JP2559129B2 - Probe card - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a probe card in which the position of a probe tip to be brought into contact with an electrode of an IC is arbitrarily adjusted by a fixing member.

[Conventional technology]

The probe card is equipped with a probe as a probe electrode that contacts the electrodes (pads) of the integrated circuit (IC) installed on the semiconductor chip to establish electrical continuity, and is used for testing the characteristics of the IC during IC manufacturing. It is used. Then, the probe is required to be compatible with a large number of electrodes of an IC that has become complicated and miniaturized.

Normally, the electrodes of the IC are regularly arranged on the peripheral portion of the semiconductor chip at a specific interval, but there are also electrodes arranged at irregular positions other than the peripheral portion due to high integration and circuit characteristics. Inspection of such an IC requires placement of a probe corresponding to the irregular electrode.

Conventionally, IC inspection has been performed for each single semiconductor chip, but in order to improve the inspection efficiency, it has been proposed to inspect a plurality of semiconductor chips at once. In this case, it is necessary to dispose the probes corresponding to the electrodes of the plurality of semiconductor chips.

[Problems to be Solved by the Invention]

By the way, conventionally, in order to correspond to the electrode of the semiconductor chip to be inspected, the probe is arranged and fixed to the annular fixing member with the tip radially toward the electrode, and when contacting the semiconductor chip, stress on the needle tip is applied. Equal, in other words, so that equal needle tip pressure acts on the electrodes,
The protrusion length from the inner edge of the fixing member is set to be equal using needle materials having the same diameter.

However, when two or more adjacent semiconductor chips are inspected at once, the distance between the position of the electrode on the adjacent edge side of each chip and the edge of the probe fixing member is different from other electrodes, and Even when an irregular electrode exists not only in the peripheral portion of the chip but also in the middle portion thereof, the distance between each electrode and the inner edge of the fixing member differs depending on the electrode. Then, the probe corresponding to the electrode having a different distance from the fixing member has a larger protrusion length than the probe corresponding to the normal electrode arrangement, so that the needle pressure changes for each electrode and probe, and the probe tip varies depending on each probe. This will affect the durability and inspection accuracy of the probe, such as wear of the probe and insufficient electrical contact.

For this reason, it is possible to adjust the stylus pressure by changing the thickness of the probe and the taper length of the middle part of the probe, but it is extremely troublesome to make these adjustments for each stylus pressure in relation to the electrode distance. Yes, it was difficult to equalize the stylus pressure.

Therefore, it is an object of the present invention to provide a probe card that realizes uniform stylus pressure in each probe corresponding to an irregular electrode arrangement with an extremely simple configuration.

[Means for solving the problem]

The probe card of the present invention, as shown in FIG.
The first probe 2 is fixed to the first fixing member (fixing ring 4) with an arbitrary protruding length l, and the second probe 14 is fixed to the second fixing member (fixing ring 16) with the protruding length l.
Is fixed, and these first and second fixing members (fixing rings 4 and 16) are superposed on each other to form the first and second probes 2,
The tip position of 14 is different.

[Action]

First probe 2 on the first fixing member (fixing ring 4) and second probe on the second fixing member (fixing ring 16)
By fixing 14 and arbitrarily overlapping the first and second fixing members (fixing rings 4 and 16), the needle tip positions of the first and second probes 2 and 14 are arbitrarily set. Therefore, the first and second fixing members (fixing ring 4,
By the fixed position of 16), the first and second probes 2 and 14 having the same protruding length l with different needle tip positions are obtained,
It is possible to correspond to each electrode of a plurality of adjacent semiconductor chips 6A and 6B, or each electrode of a semiconductor chip having an irregular electrode installed in an intermediate portion of the semiconductor chip or the like.

〔Example〕

1 and 2 show a first embodiment of the probe card of the present invention.

An annular first for fixing a plurality of first probes 2
The fixing ring 4 is installed as a fixing member of the. The fixing ring 4 is a mortar-shaped annular body made of a hard material such as synthetic resin or ceramic, has a curved corner portion, and has an edge portion 8 corresponding to the electrode arrangement at the peripheral portions of the two semiconductor chips 6A and 6B. There is. A plurality of probes 2 having needle tips corresponding to the electrodes 10 of the semiconductor chips 6A and 6B are arranged on the fixing ring 4 with the same protruding length 1 from the edge portion 8 and fixed with an adhesive 12 made of synthetic resin or the like. Has been done.

Then, a fixing ring 16 is installed as an annular second fixing member for fixing the second probe 14. The fixing ring 16 is a mortar-shaped ring made of the same material as that of the fixing ring 4, and is provided with an edge portion 18 having a curved corner and corresponding to an irregular electrode arrangement of the semiconductor chips 6A and 6B. There is. The tip of the needle is attached to the semiconductor chip 6 on the fixing ring 16.
A plurality of probes 14 corresponding to the electrodes 20 on the adjacent sides of A and 6B are arranged with the same protruding length l from the edge portion 18 and fixed with an adhesive 22 made of synthetic resin or the like.

The fixing rings 4 and 16 having the probes 2 and 14 having the same protrusion length l from the edges 8 and 18 are superposed so that the respective probes 2 and 14 correspond to a predetermined electrode arrangement, Is fixed with an adhesive.

Then, the fixing rings 4 and 16 are fixed to a substrate for a probe card (not shown), and each of the probes 2 and 14 is fixed.
Are connected to the electrodes 10 and 20 by connecting means such as solder.

In this way, the probes 2 and 14 are fixed to the fixing ring 4,
It is possible to protrude from 16 with the same protrusion length l, and the needle tip position can be made to correspond to the electrodes 10 at the peripheral portions of the plurality of semiconductor chips 6A and 6B and the electrodes 20 at irregular positions, using common needle materials. The same stylus pressure can be set.

In the first embodiment, the arrangement of the probes 2 and 14 used for the inspection of the two semiconductor chips 6A and 6B has been described, but one or a plurality of semiconductor chips having an irregular electrode arrangement are also applicable. be able to.

Next, FIGS. 3 and 4 show a second embodiment of the probe card of the present invention.

In the first embodiment, the probe card used for the inspection of the two semiconductor chips 6A and 6B has been described, but in the second embodiment, the electrodes 10 and 20 of the four arranged semiconductor chips 6A, 6B, 6C and 6D are used. The corresponding case is shown.

A plurality of probes 2 corresponding to the regular electrodes 10 at the peripheral portions of the semiconductor chips 6A to 6D are arranged and fixed to the fixing ring 4 with the same protruding length l, and the fixing ring 16 has electrodes 20 of portions adjacent to each other. Multiple probes for 14
Are arranged and fixed with a protrusion length 1 equal to that of the probe 2. The fixing rings 4 and 16 have the same outer shape, and the fixing ring 16
A protrusion 24 that forms an edge portion 18 that sets a protrusion length 1 equal to that of the probe 14 is formed on this, and the probe 14 is fixed to this protrusion 24 with an adhesive 22.

By doing so, the arrangement of the probes 2 and 14 corresponding to the plurality of semiconductor chips 6A to 6D is realized, and the same needle pressure can be set extremely easily.

In addition, in the second embodiment, after fixing the probe 2 to the fixed ring 4 and the probe 14 to the fixed ring 16, respectively, the fixed rings 4 and 16 are polymerized, but as shown in FIG. The probe 14 may be fixed to the back side of the fixing ring 4 to which the probe 2 is fixed, and the fixing ring 16 may be fixed thereon with an adhesive.

Further, in each of the embodiments, the case where the two fixing rings 4 and 16 are used has been described, but a large number of fixing rings may be installed depending on the mode of the bowl tip position, and the needle tip position may be changed by the large number of fixing rings. It can be set arbitrarily.

〔The invention's effect〕

As described above, according to the present invention, the needle tip position can be arbitrarily set corresponding to the electrodes of two or more semiconductor chips or the electrodes of the semiconductor chip having an irregular electrode arrangement, and Accordingly, since the fixing members can be made different so that the protruding length of each probe from the fixing member can be made equal, the needle pressure can be made constant and highly reliable inspection can be realized.

[Brief description of drawings]

1 is a plan view showing a first embodiment of the probe card of the present invention, FIG. 2 is a sectional view taken along the line II-II of FIG. 1, and FIG. 3 is a second embodiment of the probe card of the present invention. A plan view, FIG. 4 is a sectional view taken along line IV-IV in FIG. 3, and FIG. 5 is an exploded sectional perspective view showing a modification of the second embodiment of the probe card of the present invention. 2 ... First probe 4 ... Fixing ring (first fixing member) 14 ... Second probe 16 ... Fixing ring (second fixing member)

Claims (1)

(57) [Claims] 1. A first fixing member having an arbitrary projecting length.
The second probe is fixed to the second fixing member with the protruding length, and the first and second fixing members are overlapped with each other so that the tip positions of the first and second probes are different from each other. Set probe card.