JP2552537Y2 - 減圧タンクの扉開閉機構 - Google Patents
減圧タンクの扉開閉機構Info
- Publication number
- JP2552537Y2 JP2552537Y2 JP10405889U JP10405889U JP2552537Y2 JP 2552537 Y2 JP2552537 Y2 JP 2552537Y2 JP 10405889 U JP10405889 U JP 10405889U JP 10405889 U JP10405889 U JP 10405889U JP 2552537 Y2 JP2552537 Y2 JP 2552537Y2
- Authority
- JP
- Japan
- Prior art keywords
- door
- tank
- opening
- pressure reducing
- axis direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Pressure Vessels And Lids Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10405889U JP2552537Y2 (ja) | 1989-09-05 | 1989-09-05 | 減圧タンクの扉開閉機構 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10405889U JP2552537Y2 (ja) | 1989-09-05 | 1989-09-05 | 減圧タンクの扉開閉機構 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0343170U JPH0343170U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-04-23 |
JP2552537Y2 true JP2552537Y2 (ja) | 1997-10-29 |
Family
ID=31652867
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10405889U Expired - Lifetime JP2552537Y2 (ja) | 1989-09-05 | 1989-09-05 | 減圧タンクの扉開閉機構 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2552537Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5199703B2 (ja) * | 2008-03-05 | 2013-05-15 | 大陽日酸株式会社 | 真空装置用扉開閉装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5748709B2 (ja) | 2012-06-05 | 2015-07-15 | 三菱電機株式会社 | プローブカード |
-
1989
- 1989-09-05 JP JP10405889U patent/JP2552537Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5748709B2 (ja) | 2012-06-05 | 2015-07-15 | 三菱電機株式会社 | プローブカード |
Also Published As
Publication number | Publication date |
---|---|
JPH0343170U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-04-23 |
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