14 Siemens Ag Druckmessumformer fuer Messmedien hoher Temperatur
US3646538A (en) * 1969-10-27 1972-02-29 Rosemount Eng Co Ltd Transducer circuitry for converting a capacitance signal to a dc current signal
DE2021479A1 (de) * 1970-05-02 1971-11-11 Kleinwaechter Hans Druckmessgeraet zur Messung von Drucken in Gasen und Fluessigkeiten
US3715638A (en) * 1971-05-10 1973-02-06 Bendix Corp Temperature compensator for capacitive pressure transducers
US3783374A (en) * 1972-04-07 1974-01-01 Sundstrand Data Control Capacitance difference detector circuit
DE2364027A1 (de) * 1973-12-21 1975-07-03 Siemens Ag Differenzdruckmesszelle mit elektrischem abgriff
JPS5233575A (en) * 1975-09-09 1977-03-14 Fuji Electric Co Ltd Differential pressure measuring device
US4177496A (en) * 1976-03-12 1979-12-04 Kavlico Corporation Capacitive pressure transducer
GB1563894A (en) * 1976-03-12 1980-04-02 Kavlico Corp Capacitive pressure transducer and method for making same
JPS5829862B2 (ja) * 1977-05-14 1983-06-25 富士電機株式会社 圧力測定装置
JPS54130054A (en) * 1978-03-31 1979-10-09 Hitachi Ltd Temperature compensator of diaphragms
GB2048488B (en) * 1979-04-26 1983-04-27 Rosemount Eng Co Ltd Differential pressure sensing apparatus
US4370890A (en) * 1980-10-06 1983-02-01 Rosemount Inc. Capacitive pressure transducer with isolated sensing diaphragm
JPS582714A (ja) * 1981-06-30 1983-01-08 Toshiba Corp フランジ形液位伝送器
DE3238430A1 (de) * 1982-10-16 1984-04-19 Philips Patentverwaltung Gmbh, 2000 Hamburg Differenzdrucksensor
US4598381A (en) * 1983-03-24 1986-07-01 Rosemount Inc. Pressure compensated differential pressure sensor and method
DE3321580A1 (de) * 1983-06-15 1984-12-20 Philips Patentverwaltung Gmbh, 2000 Hamburg Einrichtung zur erfassung der temperatur fuer die kompensation temperaturabhaengiger fehler in einem kapazitiven differenzdrucksensor
US4572000A (en) * 1983-12-09 1986-02-25 Rosemount Inc. Pressure sensor with a substantially flat overpressure stop for the measuring diaphragm
WO1985004474A1 (en) * 1984-03-30 1985-10-10 Rosemount Inc. Pressure compensated differential pressure sensor and method
DE3504329A1 (de) * 1985-02-08 1986-08-14 Philips Patentverwaltung Gmbh, 2000 Hamburg Differenzdruckmessgeraet
US4680971A (en) * 1985-11-19 1987-07-21 Kavlico Corporation Dual diaphragm differential pressure transducer
US4735098A (en) * 1985-11-19 1988-04-05 Kavlico Corporation Dual diaphragm differential pressure transducer
JPS62140040A (ja) * 1985-12-16 1987-06-23 Yokogawa Electric Corp 差圧変換装置
US4754365A (en) * 1987-06-15 1988-06-28 Fischer & Porter Company Differential pressure transducer
JPH061228B2 (ja) * 1987-08-13 1994-01-05 富士電機株式会社 静電容量式圧力検出器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101567399B1 (ko) 2015-01-22 2015-11-10 강유신 체온을 이용한 접촉식 온도제어 압력 안정화장치

Also Published As

Publication number Publication date
US5111698A (en) 1992-05-12
DE59008839D1 (de) 1995-05-11
EP0421394A2 (de) 1991-04-10
JPH03210446A (ja) 1991-09-13
EP0421394B1 (de) 1995-04-05
EP0421394A3 (en) 1991-09-18
DE3933512A1 (de) 1991-04-18
FI904734A0 (fi) 1990-09-26
DE3933512C2 (en, 2012) 1993-02-18
FI100361B (fi) 1997-11-14

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