JP2544056Y2 - ウエハの表面処理装置 - Google Patents
ウエハの表面処理装置Info
- Publication number
- JP2544056Y2 JP2544056Y2 JP17680987U JP17680987U JP2544056Y2 JP 2544056 Y2 JP2544056 Y2 JP 2544056Y2 JP 17680987 U JP17680987 U JP 17680987U JP 17680987 U JP17680987 U JP 17680987U JP 2544056 Y2 JP2544056 Y2 JP 2544056Y2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- wafer
- processing
- transfer
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17680987U JP2544056Y2 (ja) | 1987-11-19 | 1987-11-19 | ウエハの表面処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17680987U JP2544056Y2 (ja) | 1987-11-19 | 1987-11-19 | ウエハの表面処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0180934U JPH0180934U (th) | 1989-05-30 |
JP2544056Y2 true JP2544056Y2 (ja) | 1997-08-13 |
Family
ID=31468512
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17680987U Expired - Lifetime JP2544056Y2 (ja) | 1987-11-19 | 1987-11-19 | ウエハの表面処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2544056Y2 (th) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110299313A (zh) * | 2019-07-04 | 2019-10-01 | 北京北方华创微电子装备有限公司 | 清洗装置和清洗方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000003894A (ja) * | 1999-05-10 | 2000-01-07 | Tokyo Electron Ltd | 洗浄装置及びその方法 |
-
1987
- 1987-11-19 JP JP17680987U patent/JP2544056Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110299313A (zh) * | 2019-07-04 | 2019-10-01 | 北京北方华创微电子装备有限公司 | 清洗装置和清洗方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0180934U (th) | 1989-05-30 |
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