JP2547102Y2 - 圧電積層アクチュエータ - Google Patents

圧電積層アクチュエータ

Info

Publication number
JP2547102Y2
JP2547102Y2 JP1991007254U JP725491U JP2547102Y2 JP 2547102 Y2 JP2547102 Y2 JP 2547102Y2 JP 1991007254 U JP1991007254 U JP 1991007254U JP 725491 U JP725491 U JP 725491U JP 2547102 Y2 JP2547102 Y2 JP 2547102Y2
Authority
JP
Japan
Prior art keywords
moisture
piezoelectric
insulating layers
insulating layer
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1991007254U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0499567U (https=
Inventor
純 多保田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP1991007254U priority Critical patent/JP2547102Y2/ja
Priority to DE4201937A priority patent/DE4201937C2/de
Publication of JPH0499567U publication Critical patent/JPH0499567U/ja
Priority to US08/202,875 priority patent/US5438232A/en
Application granted granted Critical
Publication of JP2547102Y2 publication Critical patent/JP2547102Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP1991007254U 1991-01-25 1991-01-25 圧電積層アクチュエータ Expired - Lifetime JP2547102Y2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1991007254U JP2547102Y2 (ja) 1991-01-25 1991-01-25 圧電積層アクチュエータ
DE4201937A DE4201937C2 (de) 1991-01-25 1992-01-24 Piezoelektrisches laminiertes Stellglied
US08/202,875 US5438232A (en) 1991-01-25 1994-02-28 Piezoelectric lamination actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1991007254U JP2547102Y2 (ja) 1991-01-25 1991-01-25 圧電積層アクチュエータ

Publications (2)

Publication Number Publication Date
JPH0499567U JPH0499567U (https=) 1992-08-27
JP2547102Y2 true JP2547102Y2 (ja) 1997-09-10

Family

ID=31738992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1991007254U Expired - Lifetime JP2547102Y2 (ja) 1991-01-25 1991-01-25 圧電積層アクチュエータ

Country Status (1)

Country Link
JP (1) JP2547102Y2 (https=)

Also Published As

Publication number Publication date
JPH0499567U (https=) 1992-08-27

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term