JPH0344817A - Thin film type magnetic head - Google Patents

Thin film type magnetic head

Info

Publication number
JPH0344817A
JPH0344817A JP18113989A JP18113989A JPH0344817A JP H0344817 A JPH0344817 A JP H0344817A JP 18113989 A JP18113989 A JP 18113989A JP 18113989 A JP18113989 A JP 18113989A JP H0344817 A JPH0344817 A JP H0344817A
Authority
JP
Japan
Prior art keywords
thin film
magnetic
layer
substrate
magnetic head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18113989A
Other languages
Japanese (ja)
Inventor
Takashi Suzuki
貴志 鈴木
Yoshiaki Kai
義昭 貝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP18113989A priority Critical patent/JPH0344817A/en
Publication of JPH0344817A publication Critical patent/JPH0344817A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To maintain CSS durability for practical use in the area with small surface roughness where high-density recording can be performed, by providing fine projections having step slopes to make point contact to a magnetic head. CONSTITUTION:Fine projections 4 having steep slopes are provided on the surface of a substrate 1, not such projections having rather dull slopes produced by a conventional method such as texturing. ON CSS, fine projections 4 on the disk surface contact to a magnetic head on points, so that frictional resistance can be reduced and cohesion or fracture of the medium can be prevented. Thereby, good CSS characteristics can be maintained. Further a lubricant layer is provided on the disk surface and maintained among the fine projections 4 to be supplied to the top of the fine projection 4 by surface tension. Thus, good CSS life can be obtained.

Description

【発明の詳細な説明】 産業上の利用分野 本発明はコンピューターの磁気記憶装置等に用いられる
高密度記録に適した薄膜型磁気ディスクに関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a thin-film magnetic disk suitable for high-density recording used in magnetic storage devices of computers and the like.

従来の技術 磁性層に金属薄膜や金属酸化物薄膜を使用する薄膜型磁
気ディスクとして【友 連像 アルミ合金板の表面にア
ルマイト処珠 無電解N1−Pメツキ処理等を施した基
板に真空製膜法 メツキ法等により薄膜磁性層を形成さ
せたものが実用化されていも そして、一般に 磁気デ
ィスク稼働時には磁気ヘッドがディスク面より浮上し停
止時にはディスク面に接触するいわゆるコンタクトスタ
ートストップ(C3S)方式が採用されていも この場
合、スタート時またはストップ時における磁気ヘッドと
の接触摺動に耐えるために通常ディスクの表面は基板表
面のテキスチャ加工に起因する磁気ヘッド走行方向にほ
ぼ平行な溝を有する凹凸形状が形成されており、さらに
 磁性薄膜の上に(よグラファイト5i02等を主体と
する、保護層、と、その表面に潤滑剤とが設けられてい
瓜 薄膜磁気テープにおいてζ友 ポリエステル等の平
滑性良好なプラスチック基板上に多数の微小突起を形成
せし△その上に磁性薄膜層を形成せしめたものが良好な
実用耐久性を示すことが知られている(たとえば特開昭
58−100221号公報)。薄膜型磁気ディスクにお
いてL 平滑性良好な基板に多数の微細突起を形成せし
めることにより、高記録密度領域におけるC3S耐久改
善が可能である。しかし 表面平滑性良好なガラス基板
ii、取扱い時に破損する危険性があり、アルミ合金板
あるいはその表面にNiPメツキ層を形成せしめたもの
が基板として適当である力丈 アルミ合金板の表面には
金属間化合物や偏析などによる表面欠陥部が存在しポリ
ッシングによりこれらを含めて平滑化することは困難で
あり、またN1−Pメツキにおいては1ジユール等の異
常突起が存在しこれもポリッシングで充分に平滑化する
ことは困難であも これらの異常突起(友テキスチャ加
工時にほとんどすべて除去することが可能であることが
明きらかになった発明が解決しようとする課題 記録密度向上のためには磁気ヘッド浮上距離を低減せし
めることが必要である力曳 その暇 テキスチャ加工に
より生じる突起形状の高さを低減して表面形状を改善し
ていけば それに伴ないC3S耐久性を犠牲にすること
になり実用性能確保が困難となる。また テキスチャ加
工(よ 研磨砥粒によるアブレシプ摩耗によりディスク
円周方向に微細な傷を発生させたものであり、その突起
形状として(上 円周方向に対しては山脈の尾根のごと
き匂配の非常にゆるやかなものとなっている。このよう
なゆるやかな匂配は磁気ヘッドの衝撃力に対して変忽 
破壊を受けやすく、また 磁気ヘッド摺動時に面接触を
生じやすく摩擦係数も点接触の場合に比べて高い傾向を
示す。本発明は上述の問題点に鑑み発明されたものであ
ってディスク表面に多数の匂配の急峻な微小突起を存在
せしめて、磁気ヘッドとの接触を点接触とすることによ
り、前記問題を解決した薄膜型磁気ディスクを提供する
ことを目的とすも 課題を解決するための手段 上記の目的を達成するたべ 本発明(上 すくなくとも
記録部分全域にわたり円周方向にほぼ平行に延びた溝を
有する非磁性金属基板上に 前記溝を埋ム かつ表面に
多数の微小突起を有する樹脂薄膜層が形成され この樹
脂薄膜層上に磁性薄膜胤 保護層 潤滑剤層が順次設け
られていることを特徴とすa 作用 ここで、薄膜磁気ディスクにおいて、磁性薄膜の厚さは
CoP、 CoNi、 CoN1P、 CoNiCr、
 CoCr等の金属系では約500人、j4e2Q3の
ごとき酸化物系では約1000人であり、これらに下地
 表面保護層を加えても全厚さで2000人と薄いたム
 基板表面の形状がほぼそのままディスク表面形状に反
映されも 本発明の最大の特徴は  従来基板で採用さ
れているテキスチャ加工にみられるごとき平均的にゆる
やかな匂配の突起ではなく、急峻な匂配を有する微小突
起群を基板表面に配したことであも したがって、C3
S時に磁気ヘッドがディスク表面に存在する微小突起先
端と点接触するため摩擦抵抗が低減され 凝着、破壊現
象が発生せず良好なC8S特性が確保される。さらに 
ディスク表面に施される潤滑剤層は微小突起の間に保持
され表面張力の作用により微小突起先端に供給される。
Conventional technology A thin film magnetic disk using a thin metal film or a thin metal oxide film for the magnetic layer is a vacuum film formed on a substrate that has been subjected to alumite treatment, electroless N1-P plating, etc. on the surface of an aluminum alloy plate. Although a method in which a thin magnetic layer is formed using methods such as the Metsuki method has been put into practical use, the so-called contact start-stop (C3S) method is generally used, in which the magnetic head floats above the disk surface when the magnetic disk is in operation, and comes into contact with the disk surface when the magnetic disk is stopped. In this case, the surface of the disk usually has an uneven shape with grooves approximately parallel to the running direction of the magnetic head due to texturing of the substrate surface in order to withstand contact and sliding with the magnetic head when starting or stopping. A protective layer is formed on the magnetic thin film (mainly made of graphite 5i02, etc.), and a lubricant is provided on its surface. It is known that a material in which a large number of microprotrusions are formed on a plastic substrate and a magnetic thin film layer is formed thereon exhibits good practical durability (for example, JP-A-58-100221). In thin-film magnetic disks, it is possible to improve C3S durability in high recording density areas by forming a large number of fine protrusions on a substrate with good surface smoothness.However, glass substrates with good surface smoothness can be damaged during handling. Aluminum alloy plates or those with a NiP plating layer formed on their surfaces are suitable as substrates because of the danger.The surface of aluminum alloy plates has surface defects due to intermetallic compounds and segregation, and polishing It is difficult to smooth out all of these, and in N1-P plating, there are abnormal protrusions such as 1 joule, and it is difficult to smooth them sufficiently by polishing. It has become clear that almost all of the texture can be removed during texture processing.The problem that the invention aims to solve.In order to improve the recording density, it is necessary to reduce the flying distance of the magnetic head. If the surface shape is improved by reducing the height of the protrusions produced by texturing, C3S durability will be sacrificed, making it difficult to ensure practical performance. This is due to abrasion wear caused by the abrasive wear caused by the occurrence of minute scratches in the circumferential direction of the disc, and the shape of the protrusion (in the circumferential direction, it is very gentle, resembling the ridges of a mountain range). . This gentle scent changes depending on the impact force of the magnetic head.
It is easily destroyed, and when the magnetic head slides, surface contact tends to occur, and the coefficient of friction tends to be higher than in the case of point contact. The present invention was invented in view of the above-mentioned problems, and it solves the above-mentioned problems by providing a large number of steep microprotrusions on the disk surface and making point contact with the magnetic head. Means for Solving the Problems In order to achieve the above objects, the present invention (first aspect of the present invention) is to provide a thin-film magnetic disk having grooves extending substantially parallel to the circumferential direction over at least the entire recording area. A resin thin film layer is formed on the magnetic metal substrate, filling the grooves and having a large number of microprotrusions on the surface, and a magnetic thin film layer, a protective layer, and a lubricant layer are sequentially provided on the resin thin film layer. a Effect Here, in the thin film magnetic disk, the thickness of the magnetic thin film is CoP, CoNi, CoN1P, CoNiCr,
For metal-based products such as CoCr, the number is approximately 500, and for oxide-based materials such as j4e2Q3, it is approximately 1,000. Even if you add the base surface protective layer to these, the total thickness is 2,000, and the shape of the thin board surface remains almost the same. Although reflected in the disk surface shape, the greatest feature of the present invention is that the substrate is made up of micro-protrusions with a steep pattern, rather than protrusions with an averagely gentle pattern as seen in the texture processing used on conventional substrates. Therefore, C3
During S, the magnetic head makes point contact with the tips of minute protrusions on the disk surface, reducing frictional resistance, preventing adhesion and destruction, and ensuring good C8S characteristics. moreover
The lubricant layer applied to the disk surface is held between the microprotrusions and is supplied to the tips of the microprotrusions by the action of surface tension.

その給気 良好なC3S寿命が得られも また 金属基
板の上の樹脂層は金属基板上の溝に入り込んでいるため
基板との界面で剥離を生じることもなく、磁性層は樹脂
層表面の微小突起の上に設けられるためこの界面におけ
る接着強度も大きし\ これらのこともC3S耐久性改
善に役立っている。
In addition, the resin layer on the metal substrate is embedded in the grooves on the metal substrate, so there is no peeling at the interface with the substrate, and the magnetic layer has a good C3S life. Since it is installed on top of the protrusion, the adhesive strength at this interface is also high. These factors also help improve C3S durability.

実施例 図は本発明の一実施例における薄膜型磁気ディスクの表
面付近の一部をディスク半径方向に切り出したものの断
面拡大図である。
Embodiment The figure is an enlarged cross-sectional view of a part of the vicinity of the surface of a thin-film magnetic disk according to an embodiment of the present invention, cut out in the disk radial direction.

同図において、 1は非磁性金属基板、11はこの金属
基板1の本体であるアルミ合金板12はこのアルミ合金
板ll上に形成されたN1−P無電解メツキ[13はこ
のメツキ層12の表面に設けられて、基板円周方向に延
びた鳳 3はこの溝13を埋めかつ表面に多数の微小突
起4を有する樹脂薄膜層 5はこの樹脂薄膜層3上に設
けられた磁性薄膜慰51は微小突起4に対応して磁性薄
膜層5上に生じた微小突瓜 6は潤滑剤層である。
In the figure, 1 is a non-magnetic metal substrate, 11 is the main body of this metal substrate 1, and an aluminum alloy plate 12 is an N1-P electroless plating formed on this aluminum alloy plate 11 [13 is the plated layer 12]. A resin thin film layer 5 provided on the surface and extending in the circumferential direction of the substrate fills the groove 13 and has a large number of microprotrusions 4 on the surface.A magnetic thin film layer 51 provided on the resin thin film layer 3 are microscopic protrusions formed on the magnetic thin film layer 5 corresponding to the microscopic protrusions 4. 6 is a lubricant layer.

非磁性金属基板1として(よ アルミ、あるいはアルミ
合金単体 チタン、あるいは チタン合金単体あるいは
図に示すよう狐 表面にN1−Pメツキ12を施したも
α 表面に陽極酸化処理を施したもの等であって、か1
 巨視的には表面が平坦であり、微視的にはすくなくと
も記録部分全域にわたり円周方向にほぼ平行に延びた溝
13を有するものが適していも その溝の13の形状と
して1上 深さ50〜1000人、ディスク半径方向の
ピッチ100〜IO2000人が適当であム このよう
な基板表面形状(よディスク形状の素板を通常の鹿角+
l  研肖1上 研磨等により鏡面仕上げしたのちテキ
スチャ加工を施すことにより製造できも 前記基板1上
に形成されるべき、前記基板1の溝13を理数 かス 
表面に多数の微小突起4を有する樹脂薄膜層3として(
上厚さが0.05〜5μmでありかつ溝13の深さより
大きいものが適していも 表面の微小突起4はその高さ
が100〜500Å、高さ: 面方向の長さ比0.1以
上面密度lXl0’〜lXl0@個/mm2であるもの
が適しており、この樹脂薄膜層3の形成方法として(よ
たとえば 粒径50〜1000人の微粒子と樹脂結合剤
を含む塗料を造りこれを基板1上に塗布するもα樹脂を
主体とする塗料を基板1上に塗布し表面を平滑化したの
ちさらに粒径50〜1000人の微粒子と樹脂結合剤と
を含む塗料を塗布するもの等があり、これらの場合に使
用する微粒子として(よ アルミナ、シリカ、酸化チタ
ン等の無機微粒子、ポリエステ瓜 ポリアミド、ボリア
リレート、ポリスルキン、ポリフェニレンオキサイド、
ポリイミド、エポキシ、架橋スチレン、架橋アクリ/k
  架橋ベンゾグアナミン、架橋メラミン等の高分子化
合物の微粒子、カーボン微粒子、金属アルコキシド加水
分解物微粒子、等が使用できも また 種豚樹脂結合剤
として(友 ポリエチレンテレフタレート、ポリブチレ
ンテレフタレート等の飽和ポリエステル、ナイロン6、
ナイロン6a、ナイロン610゜ナイロン11、ナイロ
ン12等のポリアミド、ポリスチレン、ポリカーボネー
ト、 ボリアリレート、 ポリスルホン、ポリエーテル
スルホン、ポリアクリレート、 ポリ塩化ビニ−k  
ポリ塩化ビニリデン、ポリビニールアルコール ポリビ
ニールアルコール、 フェノキシ種豚 ポリイミド、 
ポリアミドイミド等の各種樹脂の単体 混合体 共重合
体等が使用でき、また エポキシ僧服 ウレタン樹服シ
リコン樹B  フェノール樹脂等の架橋性樹脂も使用で
きる。磁性薄膜層5としてi&  Co−Ni、Co−
Ni −Cr、 Co−Cr、 Co−N1−P、 j
−Fe20*等のスパッタ法 メツキ法等により得られ
る公知の薄膜層が使用でき、必要に応じて、Cr、 T
i、等の下地層を設けることも可能である。本発明では
下地層は時成層の一部分と見なすこととし その磁性層
の厚みとしては500〜5000人が適当であも 保護
層として(友 各種無機・有機非磁性材料から戒る厚さ
50〜500人の薄膜か使用可能でとりわけ、スパッタ
法、CVD法等で得られる各種カーボン薄膜 湿式法で
得られる5102薄膜等が適していも 潤滑剤層6とし
て(よパーフロロアルキルポリエーテルとその誘導体フ
ロロアルキル基を導入した脂肪酸・脂肪酸エステル・脂
肪酸アミド・金属石ケン・シリコーン化合1久 フッ素
系界面活性剋 等が適しており、その存在量としては表
面1m2あたり0.1〜100mgが適当である。以下
、本実施例につきさらに具体的に説明する。鏡面パフ研
磨された直径95mm厚さ1.2mmのA1合金板の表
面に厚さ30μmのNLP膜を無電解メツキ法にて形成
せしめたの板 その表面をパフ研磨して鏡面とし さら
にポリッシングベーパによるテキスチャ加工を施して基
板円周方向に延びた溝を有する基板Aを作成した 基板
Aの溝の深さ+i  100人、 ピッチは3.000
人でありt為  鏡面パフ研磨された前記A1合金板に
直接ポリッシングペーパーによるテキスチャ加工を施し
たものを別に作成しこれを基板Bとし1.  このもの
の溝の深さは450人ピッチは7.000人であっf、
  比較例のために前記NiP膜形成後パフ研磨して鏡
面仕上げしたものを基板Cとし九 上記各基板上に 濃
度1%のポリイミド溶液を塗布し乾燥焼付し厚さ1.5
00人の表面平滑な膜を形成せしめたの板 それらの上
に平均直径150人、400人の2種類のシリカコロイ
ドを別々に含む各種濃度のポリビニールアルコール水溶
液(シリカコロイド濃度範囲500〜5000ppm、
ポリビニールアルコール濃度はシリカコロイドに対し重
量比で20%)を塗布乾燥し表面に微小突起を有する樹
脂薄膜層を形成せしめた これらの各種基板試料の表面
および破断面のSEM写真から微小突起の平均高さ、高
さ: 面方向の長さの地 面密度を求め九 そのの板 
スパッタ法によりCr下地層(厚さt、soo人)Co
Ni磁性層(600人)、カーボン、保護層、(250
人)を順次形成せしめ最後にパーフロロポリエーテル系
潤滑剤を表面1ff12当り1.5+ngとなるように
塗布して試料とした そして各試料につきC3S測定を
行ないC3S耐久性を評価し九 その胤 摩擦係数が1
.0を越える時戊 また(上 ヘッドクラッシュ発生時
点のC8S回数でもってC8S寿命とし九 なh  c
ss測定は各試料3回づつ行なり九 上記の各試料の内
容と、C8S試験結果とを皮表にまとめて記し九 な抵
 試作ディスクNo、の項の0は比較例を表わす。
As the non-magnetic metal substrate 1, aluminum or aluminum alloy alone, titanium or titanium alloy alone, or as shown in the figure, N1-P plating 12 is applied to the surface, or α the surface is anodized, etc. Te, or 1
Macroscopically, the surface is flat, and microscopically, it is suitable to have grooves 13 extending substantially parallel to the circumferential direction over the entire recording area, but the shape of the grooves 13 is 1 or more and the depth is 50. ~1,000 people, and a pitch of 100 to 2,000 people in the disk radial direction is appropriate.
1. The grooves 13 of the substrate 1 to be formed on the substrate 1 can be manufactured by polishing to a mirror finish and then texture processing.
As a resin thin film layer 3 having a large number of microprotrusions 4 on its surface (
Although it is suitable that the top thickness is 0.05 to 5 μm and larger than the depth of the groove 13, the height of the microprotrusions 4 on the surface is 100 to 500 Å, and the height:length ratio in the surface direction is 0.1 or more. A material having an areal density of 1X10' to 1X10@ pieces/mm2 is suitable, and the method for forming this resin thin film layer 3 (for example, by making a paint containing fine particles with a particle size of 50 to 1000 and a resin binder and applying this to a substrate) is suitable. In some cases, a paint mainly composed of alpha resin is applied onto the substrate 1 to smooth the surface, and then a paint containing fine particles with a particle size of 50 to 1000 and a resin binder is applied. The fine particles used in these cases include inorganic fine particles such as alumina, silica, titanium oxide, polyamide, polyarylate, polysulquine, polyphenylene oxide,
Polyimide, epoxy, crosslinked styrene, crosslinked acrylic/k
Fine particles of polymer compounds such as cross-linked benzoguanamine and cross-linked melamine, fine carbon particles, and fine particles of metal alkoxide hydrolyzate can also be used.Also, as a binder for breeding pig resin, saturated polyesters such as polyethylene terephthalate and polybutylene terephthalate, nylon 6 ,
Polyamides such as nylon 6a, nylon 610°, nylon 11, nylon 12, polystyrene, polycarbonate, polyarylate, polysulfone, polyethersulfone, polyacrylate, polyvinyl chloride-k
Polyvinylidene chloride, polyvinyl alcohol, polyvinyl alcohol, phenoxy breeding pigs, polyimide,
Single substances, mixtures, copolymers, etc. of various resins such as polyamide-imide can be used, and crosslinkable resins such as epoxy resin, urethane resin, silicone resin, and phenolic resin can also be used. As the magnetic thin film layer 5, i&Co-Ni, Co-
Ni-Cr, Co-Cr, Co-N1-P, j
- A known thin film layer obtained by sputtering method, plating method, etc. of Fe20* etc. can be used, and if necessary, Cr, T
It is also possible to provide a base layer such as i. In the present invention, the underlayer is considered to be a part of the magnetic layer, and the appropriate thickness of the magnetic layer is 500 to 5000.As for the protective layer (Friend), the thickness of 50 to 5000 is recommended from various inorganic and organic non-magnetic materials. Human thin films can be used, especially various carbon thin films obtained by sputtering, CVD, etc. 5102 thin films obtained by wet methods are suitable as the lubricant layer 6 (perfluoroalkyl polyether and its derivative fluoroalkyl) Suitable are fatty acids, fatty acid esters, fatty acid amides, metal soaps, silicone compounds, fluorine-based surfactants, etc. into which groups have been introduced, and the appropriate amount is 0.1 to 100 mg per 1 m2 of surface. This example will be explained in more detail.A plate in which a 30 μm thick NLP film was formed by electroless plating on the surface of a mirror-puff polished A1 alloy plate with a diameter of 95 mm and a thickness of 1.2 mm. The surface was puff-polished to a mirror surface, and then textured with polishing vapor to create a substrate A having grooves extending in the circumferential direction of the substrate.Depth of grooves on substrate A +i 100 people, pitch 3.000
Because I am a human being, I created a separate A1 alloy plate that had been mirror-puff polished and directly textured with polishing paper, and used this as substrate B. 1. The depth of this groove is 450 people and the pitch is 7,000 people.
For a comparative example, the NiP film was formed and then puff-polished to a mirror finish.Substrate C was used.A polyimide solution with a concentration of 1% was applied onto each of the above substrates, and dried and baked to a thickness of 1.5 cm.
A polyvinyl alcohol aqueous solution of various concentrations (silica colloid concentration range 500-5000 ppm, silica colloid concentration range 500-5000 ppm,
Polyvinyl alcohol (concentration: 20% by weight relative to silica colloid) was applied and dried to form a resin thin film layer with microprojections on the surface.The average number of microprojections was determined from SEM photographs of the surfaces and fractured surfaces of these various substrate samples. Height, height: Find the ground density of the length in the plane direction (9) That board
Cr underlayer (thickness t, so thick) Co by sputtering method
Ni magnetic layer (600), carbon, protective layer, (250
Finally, a perfluoropolyether lubricant was applied to the surface at a concentration of 1.5+ng per 1ff12 to prepare a sample.Then, each sample was subjected to C3S measurement to evaluate C3S durability. coefficient is 1
.. When the time exceeds 0, the C8S life is determined by the number of C8S at the time of head crash.
The ss measurement was performed three times for each sample.9 The contents of each sample above and the C8S test results are summarized on the surface of the disc.

以下余九 表より、本発明品においてはC3S耐久は少なくともa
o、 ooo回以上と良好であるのに対し比較例の基板
Cを使用したものは3回の試験における値のばらつきも
大きく3回中2回は30.000回に満たない。まな 
この表には記載がない力交 従来方式すなわ%  Ni
Pメツキ層表面にテキスチャ加工(溝の深さ100人溝
のピッチ5.000人)を施した基板上に直接前記実施
例に準じた磁性層 、保護層、 潤滑剤層を順次形成せ
しめた試作ディスクのC3S結果(よ 平均22.00
0回クラッシュと悪かっ起発明の効果 本発明によれば 従来のテキスチャ形状に代えて微小突
起を採用し併せてテキスチャ加工を異常突起除去と中間
樹脂層と基板との接着性改善に利用することにより表面
粗さの小さい高記録密度が可能な領域において実用に耐
えるC3S耐久性を確保することができるた吹 本発明
は工業的に価値の高いものであも
From Table 9 below, it can be seen that the C3S durability of the product of the present invention is at least a
o, ooo times or more, which is good, but in the case of the comparative example using substrate C, there was a large variation in the values in the three tests, with two out of three tests being less than 30,000 times. Mana
Force exchange not listed in this table Conventional method % Ni
A prototype in which a magnetic layer, a protective layer, and a lubricant layer according to the above embodiment were directly formed in sequence on a substrate whose surface was textured (groove depth: 100, groove pitch: 5,000). Disk C3S result (average 22.00
0 crashes and bad results Effects of the invention According to the present invention, micro protrusions are used instead of conventional texture shapes, and texture processing is used to remove abnormal protrusions and improve adhesion between the intermediate resin layer and the substrate. The present invention is capable of ensuring practical C3S durability in areas where high recording density is possible with low surface roughness.

【図面の簡単な説明】[Brief explanation of drawings]

図は本発明の一実施例における薄膜型磁気ディスクの部
分拡大断面図である。 1・・・・非磁性金属基板、 3・・・・樹脂薄膜胤 
4・・・・微小突起 5・・・・磁性薄膜凰 6・・・
・潤滑剤層 13・・・・昆
The figure is a partially enlarged cross-sectional view of a thin-film magnetic disk according to an embodiment of the present invention. 1...Nonmagnetic metal substrate, 3...Resin thin film seed
4...Minute protrusions 5...Magnetic thin film 6...
・Lubricant layer 13...kun

Claims (1)

【特許請求の範囲】[Claims] すくなくとも記録部分全域にわたり円周方向にほぼ平行
に延びた溝を有する非磁性金属基板上に、前記溝を埋め
、かつ、表面に多数の微小突起を有する樹脂薄膜層が形
成され、この樹脂薄膜層上に磁性薄膜層、保護層、潤滑
剤層が順次設けられていることを特徴とする薄膜型磁気
ディスク。
A thin resin film layer is formed on a non-magnetic metal substrate having grooves extending substantially parallel to the circumferential direction over at least the entire recording area, the resin thin film layer filling the grooves and having a large number of microprotrusions on the surface. A thin-film magnetic disk characterized in that a magnetic thin film layer, a protective layer, and a lubricant layer are sequentially provided on top of the disk.
JP18113989A 1989-07-12 1989-07-12 Thin film type magnetic head Pending JPH0344817A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18113989A JPH0344817A (en) 1989-07-12 1989-07-12 Thin film type magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18113989A JPH0344817A (en) 1989-07-12 1989-07-12 Thin film type magnetic head

Publications (1)

Publication Number Publication Date
JPH0344817A true JPH0344817A (en) 1991-02-26

Family

ID=16095571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18113989A Pending JPH0344817A (en) 1989-07-12 1989-07-12 Thin film type magnetic head

Country Status (1)

Country Link
JP (1) JPH0344817A (en)

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