JP2538003B2 - Magnetic disk drive - Google Patents

Magnetic disk drive

Info

Publication number
JP2538003B2
JP2538003B2 JP63280798A JP28079888A JP2538003B2 JP 2538003 B2 JP2538003 B2 JP 2538003B2 JP 63280798 A JP63280798 A JP 63280798A JP 28079888 A JP28079888 A JP 28079888A JP 2538003 B2 JP2538003 B2 JP 2538003B2
Authority
JP
Japan
Prior art keywords
height
magnetic
substrate
density
magnetic disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63280798A
Other languages
Japanese (ja)
Other versions
JPH02128318A (en
Inventor
貴志 鈴木
茂樹 河瀬
義昭 貝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
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Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP63280798A priority Critical patent/JP2538003B2/en
Publication of JPH02128318A publication Critical patent/JPH02128318A/en
Application granted granted Critical
Publication of JP2538003B2 publication Critical patent/JP2538003B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 産業上の利用分野 本発明はコンピュータの磁気記憶装置等に用いられる
高密度記録に適した磁気ディスク装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk device suitable for high density recording used in a magnetic storage device of a computer.

従来の技術 磁性層に金属薄膜や金属酸化物薄膜を使用する薄膜型
磁気ディスクとしては、通常、アルミ合金板の表面にア
ルマイト処理,ニッケル・リンメッキ処理等を施した基
板に真空製膜法,メッキ法等により薄膜磁性層を形成さ
せたものが実用化されている。そして、一般に、磁気デ
ィスク稼動時には磁気ヘッドがディスク面より浮上し停
止時にはディスク面に接触するいわゆるコンタクトスタ
ートストップ(CSS)方式が採用されている。この場
合、スタート時またはストップ時における磁気ヘッドス
ライダーとディスク表面との接触摺動に耐えるため、あ
るいは、停止時に高湿環境に曝された際に吸着水・結露
水等により磁気ヘッドスライダーがディスクの表面に固
着されるいわゆる吸着現象を防止するために、通常、デ
ィスク表面には基板表面のテキスチャ加工により生じる
磁気ヘッド走行方向にほぼ平行な溝を有するおう突形状
が設けられており、さらに、磁性薄膜の上にはグラファ
イト,SiO2等を主体とする保護膜と、その表面に潤滑剤
層とが設けられている。
2. Description of the Related Art As a thin film magnetic disk using a metal thin film or a metal oxide thin film as a magnetic layer, a vacuum film forming method or plating is usually applied to a substrate whose surface is an aluminum alloy plate that has been subjected to alumite treatment, nickel-phosphorus plating treatment, or the like. A thin film magnetic layer formed by a method or the like has been put into practical use. In general, a so-called contact start stop (CSS) method is adopted in which the magnetic head floats above the disk surface when the magnetic disk is in operation and contacts the disk surface when stopped. In this case, in order to withstand the sliding contact between the magnetic head slider and the disk surface at the time of start or stop, or when exposed to a high humidity environment at the time of stop, the magnetic head slider may move to the disk In order to prevent the so-called adsorption phenomenon that is fixed to the surface, the disk surface is usually provided with a protruding shape having grooves parallel to the running direction of the magnetic head generated by the texturing of the substrate surface. A protective film mainly composed of graphite, SiO 2, etc. is provided on the thin film, and a lubricant layer is provided on the surface thereof.

発明が解決しようとする課題 記録密度向上のためには、磁気ヘッド浮上距離を低減
せしめることが必要であるが、その際、テキスチャ加工
により生じる突起形状の高さを低減して表面性を改善し
ていくと、その分CSS耐久性や、磁気ヘッド吸着性を犠
牲にすることになり実用性能確保が困難となる。
Problems to be Solved by the Invention In order to improve the recording density, it is necessary to reduce the flying distance of the magnetic head. At that time, the height of the projection shape generated by the texturing is reduced to improve the surface property. As a result, the CSS durability and the magnetic head attracting property are sacrificed by that amount, making it difficult to secure practical performance.

また、テキスチャ加工は、通常、研磨砥粒によるアブ
レシブ摩耗によりディスク円周方向に微細な傷を発生さ
せたものであり、その突起形状としては、円周方向に対
しては山脈の尾根のごとき勾配の非常にゆるやかなもの
となっている。このようなゆるやかな勾配は磁気ヘッド
スライダーの衝撃力に対して変形・破壊を受けやすく、
また、磁気ヘッドスライダー摺動時に面接触を生じやす
く摩擦係数も点接触の場合に比べて高い傾向を示す。
Further, the texturing is usually a process in which minute scratches are generated in the disk circumferential direction due to abrasive wear caused by abrasive grains, and the projection shape is a gradient such as a mountain range ridge in the circumferential direction. It's very loose. Such a gentle slope is easily deformed and destroyed by the impact force of the magnetic head slider,
Further, when the magnetic head slider slides, surface contact is likely to occur, and the coefficient of friction tends to be higher than in the case of point contact.

本発明は上述の問題点に鑑み発明されたものであっ
て、ディスク表面に多数の勾配の急峻な2種類の微小突
起を存在せしめて、磁気ヘッドスライダーとの接触を点
接触とすることにより、前記問題を解決した磁気ディス
ク装置を提供することを目的とする。
The present invention has been invented in view of the above-mentioned problems. By making two kinds of minute protrusions having a large number of steep gradients on the disk surface and making the contact with the magnetic head slider a point contact, It is an object of the present invention to provide a magnetic disk device that solves the above problems.

課題を解決するための手段 上記の目的を達成するため本発明は、表面に、高さ10
0〜300Å,高さ:面方向の長さ比0.1以上,密度1×107
〜1×109個/mm2の第1微小突起群と、高さ400〜800
Å,高さ:面方向の長さ比0.1以上,密度1×103〜1×
106個/mm2の第2微小突起群からなる微小突起群を有す
る非磁性基板上に磁性層,保護層、潤滑剤層を順次形成
した薄膜型磁気ディスクと、この薄膜型磁気ディスクに
記録再生を行う磁気ヘッドを具備した磁気ヘッドスライ
ダーからなることを特徴とする磁気ディスク装置であ
る。
Means for Solving the Problems In order to achieve the above object, the present invention provides a surface with a height of 10
0 to 300Å, height: length ratio in the plane direction of 0.1 or more, density of 1 × 10 7
~ 1 x 10 9 pieces / mm 2 of the first micro-projection group, height 400 ~ 800
Å, height: length ratio in the plane direction 0.1 or more, density 1 × 10 3 to 1 ×
A thin-film magnetic disk in which a magnetic layer, a protective layer, and a lubricant layer are sequentially formed on a non-magnetic substrate having a minute protrusion group of 10 6 pieces / mm 2 and recording on this thin-film magnetic disc. A magnetic disk device comprising a magnetic head slider having a magnetic head for reproducing.

ここで、薄膜磁気ディスクにおいては、磁性薄膜の厚
さはCoP,CoNi,CoNiP,CoNiCr,CoCr等の金属系では約500
Å,γ−Fe2O3のごとき酸化物系で約1000Åであり、こ
れらに下地,表面保護層を加えても全厚さで2000Å程度
と薄いため、基板表面の形状がほぼそのままディスク表
面形状に反影される。本発明の最大の特徴は、従来基板
で採用されているテキスチャ加工にみられるごとき平均
的にゆるやかな勾配の突起ではなく、急峻な勾配を有す
る2種類の粒状の微小突起群を基板表面に配したことに
ある。
Here, in the thin film magnetic disk, the thickness of the magnetic thin film is about 500 in a metal system such as CoP, CoNi, CoNiP, CoNiCr, and CoCr.
Å, Approximately 1000Å for oxides such as γ-Fe 2 O 3 , and the total thickness is about 2000Å even if an underlayer and a surface protective layer are added to these, so the shape of the substrate surface is almost the same as the disk surface shape. Is reflected in. The greatest feature of the present invention is that two kinds of granular fine projections having a steep slope are arranged on the surface of the substrate, instead of the projections having an average gentle slope as seen in the texture processing which is conventionally used in the substrate. There is something I did.

本発明で採用した微小突起の高さ:面方向の長さの比
は、いずれの突起においても0.1以上であることが肝要
である。この範囲外では目的とするCSS寿命が得られ難
い。また、第1微小突起群の高さは最大高さの平均値で
100〜300Åの範囲が適当であり、その密度は1×107
1×109個/mm2が適当である。密度がこの範囲外、ある
いは、高さが100Å以下ではCSS耐久性が低下する。ま
た、高さが300Å以上では出力低下が大となり高記録密
度が得られ難い。第2微小突起群の高さは最大高さの平
均値で400〜800Åの範囲が適当であり、その密度は1×
104〜1×106個/mm2が適当である。密度が1×104個/
mm2以下ではCSS耐久性が低下する。さらに、高さ400Å
以下では吸着防止効果が低下する。高さが800Å以上、
あるいは密度1×106個/mm2以上では出力低下が大とな
り高記録密度が得られ難い。
It is important that the ratio of the height of the minute protrusions employed in the present invention to the length in the plane direction is 0.1 or more in any protrusion. It is difficult to obtain the desired CSS life outside this range. The height of the first micro-projection group is the average value of the maximum heights.
Range 100~300Å are suitable, its density 1 × 10 7 ~
1 × 10 9 pieces / mm 2 is suitable. If the density is out of this range or the height is less than 100Å, the CSS durability will decrease. Further, when the height is 300 Å or more, the output is greatly reduced and it is difficult to obtain a high recording density. The height of the second micro-projection group is suitable in the range of 400 to 800Å as the average value of the maximum height, and its density is 1 ×.
10 4 to 1 × 10 6 pieces / mm 2 is suitable. Density is 1 × 10 4 pieces /
If it is less than mm 2 , CSS durability will be reduced. Furthermore, the height is 400Å
Below, the effect of preventing adsorption is reduced. 800 Å or higher in height,
On the other hand, if the density is 1 × 10 6 pieces / mm 2 or more, the output is greatly reduced and it is difficult to obtain a high recording density.

作用 本発明のディスクにおいては、CSS時および停止時に
おける磁気ヘッドスライダーとディスク表面との接触は
主としてディスク表面の第2の微小突起群上で生じる。
磁気ヘッドスライダー表面はディスクと多数の点で接触
することになり摩擦抵抗が低減され、耐CSS特性が良好
で、吸着の発生が抑制される。ところで、磁気ヘッドス
ライダー表面は本来平滑に仕上げてあるが、使用中に摩
耗で微小な面荒れを生じたり、摩耗粉などが凝着し微小
突起が形成されたりする。また、発生した摩耗粉による
共摺現象も発生する。これらの磁気ヘッドスライダー表
面の微小突起先端や共摺時の摩耗粉はディスク表面の第
2の微小突起群の谷間の部分、すなわち、その谷間に存
在する第1の微小突起群と接触することになる。この場
合の接触も点接触となるため摩擦抵抗は低減され、凝着
・破壊現象が発生せず良好な耐CSS特性が確保される。
Action In the disk of the present invention, the contact between the magnetic head slider and the disk surface during CSS and at the stop mainly occurs on the second minute projection group on the disk surface.
The surface of the magnetic head slider comes into contact with the disk at many points, which reduces frictional resistance, has good CSS resistance, and suppresses the occurrence of adsorption. By the way, the surface of the magnetic head slider is originally made smooth, but during use, minute surface roughness may occur due to abrasion, or abrasion powder or the like may adhere to form minute protrusions. Further, a co-sliding phenomenon occurs due to the generated abrasion powder. The tips of the fine projections on the surface of the magnetic head slider and the abrasion powder during co-sliding contact the valleys of the second fine projections on the disk surface, that is, the first fine projections existing in the valleys. Become. Since the contact in this case is also point contact, the friction resistance is reduced, and good CSS resistance is secured without the occurrence of adhesion and fracture phenomena.

さらに、通常ディスク表面に施される潤滑剤はディス
ク表面の微小突起の間に保持され表面張力の作用により
微小突起先端に供給される。
Further, the lubricant which is usually applied to the surface of the disk is held between the minute projections on the surface of the disk and is supplied to the tips of the minute projections by the action of surface tension.

結局、耐CSSには第1および第2の微小突起群が、ま
た、吸着防止には第2の微小突起群が有効に作用する。
After all, the first and second micro-projection groups effectively act on the CSS resistance, and the second micro-projection group effectively acts on the adsorption prevention.

実施例 第1図は、本発明の一実施例である磁気ディスクの厚
さ方向の断面の部分拡大図である。
Embodiment FIG. 1 is a partially enlarged view of a cross section in the thickness direction of a magnetic disk according to an embodiment of the present invention.

図において、1は基板、2は基板1表面の第1微小突
起、3は基板1表面の第2微小突起、4は磁性薄膜層、
5は保護層、6は潤滑剤、7は基板表面の第1微小突起
2に対応するディスク表面の微小突起、8は同じく第2
微小突起3に対応する微小突起である。
In the figure, 1 is a substrate, 2 is a first minute protrusion on the surface of the substrate 1, 3 is a second minute protrusion on the surface of the substrate 1, 4 is a magnetic thin film layer,
5 is a protective layer, 6 is a lubricant, 7 is a microprojection on the disk surface corresponding to the first microprojection 2 on the substrate surface, and 8 is the second microprojection.
It is a minute protrusion corresponding to the minute protrusion 3.

本発明に使用する基板1としては、アルミまたはアル
ミ合金板、その上にアルマイト処理,NiPメッキ処理,ポ
リイミド等の樹脂処理等を施したもの、ガラス板,セラ
ミック板,プラスチック成型板,強化プラスチック成形
板等が使用できる。
The substrate 1 used in the present invention is an aluminum or aluminum alloy plate, on which alumite treatment, NiP plating treatment, resin treatment such as polyimide or the like is applied, glass plate, ceramic plate, plastic molding plate, reinforced plastic molding Boards can be used.

平滑な基板1上への突起形成法としては、たとえば、
平均直径の異なる2種類の微粒子の混合物を樹脂結合剤
により基板1上に固着せしめるものがあり、この場合、
微粒子としては、アルミナ,シリカ,酸化チタン等の無
機物微粒子,ポリエステル,ポリアミド,ポリアリレー
ト,ポリスルホン,ポリフェニレンオキサイド,ポリイ
ミド,エポキシ,架橋スチレン,架橋アクリル,架橋ベ
ンジグアナミン,架橋メラミン等の高分子化合物の微粒
子,カーボン微粒子,金属アルコキシド加水分解物微粒
子等が使用できる。また樹脂結合剤としては、ポリエチ
レンテレフタレート,ポリブチレンテレフタレート等の
飽和ポリエステル,ナイロン6,ナイロン66,ナイロン61
0,ナイロン11,ナイロン12等のポリアミド,ポリスチレ
ン,ポリカーボネート,ポリアリレート,ポリスルホ
ン,ポリエーテルスルホン,ポリアクリレート,ポリ塩
化ビニール,ポリ塩化ビニリデン,ポリビニルブチラー
ル,ポリビニールアルコール,フェノキシ樹脂,ポリイ
ミド,ポリアミドイミド等の各種樹脂の単体,混合体,
共重合体等が使用でき、また、エポキシ樹脂,ウレタン
樹脂,シリコン樹脂,フェノール樹脂等の架橋性樹脂も
使用できる。結合剤100重量部に対し第1微小突起2群
を構成する微粒子50〜300重量部、さらに、第2微小突
起3群を構成する微粒子を適量加えて得られる塗布液を
基板1表面に塗布乾燥させる。微小突起群形成法として
は上記に限定されるものではなく、スパッタリング,イ
オンビーム蒸着,メッキ等の方法により金属,酸化物等
を島状に析出させる方法、あるいは、これらと前記湿式
塗布法との併用等によることもできる。
As a method of forming protrusions on a smooth substrate 1, for example,
There is one in which a mixture of two kinds of fine particles having different average diameters is fixed on the substrate 1 with a resin binder. In this case,
As the fine particles, fine particles of inorganic compounds such as alumina, silica, titanium oxide, etc., polyester, polyamide, polyarylate, polysulfone, polyphenylene oxide, polyimide, epoxy, crosslinked styrene, crosslinked acrylic, crosslinked benziguanamine, crosslinked melamine and the like. , Carbon fine particles, metal alkoxide hydrolyzate fine particles, etc. can be used. As the resin binder, saturated polyester such as polyethylene terephthalate and polybutylene terephthalate, nylon 6, nylon 66, nylon 61
Polyamide, polystyrene, polycarbonate, polyarylate, polysulfone, polyethersulfone, polyacrylate, polyvinyl chloride, polyvinylidene chloride, polyvinyl butyral, polyvinyl alcohol, phenoxy resin, polyimide, polyamideimide, etc. , A mixture of various resins
A copolymer or the like can be used, and a crosslinkable resin such as an epoxy resin, a urethane resin, a silicone resin or a phenol resin can also be used. A coating liquid obtained by adding 50 to 300 parts by weight of the fine particles forming the first microprojection 2 group and 100 parts by weight of the fine particles forming the second microprojection 3 group to 100 parts by weight of the binder is applied and dried on the surface of the substrate 1. Let The method of forming a group of fine projections is not limited to the above, and a method of depositing a metal, an oxide, or the like in an island shape by a method such as sputtering, ion beam vapor deposition, or plating, or a method in which these are combined with the wet coating method is used. It can also be used in combination.

磁性薄膜層4としては、Co-Ni,Co-Ni-Cr,Co-Cr,Co-Ni
-P,γ−Fe2O3等のスパッタ法,蒸着法,メッキ法等によ
り得られる公知の薄膜層が使用でき、必要に応じてCr,T
i等の下地層を設けることも可能である。下地層を含め
た磁性薄膜層4の厚みとしては、500〜5000Åが適当で
ある。
As the magnetic thin film layer 4, Co-Ni, Co-Ni-Cr, Co-Cr, Co-Ni
-P, γ-Fe 2 O 3 and other known thin film layers obtained by sputtering, vapor deposition, plating, etc. can be used.
It is also possible to provide an underlayer such as i. A suitable thickness of the magnetic thin film layer 4 including the underlayer is 500 to 5000Å.

保護層5としては、各種無機,有機非磁性材料から成
る厚さ50〜500Åの薄膜が使用可能でとりわけ、スパッ
タ法,CVD法等で得られる各種カーボン薄膜,湿式法で得
られるSiO2薄膜等が適している。
As the protective layer 5, thin films made of various inorganic and organic non-magnetic materials with a thickness of 50 to 500 Å can be used. In particular, various carbon thin films obtained by the sputtering method, CVD method, etc., SiO 2 thin films obtained by the wet method, etc. Is suitable.

潤滑剤層6としては、パーフロロアルキルポリエーテ
ルとその誘導体,フロロアルキル基を導入した脂肪酸・
脂肪酸エステル・脂肪酸アミド・金属石ケン・シリコー
ン化合物,フッ素系界面活性剤等が適しており、その存
在量としては表面1m2あたり0.1〜100mgが適当である。
As the lubricant layer 6, perfluoroalkyl polyether and its derivative, a fluoroalkyl group-introduced fatty acid,
Suitable are fatty acid esters, fatty acid amides, metal soaps, silicone compounds, fluorine-based surfactants, etc., and the amount present is 0.1 to 100 mg per 1 m 2 of the surface.

以下、実施例につきさらに具体例をあげて説明する。 Hereinafter, examples will be described with reference to specific examples.

(具体例) バフ研磨により鏡面仕上された直径95mm厚さ1.2mmのA
l合金板の表面に、湿式塗布法により厚さ5μmのポリ
イミド膜を形成し表面を平滑化して得た基板1の表面に
下記のA〜Cの方法により各種形状,各種密度の第1お
よび第2の微小突起2,3群を形成せしめた。
(Specific example) A with a diameter of 95 mm and a thickness of 1.2 mm that was mirror-finished by buffing
l The surface of the substrate 1 obtained by forming a polyimide film having a thickness of 5 μm on the surface of the alloy plate by the wet coating method and smoothing the surface is applied to the surface of the substrate 1 by the following methods A to C in various shapes and various densities. Two microprotrusions 2 and 3 groups were formed.

A)スチレン・ジビニルベンゼン共重合体より成る各種
粒径の架橋樹脂エマルジョン(粒径:400Å,600Å,800
Å)の希釈溶液を取捨選択し組合せて得られた混合液
(たとえば、粒径400Å,濃度3000ppmの希釈液と、粒径
800Å濃度500ppmの希釈液の当量混合液)を基板1上に
塗布後150℃30分間熱処理を行なった。熱処理により400
Åの粒子からは高さ300Åの突起が、また、600Åの粒子
からは高さ400Å,800Åからは600Åの突起がそれぞれ形
成され、それらの突起の高さ:面方向の長さ比は約0.8
であった。
A) Crosslinked resin emulsions of various particle sizes consisting of styrene-divinylbenzene copolymer (particle size: 400Å, 600Å, 800
Å) Diluted solutions are selected and combined to obtain a mixed solution (for example, a particle size of 400Å and a concentration of 3000ppm, and a particle size of
An equivalent mixture of 800 Å concentration of 500 ppm diluted solution) was applied on the substrate 1 and then heat-treated at 150 ° C. for 30 minutes. 400 by heat treatment
Particles of Å form protrusions with a height of 300 Å, particles of 600 Å form protrusions of 400 Å and 600 Å from 800 Å, and the height-to-face ratio is about 0.8.
Met.

B)クロロホルム:ベンゼン混合溶液中に膨潤分散した
平均直径1000Åおよび4000Åの2種類のポリアリレート
微粒子を含む溶液でその2種類の粒子の含有率を種々変
化させたものをそれぞれ基板に塗布したのち190℃10分
間の熱処理を行なった。直径1000Åの粒子からは高さ20
0Åの、また4000Åの粒子からは800Åの突起が形成され
た。それらの突起の高さ:面方向の長さ比は0.1であっ
た。
B) A solution containing two kinds of polyarylate fine particles having an average diameter of 1000 Å and 4000 Å swollen and dispersed in a chloroform: benzene mixed solution, each of which has a different content ratio of the two kinds of particles, and then applied to each substrate. Heat treatment was performed at 10 ° C for 10 minutes. 20 from a particle with a diameter of 1000Å
From 0Å and 4000Å particles, 800Å protrusions were formed. The height: height ratio of the protrusions was 0.1.

C)平均直径50Å,100Å,200Å,400Åの4種類のシリカ
コロイドを各々含有するポリビニールアルコール水溶液
(シリカコロイド濃度1000ppm,ポリビニールアルコール
濃度500〜2000ppm)を取捨選択し組合せて得られた混合
液を基板に塗布乾燥した。この場合には、粒子径と突起
高さとはほぼ同じ値となった。また突起の高さ:面方向
の長さ比は0.5〜0.8であった。
C) A mixed solution obtained by selecting and combining polyvinyl alcohol aqueous solutions (silica colloid concentration 1000 ppm, polyvinyl alcohol concentration 500-2000 ppm) containing four types of silica colloids with average diameters of 50 Å, 100 Å, 200 Å, 400 Å, respectively. Was applied to the substrate and dried. In this case, the particle diameter and the projection height were almost the same value. The height ratio of the protrusions to the plane direction was 0.5 to 0.8.

これらの方法により得られた試料の表面および破断面
のSEM写真から微小突起の高さ、高さ:面方向の長さ
比、および、面密度を求めた。そののち、スパッタ法に
より、Cr下地層(厚さ1200Å),CoNi磁性層4(同600
Å),カーボン保護層5(同200Å)を順次形成せし
め、最後に、パーフロロポリエーテル系潤滑剤を表面1
m2当り1mgとなるように塗布して潤滑剤層6を形成せし
め試料とした。そして、各試料につきCSS測定および吸
着測定を行なった。CSS耐久としては、摩擦係数が1.0を
超えた時点のCSS回数またはヘッドクラッシュ発生時のC
SS回数で評価し、これらの時点をCSS寿命とした。ま
た、吸着試験は、ディスク上にスライダーを固定した状
態で40℃90%雰囲気中でディスクを回転させた場合、始
動時にスライダーに加わる力が異常値を示した場合を吸
着発生とみなした。
From the SEM photographs of the surface and fracture surface of the sample obtained by these methods, the height of the microprotrusions, the length ratio in the height: plane direction, and the surface density were obtained. After that, the Cr underlayer (thickness 1200Å), CoNi magnetic layer 4 (600
Å) and carbon protective layer 5 (200 Å) are sequentially formed, and finally, perfluoropolyether lubricant is applied to the surface 1
A lubricant layer 6 was formed by applying 1 mg per m 2 to prepare a sample. Then, CSS measurement and adsorption measurement were performed for each sample. CSS durability is the number of CSSs when the friction coefficient exceeds 1.0 or C when a head crash occurs.
The number of times of SS was evaluated, and these points were set as CSS life. In the adsorption test, when the disc was rotated in a 90% atmosphere at 40 ° C. with the slider fixed on the disc, when the force applied to the slider at the time of starting showed an abnormal value, it was considered that the adsorption occurred.

上記の各試料につき、それらの試料の内容とCSS試験
および吸着試験の結果を第1表にまとめて記した。
For each of the above samples, the contents of the samples and the results of the CSS test and adsorption test are summarized in Table 1.

なお、表中、試作ディスクNo.に( )を付したもの
は比較例である。
In the table, the prototype disc numbers with () are comparative examples.

第1表より、第1および第2微小突起2,3群は共に必
要であること〔比較例(7),(8)参照〕、第1微小
突起2の高さは100Å以上必要であること〔比較例(1
3)参照〕、またその面密度は1×107〜1×109個/mm2
が適当であること〔比較例(6),(12),(20)参
照〕、第2微小突起3の高さ400以上必要であること
〔比較例(21)参照〕、またその面密度は1×104〜1
×106個/mm2が適当であること〔比較例(2),(1
0),(14)参照〕がわかる。
From Table 1, it is necessary that both the first and second groups 2 and 3 of microprotrusions are required [see Comparative Examples (7) and (8)], and the height of the first microprotrusions 2 must be 100Å or more. [Comparative example (1
3)], and its surface density is 1 × 10 7 to 1 × 10 9 pieces / mm 2
Is appropriate [see Comparative Examples (6), (12) and (20)], the height of the second micro-protrusions 3 must be 400 or more [see Comparative Example (21)], and its areal density is 1 x 10 4 ~ 1
× 10 6 pieces / mm 2 is appropriate [Comparative example (2), (1
See 0) and (14).

上記を考慮して、本願請求の範囲内であれば、CSS試
験結果、および吸着試験結果がすべて良好であることが
第1表より明らかである。なお、基板1のポリイミド膜
上に従来公知のテキスチャ加工による突起を形成せしめ
たのち微小突起群を形成することなく磁性層4,保護層5
等を上記実施例に順じて形成せしめたものでは最大表面
粗さ1000Åの場合においてもCSS耐久性は1000回以下で
あった。
In consideration of the above, it is clear from Table 1 that the CSS test result and the adsorption test result are all good within the scope of the claims of the present application. It should be noted that the magnetic layer 4 and the protective layer 5 are formed on the polyimide film of the substrate 1 after forming the protrusions by the conventionally known texture processing without forming the minute protrusion group.
When the maximum surface roughness was 1000Å, the CSS durability was 1000 times or less in the case where the above were formed in accordance with the above examples.

発明の効果 本発明によれば、従来のテキスチャ形状に代えて第1
および第2の微小突起群を採用することにより、表面粗
さの小さい高記録密度が可能な領域において実用に耐え
るCSS耐久性とスライダー非吸着性とを確保することが
できるため、本発明は工業的に価値の高いものである。
EFFECTS OF THE INVENTION According to the present invention, instead of the conventional texture shape, the first
By adopting the second group of microprotrusions, it is possible to ensure practical CSS durability and slider non-adhesiveness in an area where surface roughness is small and high recording density is possible. Of high value.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明による薄膜磁気ディスクの厚さ方向の断
面図である。 1……基板、2……第1微小突起、3……第2微小突
起、4……磁性層、5……保護層、6……潤滑剤層。
FIG. 1 is a sectional view in the thickness direction of a thin film magnetic disk according to the present invention. 1 ... Substrate, 2 ... First minute protrusion, 3 ... Second minute protrusion, 4 ... Magnetic layer, 5 ... Protective layer, 6 ... Lubricant layer.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】表面に、高さ100〜300Å、高さ:面方向の
長さ比0.1以上、密度1×107〜1×109個/mm2の第1微
小突起群と、高さ400〜800Å、高さ:面方向の長さ比0.
1以上、密度1×104〜1×106個/mm2の第2微小突起群
とからなる微小突起群を有する非磁性基板上に磁性層、
保護層、潤滑剤層を順次形成してなる薄膜型磁気ディス
クと、この薄膜型磁気ディスクに記録再生を行う磁気ヘ
ッドを具備した磁気ヘッドスライダーからなることを特
徴とする磁気ディスク装置。
1. A first group of microprojections having a height of 100 to 300Å, a height: plane length ratio of 0.1 or more, and a density of 1 × 10 7 to 1 × 10 9 pieces / mm 2 , and a height on the surface. 400-800Å, height: length ratio in the plane direction 0.
A magnetic layer on a non-magnetic substrate having a microprojection group having a density of 1 or more and a second microprojection group having a density of 1 × 10 4 to 1 × 10 6 pieces / mm 2 .
A magnetic disk drive comprising: a thin film magnetic disk having a protective layer and a lubricant layer sequentially formed thereon; and a magnetic head slider having a magnetic head for recording and reproducing information on the thin film magnetic disk.
JP63280798A 1988-11-07 1988-11-07 Magnetic disk drive Expired - Lifetime JP2538003B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63280798A JP2538003B2 (en) 1988-11-07 1988-11-07 Magnetic disk drive

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63280798A JP2538003B2 (en) 1988-11-07 1988-11-07 Magnetic disk drive

Publications (2)

Publication Number Publication Date
JPH02128318A JPH02128318A (en) 1990-05-16
JP2538003B2 true JP2538003B2 (en) 1996-09-25

Family

ID=17630119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63280798A Expired - Lifetime JP2538003B2 (en) 1988-11-07 1988-11-07 Magnetic disk drive

Country Status (1)

Country Link
JP (1) JP2538003B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6057984A (en) * 1995-10-25 2000-05-02 Mitsubishi Chemical Corporation Method for data writing/read-out using a contact start and stop system
US6132843A (en) * 1996-11-14 2000-10-17 Nippon Sheet Glass Do., Ltd. Glass substrate for magnetic disks

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2608868B2 (en) * 1982-11-18 1997-05-14 松下電器産業株式会社 Magnetic recording media

Also Published As

Publication number Publication date
JPH02128318A (en) 1990-05-16

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