JPH08221733A - Magnetic disk medium - Google Patents

Magnetic disk medium

Info

Publication number
JPH08221733A
JPH08221733A JP2911095A JP2911095A JPH08221733A JP H08221733 A JPH08221733 A JP H08221733A JP 2911095 A JP2911095 A JP 2911095A JP 2911095 A JP2911095 A JP 2911095A JP H08221733 A JPH08221733 A JP H08221733A
Authority
JP
Japan
Prior art keywords
magnetic
disk
film
layer
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2911095A
Other languages
Japanese (ja)
Inventor
Toshinori Kazama
利紀 風間
Mitsuhiko Oguchi
光彦 小口
Kazuhisa Murakami
和久 村上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2911095A priority Critical patent/JPH08221733A/en
Publication of JPH08221733A publication Critical patent/JPH08221733A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To relieve the attraction of a magnetic head to a magnetic disk medium and to reduce frictional force due to contact by forming a 2nd base film contg. dispersed nonmagnetic particles whose particle size is almost equal to the spacing of the magnetic head in the surface direction on a 1st base film on a nonmagnetic substrate. CONSTITUTION: A Cr layer 7 is formed as a 1st base film on a soda lime glass substrate 6 as a nonmagnetic substrate and a 2nd base film 8 for forming ruggedness is formed on the Cr layer 7. The base film 8 contains nonmagnetic particles 9 blown to and dispersed in the surface and has a desired film thickness. A Cr layer is further formed as a middle layer 10 under a magnetic layer 11 and a magnetic film of a Co-Cr-Ta alloy is formed as the magnetic layer 11. A protective layer 12 of carbon is then formed as the top layer of a disk. The surface of the protective layer 12 has fine ruggedness formed by the 2nd under film 8.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は磁気デイスク装置に搭載
される磁気デイスク媒体に関し、特に磁気ヘッドとの接
触に対し、吸着特性及び耐摩耗性が良好な磁気デイスク
媒体の膜構造に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk medium mounted in a magnetic disk device, and more particularly to a film structure of a magnetic disk medium having good adsorption characteristics and wear resistance against contact with a magnetic head.

【0002】[0002]

【従来の技術】磁気デイスク媒体(以下、デイスクと略
す。)が搭載される磁気デイスク装置はその回転制御機
構と記録再生磁気ヘッド・スライダ−(以下、単にヘッ
ドと略す。)、ヘッドの位置決め機構、記録再生処理機
構を主たる構成としている。その稼動は一般的にコンタ
クト・スタ−ト・ストップ方式(以下、CSSと略
す。)と呼ばれるヘッドロ−デイング法が用いられてい
る。デイスクは回転停止時に、対向するヘッドの支持機
構である軽加重のジンバル・スプリングの力で押し付け
られて接触している。一方、記録再生時には、デイスク
の回転によって表面付近に発生する空気粘性流より、ヘ
ッドはデイスクから離れ浮上し、この状態にて記録再生
を行う。
2. Description of the Related Art A magnetic disk device equipped with a magnetic disk medium (hereinafter abbreviated as a disk) has a rotation control mechanism, a recording / reproducing magnetic head slider (hereinafter simply referred to as a head), and a head positioning mechanism. The recording / playback processing mechanism is the main configuration. For its operation, a head loading method generally called a contact start stop method (hereinafter abbreviated as CSS) is used. When the rotation of the disk is stopped, the disk is pressed and brought into contact by the force of a lightly weighted gimbal spring that is a supporting mechanism of the head that faces the disk. On the other hand, at the time of recording / reproducing, the head floats away from the disk due to the viscous air flow generated near the surface due to the rotation of the disk, and recording / reproducing is performed in this state.

【0003】このようにCSS方式では、デイスクは起
動・停止時にヘッドと接触し、互いに表面を摺動する。
この接触・摺動においてヘッドとデイスクは十分に耐え
られる関係でなければならない。
As described above, in the CSS system, the disks come into contact with the heads at the time of starting / stopping and slide on the surface of each other.
The head and disk must be in a relationship that can withstand this contact and sliding.

【0004】又、ディスク装置内の空気中に存在する水
分子の介在により、デイスク回転停止時にヘッドとデイ
スク間が吸着し、装置起動時のヘッド浮上に大きな摩擦
力が発生する場合がある。この結果、ジンバル破壊、ヘ
ッドの不安定浮上により、ヘッド及びデイスクを接触摩
耗させ、記録再生特性の劣化を引き起こす恐れがあっ
た。
Further, due to the presence of water molecules existing in the air in the disk device, the head and the disk may be attracted to each other when the disk rotation is stopped, and a large frictional force may be generated when the head is floated when the device is started. As a result, there is a possibility that the head and the disk may contact and wear due to the gimbal destruction and the unstable flying of the head, which may deteriorate the recording and reproducing characteristics.

【0005】一方、近年のコンピュ−タ−・システムに
おける磁気記録装置の記憶容量は年々その大きさを増
し、デイスクの単位面積あたりの記録密度の増大に関連
して、記録再生時のデイスク最表面とヘッドの記録再生
素子部との間隙、すなわちヘッド・スペ−シング(以
下、浮上量と略す)は、より小さくすることが要求され
ている。しかし、この低浮上化の要求はデイスクとヘッ
ドの両者が、直接的、あるいは塵埃が介在した場合は間
接的に接触しあう可能性があり、摩擦力の増加を招き、
互いを損傷させるという問題もある。従来からデイスク
用の基板としてはアルミニウム合金の基板が広く採用さ
れている。しかし、上述した高密度化の要求に伴い、近
年ではガラス基板を採用したデイスクを搭載した磁気デ
イスク装置も多く報告され、実用化されている。その理
由として、ガラス基板はアルミニウム基板と比較して表
面の突起がなく、超平滑性に優れ、硬く表面欠陥が少な
いためである。
On the other hand, the storage capacity of a magnetic recording device in a computer system in recent years has been increasing year by year, and in connection with the increase in recording density per unit area of the disk, the outermost surface of the disk at the time of recording and reproducing. The gap between the head and the recording / reproducing element portion of the head, that is, the head spacing (hereinafter abbreviated as the flying height) is required to be smaller. However, this requirement for low flying height may cause both the disk and the head to come into direct contact with each other, or indirectly when dust is present, resulting in an increase in frictional force.
There is also the problem of damaging each other. Conventionally, aluminum alloy substrates have been widely used as substrates for disks. However, in response to the above-mentioned demand for higher density, many magnetic disk devices equipped with a disk using a glass substrate have been reported and put into practical use in recent years. The reason is that the glass substrate has no surface protrusion, is excellent in ultra-smoothness, is hard, and has few surface defects as compared with the aluminum substrate.

【0006】しかし、その反面、平滑性に優れているた
めにヘッドとデイスクの接触面積が大きく、吸着しやす
く、摩擦力の増大を招く。その結果、前述のCSS特性
を含む耐摩耗性が低下するという課題がある。上記の課
題の解決方法としてデイスク最表面を凹凸形状にせし
め、ヘッドとデイスクの接触面積を低減させる公知例が
多く報告されている。デイスクの保護膜上に凹凸を形成
した例として、特開平4−137216号公報には、ケ
ミカルエッチング(化学的腐食)を用いる方法が開示さ
れている。高密度磁気デイスク媒体では保護膜層下面の
磁気記録層とヘッドの記録再生素子部との距離はできる
限り短くすることが必要であるがこれに伴い保護膜の膜
厚は出来るだけ薄いことが望ましい。保護膜上にnmオ
−ダ−の凹凸をばらつき無く安定して形成する技術に
は、初期の膜厚を数十nm程度確保した上で凸部をエッ
チング等により形成させる必要があるため凸部のみ初期
の厚い膜厚が残存する。このため、ヘッドがデイスクか
ら浮上する稼動時(記録再生時)にはヘッドとデイスク
の凸部が常時接触しあい摩耗を発生させるため耐久性が
低下する恐れがある。又、特開平5−20659号公報
では保護層にクラスタ−を点在させデイスク最表面に凹
凸を形成させることが開示されている。しかし、この場
合は異物である非磁性金属または酸化物、窒化物のクラ
スタ−が磁性層上にあるためデイスクの電磁気特性(再
生ノイズの増大、S/N比の低下)の観点からは望まし
く無い。又、デイスク表面に凹凸を形成する磁気デイス
ク媒体はいかなる手法であっても、搭載される磁気デイ
スク装置から要求される浮上量を配慮して提供されなけ
ればならず、この点について論じている公知例はない。
On the other hand, on the other hand, since the smoothness is excellent, the contact area between the head and the disk is large, and it is easy to adsorb, which causes an increase in frictional force. As a result, there is a problem in that the wear resistance including the CSS characteristics described above decreases. As a method for solving the above-mentioned problems, many publicly known examples in which the outermost surface of the disk is made uneven to reduce the contact area between the head and the disk have been reported. As an example of forming irregularities on the protective film of the disk, Japanese Patent Laid-Open No. 4-137216 discloses a method using chemical etching (chemical corrosion). In a high-density magnetic disk medium, it is necessary to make the distance between the magnetic recording layer on the lower surface of the protective film layer and the read / write element portion of the head as short as possible, but it is desirable that the film thickness of the protective film be as thin as possible. . In the technique for stably forming irregularities of nm order on the protective film without variation, it is necessary to secure the initial film thickness of several tens of nm and then to form the convex portion by etching or the like. Only the initial thick film remains. For this reason, during operation in which the head floats above the disk (during recording / reproduction), the head and the convex portion of the disk are constantly in contact with each other and wear occurs, which may reduce durability. Further, Japanese Patent Laid-Open No. 5-20659 discloses that clusters are scattered on the protective layer to form irregularities on the outermost surface of the disk. However, in this case, it is not desirable from the viewpoint of the electromagnetic characteristics of the disk (increase in reproduction noise, decrease in S / N ratio) because clusters of non-magnetic metal or oxide or nitride, which are foreign matter, are present on the magnetic layer. . In addition, the magnetic disk medium for forming irregularities on the disk surface must be provided in consideration of the flying height required by the mounted magnetic disk device by any method. There is no example.

【0007】[0007]

【発明が解決しようとする課題】以上、述べた様に、ヘ
ッドとデイスク磁性層間の狭小化に対応して、電磁気特
性を損ねること無くすために、ヘッドの浮上量とディス
ク表面状態との物理的な関係を考慮しなければ、ヘッド
との摩擦力、とりわけ、デイスクとの吸着力を低減させ
る特性を有する磁気デイスク媒体と磁気ヘッドスライダ
との優れた動作環境を得ることはできない。
As described above, in order to cope with the narrowing of the head and the disk magnetic layer and to prevent the electromagnetic characteristics from being impaired, the physical quantity of the flying height of the head and the disk surface state is If such a relationship is not taken into consideration, an excellent operating environment between the magnetic disk medium and the magnetic head slider, which has a characteristic of reducing the frictional force with the head, especially the attraction force with the disk, cannot be obtained.

【0008】本発明は、かかる問題を解決するために為
されたものであって、優れた耐久性、及び摺動性を有す
る磁気ディスク媒体を提供することを目的とする。
The present invention has been made to solve the above problems, and an object of the present invention is to provide a magnetic disk medium having excellent durability and slidability.

【0009】[0009]

【課題を解決するための手段】前記課題を解決するため
に本発明は、磁性膜上では無く、第1下地膜上に非磁性
粒子が分散される第2下地層を形成し、表面を凹凸せし
め、中間膜及び磁性膜、保護膜を、順次、積層し、最表
面まで凹凸が反映される磁気デイスク媒体構造にする。
又、第2下地膜に分散される非磁性粒子の粒径サイズは
搭載される磁気デイスク装置における磁気ヘッドスライ
ダの浮上量によって異なり、その値は、浮上量と同等で
ある。更に、その第2下地層の膜厚は非磁性粒子サイズ
の0.8倍〜1.0倍とする。
In order to solve the above-mentioned problems, the present invention forms a second underlayer in which non-magnetic particles are dispersed, not on the magnetic film, but on the first underlayer, and the surface is made uneven. The intermediate film, the magnetic film, and the protective film are sequentially laminated to form a magnetic disk medium structure in which unevenness is reflected up to the outermost surface.
Further, the particle size of the non-magnetic particles dispersed in the second underlayer varies depending on the flying height of the magnetic head slider in the mounted magnetic disk device, and the value is equivalent to the flying height. Further, the thickness of the second underlayer is 0.8 to 1.0 times the size of the non-magnetic particles.

【0010】[0010]

【作用】本発明に関わる磁気デイスク媒体においては、
化学強化されたソ−ダライムガラスやアルミノシリケ−
トガラス上に第一下地膜膜にはクロム層を設け、表面に
デイスク面内の表面に非磁性粒子を分散させた層を第二
下地膜として形成する。この非磁性粒子はディスク表面
を適宜に凹凸せしめ、この凹凸は、中間膜であるクロム
層及び磁性層、さらにデイスク最上層である保護膜表面
にまで反映される。 本発明によれば第一の作用として
この凹凸形状により、非記録再生時に対向するヘッド浮
上面との接触面積が下げられるため、吸着力を低減する
ことができる。 又、第2の作用として磁性層の下地層
に凹凸形成手段を図ることにより、電磁気特性を損なわ
ず、且つ保護膜層を薄膜化できる。磁性層に粒子を分散
させると磁気的空間となりノイズの原因となる。ヘッド
の記録再生素子部とデイスク最表面の距離を縮めるこ
と、つまり低浮上化が可能となり、高密度が達成でき
る。
In the magnetic disk medium according to the present invention,
Chemically strengthened soda lime glass and alumino silicate
A chrome layer is provided on the first underlayer film on the glass, and a layer in which nonmagnetic particles are dispersed on the surface of the disk is formed as the second underlayer film on the surface. The non-magnetic particles appropriately make the disk surface uneven, and the unevenness is reflected even on the chromium layer and the magnetic layer as the intermediate film, and further on the surface of the protective film as the uppermost layer of the disk. According to the present invention, as the first effect, the uneven shape reduces the contact area with the air bearing surface of the head which is opposed during non-recording / reproducing, so that the attraction force can be reduced. Further, as the second effect, by providing the unevenness forming means on the underlayer of the magnetic layer, the protective film layer can be thinned without impairing the electromagnetic characteristics. Dispersing the particles in the magnetic layer creates a magnetic space and causes noise. It is possible to shorten the distance between the recording / reproducing element portion of the head and the outermost surface of the disk, that is, to reduce the flying height and achieve high density.

【0011】[0011]

【実施例】以下、実施例の全体を図1から図4を用いて
説明する。図2は磁気デイスク装置内における一般的な
非記録再生時のヘッド/デイスク断面模式拡大図であ
る。非記録再生時には、デイスク1は対向するヘッド2
の軽加重スプリング3の力で押しつけられ常時接触しあ
っている状態、即ちコンタクト・ストップ状態を示して
いる。この状態ではヘッド及びデイスク双方の表面平滑
性が優れているため潤滑剤4を介してデイスクとヘッド
の間は吸着現象が発生しやすく、更に、大気中の水分子
(H2O)5との化学結合によって、より吸着力は強固
となり、記録再生時のヘッド浮上時には大きな摩擦力が
発生する。このため本発明ではデイスク側最表面の保護
層に微小凹凸を形成し、ヘッドとデイスクの接触面積を
小さくし、吸着力を低減している。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The entire embodiment will be described below with reference to FIGS. FIG. 2 is a schematic enlarged view of a head / disk cross section at the time of general non-recording / reproduction in the magnetic disk device. At the time of non-recording and reproduction, the disk 1 faces the head 2 facing
2 shows a state in which they are pressed by the force of the light weighted spring 3 and are in constant contact with each other, that is, a contact stop state. In this state, since the surface smoothness of both the head and the disk is excellent, an adsorption phenomenon is likely to occur between the disk and the head through the lubricant 4, and further, the water molecules (H 2 O) 5 in the atmosphere may be absorbed. The chemical bond further strengthens the adsorption force, and a large frictional force is generated when the head floats during recording and reproduction. For this reason, in the present invention, minute irregularities are formed in the protective layer on the outermost surface on the disk side, the contact area between the head and the disk is reduced, and the suction force is reduced.

【0012】図1は本発明による磁気デイスク媒体の実
施例の断面摸式図である。非磁性下地基板としてはソ−
ダライムあるいはアルミノシリケ−トガラス等でRa
(中心平均面粗さ)が1nm以下であり、化学強化され
た外径Φ65mm、板厚0.64mmの超音波洗浄、脱
脂等の工程を経たソ−ダライムガラス基板6を用いた。
更に第一下地膜7として厚さ500nmのクロム層をス
パッタリングにて形成している。このクロム層は前述の
ガラス基板の搬送や洗浄工程において付着する表面上の
水分子の影響をプロテクトする作用を有する。また、磁
気デイスク装置を誤って落下させた場合、磁気デイスク
装置には200G〜300Gの衝撃力が発生する。しか
し、このクロム層は密着性がよい上、靭性な性質を有し
ているためデイスクに加わる衝撃力を緩和させ、打痕等
の損傷を防止し、記録再生デ−タ保護する作用をも有す
る。
FIG. 1 is a schematic sectional view of an embodiment of a magnetic disk medium according to the present invention. As a non-magnetic base substrate,
Ra with dhalime or aluminosilicate glass
A soda lime glass substrate 6 having a (center average surface roughness) of 1 nm or less, a chemically strengthened outer diameter Φ65 mm, and a plate thickness of 0.64 mm, which has been subjected to ultrasonic cleaning, degreasing, and the like, was used.
Further, a chromium layer having a thickness of 500 nm is formed as the first base film 7 by sputtering. This chromium layer has a function of protecting the influence of water molecules on the surface attached in the above-mentioned glass substrate transportation and cleaning steps. When the magnetic disk device is accidentally dropped, an impact force of 200G to 300G is generated in the magnetic disk device. However, since this chromium layer has good adhesion and toughness, it also has the effect of relaxing the impact force applied to the disk, preventing damage such as dents, and protecting the recording / reproducing data. .

【0013】次にその層上にデイスク表面に凹凸を形成
させるための第2下地膜8を形成する。この第2下地膜
は一般的なスパッタリング装置に非磁性粒子9を吹き付
けながら面内に不連続に分散させ嘱望のスパッタ膜厚に
形成したものである。また非磁性粒子の大きさはデイス
ク装置から要求されるヘッド及びデイスクの間隙即ち、
浮上量を考慮したサイズでなければならない。例えば本
実施例では浮上量が50nmのデイスク装置に搭載され
るデイスクを想定し、粒子サイズは、最大で50nm
(平均では40nm)以下とした。また、膜厚はその
0.8倍=40nmとしている。なぜなら粒子サイズが
浮上スペ−シングの値を超えると記録再生時ヘッドとデ
イスク最表面の凸部との接触頻度が高くなり両者の摩耗
を発生させるためである。更に、膜厚は後述する図3、
図4に示すように装置稼動後の吸着力を測定した結果、
粒子サイズの0.8〜1.0倍が望ましいという結論に
至った。非磁性粒子はシリカ(SiO2)、スパッタタ
−ゲット板はSiO2である。
Next, a second base film 8 for forming irregularities on the disk surface is formed on the layer. This second undercoat film is formed by spraying non-magnetic particles 9 in a general sputtering device while discontinuously dispersing the non-magnetic particles 9 in a desired sputtering film thickness. The size of the non-magnetic particles depends on the gap between the head and the disk required by the disk device, that is,
It must be a size that takes into account the flying height. For example, in this embodiment, a disk mounted on a disk device having a flying height of 50 nm is assumed, and the maximum particle size is 50 nm.
(40 nm on average) The film thickness is 0.8 times that of 40 nm. This is because if the particle size exceeds the floating spacing value, the frequency of contact between the head and the convex portion on the outermost surface of the disk at the time of recording / reproducing becomes high, causing wear of both. Further, the film thickness is shown in FIG.
As shown in FIG. 4, the result of measuring the adsorption force after the operation of the device,
We have come to the conclusion that 0.8-1.0 times the particle size is desirable. The non-magnetic particles are silica (SiO 2 ), and the sputter target plate is SiO 2 .

【0014】次に磁性層下の中間膜10として更に、ク
ロム層を膜厚200nmにて形成した。このクロム層は
前述の第一下地膜と同様に衝撃力を緩和すると共に、磁
気特性(高保持力及び角形比等)を改善させる為のもの
である。磁性層11はコバルト−クロム−タンタル合金
磁性膜を厚み50nmで形成している。デイスクの最上
部の保護層12は耐久性の観点からカ−ボンとした。こ
の理由としてデイスク及びヘッドの接触発熱に対しカ−
ボンは燃えやすく摩耗粉をデイスクやヘッドに移着発生
させにくい点にあり、且つ、高密度用磁気ヘッド材の主
流であるAl23−TiC及びCaTiO3スライダと
の組合わせにおける耐久性に優れている為である。本実
施例では、保護膜にカーボンを用いたが、同様の性能を
得られればカーボンに限定されることは無い。保護膜に
塗布される潤滑膜13はフロロカ−ボン系の液体潤滑剤
を約7nm塗布している。
Next, a chromium layer having a film thickness of 200 nm was further formed as the intermediate film 10 under the magnetic layer. This chromium layer is for reducing the impact force as well as for improving the magnetic characteristics (high coercive force, squareness ratio, etc.) as in the case of the above-mentioned first underlayer. The magnetic layer 11 is a cobalt-chromium-tantalum alloy magnetic film having a thickness of 50 nm. The uppermost protective layer 12 of the disk was made of carbon from the viewpoint of durability. The reason for this is that the heat generated by contacting the disk and head is
Bonn is liable to burn and is less likely to cause abrasion powder to be transferred to a disk or a head, and has durability in combination with Al 2 O 3 —TiC and CaTiO 3 sliders, which are the mainstream of high density magnetic head materials. Because it is excellent. In this embodiment, carbon is used for the protective film, but it is not limited to carbon as long as similar performance can be obtained. As the lubricating film 13 applied to the protective film, a fluorocarbon-based liquid lubricant is applied to a thickness of about 7 nm.

【0015】この様に順次、積層形成されたデイスクの
保護膜表面には前述の第2下地膜により、微小凹凸14
が反映される。図3はこの凹凸の効果例を示す図であ
る。本図は単品では無く実際に磁気デイスク装置に搭載
し、一定時間稼動させた後、装置を停止させ24時間放
置したサイクルを繰り返した。尚、搭載したデイスクは
前述した第2下地膜における非磁性粒子サイズと膜厚の
関係を変化させその効果を検証したものである。吸着力
はヘッドの駆動系であるVCM(ボイス・コイル・モ−
タ)15に電流をゆっくり流し、ヘッドが半径方向に動
きだす電流値を換算し吸着力を測定した。デイスクは膜
厚を40nm一定とし、非磁性粒子の最大粒径サイズを
サンプルA:30nm、B:40nm、C:50nm、
D:60nmと変化させた4種である。尚、ヘッドのス
ペ−シングは50nmである。吸着力の低減効果は粒子
サイズが大きくなるほど効果が大きいが逆に図4に示す
ようにサンプルDの60nm粒子サイズではヘッド汚れ
が大きくなる。これはデイスク表面の凸部が突出しすぎ
ており、50nmのヘッドスペ−シングでは接触頻度が
高くなる。その結果、カ−ボン摩耗粉が燃えきらず、ヘ
ッドに移着するためと考えられる。このヘッド汚れは、
記録再生時、磁気ヘッドの浮上量を著しく低下させ、デ
イスク及びヘッド摩耗を増大させる。その結果、デイス
クのデ−タ破壊を起こす致命的な問題となる。以上、検
討を繰り返した結果、前述の吸着力とヘッド汚れの低減
を双方満足させるためには、非磁性粒子の最大粒径サイ
ズは浮上量と同等とし、その膜厚は0.8倍〜1.0倍
が望ましいという知見を得た。更にこの知見を検証する
ため次に、浮上量60nm、膜厚を0.8倍の48n
m、最大非磁性粒子サイズをサンプルB:40nm、
C:50nm、D:60nm、E:70nmのデイスク
を作製し検討を行った。デイスク装置の稼働時間は10
00hrであり、吸着力の測定方法は前回と同様であ
る。表1は本発明における検討結果の一例である。
In this way, the surface of the protective film of the disk thus laminated is successively covered with the above-mentioned second undercoat film to form the minute irregularities 14.
Is reflected. FIG. 3 is a diagram showing an example of the effect of this unevenness. This figure is not a single product, but is actually mounted on a magnetic disk device, and after operating for a certain period of time, the device was stopped and left for 24 hours. The cycle was repeated. Incidentally, the mounted disk is the one in which the relationship between the non-magnetic particle size and the film thickness in the above-mentioned second underlayer film is changed and its effect is verified. The attraction force is VCM (voice coil mode) which is the drive system of the head.
(15) A current was slowly passed through the device 15 and the current value at which the head started to move in the radial direction was converted to measure the adsorption force. The disk has a constant film thickness of 40 nm, and the maximum particle size of non-magnetic particles is sample A: 30 nm, B: 40 nm, C: 50 nm,
D: 4 types that were changed to 60 nm. The spacing of the head is 50 nm. The larger the particle size, the greater the effect of reducing the adsorptive power, but conversely, as shown in FIG. 4, the head dirt becomes larger with the 60 nm particle size of sample D. This is because the protrusions on the surface of the disk project too much, and the frequency of contact increases with head spacing of 50 nm. As a result, it is considered that the carbon abrasion powder does not burn out and is transferred to the head. This head dirt is
During recording / reproduction, the flying height of the magnetic head is remarkably reduced, and disk and head wear are increased. As a result, it becomes a fatal problem that destroys the data on the disk. As a result of repeating the above-mentioned examination, in order to satisfy both the above-mentioned attraction force and reduction of head dirt, the maximum particle size of the non-magnetic particles is made equal to the flying height, and the film thickness thereof is 0.8 times to 1 times. We have found that 0.0 times is desirable. In order to further verify this finding, next, the flying height is 60 nm and the film thickness is 0.8 times 48 n.
m, maximum non-magnetic particle size is sample B: 40 nm,
Discs of C: 50 nm, D: 60 nm and E: 70 nm were prepared and studied. The operating time of the disk device is 10
It is 00 hr, and the method of measuring the suction force is the same as the previous time. Table 1 is an example of the examination results in the present invention.

【0016】[0016]

【表1】 [Table 1]

【0017】吸着力とヘッド汚れは装置稼働前の値を1
とし、規格化した数値である。ヘッド汚れの増加と吸着
力の関係においてその低減効果は相反し、前回と同様非
磁性粒子の最大サイズは浮上量と同等であり、且つその
膜厚は0.8倍のデイスクが最も良好であるという結論
を得ている。
The suction force and head contamination are 1 before the operation of the device.
And is a standardized numerical value. In the relationship between the increase in head dirt and the attraction force, the reduction effect is contradictory, the maximum size of non-magnetic particles is the same as the flying height, and the disk with 0.8 times the film thickness is the best as in the previous case. I have come to the conclusion.

【0018】[0018]

【発明の効果】本発明の層構造を有した磁気デイスク媒
体を用いると非記録再生時に磁気ヘッドとの吸着力が低
減する。又、記録再生時、ヘッドとの接触頻度を下げら
れる為、ヘッド汚れを抑止する効果がある。更に、ヘッ
ドとの間隙を詰めることができ、高再生出力が可能な低
浮上用高密度磁気デイスク媒体が得られる。
When the magnetic disk medium having the layer structure of the present invention is used, the attraction force with the magnetic head is reduced during non-recording / reproduction. Moreover, since the frequency of contact with the head can be reduced during recording and reproduction, there is an effect of suppressing head contamination. Further, the gap between the head and the head can be narrowed, and a low-flying high-density magnetic disk medium capable of high reproduction output can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の磁気デイスク媒体の一実施例の断面模
式図である。
FIG. 1 is a schematic sectional view of an embodiment of a magnetic disk medium of the present invention.

【図2】非記録再生時における従来の磁気デイスク媒体
の断面模式図である。
FIG. 2 is a schematic sectional view of a conventional magnetic disk medium at the time of non-recording / reproduction.

【図3】装置稼働時間と吸着力の関係グラフ図である。FIG. 3 is a graph showing the relationship between device operating time and suction force.

【図4】装置稼働時間とヘッド汚れの関係グラフ図であ
る。
FIG. 4 is a graph showing the relationship between apparatus operating time and head contamination.

【符号の説明】[Explanation of symbols]

1 磁気デイスク媒体 2 磁気ヘッド 3 軽荷重スプリング 4 潤滑剤(潤滑膜) 5 水分子 6 ソ−ダライムガラス基板 7 第1下地膜 8 第2下地膜 9 非磁性粒子 10 中間膜 11 磁性層(磁性膜) 12 保護層(保護膜) 13 潤滑膜 14 微小凹凸 15 VCM(ボイス・コイル・モ−タ) 1 magnetic disk medium 2 magnetic head 3 light load spring 4 lubricant (lubrication film) 5 water molecules 6 soda lime glass substrate 7 first underlayer film 8 second underlayer film 9 non-magnetic particles 10 intermediate film 11 magnetic layer (magnetic Film) 12 Protective layer (protective film) 13 Lubricating film 14 Micro unevenness 15 VCM (voice coil motor)

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】非磁性基板上に順次、下地膜、中間膜、磁
性膜、保護膜からなる磁気デイスク媒体において、前下
地膜上に面内方向に磁気ヘッド浮上スペ−シングと同等
な粒子サイズを有する非磁性微粒子を分散させ、不連続
な微少突起膜を第2下地膜として形成した磁気デイスク
媒体。
1. A magnetic disk medium comprising a base film, an intermediate film, a magnetic film, and a protective film, which are sequentially formed on a non-magnetic substrate, and has a particle size equivalent to that of magnetic head levitation spacing in the in-plane direction on the front base film. A magnetic disk medium in which non-magnetic fine particles having the above are dispersed and a discontinuous minute projection film is formed as a second base film.
【請求項2】前記第2下地膜の膜厚は、非磁性粒子サイ
ズの0.8〜1.0倍とした請求項第1項に記載の磁気デイス
ク媒体。
2. The magnetic disk medium according to claim 1, wherein the thickness of the second underlayer film is 0.8 to 1.0 times the size of the non-magnetic particles.
【請求項3】第1下地膜及び中間膜はクロム層で構成さ
れた請求項第1項に記載の磁気デイスク媒体。
3. The magnetic disk medium according to claim 1, wherein the first underlayer and the intermediate layer are chromium layers.
JP2911095A 1995-02-17 1995-02-17 Magnetic disk medium Pending JPH08221733A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2911095A JPH08221733A (en) 1995-02-17 1995-02-17 Magnetic disk medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2911095A JPH08221733A (en) 1995-02-17 1995-02-17 Magnetic disk medium

Publications (1)

Publication Number Publication Date
JPH08221733A true JPH08221733A (en) 1996-08-30

Family

ID=12267199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2911095A Pending JPH08221733A (en) 1995-02-17 1995-02-17 Magnetic disk medium

Country Status (1)

Country Link
JP (1) JPH08221733A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100438802B1 (en) * 1996-12-17 2004-08-31 삼성전자주식회사 A quantum disk and a method for fabricating the same
KR100551648B1 (en) * 1997-06-09 2006-04-21 가부시끼가이샤 히다치 세이사꾸쇼 An optical information recording medium

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100438802B1 (en) * 1996-12-17 2004-08-31 삼성전자주식회사 A quantum disk and a method for fabricating the same
KR100551648B1 (en) * 1997-06-09 2006-04-21 가부시끼가이샤 히다치 세이사꾸쇼 An optical information recording medium

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