JP2544056Y2 - ウエハの表面処理装置 - Google Patents

ウエハの表面処理装置

Info

Publication number
JP2544056Y2
JP2544056Y2 JP17680987U JP17680987U JP2544056Y2 JP 2544056 Y2 JP2544056 Y2 JP 2544056Y2 JP 17680987 U JP17680987 U JP 17680987U JP 17680987 U JP17680987 U JP 17680987U JP 2544056 Y2 JP2544056 Y2 JP 2544056Y2
Authority
JP
Japan
Prior art keywords
cassette
wafer
processing
transfer
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP17680987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0180934U (th
Inventor
俊作 児玉
Original Assignee
大日本スクリ−ン製造 株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大日本スクリ−ン製造 株式会社 filed Critical 大日本スクリ−ン製造 株式会社
Priority to JP17680987U priority Critical patent/JP2544056Y2/ja
Publication of JPH0180934U publication Critical patent/JPH0180934U/ja
Application granted granted Critical
Publication of JP2544056Y2 publication Critical patent/JP2544056Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP17680987U 1987-11-19 1987-11-19 ウエハの表面処理装置 Expired - Lifetime JP2544056Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17680987U JP2544056Y2 (ja) 1987-11-19 1987-11-19 ウエハの表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17680987U JP2544056Y2 (ja) 1987-11-19 1987-11-19 ウエハの表面処理装置

Publications (2)

Publication Number Publication Date
JPH0180934U JPH0180934U (th) 1989-05-30
JP2544056Y2 true JP2544056Y2 (ja) 1997-08-13

Family

ID=31468512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17680987U Expired - Lifetime JP2544056Y2 (ja) 1987-11-19 1987-11-19 ウエハの表面処理装置

Country Status (1)

Country Link
JP (1) JP2544056Y2 (th)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110299313A (zh) * 2019-07-04 2019-10-01 北京北方华创微电子装备有限公司 清洗装置和清洗方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000003894A (ja) * 1999-05-10 2000-01-07 Tokyo Electron Ltd 洗浄装置及びその方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110299313A (zh) * 2019-07-04 2019-10-01 北京北方华创微电子装备有限公司 清洗装置和清洗方法

Also Published As

Publication number Publication date
JPH0180934U (th) 1989-05-30

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