JP2548948Y2 - 静電走査型イオン注入装置 - Google Patents

静電走査型イオン注入装置

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Publication number
JP2548948Y2
JP2548948Y2 JP1990053451U JP5345190U JP2548948Y2 JP 2548948 Y2 JP2548948 Y2 JP 2548948Y2 JP 1990053451 U JP1990053451 U JP 1990053451U JP 5345190 U JP5345190 U JP 5345190U JP 2548948 Y2 JP2548948 Y2 JP 2548948Y2
Authority
JP
Japan
Prior art keywords
scanning signal
frequency
amplitude
triangular wave
direction scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990053451U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0412251U (enrdf_load_stackoverflow
Inventor
純一 長谷部
Original Assignee
山形日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 山形日本電気株式会社 filed Critical 山形日本電気株式会社
Priority to JP1990053451U priority Critical patent/JP2548948Y2/ja
Publication of JPH0412251U publication Critical patent/JPH0412251U/ja
Application granted granted Critical
Publication of JP2548948Y2 publication Critical patent/JP2548948Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
JP1990053451U 1990-05-22 1990-05-22 静電走査型イオン注入装置 Expired - Lifetime JP2548948Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990053451U JP2548948Y2 (ja) 1990-05-22 1990-05-22 静電走査型イオン注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990053451U JP2548948Y2 (ja) 1990-05-22 1990-05-22 静電走査型イオン注入装置

Publications (2)

Publication Number Publication Date
JPH0412251U JPH0412251U (enrdf_load_stackoverflow) 1992-01-31
JP2548948Y2 true JP2548948Y2 (ja) 1997-09-24

Family

ID=31574646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990053451U Expired - Lifetime JP2548948Y2 (ja) 1990-05-22 1990-05-22 静電走査型イオン注入装置

Country Status (1)

Country Link
JP (1) JP2548948Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8735855B2 (en) 2010-06-07 2014-05-27 Sen Corporation Ion beam irradiation system and ion beam irradiation method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5494275A (en) * 1978-01-10 1979-07-25 Toshiba Corp Implanting method of charge particles to semiconductor wafers and apparatus for the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8735855B2 (en) 2010-06-07 2014-05-27 Sen Corporation Ion beam irradiation system and ion beam irradiation method

Also Published As

Publication number Publication date
JPH0412251U (enrdf_load_stackoverflow) 1992-01-31

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