JP2564661Y2 - Adhesive plate cleaning device - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for cleaning an adhesive plate used for polishing a wafer.

[0002]

2. Description of the Related Art In a semiconductor manufacturing process, a wafer is required to have a very smooth surface. In general, a wafer is attached to an adhesive plate with an adhesive such as wax diluted in a solvent, and the adhesive plate is set on a polishing machine and polished. At this time, the adhesive between the wafer and the adhesive plate is removed. If it is not formed thinly and uniformly, fine irregularities occur on the surface during polishing, and a high degree of flatness cannot be obtained.

[0003] Further, if minute dust or the like is present on the surface of the sticking plate, the adhesive causes dimples in the portion of the dust or the like, which hinders uniform sticking of the wafer. For this reason, after the polishing operation, the adhesive plate from which the wafer has been removed must be sufficiently cleaned so that the adhesive or the like does not remain as dust.

[0004] Since the above-mentioned sticking plate is used repeatedly in the above-mentioned polishing step, it is made of a material such as ceramics or glass which is chemically stable and has little deformation over time and load. Then, in order to be able to attach a plurality of wafers of various sizes, a diameter of several tens of centimeters and a thickness of about 20 in accordance with the wafers.
Various kinds of disks having a diameter of about millimeters are prepared, and many of them have a weight of about 20 kg to 30 kg or more.

[0005] At present, as an apparatus for cleaning the adhesive plate, for example, an apparatus for transferring an adhesive plate from one side to another for cleaning before attaching a wafer is known. In this apparatus, a horizontally long cylindrical brush roll is provided up and down across the conveyance path of the sticking plate, and the upper and lower surfaces of the sticking plate are brushed and washed when passing between the brush rolls. As described above, the sticking plate has a large diameter, and the brush roll is formed to be longer than the diameter of the sticking plate, so that if a part of the brush roll is curved, the surface of the sticking plate may be curved. May not be able to be cleaned.

Further, since the peripheral side surface (end surface) of the attaching plate cannot be cleaned, the adhesive remaining on this portion peels off in a powder form when attaching the wafer, and adheres to the attaching surface. In the adhesive application step, dimples may be generated.

In addition, in order to wash the adhesive, it is necessary to continuously remove the adhesive, then brush the surface with pure water, and finally rinse the surface.
As described above, the apparatus for cleaning while transferring the adhesive plate has a disadvantage that the entire apparatus is extremely large and cannot be obtained economically.

There is also known an apparatus for immersing the above-mentioned adhesive plate in an organic solvent bath for cleaning. This device is a heated organic solvent tank,
A normal-temperature organic solvent tank, an organic solvent vapor tank and the like are continuously provided, and the adhesive plate is sequentially immersed in each of these tanks and washed.
Although it is designed to dry, the surface of the adhesive plate is not brushed, so the cleaning effect is insufficient.
Since the attachment plate is heavier and larger than a wafer or the like, each of the above-mentioned tanks for immersing the attachment plate is also large, requiring a large installation space. Although emphasis is placed on cleaning methods that are not used,
From such a viewpoint, there is a need to improve the conventional apparatus.

[0009]

In the present invention, the process of removing the adhesive and the like attached to the attaching plate for attaching the wafer for polishing as described above, washing with pure water, and drying is performed in a wide area. It is an object of the present invention to provide an adhesive plate cleaning apparatus which can be processed at one place without taking any steps, and which can immediately respond to automation.

[0010]

According to the present invention, a sticking plate is rotatably mounted on a receiving roller, and while the sticking plate is rotated about its central axis, disc-shaped plates are formed on the upper surface, the lower surface, and the peripheral side surface. upper surface washing brush, brushed simultaneously each surface in sliding contact with the lower surface washing brush and the cylindrical side surface washing brush, washed with clamped a patch plate at that time the upper surface washing brush and the lower surface washing brush, after washing, retracted position Stored in the cover with
Rotate the upper and lower nozzles on the upper and lower surfaces of the
And blow the gas from the nozzle to dry the entire surface.
The present invention provides an affixed plate cleaning apparatus characterized in that the above object is achieved.

[0011]

Embodiments will be described below together with embodiments. FIG. 1 is a schematic configuration diagram of the present invention, FIG. 2 is a plan view, and FIG. 3 is a side view. In the drawing, a main body (1) has a sink (2) for collecting and discharging a cleaning liquid and the like at a lower portion, and is entirely made hermetically, and has an opening (3) formed on both side surfaces and a back surface in a substantially U-shape. The shutter (4) is provided, and the shutter (4) is moved up and down by air cylinders (5), (5) and (5) to open and close the opening (3).

The attaching plate (6) is formed in a disk shape having an upper surface, a lower surface, and a peripheral side surface connecting the peripheral edges of the upper surface and the lower surface so that the wafer is attached to the upper surface, and the opening (3) is open. The sticking plate (6) is moved by appropriate robot means.
A set of rotatable receiving rolls carried into the main body (1)
.. Are rotatably supported on la (7)... So as to rotate in a horizontal plane with the entire surface exposed during rotation. The attaching plate placed on the receiving roller rotates about its central axis as described later.

The receiving rollers (7) are arranged in the circumferential direction of the attaching plate (6) as shown in FIG. 2, and are shown in FIGS.
As shown in (1), a column (9) is erected on a gantry (8), a housing (10) is mounted on an upper portion of the column (9), and the housing (10) is rotatable via a bearing (11). Provided shaft
Installed at the tip of (12). The receiving roller (7) is made of polyvinylidene fluoride (PVDF) or other synthetic resin material having high chemical resistance, and when worn out, can be easily replaced by removing the bolt (13).

Further, as shown in FIG.
The lower end of (10) and the upper end of the column (9) are engaged by inclined surfaces (14) and (15), and the column (9) is provided with a vertically long mounting hole (16). Since a horizontally long mounting hole (17) is provided and a bolt (18) is inserted into the mounting hole and fastened, if the housing (10) is moved right and left along the inclined surface,
The height of the receiving roller (7) can be adjusted up and down.

The sticking plate (6) is rotatably supported on the receiving roller in a horizontal plane, and is rotated about its central axis by clamping the peripheral side surface with a cylindrical driving roller. I do.

FIG. 6 shows an embodiment of a driving roller, in which a slide base (20) is mounted on rails (19), (19) (see FIG. 7) provided on a gantry. The slide base (20) is slidably provided by an air cylinder (21) toward the center of the attachment plate. A buffer member (22) is opposed to one end of the slide base (20), and a drive shaft (25) connected to a motor (24) is provided in a housing (23) standing upright. And a roller shaft (28) is rotated via gears (26) and (27) mounted on the upper portion thereof, and a driving roller provided on the roller shaft (28) is rotated.
La (29) is designed to rotate.

Around the drive roller (29), synthetic rubber,
The lining layer (30) is provided with an elastic material such as a soft synthetic resin material. It is preferable to prepare rollers having different diameters so as to be able to cope with each size even when the diameter of the sticking plate changes, and as shown in FIG. There are three places around the sticker,
More or some rollers may be used as driven rollers.

An upper surface of the sticking plate placed on the receiving roller,
A disk-shaped upper cleaning brush (31), a lower cleaning brush (32), and a cylindrical side cleaning brush (33) are provided so as to be in sliding contact with the lower surface and the peripheral side surface, respectively.

FIG. 8 shows an embodiment of the upper surface cleaning brush (31), in which a stand (34) standing on a gantry (8) has an air cylinder (36) (see FIG. 8) via a link (35). 1 to 3), the main shaft (37) rotated by the main shaft is inserted therethrough.
An arm (39) is fixed to the tip of (37) via a flange (38), and the periphery of the arm is covered with a cover (40).

A lift plate (42) rotatably supporting a shaft (41) of an upper surface cleaning brush (31) planted on the lower surface of a disk-shaped substrate is provided at the tip of the arm (39). A cylinder (43) is provided to move up and down. A part of the brush shaft (41) is formed as a spline shaft, and a shaft holder having a ball spline (44) at an end thereof for engaging with the spline shaft.
A timing pulley (46) is fixed to (45), and the timing pulley (46) is connected to a timing pulley (49) attached to a motor (48) via a timing belt (47). It is. Housing (50) for rotatably supporting the shaft holder (45)
Is fixed to the lower surface of the arm (39), and is surrounded by bellows (51).

With the above configuration, the upper surface cleaning brush (31)
Can be rotated by a motor (48) and raised and lowered by a cylinder (43). In addition, by operating an air cylinder (36), the standby position separated from the attaching plate (6) and the As shown by an arrow (52) in FIG. 2, it can be swung between cleaning positions opposed to the lower surface cleaning brush (32) with the attachment plate therebetween.

FIG. 9 shows an embodiment of the lower surface cleaning brush (32), in which a housing (54) is erected on a base (53) provided on a gantry (8). The spline shaft (55) is inserted through the housing. A bore engaging with the spline shaft (55) is provided between the spline shaft (55) and the housing (54).
Shaft holder (5
7) is provided rotatably, and the shaft holder (5
A motor (not shown) is connected to a timing pulley (58) provided at the lower end of (7) via a timing belt and pulley (not shown).

The lower end of the spline shaft (55) is rotatably connected to a bearing holder (59). The bearing holder (59) is guided by a slide bush (60) and a guide shaft (61), It moves up and down by the action of the air cylinder (62). Also,
A lower surface cleaning brush (32) planted on the upper surface of a disk-shaped substrate is fixed to the upper end of the spline shaft (55).

With the above configuration, the lower surface cleaning brush (32)
It can be rotated by a motor (not shown) and raised and lowered by a cylinder (62). Note that the lower surface cleaning brush may be turned similarly to the upper surface cleaning brush (31).

FIG. 10 shows an embodiment of the side cleaning brush (33), which is basically similar in structure to the drive roller mechanism shown in FIGS. That is, the slide base (64) is placed on the rail (63) provided on the gantry,
The slide base (64) is slidably provided by an air cylinder (65) toward the center of the attaching plate, and the moving range of the slide base (64) is adjusted by the rod of the air cylinder (65).
It is regulated by the hit piece (67) provided in (66). A drive shaft (70) connected to a motor (69) is inserted through a housing (68) standing above the slide base (64),
Brush shaft (73) via gears (71) and (72) mounted on the top
Rotating the side cleaning brush (33) provided on the brush shaft (73).
Is rotated.

The side cleaning brush (33) is formed by radially implanting hair around a cylindrical body portion thicker than the thickness of the sticking plate (6). A plurality of side cleaning brushes having different diameters are prepared so as to cope with the problem.

The nozzles (74) and (75) for supplying the cleaning liquid and the nozzles (7
6) and (77) are provided. Also, to dry the sticker,
Nozzles (78) and (79) for supplying gas such as nitrogen gas are also provided. Gases such as air and nitrogen gas may be appropriately heated. Each of the above-mentioned nozzles can be fixed or swiveled, but in the embodiment shown in the figure, the nozzle for jetting nitrogen gas is swirled and the other nozzles are fixed. As previously filed by the present applicants (Japanese Patent Application No. 1-343868), a three-membered ring compound represented by an aqueous alkali-soluble adhesive such as rosin or other abietic acid is used as a wafer adhesive. If a resin containing, as a main component, a derivative of the resin, or a modified product of the resin with a dibasic acid, or an adhesive obtained by mixing two or more of these, as a cleaning liquid, for example, water-compatible A cleaning solution of an alkaline aqueous solution such as a cleaning solution obtained by mixing one or more of organic alkali, inorganic alkali, or inorganic alkali salt having the same or a mixture of two or more thereof may be used.

FIGS. 11 and 12 show one embodiment of the upper nozzle. In the figure, a bearing holder (81) is inserted through a slide bush (80) fixed to the main body (1) so as to be able to move up and down, and a shaft (8) is inserted into the bearing holder (81).
2) is supported, a nozzle shaft (84) is fixed to the tip of the shaft (82) via a nozzle holder (83), and a nozzle (78) is attached to the tip of the nozzle shaft (84). I have.

The upper end of the shaft (82) is connected to a motor (85), and a part of the shaft (82) is provided with a sensor cut (87) for operating a sensor (86). The shaft (82) is turned by the motor (86), and its range is controlled by a sensor.

An elevating plate (88) is fixed to the upper end of the bearing holder (81), and the motor (85) is mounted on the elevating plate (88) via a column (89). Supporting motor play
(90) is fixed. The lifting plate (88)
As shown in FIG. 12, a slide bush (9
1), and the slide bush (91) has a guide shaft
(92) is inserted. The rod (94) of the cylinder (93) provided on the elevating plate (88) has its tip fixed to the main body (1). The nozzle (78) moves up and down via the plate (88), the bearing holder (81) and the shaft (82).

The upper nozzle (78) turns while the shaft (82) is lowered, and ascends into a cover portion (95) provided in the main body at a retracted position, as shown by a chain line in FIG. Stored. The upper nozzle is dried by ejecting a gas such as nitrogen gas into the cover portion (95).

FIG. 13 shows an embodiment of the lower nozzle, in which a housing (97) is mounted on a base (96) fixed to a gantry.
The shaft (99) connected to the motor (98) is inserted into the housing (97), and the tip of the shaft (99) is inserted through the nozzle holder (100) into the nozzle shaft (101). ), And the nozzle shaft (1
01) is provided with a nozzle (79) at the tip. The above motor (9
According to 8), the nozzle shaft (101) turns, and its turning range is controlled by the sensor cut (102) and the sensor (103).
The nozzle (79) is housed in a cover (104) provided on the main body at the retracted position.

As shown in FIG. 4 to FIG. 6, FIG. 8 to FIG. 10 and FIG.
A cover is formed with the rising wall to prevent leakage of the cleaning liquid and the like.

When the shutter (4) of the opening (3) is opened and the attaching plate (6) is placed on the receiving roller (7) by the robot means, the cylinder (21) is used from the surroundings. The drive roller (29) is approached, and the sticking plate (6) is sandwiched and rotated. This rotation speed is preferably several tens to 100 rpm. In addition, after carrying in the sticking plate, the shutter (4)
Is closed.

Then, while supplying the cleaning liquid from the nozzle (74), the upper cleaning brush (31) is rotated while rotating, is lowered to the upper surface of the attaching plate (6), and then the cleaning liquid is supplied to the lower surface of the nozzle (75). The lower surface cleaning brush (32) and the side cleaning brush (33) are spouted from the cylinder and are brought into contact with the attachment plate by the cylinders (62) and (65) while rotating. At this time, the upper surface cleaning brush (31) and the lower surface cleaning brush (32) are opposed to each other with the attaching plate interposed therebetween, and their rotation directions are opposite.

When the adhesive such as wax attached to the surface of the attaching plate or other attached matter is removed, the supply of the cleaning liquid is stopped, and pure water is supplied from the nozzles (76) and (77). Wash. Rinsing can be performed if desired.

Then, the lower surface cleaning brush and the side cleaning brush are retracted by the cylinders (62) and (65), and the upper surface cleaning brush is retracted by the cylinders (36) and (43). ) And the lower nozzle (79) are swirled, and nitrogen gas is blown onto the sticking plate to dry the entire surface of the sticking plate.

When the above steps are completed, the shutter (4) of the opening (3) is opened again, the sticking plate is taken out of the main body by the robot means, the next sticking plate is carried in, and the above steps are repeated. Automatically cleans the sticker.

[0039]

According to the present invention, the present invention is constructed as described above. The adhesive plate is placed on a receiving roller and brushed while rotating about a central axis in a state where the entire surface is exposed. The entire surface can be cleaned. At this time, the cleaning brushes on the upper and lower surfaces are formed in a disk shape, and the brushes are clamped and cleaned while the brushes are in surface contact. It can reliably remove dirt such as wax, and does not take up a large space as before,
The use of the cleaning solution of the alkaline aqueous solution as described above can be performed safely and sanitarily without using an organic solvent, the cost is reduced to about one tenth of that when an organic solvent is used, and the size of the brush is the same as that of the conventional brush. the position will be the size of about one-third of compared to the arranged, can be installed in a narrow space and can be cleaned only by sticking plates with different diameters exchanging driving roller and side washing brush, after washing The above attachment plate is
The nitrogen jets from the upper and lower nozzles
Due to gases such as raw gas, even large-sized
Area dried, and the upper and lower nozzles are retracted
It is stored in the cover at the
It can be prevented from being contaminated by dropped dust, etc.
There is no risk of reattaching dust and the like.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing an embodiment of the present invention.

FIG. 2 is a plan view showing a state in which an upper part of a main body is removed.

FIG. 3 is a side view.

FIG. 4 is a front view showing a part of a receiving roller section in cross section.

FIG. 5 is a side view of a receiving roller portion.

FIG. 6 is a front view of a driving roller portion.

FIG. 7 is a side view mainly showing a cross section of a rail portion.

FIG. 8 is a front view of a top cleaning brush portion.

FIG. 9 is a front view of a lower surface cleaning brush portion.

FIG. 10 is a front view of a side cleaning brush portion.

FIG. 11 is a front view of an upper nozzle portion.

FIG. 12 is a side view of an upper nozzle portion.

FIG. 13 is a front view of a lower nozzle portion.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Main body 6 Adhering plate 7 Receiving roller 8 Stand 29 Drive roller 31 Upper surface cleaning brush 32 Lower surface cleaning brush 33 Side cleaning brush

Claims (1)

(57) [Scope of request for utility model registration] An apparatus for cleaning an adhesive plate formed in a disk shape and having an upper surface, a lower surface to which a wafer is to be attached, and a peripheral side surface connecting the peripheral edges of the upper surface and the lower surface, wherein all surfaces of the adhesive plate are rotated. has a receiving roller rotatably supported in a horizontal plane該貼with plate so as to be exposed between, receiving rollers rotatable to該貼with plate put the patch plate thereon about its central axis A pair of rotatable rollers arranged in the circumferential direction of the sticking plate so as to support the sticking plate, and a cylindrical drive for sandwiching the circumferential side surface of the sticking plate to rotationally drive the sticking plate. Roller, a supply nozzle for supplying a cleaning liquid to the surface of the pasting plate during rotation, and the upper surface, lower surface, and peripheral side surface of the pasting plate while simultaneously supplying the cleaning liquid to the pasting plate. Disc-shaped upper surface cleaning brush that slides on the upper surface A brush, a disc-shaped lower surface cleaning brush that slides on the lower surface of the adhesive plate, and a cylindrical side cleaning brush that slides on the peripheral side surface of the adhesive plate, and the upper surface cleaning brush sandwiches the adhesive plate. The lower surface cleaning brush is provided so as to be movable between a cleaning position opposed to the lower surface cleaning brush and a standby position separated from the adhesive plate, and the upper surface and the lower surface of the adhesive plate are provided with the adhesive.
Upper and lower nozzles that eject gas to dry the plate
Are provided so as to be pivotable, and the upper nozzle and the lower nozzle are retracted.
A sticking plate cleaning device housed in a cover in an installation.