JP2545575Y2 - エッチング装置 - Google Patents

エッチング装置

Info

Publication number
JP2545575Y2
JP2545575Y2 JP1990067279U JP6727990U JP2545575Y2 JP 2545575 Y2 JP2545575 Y2 JP 2545575Y2 JP 1990067279 U JP1990067279 U JP 1990067279U JP 6727990 U JP6727990 U JP 6727990U JP 2545575 Y2 JP2545575 Y2 JP 2545575Y2
Authority
JP
Japan
Prior art keywords
plasma
etching
gas
vacuum chamber
end point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990067279U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0426531U (enrdf_load_stackoverflow
Inventor
誠 縄田
三郎 金井
良次 福山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1990067279U priority Critical patent/JP2545575Y2/ja
Publication of JPH0426531U publication Critical patent/JPH0426531U/ja
Application granted granted Critical
Publication of JP2545575Y2 publication Critical patent/JP2545575Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1990067279U 1990-06-27 1990-06-27 エッチング装置 Expired - Fee Related JP2545575Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990067279U JP2545575Y2 (ja) 1990-06-27 1990-06-27 エッチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990067279U JP2545575Y2 (ja) 1990-06-27 1990-06-27 エッチング装置

Publications (2)

Publication Number Publication Date
JPH0426531U JPH0426531U (enrdf_load_stackoverflow) 1992-03-03
JP2545575Y2 true JP2545575Y2 (ja) 1997-08-25

Family

ID=31600716

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990067279U Expired - Fee Related JP2545575Y2 (ja) 1990-06-27 1990-06-27 エッチング装置

Country Status (1)

Country Link
JP (1) JP2545575Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0821573B2 (ja) * 1986-02-03 1996-03-04 株式会社日立製作所 プラズマ処理装置
JPS63170938U (enrdf_load_stackoverflow) * 1987-04-23 1988-11-07

Also Published As

Publication number Publication date
JPH0426531U (enrdf_load_stackoverflow) 1992-03-03

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