JP2570605B2 - Semiconductor device - Google Patents

Semiconductor device

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Publication number
JP2570605B2
JP2570605B2 JP30699993A JP30699993A JP2570605B2 JP 2570605 B2 JP2570605 B2 JP 2570605B2 JP 30699993 A JP30699993 A JP 30699993A JP 30699993 A JP30699993 A JP 30699993A JP 2570605 B2 JP2570605 B2 JP 2570605B2
Authority
JP
Japan
Prior art keywords
heat
cap
semiconductor device
semiconductor element
metal foil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP30699993A
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Japanese (ja)
Other versions
JPH07142647A (en
Inventor
信明 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
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Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP30699993A priority Critical patent/JP2570605B2/en
Priority to US08/341,933 priority patent/US5528456A/en
Publication of JPH07142647A publication Critical patent/JPH07142647A/en
Application granted granted Critical
Publication of JP2570605B2 publication Critical patent/JP2570605B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367—Cooling facilitated by shape of device
    • H01L23/3675—Cooling facilitated by shape of device characterised by the shape of the housing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/433—Auxiliary members in containers characterised by their shape, e.g. pistons
    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0655—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next to each other
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    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
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    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144—Gold (Au) as principal constituent
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    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
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    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
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    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73253—Bump and layer connectors
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    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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    • H01L2924/151—Die mounting substrate
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    • H01L2924/161—Cap
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    • H01L2924/16152—Cap comprising a cavity for hosting the device, e.g. U-shaped cap
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    • H01L2924/16195—Flat cap [not enclosing an internal cavity]

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【産業上の利用分野】本発明は半導体装置の実装構造に
関し、特に回路基板に搭載した半導体素子の放熱性を改
善した半導体装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device mounting structure, and more particularly, to a semiconductor device having a semiconductor element mounted on a circuit board with improved heat dissipation.

【０００２】[0002]

【従来の技術】従来の半導体装置、特にマルチチップモ
ジュールでは、図６のように、回路基板２３上に複数個
の半導体素子２１をバンプ２２を用いたフリップチップ
接続法等により搭載し、これをパッケージ２４内に内装
しキャップ２７で封止している。また、回路基板２３は
パッケージ２４に設けたリード２５に金属ワイヤ２６で
電気接続される。そして、この半導体素子２１の放熱性
を高めるために、半導体素子２１の裏面にキャップ２７
を直接或いは間接的に接続し、半導体素子２１で発生し
た熱をキャップ２７に設けたヒートシンク２８を介して
放熱させる構成が取られている。しかしながら、このよ
うな構造では、半導体素子２１とキャップ２７やヒート
シンク２８との熱膨張係数の相違により、熱履歴を受け
たときに半導体素子２１とキャップ２７やヒートシンク
２８との間に熱応力が生じ、半導体素子２１の接続部２
２の接続不良が生じたり、半導体素子２１自体に割れが
発生する等の問題が生じる。2. Description of the Related Art In a conventional semiconductor device, particularly a multi-chip module, a plurality of semiconductor elements 21 are mounted on a circuit board 23 by a flip-chip connection method using bumps 22 as shown in FIG. It is housed inside a package 24 and sealed with a cap 27. The circuit board 23 is electrically connected to leads 25 provided on a package 24 by metal wires 26. In order to enhance the heat dissipation of the semiconductor element 21, a cap 27 is provided on the back surface of the semiconductor element 21.
Are connected directly or indirectly, and the heat generated in the semiconductor element 21 is radiated through a heat sink 28 provided on the cap 27. However, in such a structure, due to the difference in the thermal expansion coefficient between the semiconductor element 21 and the cap 27 or the heat sink 28, thermal stress is generated between the semiconductor element 21 and the cap 27 or the heat sink 28 when subjected to a thermal history. Connection part 2 of semiconductor element 21
2 causes problems such as poor connection and cracking of the semiconductor element 21 itself.

【０００３】このため、従来では熱応力を緩和する構造
が提案されており、例えば、特開昭６３−２８７０３８
号公報に記載されているものを図７に示す。この構造
は、多層配線基板３３上にＬＳＩチップ３１を半田３２
により搭載し、これを熱伝導性の良い銅等で形成したキ
ャップ３７内に内装し、かつその上でＬＳＩチップ３１
の裏面に、高熱伝導板３４を接着し、かつこの高熱伝導
板３４とキャップ３７とを金属繊維からなる柔軟性を有
する熱伝導体３５を用いて接続した構成がとられてい
る。３６は多層配線基板とキャップとを接続する金属ベ
ローズである。For this reason, a structure for relieving thermal stress has been proposed in the past, for example, in Japanese Patent Application Laid-Open No. 63-287038.
FIG. 7 shows what is described in Japanese Patent Publication No. This structure is such that the LSI chip 31 is
And mounted inside a cap 37 made of copper or the like having good thermal conductivity,
A high heat conductive plate 34 is adhered to the back surface of the device, and the high heat conductive plate 34 and the cap 37 are connected by using a flexible heat conductor 35 made of metal fiber. 36 is a metal bellows connecting the multilayer wiring board and the cap.

【０００４】この構造では、ＬＳＩチップ３１とキャッ
プ３７とを高熱伝導板３４及び金属繊維からなる熱伝導
体３５で接合していることにより、ＬＳＩチップ３１で
発生した熱を高熱伝導板３４及び熱伝導体３５を介して
キャップ３７に伝達させ、このキャップ３７から放熱さ
せることで高い放熱性を得ている。また、熱伝導体３５
を構成する金属繊維は柔軟性を有しているので、ＬＳＩ
チップ３１とキャップ３７との間に熱膨張率の違いによ
り生じる熱応力を吸収し、或いは緩和し、ＬＳＩチップ
３１の接続部３２の不良発生やＬＳＩチップ３１の割れ
を防止することができる効果を得ることができる。な
お、金属ベローズ３６は、金属薄板を部分的に積層接合
して組立てたものであり、半田接合時に生じるキャップ
３７と配線基板３３の相対的な変位に対応して、両者間
での応力を吸収し、或いは緩和することが可能である。In this structure, the LSI chip 31 and the cap 37 are joined by the high heat conductive plate 34 and the heat conductor 35 made of metal fiber, so that the heat generated in the LSI chip 31 is By transmitting the heat to the cap 37 via the conductor 35 and radiating heat from the cap 37, high heat dissipation is obtained. The heat conductor 35
Since the metal fibers that make up
The thermal stress generated by the difference in the coefficient of thermal expansion between the chip 31 and the cap 37 is absorbed or reduced, and the effect that the failure of the connection portion 32 of the LSI chip 31 and the cracking of the LSI chip 31 can be prevented. Obtainable. The metal bellows 36 is formed by partially laminating and joining thin metal plates. The metal bellows 36 absorbs the stress between the cap 37 and the wiring board 33 in accordance with the relative displacement between the two. Or it can be alleviated.

【０００５】[0005]

【発明が解決しようとする課題】しかしながら、この従
来の半導体装置では、ＬＳＩチップ３１とキャップ３７
の間に設けている金属繊維からなる熱伝導体３５は、高
い柔軟性を得るためには金属繊維に細いものを用い、か
つ各繊維間の間隔を広くとらなければならないので、結
果的に熱伝導体としての有効面積が小さくなり、熱抵抗
が高くなって放熱性の効果が小さなものとなる。逆に、
高い放熱性を得るために、金属繊維に太いものを用い、
或いは繊維間の間隔を狭くして熱抵抗の低減すると、熱
伝導体としての剛性が大きくなり、結果的に高い柔軟性
を得るのは困難になり、ＬＳＩチップに生じる熱応力の
緩和効果が低下される。また、金属繊維間はある間隔を
持たせなければならず、しかも長さを揃える必要がある
ので、熱伝導体の作製プロセスが複雑になり、製造コス
トが高くなるという問題もある。本発明の目的は、半導
体素子の放熱性を改善するとともに、半導体素子に対す
る熱応力を緩和することを可能にした半導体装置を提供
することにある。However, in this conventional semiconductor device, the LSI chip 31 and the cap 37 are not provided.
As for the heat conductor 35 made of metal fibers provided between the fibers, in order to obtain high flexibility, a thin metal fiber must be used, and the interval between the fibers must be widened. The effective area as a conductor is reduced, the thermal resistance is increased, and the heat dissipation effect is reduced. vice versa,
In order to obtain high heat dissipation, use a thick metal fiber,
Alternatively, if the thermal resistance is reduced by reducing the distance between the fibers, the rigidity of the thermal conductor increases, and as a result, it becomes difficult to obtain high flexibility, and the effect of reducing the thermal stress generated in the LSI chip decreases. Is done. In addition, since the metal fibers must be spaced apart from each other and the lengths of the metal fibers must be uniform, the production process of the heat conductor becomes complicated and the production cost increases. An object of the present invention is to provide a semiconductor device capable of improving heat dissipation of a semiconductor element and reducing thermal stress on the semiconductor element.

【０００６】[0006]

【課題を解決するための手段】本発明の半導体装置は、
パッケージ内に内装された半導体素子と、このパッケー
ジに設けられたキャップあるいはヒートシンクとを柔軟
な形状に加工された伝熱性金属フォイルにより接続した
構成とする。ここで、伝熱性金属フォイルは、高熱伝導
性の薄い金属板を波形状に加工し、その山部を半導体素
子またはキャップあるいはヒートシンクの一方に接続
し、谷部を他方に接続する。また、伝熱性金属フォイル
は、波形状の山部または谷部の幅方向の一部には、波の
連続方向に沿って切溝を形成することが好ましい。According to the present invention, there is provided a semiconductor device comprising:
A semiconductor element contained in a package is connected to a cap or a heat sink provided in the package by a heat conductive metal foil processed into a flexible shape. Here, the heat conductive metal foil is formed by processing a thin metal plate having high thermal conductivity into a corrugated shape, connecting its peak to one of the semiconductor element or the cap or the heat sink , and connecting the valley to the other. Further, it is preferable that the heat conductive metal foil has a kerf formed along a continuous direction of the wave at a part of the width of the wave-shaped peak or valley.

【０００７】[0007]

【作用】本発明によれば、伝熱性金属フォイルは、高い
伝熱性と柔軟性を有しているため、半導体素子で発生し
た熱を効率良く放熱板に伝達して放熱するとともに、半
導体素子とキャップあるいはヒートシンクとの間に生じ
る熱応力をその柔軟性により緩和して半導体素子におけ
る接続不良や破損等を防止する。特に、伝熱性金属フォ
イルを、波形状とし、山部または谷部を半導体素子とキ
ャップあるいはヒートシンクに接続することで、山と山
あるいは谷と谷のピッチを狭くすれば広い接触面積が得
られ、伝熱効果を高めることが可能となり、かつ波形状
により柔軟性を得ることができる。更に、波形状の伝熱
性金属フォイルに切溝を設けることで、縦横方向の柔軟
性を向上することが可能となる。According to the present invention, the heat conductive metal foil has high heat conductivity and flexibility, so that the heat generated in the semiconductor element is efficiently transmitted to the heat radiating plate to radiate the heat, and the heat is transferred to the semiconductor element. Thermal stress generated between the cap and the heat sink is alleviated by its flexibility to prevent poor connection or breakage of the semiconductor element. In particular, the heat conductive metal foil is formed into a corrugated shape, and the peaks or valleys are combined with the semiconductor element.
By connecting to the cap or heat sink, mountains and mountain
Alternatively, if the pitch between valleys is reduced, a large contact area can be obtained.
As a result , the heat transfer effect can be enhanced, and flexibility can be obtained due to the wave shape. Further, by providing the kerfs in the corrugated heat-conductive metal foil, it is possible to improve the flexibility in the vertical and horizontal directions.

【０００８】[0008]

【実施例】次に、本発明について図面を参照して説明す
る。図１は本発明の実施例１の半導体装置の断面図であ
る。半導体素子１はシリコン等の半導体基板にトランジ
スタ等の能動素子や、抵抗等の受動素子を形成した半導
体チップとして構成されており、その表面に設けた電極
パッドに形成したバンプ２により回路基板３にフリップ
チップ接続法で搭載されている。バンプ２は、例えば、
Ｐｂ／Ｓｎ＝９５／５ｗｔ．％半田で構成される。ま
た、回路基板３は半導体素子１を構成する材料に近い熱
膨張率を有する材料で構成されている。そして、この半
導体素子１を搭載した回路基板３はパッケージ４内に内
装され、パッケージ４に支持されたリード５に電気接続
される。この電気接続に際しては、ここではＴＡＢ（テ
ープ・オートメイティド・ボンディング）６を用いてお
り、これにより回路基板３はパッケージ４内においてＴ
ＡＢ６により懸架された状態で支持される。そして、前
記パッケージ４の上部の開口部にコバール等の金属で形
成されたキャップ７を半田（Ｐｂ／Ｓｎ＝３７／６３ｗ
ｔ．％）により接続し、内部を封止する。また、キャッ
プ７の外側面にはＡｌ等からなるヒートシンク８を接続
している。Next, the present invention will be described with reference to the drawings. FIG. 1 is a sectional view of a semiconductor device according to a first embodiment of the present invention. The semiconductor element 1 is configured as a semiconductor chip in which an active element such as a transistor and a passive element such as a resistor are formed on a semiconductor substrate such as silicon, and is mounted on a circuit board 3 by bumps 2 formed on electrode pads provided on the surface thereof. It is mounted by flip chip connection method. The bump 2 is, for example,
Pb / Sn = 95/5 wt. % Solder. The circuit board 3 is made of a material having a coefficient of thermal expansion close to that of the material forming the semiconductor element 1. The circuit board 3 on which the semiconductor element 1 is mounted is housed in the package 4 and is electrically connected to the leads 5 supported by the package 4. In this electrical connection, TAB (Tape Automated Bonding) 6 is used here, so that the circuit board 3
It is supported in a suspended state by AB6. Then, a cap 7 made of a metal such as Kovar is soldered ( Pb / Sn = 37 / 63w) to the upper opening of the package 4.
t. %) To seal the inside. A heat sink 8 made of Al or the like is connected to the outer surface of the cap 7.

【０００９】一方、前記半導体素子１とキャップ７との
間には、ＡｌおよびＡｌ系合金、またはＣｕおよびＣｕ
系合金で形成された薄板を波形状に加工した伝熱性金属
フォイル９を接着する。図２は前記伝熱性金属フォイル
９を示す図であり、図２（ａ）は平面図、図２（ｂ）は
そのＡ部の拡大斜視図である。伝熱性金属フォイル９は
前記した素材の金属薄板をプレス加工法等によりその一
方の辺方向に沿って波が進行される波形状に形成する。
また、他方の辺方向の複数箇所（ここでは２箇所）に
は、山の頂部を他方の辺方向に分離する切溝９ａを一方
の辺方向に向けて延長形成している。例えば、金属フォ
イル９の厚さは２０〜１００μｍ程度、波形状に加工後
の山と山、および谷と谷のピッチは０．５〜２ｍｍ程
度、高さは０．５〜２ｍｍ程度である。On the other hand, between the semiconductor element 1 and the cap 7, Al and an Al-based alloy or Cu and Cu
A heat conductive metal foil 9 obtained by processing a thin plate made of a system alloy into a corrugated shape is bonded. FIG. 2 is a view showing the heat conductive metal foil 9, FIG. 2 (a) is a plan view, and FIG. 2 (b) is an enlarged perspective view of a portion A thereof. Heat transfer metal foil 9 an the metal sheet of the material mentioned above by pressing method or the like
It is formed in a wave shape in which the wave travels along the direction of the side .
Further, the plurality of locations of the other side direction (two positions in this case), one cut grooves 9a which separates the top of the mountain on the other side direction
Is formed to extend in the direction of the side of. For example, the thickness of the metal foil 9 is about 20 to 100 μm, the pitch between peaks and valleys after being processed into a wave shape is about 0.5 to 2 mm, and the height is about 0.5 to 2 mm.

【００１０】そして、谷の部分を半導体素子１の裏面に
半田１０で接続し、山の部分をキャップの内面に半田１
０で接続している。この場合、金属フォイル９の材料と
してＡｌ等のＰｂ／Ｓｎ半田で直接接着することが困難
な材料を用いる場合は、接着する山と谷の部分、あるい
は全面にＣｕ等のＰｂ／Ｓｎ半田と直接接着可能な金属
をクラッド法等を用いて形成しておけば良い。また、波
形状の山の部分には、必ずしも角度が付いている必要が
なく、丸みが付いていても良い。また、この実施例で
は、一つの伝熱性金属フォイル９が回路基板３に搭載さ
れている複数個の半導体素子１の全てにわたって形成さ
れているが、それぞれ独立した複数個の伝熱性フォイル
を各半導体素子に接続してもよい。Then, the valley portion is connected to the back surface of the semiconductor element 1 by solder 10, and the ridge portion is connected to the inner surface of the cap by solder 1.
0 is connected. In this case, when using a hard material to be bonded directly with Pb / Sn solder, such as Al, as a material of the metal foil 9, peaks and valley portions of the bonding or on the entire surface Pb / Sn solder and direct such as Cu, An adhesive metal may be formed using a cladding method or the like. The corrugated mountain portion does not necessarily have to be angled, and may be rounded. Further, in this embodiment, one heat conductive metal foil 9 is formed over all of the plurality of semiconductor elements 1 mounted on the circuit board 3. You may connect to an element.

【００１１】この構成によれば、伝熱性金属フォイル９
は波形状に加工されており、かつその波形状方向に切溝
９ａが形成されているため、その他方の辺方向及び一方
の辺方向の柔軟性に優れている。そのため、熱履歴によ
って生じるパッケージキャップ７と半導体素子１との間
の熱膨張差による熱応力を伝熱性金属フォイル９によっ
て吸収し、緩和することができる。その結果、半導体素
子１と回路基板３の熱膨張差は影響なくなり、バンプ２
における接続不良の発生を回避することができる。ま
た、これと同時に伝熱性金属フォイル９は熱伝導率の高
い金属材料で形成されており、かつ半導体素子１やキャ
ップ７とは波形状の谷部や山部の広い面積で接続されて
いるため、全体の熱抵抗が低くなり、半導体素子１で発
生した熱を効率良くキャップ７に伝熱させ、更にヒート
シンク８から放熱させることができ、半導体装置として
の放熱性を向上することができる。According to this configuration, the heat conductive metal foil 9
Since being processed into a wave shape, and cut grooves 9a on the waveform shape direction are formed, side direction and one of the other
It has excellent flexibility in the side direction. Therefore, the thermal stress caused by the thermal expansion difference between the package cap 7 and the semiconductor element 1 caused by the thermal history can be absorbed and reduced by the heat conductive metal foil 9. As a result, the difference in thermal expansion between the semiconductor element 1 and the circuit board 3 has no effect, and the bump 2
Can be avoided. At the same time, the heat conductive metal foil 9 is formed of a metal material having a high thermal conductivity, and is connected to the semiconductor element 1 and the cap 7 over a wide area of a wave-shaped valley or a mountain. As a result, the overall thermal resistance is reduced, the heat generated in the semiconductor element 1 can be efficiently transferred to the cap 7, and further radiated from the heat sink 8, so that the heat dissipation of the semiconductor device can be improved.

【００１２】一例として１０ｍｍ□の１チップの放熱に
おける熱抵抗を示す。図３は熱抵抗計算に使用したモデ
ル図であり、図３（ａ）は図７に示した構造の場合、図
３（ｂ）は本発明の実施例１の構造の場合をそれぞれ示
す。簡単のため、接着剤等は省略して考える。本発明の
場合、伝熱性金属フォイル９の材料をＣｕ（熱伝導率３
９５Ｗ／ｍ・Ｋ）とし、フォイル厚を５０μｍ、加工後
の波形状ピッチを１ｍｍ、高さを１ｍｍとすると、熱抵
抗は０．２８Ｋ／Ｗが得られる。この熱抵抗と同等の熱
抵抗を従来技術で得る場合、熱伝導体３５の金属繊維の
材料をＣｕとし、太さを５０μｍとすると、１０ｍｍ□
の領域内に約１５０μｍの狭いピッチで４６００本もの
繊維を設けなければならず、柔軟性が低下されて熱応力
の緩和効果が低下されるとともに、その作製が非常に困
難になり、かつ高コストになってしまう。As an example, the thermal resistance in the heat radiation of one chip of 10 mm square is shown. 3A and 3B are model diagrams used for calculating the thermal resistance. FIG. 3A shows the case of the structure shown in FIG. 7, and FIG. 3B shows the case of the structure of the first embodiment of the present invention. For simplicity, the adhesive and the like are omitted. In the case of the present invention, the material of the heat conductive metal foil 9 is Cu (thermal conductivity 3).
95 W / m · K ), the foil thickness is 50 μm, the corrugated pitch after processing is 1 mm, and the height is 1 mm, the thermal resistance is 0.28 K / W. When a thermal resistance equivalent to this thermal resistance is obtained by the conventional technology, the material of the metal fiber of the thermal conductor 35 is Cu and the thickness is 50 μm, and 10 mm square.
As many as 4600 fibers must be provided at a narrow pitch of about 150 μm in the region, the flexibility is reduced, the effect of alleviating thermal stress is reduced, the production is extremely difficult, and the cost is high. Become.

【００１３】図４は、本発明の実施例２の断面図であ
り、実施例１と同一部分には同一符号を付してある。こ
の実施例では、パッケージ４の開口部を封止するキャッ
プを省略しており、開口部にはヒートシンク８を直接接
続して封止を行っている。そして、半導体素子１の裏面
とヒートシンク８の内面とをＡｌおよびＡｌ系合金、ま
たはＣｕおよびＣｕ系合金からなる伝熱性金属フォイル
９で接続している。この構造によれば、前記実施例１と
同様に放熱効果と熱応力緩和効果の両方の効果が得られ
るのは勿論であるが、ここではキャップが省略されてい
ることにより半導体素子１とヒートシンク８間の熱抵抗
を更に低下することが可能であり、放熱性をより向上す
ることができる。また、キャップ７を取付ける工程が削
減されるのでコストが低下できる。FIG. 4 is a sectional view of a second embodiment of the present invention, and the same parts as those of the first embodiment are denoted by the same reference numerals. In this embodiment, a cap for sealing the opening of the package 4 is omitted, and a heat sink 8 is directly connected to the opening for sealing. Then, the back surface of the semiconductor element 1 and the inner surface of the heat sink 8 are connected by a heat conductive metal foil 9 made of Al and an Al-based alloy or Cu and a Cu-based alloy. According to this structure, both the heat radiation effect and the thermal stress relaxation effect can be obtained as in the first embodiment. However, the semiconductor element 1 and the heat sink 8 are omitted here because the cap is omitted. It is possible to further reduce the thermal resistance between them, and it is possible to further improve the heat dissipation. Further, the number of steps for attaching the cap 7 is reduced, so that the cost can be reduced.

【００１４】図５は本発明の実施例３の断面図である。
この実施例では半導体素子１を搭載した回路基板３をシ
リコン樹脂等の接着剤１１によりパッケージ８の内底面
に接着して固定し、半導体素子１とインナーリード５と
をＡｕワイヤ１２により接続する。また、パッケージ４
の開口部はヒートシンク８で直接封止する。そして、半
導体素子１の裏面とヒートシンク８の内面とを伝熱性金
属フォイル９で接続する。そして、ここでは伝熱性金属
フォイル９の山と山の間、或いは谷と谷の間の各凹み部
分には高熱伝導率で柔軟性の優れた樹脂１３を充填させ
ている。FIG. 5 is a sectional view of a third embodiment of the present invention.
In this embodiment, the circuit board 3 on which the semiconductor element 1 is mounted is adhered and fixed to the inner bottom surface of the package 8 with an adhesive 11 such as a silicon resin, and the semiconductor element 1 and the inner leads 5 are connected by Au wires 12. Package 4
Is directly sealed with a heat sink 8. Then, the back surface of the semiconductor element 1 and the inner surface of the heat sink 8 are connected by a heat conductive metal foil 9. Here, a resin 13 having high thermal conductivity and excellent flexibility is filled in each concave portion between the peaks or between the valleys of the heat conductive metal foil 9.

【００１５】この構成によれば、実施例２と同様に伝熱
性金属フォイル９により半導体素子１の放熱効果を高
め、かつ熱応力を緩和する効果を得ることができる。ま
た、回路基板３をパッケージ４に直接固定しているの
で、振動に対する強度が増加でき、また、回路基板３と
インナーリード５を金属ワイヤ１２で接続しているので
ＴＡＢが不要となり、更なる低コスト化が可能となる。
また、伝熱性フォイル９に高熱伝導率で柔軟性の優れた
樹脂１３を充填しているので、振動に対する強度が増加
するとともに、半導体素子１とヒートシンク８との間の
熱伝達径路の断面積が増加でき、熱抵抗を更に低下する
ことができる。なお、実施例３においては、実施例１の
ようにキャップを設けた構造としても良い。また、伝熱
性フォイルに充填する樹脂は、フォイルの表面に所要厚
さで塗布した構成としてもよい。According to this structure, as in the second embodiment, the heat dissipation effect of the semiconductor element 1 can be enhanced by the heat conductive metal foil 9 and the effect of reducing the thermal stress can be obtained. Further, since the circuit board 3 is directly fixed to the package 4, the strength against vibration can be increased. Further, since the circuit board 3 and the inner leads 5 are connected by the metal wires 12, TAB is not required, and further lowering is achieved. Costs can be reduced.
Further, since the heat conductive foil 9 is filled with the resin 13 having high thermal conductivity and excellent flexibility, the strength against vibration is increased and the cross-sectional area of the heat transfer path between the semiconductor element 1 and the heat sink 8 is reduced. Can be increased, and the thermal resistance can be further reduced. In the third embodiment, a structure in which a cap is provided as in the first embodiment may be adopted. Further, the resin to be filled in the heat conductive foil may be applied to the surface of the foil with a required thickness.

【００１６】[0016]

【発明の効果】以上説明したように本発明は、パッケー
ジ内に内装された半導体素子とキャップあるいはヒート
シンクとを柔軟な形状に加工された高伝熱性の伝熱性金
属フォイルにより接続しているので、半導体素子で発生
した熱を効率良くキャップあるいはヒートシンクに伝達
して放熱することができるとともに、半導体素子とキャ
ップあるいはヒートシンクとの間に生じる熱応力をその
柔軟性により緩和して半導体素子における接続不良や破
損等を防止することができ、かつ、伝熱性金属フォイル
は、高熱伝導性の薄い金属板を波形状に加工し、その山
部を半導体素子またはキャップあるいはヒートシンクの
一方に接続し、谷部を他方に接続しているので、山と山
あるいは谷と谷のピッチを狭くすれば半導体素子とキャ
ップあるいはヒートシンクの間に広い接触面積を得るこ
とができ、かつ複数の山部と谷部とのそれぞれの間にお
いて並列状態で熱が伝導されるため、伝熱効果を高める
ことが可能となり、半導体素子の放熱効果を高めること
ができる。更に、伝熱性金属フォイルに切溝を形成する
ことで、縦横方向の柔軟性を向上することが可能とな
り、熱応力の緩和ないし吸収効果を高めることができ
る。また、本発明の伝熱性金属フォイルは、作製が容易
であり、パッケージへのアセンブリも容易であるので製
造コストを低くすることができる効果もある。As described above, according to the present invention, the semiconductor element contained in the package and the cap or the heat sink are connected by the highly heat-conductive metal foil processed into a flexible shape. The heat generated in the semiconductor element can be efficiently transmitted to the cap or the heat sink to dissipate the heat, and the thermal stress generated between the semiconductor element and the cap or the heat sink can be relaxed by its flexibility, and the connection failure in the semiconductor element can be reduced. Damage can be prevented , and the heat conductive metal foil is formed by processing a thin metal plate with high thermal conductivity into a corrugated shape, connecting the peak to one of the semiconductor element or the cap or the heat sink, and forming the valley. Since it is connected to the other side, if the pitch between peaks and valleys or valleys and valleys is narrowed, the semiconductor element and the cap or heat It is possible to obtain a large contact area between the sink and your multiple peaks and between the respective valleys
Since heat is conducted in a parallel state have, Ri Do is possible to enhance the heat transfer effect, to enhance the heat dissipation effect of the semiconductor element
It is Ru can. Further, by forming the kerfs in the heat conductive metal foil, the flexibility in the vertical and horizontal directions can be improved, and the effect of relaxing or absorbing thermal stress can be enhanced. Further, the heat conductive metal foil of the present invention is easy to manufacture and easy to assemble into a package, so that there is also an effect that the manufacturing cost can be reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図１】本発明の実施例１の断面図である。FIG. 1 is a sectional view of a first embodiment of the present invention.

【図２】伝熱性フォイルを示す図であり、（ａ）は平面
図、（ｂ）はＡ部の拡大斜視図である。FIGS. 2A and 2B are views showing a heat conductive foil, wherein FIG. 2A is a plan view and FIG. 2B is an enlarged perspective view of a portion A.

【図３】実施例１の効果を説明するための模式図であ
る。FIG. 3 is a schematic diagram for explaining an effect of the first embodiment.

【図４】本発明の実施例２の断面図である。FIG. 4 is a sectional view of a second embodiment of the present invention.

【図５】本発明の実施例３の断面図である。FIG. 5 is a sectional view of a third embodiment of the present invention.

【図６】従来の半導体装置の一例の断面図である。FIG. 6 is a cross-sectional view of an example of a conventional semiconductor device.

【図７】改善された従来の半導体装置の断面図である。FIG. 7 is a cross-sectional view of an improved conventional semiconductor device.

【符号の説明】[Explanation of symbols]

１ 半導体素子 ３ 回路基板 ４ パッケージ ７ キャップ ８ ヒートシンク ９ 伝熱性金属フォイル １３ 高熱伝導率で柔軟な樹脂 DESCRIPTION OF SYMBOLS 1 Semiconductor element 3 Circuit board 4 Package 7 Cap 8 Heat sink 9 Heat conductive metal foil 13 Flexible resin with high thermal conductivity

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項１】 半導体素子を回路基板に搭載してパッケ
ージ内に封止し、このパッケージに設けたキャップある
いはヒートシンクと前記半導体素子とを熱的に接続して
半導体素子の放熱を行うように構成した半導体装置にお
いて、前記半導体素子とキャップあるいはヒートシンク
とを柔軟な形状に加工された伝熱性金属フォイルにより
接続し、この伝熱性金属フォイルは、高熱伝導性の薄い
金属板を波形状に加工し、その複数の山部を半導体素子
とキャップあるいはヒートシンクとの一方に接続し、複
数の谷部を他方に接続したことを特徴とする半導体装
置。A semiconductor device is mounted on a circuit board and sealed in a package, and a semiconductor device is thermally radiated by thermally connecting a semiconductor device with a cap or heat sink provided in the package. In the semiconductor device described above, the semiconductor element and the cap or the heat sink are connected by a heat conductive metal foil processed into a flexible shape, and the heat conductive metal foil has a high heat conductive thin film.
A metal plate is processed into a corrugated shape, and the plurality of peaks are
To one of the cap or heat sink and
A semiconductor device having a number valley connected to the other . 【請求項２】 伝熱性金属フォイルは、波形状の山部ま
たは谷部の幅方向の一部には、波の連続方向に沿って切
溝を形成してなる請求項１の半導体装置。 2. The semiconductor device according to claim 1 , wherein the heat conductive metal foil is formed by forming a groove along a continuous direction of the wave at a part of the width of the wave-shaped peak or valley. 【請求項３】 伝熱性金属フォイルは、ＡｌおよびＡｌ
合金、あるいはＣｕおよびＣｕ合金で形成され、半導体
素子とキャップあるいはヒートシンクにそれぞれ半田で
接続してなる請求項１または２の半導体装置。 3. The heat conductive metal foil comprises Al and Al.
3. The semiconductor device according to claim 1 , wherein the semiconductor device is formed of an alloy, or Cu and a Cu alloy, and is connected to the semiconductor element and the cap or the heat sink by soldering.
JP30699993A 1993-11-15 1993-11-15 Semiconductor device Expired - Fee Related JP2570605B2 (en)

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JP30699993A JP2570605B2 (en) 1993-11-15 1993-11-15 Semiconductor device
US08/341,933 US5528456A (en) 1993-11-15 1994-11-15 Package with improved heat transfer structure for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30699993A JP2570605B2 (en) 1993-11-15 1993-11-15 Semiconductor device

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JPH07142647A JPH07142647A (en) 1995-06-02
JP2570605B2 true JP2570605B2 (en) 1997-01-08

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