JP2546243B2 - Air conditioner - Google Patents

Air conditioner

Info

Publication number
JP2546243B2
JP2546243B2 JP61256985A JP25698586A JP2546243B2 JP 2546243 B2 JP2546243 B2 JP 2546243B2 JP 61256985 A JP61256985 A JP 61256985A JP 25698586 A JP25698586 A JP 25698586A JP 2546243 B2 JP2546243 B2 JP 2546243B2
Authority
JP
Japan
Prior art keywords
air
main body
cooling
air conditioner
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61256985A
Other languages
Japanese (ja)
Other versions
JPS63111686A (en
Inventor
三郎 神谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP61256985A priority Critical patent/JP2546243B2/en
Publication of JPS63111686A publication Critical patent/JPS63111686A/en
Application granted granted Critical
Publication of JP2546243B2 publication Critical patent/JP2546243B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/042—Arrangements for thermal management for solid state lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/0404—Air- or gas cooling, e.g. by dry nitrogen

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Public Health (AREA)
  • General Physics & Mathematics (AREA)
  • Epidemiology (AREA)
  • Atmospheric Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lasers (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、アライメント用、位置測定用、位置決め用
のレーザ発振手段（レーザ光源）を備えた被冷却装置
（露光装置、レーザ加工装置、検査測定装置等）に対す
る空調装置、およびそのような空調装置によって空調さ
れる露光装置に関しに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a device to be cooled (exposure device, laser processing device, inspection) equipped with laser oscillation means (laser light source) for alignment, position measurement, and positioning. The present invention relates to an air conditioner for a measuring device, etc., and an exposure apparatus that is air-conditioned by such an air conditioner.

［従来の技術］ 集積回路製造用の露光装置では、例えばレチクルとウ
エハとのアライメントを行うために、レーザ発振手段が
備えられている場合がある。[Prior Art] An exposure apparatus for manufacturing an integrated circuit may be provided with a laser oscillating means for performing alignment between a reticle and a wafer, for example.

このレーザ発振手段は、その動作を安定して行わせる
必要から、冷却を行って一定雰囲気に保つ必要がある。This laser oscillating means needs to be cooled and kept in a constant atmosphere because it is necessary to stably perform its operation.

従来の空調装置では、適宜のチャンバや工場建屋など
（以下、単に「筐体」と総称する）に収容された露光装
置とともに、レーザ発振手段の冷却も行われている。す
なわち、レーザ発振手段は、露光装置とともに該筐体内
で一定温度雰囲気に保たれており、レーザ光源のみを独
自に一定温度に保つ手段は特に設けられていない。In a conventional air conditioner, a laser oscillation means is cooled together with an exposure device housed in an appropriate chamber, a factory building or the like (hereinafter, simply referred to as a “casing”). That is, the laser oscillating means is kept in a constant temperature atmosphere inside the housing together with the exposure device, and there is no special means for keeping only the laser light source at a constant temperature.

［発明が解決しようとする問題点］ しかしながら以上のような従来の空調装置では、他の
被冷却装置部分、例えば露光装置を冷却した気体がレー
ザ発振手段に当ることがあるため、レーザ発振手段の冷
却が良好に行われなくなるという不都合がある。[Problems to be Solved by the Invention] However, in the conventional air conditioner as described above, since the gas that has cooled another device to be cooled, for example, the exposure device may hit the laser oscillation means, There is an inconvenience that the cooling is not performed well.

また、レーザ発振手段自体が熱源となり、ここで暖め
られた気体が他の被冷却装置部分に熱的に影響を及ぼす
という不都合もある。In addition, the laser oscillating means itself serves as a heat source, and the gas heated here has a disadvantage that it thermally affects other parts to be cooled.

本発明は、かかる点に鑑みてなされたものであり、被
冷却装置（被空調装置）としての露光装置、レーザ加工
装置、または検査測定装置等と共に筐体（チャンバー）
内に収容されたレーザ発振手段（レーザ光源）を、被空
調装置に悪影響を及ぼすことなく良好に冷却する空調装
置、あるいは熱源としてのレーザ光源で暖められた空気
が装置全体に悪影響を与えないようにした露光装置を提
供することを、その目的とするものである。The present invention has been made in view of the above points, and a housing (chamber) together with an exposure apparatus as a cooled apparatus (air-conditioned apparatus), a laser processing apparatus, an inspection measurement apparatus, or the like.
The air conditioner that cools the laser oscillation means (laser light source) housed inside the device well without adversely affecting the air-conditioned device or the air heated by the laser light source as a heat source does not adversely affect the entire device. It is an object of the present invention to provide an exposure apparatus having the above structure.

［問題点を解決するための手段］ 本願特許請求の範囲第１項に記載した発明（第１発
明）は、露光装置、レーザ加工装置、検査測定装置等の
装置本体を内部に収容して、該装置本体を適宜の温度、
湿度の雰囲気に設置するための筐体を備えた空調装置に
おいて、前記筐体内に温度と湿度とが調整された空気を
供給する本体用空調器と、前記装置本体の近傍に配置さ
れ、前記装置本体内のアライメント、位置測定、あるい
は位置決めに用いられるレーザ光源を、前記筐体内の他
の部分から隔離して収納すると共に、前記レーザ光源の
冷却用に前記本体用空調器からの温度等が調整された空
気の一部を取り込む容器と、該容器内で前記レーザ光源
の冷却に寄与した空気を、前記容器内から前記筐体外へ
直接排出させる排気ダクト手段とを備え、前記レーザ光
源の冷却用空気と前記装置本体の空調用空気とを兼用さ
せたことを特徴とするものである。[Means for Solving Problems] The invention (first invention) described in claim 1 of the present application accommodates an apparatus main body such as an exposure apparatus, a laser processing apparatus, and an inspection and measurement apparatus inside, The device body at an appropriate temperature,
An air conditioner having a housing for installation in an atmosphere of humidity, wherein an air conditioner for a main body that supplies air whose temperature and humidity are adjusted into the housing, and the air conditioner arranged near the main body of the device, A laser light source used for alignment, position measurement, or positioning in the main body is housed separately from the other parts in the housing, and the temperature from the air conditioner for the main body is adjusted for cooling the laser light source. For cooling the laser light source, comprising: a container for taking in a part of the stored air, and an exhaust duct means for directly discharging the air, which has contributed to the cooling of the laser light source in the container, from the inside of the container to the outside of the housing. The present invention is characterized in that the air is also used as the air for the air conditioning of the apparatus body.

本願特許請求の範囲第２項に記載した発明（第２発
明）は、集積回路製造用の露光装置本体を内部空間に収
容して、該露光装置本体を適宜の温度、湿度の雰囲気に
設置するためのチャンバーを備えた露光装置において、
前記チャンバーの内部空間に温度と湿度とが調整された
空気を供給する本体用空調器と、前記露光装置本体の近
傍に配置され、前記露光装置本体に熱的な影響を及ぼし
得る熱源を、前記チャンバー内の他の部分から隔離して
収納すると共に、前記熱源の冷却用に前記本体用空調器
からの温度等が調整された空気の一部を取り込む容器
と、該容器内で前記熱源の冷却に寄与した空気を、前記
容器内から前記チャンバーの外へ直接排出させる排気ダ
クト手段とを備え、前記熱源の冷却用空気と前記露光装
置本体の空調用空気とを兼用させたことを特徴とするも
のである。The invention (second invention) described in claim 2 of the present application accommodates an exposure apparatus main body for manufacturing an integrated circuit in an internal space, and installs the exposure apparatus main body in an atmosphere of appropriate temperature and humidity. In an exposure apparatus equipped with a chamber for
An air conditioner for a main body that supplies air whose temperature and humidity are adjusted to the internal space of the chamber, and a heat source that is arranged in the vicinity of the main body of the exposure apparatus and may have a thermal influence on the main body of the exposure apparatus, A container that is stored separately from the other parts in the chamber, and that takes in a part of the air whose temperature is adjusted from the air conditioner for the main body for cooling the heat source, and a cooling of the heat source in the container Exhaust duct means for directly discharging the air contributing to the above from the inside of the container to the outside of the chamber, and is used as both cooling air for the heat source and air conditioning air for the exposure apparatus main body. It is a thing.

［作用］ この発明においては、レーザ発振手段（レーザ光源）
が容器内に収容されているため、露光装置、レーザ加工
装置、検査測定装置等の被冷却装置（被空調装置）から
の気体による悪影響が低減される。[Operation] In the present invention, laser oscillation means (laser light source)
Is stored in the container, the adverse effect of gas from the cooled device (air-conditioned device) such as the exposure device, the laser processing device, and the inspection and measurement device is reduced.

レーザ発振手段の冷却は、気体導入手段によって容器
内に導入された冷却気体によって行われる。The cooling of the laser oscillation means is performed by the cooling gas introduced into the container by the gas introduction means.

そして、レーザ発振手段の冷却に寄与した気体は、気
体排出手段（排気ダクト手段によって、露光装置、レー
ザ加工装置、検査測定装置等の被冷却装置（被空調装
置）に影響を及ぼすことなく、筐体外に排出される。The gas that contributes to the cooling of the laser oscillating means does not affect the cooled device (air-conditioned device) such as the exposure device, the laser processing device, and the inspection and measurement device by the gas exhausting device (exhaust duct device). Excreted out of the body.

［実施例］ 以下、本発明の実施例を、添付図面を参照しながら詳
細に説明する。EXAMPLES Examples of the present invention will be described in detail below with reference to the accompanying drawings.

第１図には、本発明の一実施例が示されており、第２
図には、この実施例の主要部分が拡大して示されてい
る。An embodiment of the invention is shown in FIG.
In the figure, the main part of this embodiment is shown enlarged.

これら第１図および第２図において、筐体10の内部に
は、露光装置12が収容されている。この露光装置12の適
宜肩部には、レーザ発振器14が配置されている。In FIGS. 1 and 2, the exposure device 12 is housed inside the housing 10. A laser oscillator 14 is arranged at an appropriate shoulder of the exposure device 12.

筐体10の側方適宜位置には、空気の吸入口16と排出口
18とが各々設けられている。そして、吸入口16側には、
空気冷却用の空調器20が設けられている。Air inlet 16 and outlet at appropriate positions on the side of the casing 10.
18 and 18 are provided respectively. And on the suction port 16 side,
An air conditioner 20 for cooling air is provided.

この空調器20によって冷却された空気は、一方におい
て、本体用送風装置22により露光装置12の方に送られ、
他方において、ダクト24に送られるようになっている。The air cooled by the air conditioner 20 is, on the one hand, sent to the exposure device 12 by the main body blower 22,
On the other hand, it is adapted to be sent to the duct 24.

このダクト24は、レーザ発振器14が収容されている容
器26に、送風装置28を介して接続されている。この送風
装置28は、適当な速度でレーザ発振器14に冷却空気（ク
リーン・エア）を送るためのものである。本実施例にお
いては、上記ダクト24と送風装置28とがレーザ発振器14
の冷却（空調）用に温度調整された気体を容器26内に供
給する気体導入手段を構成している。そして、この気体
導入手段によって冷却空気を容器26内に直接導入するこ
ととしたので、レーザ発振器14の冷却を良好に行って、
安定したレーザ発振を行うことができ、このレーザ光を
用いる位置測定ないし位置決めの精度の向上を図ること
ができるといった効果が得られる。The duct 24 is connected to a container 26 in which the laser oscillator 14 is housed via a blower 28. The blower 28 is for sending cooling air (clean air) to the laser oscillator 14 at an appropriate speed. In this embodiment, the duct 24 and the blower 28 are the laser oscillator 14
It constitutes a gas introduction means for supplying a gas, the temperature of which has been adjusted for cooling (air conditioning), into the container 26. Then, since the cooling air is directly introduced into the container 26 by this gas introduction means, the laser oscillator 14 is satisfactorily cooled,
The effect that stable laser oscillation can be performed and the accuracy of position measurement or positioning using this laser light can be improved can be obtained.

レーザ発振器14は、適宜の架台30上に固定されてお
り、そのレーザ光は、パイプ32を介して露光装置12の方
に出力されるようになっている。パイプ32は、レーザ光
が外部に露出しないようにするためのものである。The laser oscillator 14 is fixed on an appropriate pedestal 30, and its laser light is output to the exposure device 12 via a pipe 32. The pipe 32 is for preventing the laser light from being exposed to the outside.

次に、上述した容器26には、レーザ発振器14をはさん
で略反対側に、排気ダクト34が接続されており、この排
気ダクト34は、排気装置36を介して排気口18に接続され
ている。Next, to the container 26 described above, an exhaust duct 34 is connected to the opposite side across the laser oscillator 14, and the exhaust duct 34 is connected to the exhaust port 18 via an exhaust device 36. There is.

次に、上記実施例の全体的作用について説明する。吸
入口16から吸入された空気は、空調器20の作用により、
適宜の温度、湿度となるように調整される。そして、こ
の冷却空気は、一方において、本体用送風装置22により
露光装置12の方へ送られ（矢印FA参照）、他方におい
て、ダクト24の方へ送られる（矢印FB参照）。Next, the overall operation of the above embodiment will be described. The air sucked from the suction port 16 is operated by the air conditioner 20.
The temperature and humidity are adjusted appropriately. Then, on the one hand, this cooling air is sent to the exposure device 12 by the main body air blower 22 (see arrow FA), and on the other hand to the duct 24 (see arrow FB).

矢印FA方向の冷却空気は、露光装置12を冷却し、その
後排気装置36の作用により、筐体10以外に排気される。
このとき、露光装置12を冷却した空気はレーザ発振器14
の方向に流れる。しかし、容器26の作用により、該空気
が直接レーザ発振器14に当るのが防止される。The cooling air in the direction of the arrow FA cools the exposure device 12, and then is exhausted to a place other than the housing 10 by the action of the exhaust device 36.
At this time, the air that has cooled the exposure apparatus 12 is the laser oscillator 14
Flowing in the direction of. However, the action of the container 26 prevents the air from hitting the laser oscillator 14 directly.

矢印FB方向の冷却空気は、ダクト24を通過し、更に
は、送風装置28によって容器26内に導かれる（矢印FC参
照）。そして、ここでレーザ発振器14を冷却する。The cooling air in the direction of the arrow FB passes through the duct 24 and is further guided into the container 26 by the blower 28 (see the arrow FC). Then, the laser oscillator 14 is cooled here.

レーザ発振器14を冷却した空気は、排気ダクト34を通
過して、排気装置36により、排気口18から筐体10外部に
排気される（矢印FD、FE参照）。The air that has cooled the laser oscillator 14 passes through the exhaust duct 34 and is exhausted from the exhaust port 18 to the outside of the housing 10 by the exhaust device 36 (see arrows FD and FE).

なお、本発明は何ら上記実施例に限定されるものでは
なく、例えばレーザ発振器としては、ガスレーザ、半導
体などの固体レーザなど種々のものが適用可能である。It should be noted that the present invention is not limited to the above embodiments, and various laser oscillators such as gas lasers and solid-state lasers such as semiconductors can be applied.

また、上記実施例では、被冷却装置として露光装置が
筐体内に収容されている場合を示したが、その他、ウエ
ハのレーザ加工装置や、検査測定装置などに対してもこ
の発明は適用されるものである。Further, in the above embodiment, the case where the exposure apparatus is housed in the housing as the cooled apparatus is shown, but the present invention is also applied to a wafer laser processing apparatus, an inspection measuring apparatus, and the like. It is a thing.

［発明の効果］ 以上説明したように、本発明によれば、露光装置、レ
ーザ加工装置、検査測定装置等の装置本体が収容される
筐体（チャンバー等）内に、その装置本体と近接してレ
ーザ発振手段（熱源）が配置されている場合に、そのレ
ーザ光源（熱源）を筐体（チャンバー等）内で容器内に
収容して他の部分から隔離すると共に、筐体（チャンバ
ー等）の内部空間全体の空調を行う本体用空調器からの
温度調整された空気を容器内に導いてレーザ光源（熱
源）を冷却するようにし、そのレーザ光源（熱源）によ
って暖められた容器内の空気を強制的に筐体（チャンバ
ー等）の内部空間の外に排出するダクト手段を設けたの
で、レーザ光源（熱源）の冷却に寄与した空気（暖めら
れた気体）の筐体（チャンバー等）内の他の装置本体部
分に対する悪影響が低減されるといった効果が得られ
る。[Effects of the Invention] As described above, according to the present invention, a device (a chamber or the like) that houses a device body such as an exposure device, a laser processing device, and an inspection / measuring device is placed close to the device body. If a laser oscillating means (heat source) is provided, the laser light source (heat source) is housed in a container in a housing (chamber or the like) to isolate it from other parts, and at the same time, the housing (chamber or the like). The air inside the container is heated by the laser light source (heat source) by guiding the temperature-controlled air from the air conditioner for the main body to cool the laser light source (heat source) Since the duct means for forcibly discharging the air to the outside of the internal space of the housing (chamber etc.) is provided, the inside of the housing (chamber etc.) of the air (warmed gas) that contributed to the cooling of the laser light source (heat source) The other device The effect of reducing the adverse effect of

また、筐体（チャンバー等）内全体の空調とレーザ光
源（熱源）の冷却（容器内の空調）とを、筐体（チャン
バー等）内の装置本体空調用に設けられた空調器で兼用
して行うようにしたので、筐体内に収容される露光装
置、レーザ加工装置、検査測定装置等の温度とレーザ光
源（熱源）を収容する容器内の温度とほぼ同じにするこ
とができ、全体としての温度分布も一様にすることが可
能となるといった効果も得られる。Further, the air conditioner provided for air conditioning of the main body of the housing (chamber etc.) is used for both the air conditioning of the entire housing (chamber etc.) and the cooling of the laser light source (heat source) (air conditioning of the container). Since the temperature of the exposure device, laser processing device, inspection and measurement device, etc. housed in the housing can be made almost the same as the temperature of the container housing the laser light source (heat source), as a whole, It is also possible to obtain the effect that the temperature distribution of can be made uniform.

【図面の簡単な説明】[Brief description of drawings]

第１図は本発明の一実施例にかかる空調装置を示す一部
破断した正面図、第２図は第１図の実施例の主要部分を
示す斜視図である。 10……筐体、12……露光装置、14……レーザ発振器、16
……吸入口、18……排気口、20……空調器、22……本体
用送風装置、24……ダクト、26……容器、28……送風装
置、34……排気ダクト、36……排気装置。FIG. 1 is a partially cutaway front view showing an air conditioner according to an embodiment of the present invention, and FIG. 2 is a perspective view showing a main part of the embodiment shown in FIG. 10 ... Case, 12 ... Exposure device, 14 ... Laser oscillator, 16
...... Intake port, 18 ...... Exhaust port, 20 ...... Air conditioner, 22 ...... Main body blower, 24 ...... Duct, 26 ...... Container, 28 ...... Blower, 34 ...... Exhaust duct, 36 ...... Exhaust system.

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項１】露光装置、レーザ加工装置、検査測定装置
等の装置本体を内部に収容して、該装置本体を適宜の温
度、湿度の雰囲気に設置するための筐体を備えた空調装
置において、 前記筐体内に温度と湿度とが調整された空気を供給する
本体用空調器と、 前記装置本体の近傍に配置され、前記装置本体内のアラ
イメント、位置測定、あるいは位置決めに用いられるレ
ーザ光源を、前記筐体内の他の部分から隔離して収納す
ると共に、前記レーザ光源の冷却用に前記本体用空調器
からの温度等が調整された空気の一部を取り込む容器
と、 該容器内で前記レーザ光源の冷却に寄与した空気を、前
記容器内から前記筐体外へ直接排出させる排気ダクト手
段とを備え、 前記レーザ光源の冷却用空気と前記装置本体の空調用空
気とを兼用させたことを特徴とする空調装置。1. An air conditioner having a housing for accommodating an apparatus main body such as an exposure apparatus, a laser processing apparatus, and an inspection / measuring apparatus inside, and installing the apparatus main body in an atmosphere of appropriate temperature and humidity. An air conditioner for a main body that supplies air whose temperature and humidity are adjusted into the housing, and a laser light source that is arranged in the vicinity of the main body of the device and is used for alignment, position measurement, or positioning in the main body of the device. A container that is stored separately from the other parts in the housing and that takes in part of the air from the air conditioner for the main body whose temperature is adjusted for cooling the laser light source; An exhaust duct means for directly discharging the air, which contributes to the cooling of the laser light source, from the inside of the container to the outside of the housing, wherein the cooling air of the laser light source and the air conditioning air of the apparatus main body are combined. A characteristic air conditioner. 【請求項２】集積回路製造用の露光装置本体を内部空間
に収容して、該露光装置本体を適宜の温度、湿度の雰囲
気に設置するためのチャンバーを備えた露光装置におい
て、 前記チャンバーの内部空間に温度と湿度とが調整された
空気を供給する本体用空調器と、 前記露光装置本体の近傍に配置され、前記露光装置本体
に熱的な影響を及ぼし得る熱源を、前記チャンバー内の
他の部分から隔離して収納すると共に、前記熱源の冷却
用に前記本体用空調器からの温度等が調整された空気の
一部を取り込む容器と、 該容器内で前記熱源の冷却に寄与した空気を、前記容器
内から前記チャンバーの外へ直接排出させる排気ダクト
手段とを備え、 前記熱源の冷却用空気と前記露光装置本体の空調用空気
とを兼用させたことを特徴とする露光装置。2. An exposure apparatus comprising a chamber for accommodating an exposure apparatus main body for manufacturing an integrated circuit in an internal space and installing the exposure apparatus main body in an atmosphere of appropriate temperature and humidity, wherein the inside of the chamber An air conditioner for a main body that supplies air whose temperature and humidity are adjusted to a space, and a heat source that is arranged in the vicinity of the exposure apparatus main body and may have a thermal influence on the exposure apparatus main body, in addition to the other inside the chamber. And a container for taking in a part of the air whose temperature is adjusted from the air conditioner for the main body for cooling the heat source, and the air that contributes to the cooling of the heat source in the container. And an exhaust duct means for directly discharging the inside of the container to the outside of the chamber, wherein the cooling air of the heat source and the air conditioning air of the exposure apparatus main body are used together.
JP61256985A 1986-10-30 1986-10-30 Air conditioner Expired - Lifetime JP2546243B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61256985A JP2546243B2 (en) 1986-10-30 1986-10-30 Air conditioner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61256985A JP2546243B2 (en) 1986-10-30 1986-10-30 Air conditioner

Publications (2)

Publication Number Publication Date
JPS63111686A JPS63111686A (en) 1988-05-16
JP2546243B2 true JP2546243B2 (en) 1996-10-23

Family

ID=17300125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61256985A Expired - Lifetime JP2546243B2 (en) 1986-10-30 1986-10-30 Air conditioner

Country Status (1)

Country Link
JP (1) JP2546243B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010219238A (en) * 2009-03-16 2010-09-30 Nuflare Technology Inc Charged-particle beam lithography system
JP6435153B2 (en) * 2014-10-14 2018-12-05 株式会社アマダホールディングス Laser resonator, laser processing apparatus, and laser resonator dehumidification method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4723952U (en) * 1971-03-23 1972-11-17
JPS5243980Y2 (en) * 1972-09-25 1977-10-05
JPS6021582A (en) * 1983-07-15 1985-02-02 Fuji Photo Film Co Ltd Device for laser temperature adjustment

Also Published As

Publication number Publication date
JPS63111686A (en) 1988-05-16

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