JP2572069B2 - 安定化コリン塩基溶液 - Google Patents

安定化コリン塩基溶液

Info

Publication number
JP2572069B2
JP2572069B2 JP62178844A JP17884487A JP2572069B2 JP 2572069 B2 JP2572069 B2 JP 2572069B2 JP 62178844 A JP62178844 A JP 62178844A JP 17884487 A JP17884487 A JP 17884487A JP 2572069 B2 JP2572069 B2 JP 2572069B2
Authority
JP
Japan
Prior art keywords
weight
solution
concentration
solution according
choline base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62178844A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6354344A (ja
Inventor
ジェイ タセット カール
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Syntex USA LLC
Original Assignee
Syntex USA LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Syntex USA LLC filed Critical Syntex USA LLC
Publication of JPS6354344A publication Critical patent/JPS6354344A/ja
Application granted granted Critical
Publication of JP2572069B2 publication Critical patent/JP2572069B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C5/00—Photographic processes or agents therefor; Regeneration of such processing agents
    • G03C5/18—Diazo-type processes, e.g. thermal development, or agents therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02052—Wet cleaning only
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C11D7/3209—Amines or imines with one to four nitrogen atoms; Quaternized amines
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C11D7/3218—Alkanolamines or alkanolimines
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
    • G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
    • H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
    • H01L21/32134—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by liquid etching only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Wood Science & Technology (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Power Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Detergent Compositions (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
JP62178844A 1986-07-18 1987-07-17 安定化コリン塩基溶液 Expired - Lifetime JP2572069B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/887,674 US4686002A (en) 1986-07-18 1986-07-18 Stabilized choline base solutions
US887674 1986-07-18

Publications (2)

Publication Number Publication Date
JPS6354344A JPS6354344A (ja) 1988-03-08
JP2572069B2 true JP2572069B2 (ja) 1997-01-16

Family

ID=25391630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62178844A Expired - Lifetime JP2572069B2 (ja) 1986-07-18 1987-07-17 安定化コリン塩基溶液

Country Status (9)

Country Link
US (1) US4686002A (cg-RX-API-DMAC7.html)
EP (1) EP0253675B1 (cg-RX-API-DMAC7.html)
JP (1) JP2572069B2 (cg-RX-API-DMAC7.html)
KR (1) KR950007339B1 (cg-RX-API-DMAC7.html)
AT (1) ATE73126T1 (cg-RX-API-DMAC7.html)
CA (1) CA1306660C (cg-RX-API-DMAC7.html)
DE (1) DE3776995D1 (cg-RX-API-DMAC7.html)
ES (1) ES2030430T3 (cg-RX-API-DMAC7.html)
GR (1) GR3003964T3 (cg-RX-API-DMAC7.html)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3638629A1 (de) * 1986-11-11 1988-05-26 Schering Ag Mittel und verfahren zur entfernung von fotoresisten
DE3740369A1 (de) * 1987-11-25 1989-06-08 Schering Ag Verfahren zur vorbehandlung von kunststoffen
US4931103A (en) * 1988-08-11 1990-06-05 E. I. Du Pont De Nemours And Company Tricholine phosphate surface treating agent
US4964919A (en) * 1988-12-27 1990-10-23 Nalco Chemical Company Cleaning of silicon wafers with an aqueous solution of KOH and a nitrogen-containing compound
JP2653511B2 (ja) * 1989-03-30 1997-09-17 株式会社東芝 半導体装置の洗浄方法及びその洗浄装置
US5110367A (en) * 1990-04-12 1992-05-05 Mallinckrodt Specialty Chemicals Company Method for precision cleaning of medical devices
CA2075633A1 (en) * 1990-04-12 1991-10-13 E. Wayne Ahlstrom Method for precision cleaning of medical devices
JP2906590B2 (ja) * 1990-06-14 1999-06-21 三菱瓦斯化学株式会社 アルミニウム配線半導体基板の表面処理剤
US5139607A (en) * 1991-04-23 1992-08-18 Act, Inc. Alkaline stripping compositions
EP0539881B1 (en) * 1991-10-29 1995-08-02 E.I. Du Pont De Nemours And Company Single-phase developers for lithographic printing elements
US5554320A (en) * 1993-11-22 1996-09-10 Yianakopoulos; Georges Liquid cleaning compositions
US5683192A (en) * 1996-04-15 1997-11-04 Kilfoil; Dennis C. Toothbrush system with an internal water delivery system operable from a shower
JPH10289891A (ja) * 1997-04-11 1998-10-27 Mitsubishi Gas Chem Co Inc 半導体回路用洗浄剤及びそれを用いた半導体回路の製造方法
US6417112B1 (en) 1998-07-06 2002-07-09 Ekc Technology, Inc. Post etch cleaning composition and process for dual damascene system
US6348239B1 (en) 2000-04-28 2002-02-19 Simon Fraser University Method for depositing metal and metal oxide films and patterned films
WO2004011931A1 (en) * 2002-07-26 2004-02-05 Instrumentation Laboratory Company Compositions and method for reducing the rate of oxygen loss from aqueous
US20030073242A1 (en) * 2001-10-11 2003-04-17 Kitchens Keith G. Apparatus for controlling stripping solutions methods thereof
US20040074519A1 (en) * 2002-10-17 2004-04-22 Moore John C. Metal safe stabilized stripper for removing cured polymeric layers and negative tone acrylic photoresists
RU2007104939A (ru) * 2004-07-09 2008-08-20 Акцо Нобель Н.В. (NL) Композиция, включающая гидроксид холина, и способ ее получения
US20140361217A1 (en) * 2011-11-22 2014-12-11 Taminco Stabilized choline solutions and methods for preparing the same
MY182325A (en) 2013-04-11 2021-01-19 Taminco Improved process for preparing choline hydroxide
US9297081B2 (en) 2014-02-21 2016-03-29 Ecolab Usa Inc. Use of neutralizing agent in olefin or styrene production
JP6296974B2 (ja) * 2014-12-25 2018-03-20 四日市合成株式会社 安定化四級アンモニウム水酸化物水溶液及びその製造方法
CA2993822C (en) 2015-07-29 2022-07-12 Ecolab Usa Inc. Heavy amine neutralizing agents for olefin or styrene production

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB700115A (en) * 1951-03-16 1953-11-25 Evan Jones Improvements in disinfectants and deodorizers
US2823166A (en) * 1954-11-17 1958-02-11 Walter H Hoffman Choline ascorbate, methods for producing same, and compositions thereof
US3897485A (en) * 1966-10-18 1975-07-29 J Berthier Lab Choline compounds
US3549370A (en) * 1966-11-23 1970-12-22 Hunt Chem Corp Philip A Quaternary ammonium bisulfites,sulfites or pyrosulfites as developer preservatives
NL7007023A (cg-RX-API-DMAC7.html) * 1969-05-16 1970-11-18
US3947491A (en) * 1972-03-24 1976-03-30 The Purdue Frederick Company Stabilized choline salicylate compounds
US4339340A (en) * 1975-11-26 1982-07-13 Tokyo Shibaura Electric Co., Ltd. Surface-treating agent adapted for intermediate products of a semiconductor device
GB1573206A (en) * 1975-11-26 1980-08-20 Tokyo Shibaura Electric Co Method of trating surfaces of intermediate products obtained in the manufacture of semiconductor devices
JPS5351970A (en) * 1976-10-21 1978-05-11 Toshiba Corp Manufacture for semiconductor substrate
US4294911A (en) * 1979-06-18 1981-10-13 Eastman Kodak Company Development of light-sensitive quinone diazide compositions using sulfite stabilizer
IT1141651B (it) * 1980-06-24 1986-10-08 Giuseppe Riva Procedimento per la stabilizzazione di vitamine
US4425202A (en) * 1982-08-18 1984-01-10 Thiokol Corporation Method of making and color stabilization of choline base
JPS59182444A (ja) * 1983-04-01 1984-10-17 Sumitomo Chem Co Ltd ポジ型フオトレジストの改良現像液
US4464461A (en) * 1983-07-22 1984-08-07 Eastman Kodak Company Development of light-sensitive quinone diazide compositions

Also Published As

Publication number Publication date
ATE73126T1 (de) 1992-03-15
EP0253675B1 (en) 1992-03-04
DE3776995D1 (de) 1992-04-09
CA1306660C (en) 1992-08-25
JPS6354344A (ja) 1988-03-08
GR3003964T3 (cg-RX-API-DMAC7.html) 1993-03-16
US4686002A (en) 1987-08-11
ES2030430T3 (es) 1992-11-01
KR950007339B1 (ko) 1995-07-10
EP0253675A1 (en) 1988-01-20
KR880002049A (ko) 1988-04-28

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