JP2541813Y2 - 縦型ｃｖｄ装置の反応管 - Google Patents

縦型ｃｖｄ装置の反応管

Info

Publication number
JP2541813Y2
JP2541813Y2 JP1989067716U JP6771689U JP2541813Y2 JP 2541813 Y2 JP2541813 Y2 JP 2541813Y2 JP 1989067716 U JP1989067716 U JP 1989067716U JP 6771689 U JP6771689 U JP 6771689U JP 2541813 Y2 JP2541813 Y2 JP 2541813Y2
Authority
JP
Japan
Prior art keywords
reaction tube
heater
reaction
vertical cvd
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989067716U
Other languages
English (en)
Japanese (ja)
Other versions
JPH038426U (enrdf_load_stackoverflow
Inventor
利一 狩野
康博 原田
昭一郎 泉
幸二 遠目塚
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP1989067716U priority Critical patent/JP2541813Y2/ja
Publication of JPH038426U publication Critical patent/JPH038426U/ja
Application granted granted Critical
Publication of JP2541813Y2 publication Critical patent/JP2541813Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989067716U 1989-06-09 1989-06-09 縦型ｃｖｄ装置の反応管 Expired - Lifetime JP2541813Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989067716U JP2541813Y2 (ja) 1989-06-09 1989-06-09 縦型ｃｖｄ装置の反応管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989067716U JP2541813Y2 (ja) 1989-06-09 1989-06-09 縦型ｃｖｄ装置の反応管

Publications (2)

Publication Number Publication Date
JPH038426U JPH038426U (enrdf_load_stackoverflow) 1991-01-28
JP2541813Y2 true JP2541813Y2 (ja) 1997-07-23

Family

ID=31601535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989067716U Expired - Lifetime JP2541813Y2 (ja) 1989-06-09 1989-06-09 縦型ｃｖｄ装置の反応管

Country Status (1)

Country Link
JP (1) JP2541813Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62201927U (enrdf_load_stackoverflow) * 1986-06-13 1987-12-23

Also Published As

Publication number Publication date
JPH038426U (enrdf_load_stackoverflow) 1991-01-28

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