JP2536671B2 - Method for manufacturing piezoelectric porcelain - Google Patents
Method for manufacturing piezoelectric porcelainInfo
- Publication number
- JP2536671B2 JP2536671B2 JP18241690A JP18241690A JP2536671B2 JP 2536671 B2 JP2536671 B2 JP 2536671B2 JP 18241690 A JP18241690 A JP 18241690A JP 18241690 A JP18241690 A JP 18241690A JP 2536671 B2 JP2536671 B2 JP 2536671B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- slurry
- manufacturing
- porous
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 29
- 238000000034 method Methods 0.000 title description 16
- 229910052573 porcelain Inorganic materials 0.000 title description 6
- 239000000919 ceramic Substances 0.000 claims description 36
- 239000002002 slurry Substances 0.000 claims description 25
- 239000000843 powder Substances 0.000 claims description 19
- 238000010304 firing Methods 0.000 claims description 8
- 239000011230 binding agent Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000011148 porous material Substances 0.000 claims description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 12
- 238000007606 doctor blade method Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000009545 invasion Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
- Porous Artificial Stone Or Porous Ceramic Products (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、セラミクス焼結体の内部に多孔質層を有す
る圧電性磁器の製造方法に関し、特に品質に対する信頼
性を向上できるとともに、製造コストを低減できるよう
にした製造方法に関する。The present invention relates to a method for manufacturing a piezoelectric porcelain having a porous layer inside a ceramics sintered body, and in particular, the reliability of quality can be improved and the manufacturing cost can be improved. The present invention relates to a manufacturing method capable of reducing the above.
一般に、電子回路素子として採用される圧電共振子，
圧電発振子等の圧電素子は、高誘電率のセラミクス圧電
体の表面に電極を形成して構成されている。このような
圧電素子において、電圧異方性を向上させたり、圧電ｇ
定数を大きくしたり、あるいは厚み振動に起因して生じ
るスプリアスを抑制したりするために、上記圧電体に多
数の空孔を形成するようにしたものが提案されている。Generally, a piezoelectric resonator used as an electronic circuit element,
A piezoelectric element such as a piezoelectric oscillator is formed by forming electrodes on the surface of a ceramics piezoelectric body having a high dielectric constant. In such a piezoelectric element, the voltage anisotropy is improved and the piezoelectric g
In order to increase the constant or suppress spurious generated due to thickness vibration, there has been proposed a piezoelectric body in which a large number of holes are formed.
このような空孔を有する圧電体を製造する場合、従
来、第４図及び第５図に示すような方法が採用されてい
る。第４図に示す製造方法は、焼成時に消失する有機物
粉末10と圧電性セラミクス粉末11とを混合して成形体12
を形成し、これを焼成して上記有機物粉末10を燃焼・焼
失させ、これにより多数の空孔13を有する圧電体14を得
るものである。Conventionally, when manufacturing a piezoelectric body having such holes, the methods shown in FIGS. 4 and 5 have been adopted. In the manufacturing method shown in FIG. 4, a molded body 12 is prepared by mixing the organic powder 10 and the piezoelectric ceramic powder 11 that disappear during firing.
Is formed and is burned to burn and burn off the organic powder 10 to obtain a piezoelectric body 14 having a large number of holes 13.
また、第５図に示す製造方法は、有機物粉末を混合し
てなる多孔質シート15を複数枚の圧電性セラミクスシー
ト16・・で挟んで積層体17を形成し、これを圧着した後
一体焼成して上記有機物粉末を消失させ、これにより焼
結体18の内部に多孔質層19を有する圧電体20を得るもの
である。Further, in the manufacturing method shown in FIG. 5, a porous sheet 15 made by mixing organic powder is sandwiched between a plurality of piezoelectric ceramic sheets 16 ... to form a laminated body 17, which is pressure-bonded and integrally fired. Then, the above-mentioned organic substance powder is eliminated, whereby a piezoelectric body 20 having a porous layer 19 inside the sintered body 18 is obtained.
ところで、上記従来の有機物粉末と圧電性セラミクス
粉末とを混合して圧電体を製造する方法は、製造が容易
であることからコストを低減できるものの、品質に対す
る信頼性が低いという問題点がある。即ち、上記圧電体
の全体が多孔質であることから、これの表面に導電性ペ
ーストを塗布した後焼き付けて対向電極膜を形成する際
に、上記ペーストが内部に浸透し易く場合によっては内
部でショートするおそれがあり、また湿度の影響を受け
易い。さらに圧電体の精度を向上させるために研磨等の
機械加工を施すと、多孔質体は強度が低いことから表面
にクラックが発生し易く、加工を加えることが困難であ
る。By the way, the conventional method for manufacturing a piezoelectric body by mixing the organic powder and the piezoelectric ceramic powder is easy to manufacture and thus can reduce the cost, but has a problem that the reliability of the quality is low. That is, since the entire piezoelectric body is porous, when a conductive paste is applied to the surface of the piezoelectric body and then baked to form a counter electrode film, the paste easily penetrates into the inside and may be There is a risk of short-circuiting and it is easily affected by humidity. Further, when mechanical processing such as polishing is performed to improve the accuracy of the piezoelectric body, the porous body has a low strength and cracks easily occur on the surface, which makes it difficult to perform processing.
一方、多孔質シートをセラミクスシートで積層して圧
電体を製造する場合は、表面部分は緻密なセラミクス層
であることから、上述した導電ペーストの侵入や，機械
的強度の低下等の問題は生じることはなく、品質に対す
る信頼性を向上できる。しかしながら、多数のセラミク
スシートを作成し、これらを順次重ねて圧着し、積層体
を作成するという手間のかかる工程が必要なことから、
製造コストが上昇するという問題点がある。On the other hand, when a porous body is laminated with a ceramics sheet to manufacture a piezoelectric body, the surface portion is a dense ceramics layer, and therefore the above-mentioned problems such as penetration of the conductive paste and reduction in mechanical strength occur. It can improve the reliability of quality. However, since a lot of ceramic sheets are created, these are sequentially stacked and pressure-bonded, and a laborious process of creating a laminated body is required,
There is a problem that the manufacturing cost increases.
本発明の目的は、品質に対する信頼性を向上できると
ともに、製造工程を簡略化してコストを低減できる圧電
性磁器の製造方法を提供することを目的としている。An object of the present invention is to provide a method for manufacturing a piezoelectric porcelain, which can improve the reliability of quality, simplify the manufacturing process, and reduce the cost.
そこで本発明は、焼成時に消失する多孔質シートの孔
内部に圧電性セラミクス粉末とバインダーからなるスラ
リーを含浸させるとともに、上記多孔質シートの表面に
上記スラリーを層状に付着させて成形体を得る第１工程
と、該成形体を所定温度で加熱焼成して表面部分に緻密
なセラミクス層を有し、かつ内部に多孔質層を有する圧
電体を得る第２工程とを備えたことを特徴とする圧電性
磁器の製造方法である。Therefore, the present invention is to obtain a molded article by impregnating the inside of the pores of the porous sheet that disappears during firing with a slurry composed of a piezoelectric ceramic powder and a binder, and by adhering the slurry in layers on the surface of the porous sheet. It is characterized by comprising one step and a second step of heating and calcining the molded body at a predetermined temperature to obtain a piezoelectric body having a dense ceramics layer on the surface portion and having a porous layer inside thereof. It is a manufacturing method of a piezoelectric porcelain.
ここで、上記多孔質シートにスラリーを含浸，付着さ
せる方法としては、例えば多孔質シートをスラリー浴中
に浸漬させながら引き上げることによりスラリーを含
浸，付着させる方法、または上記多孔質シートにドクタ
ーブレード法によりスラリーを塗布する方法等が採用で
き、特に限定されるものではない。Here, as a method of impregnating and adhering the slurry to the porous sheet, for example, a method of impregnating and adhering the slurry by pulling up the porous sheet while being immersed in a slurry bath, or a doctor blade method to the porous sheet The method of applying the slurry can be adopted, and the method is not particularly limited.
本発明に係る圧電性磁器の製造方法によれば、多孔質
シートに圧電性セラミクス粉末からなるスラリーを含
浸，付着させて成形体を作成した後、これを焼成したの
で、これにより製造された圧電体は表面部分は緻密な圧
電性セラミクス層となり、かつ内部は多孔質層となる。
このように内部が多孔質であるから圧電ｇ定数を大きく
でき、かつスプリアスを制御できる。また表面部分は緻
密なセラミクス層となっているので、従来の圧電体の全
体が多孔質となっている場合のような導電ペーストの侵
入や，機械的強度の低下等の問題が生じることはなく、
品質に対する信頼性を向上できる。According to the method for manufacturing a piezoelectric porcelain according to the present invention, a porous sheet is impregnated with and made to adhere to a slurry made of piezoelectric ceramic powder to form a molded body, which is then fired. The surface of the body is a dense piezoelectric ceramics layer, and the inside is a porous layer.
Since the inside is porous in this way, the piezoelectric g constant can be increased and spurious can be controlled. In addition, since the surface part is a dense ceramics layer, there is no problem such as penetration of the conductive paste and deterioration of mechanical strength, which occurs when the conventional piezoelectric body is entirely porous. ,
The reliability of quality can be improved.
また、本発明の製造方法では、多孔質シートにセラミ
クス粉末のスラリーを浸透，付着させて成形体を得るよ
うにしているので、例えばスラリー浴中に多孔質シート
を浸しながら引き上げるだけで所定厚さのセラミクス層
を有する成形体を得ることができ、従来のセラミクスシ
ート等を順次積層して圧着するという工程を省略でき、
それだけ製造コストを低減できる。Further, in the manufacturing method of the present invention, since the slurry of the ceramic powder is permeated and adhered to the porous sheet to obtain a molded body, for example, the porous sheet is pulled up while being dipped in the slurry bath to a predetermined thickness. It is possible to obtain a molded article having a ceramics layer of, and it is possible to omit the step of sequentially laminating and pressure-bonding conventional ceramics sheets,
The manufacturing cost can be reduced accordingly.
以下、本発明の実施例を図について説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図ないし第３図は本発明の一実施例による圧電性
磁器の製造方法を説明するための図である。1 to 3 are views for explaining a method for manufacturing a piezoelectric ceramic according to an embodiment of the present invention.
第１工程 まず、圧電性セラミクス粉末としてチタン酸鉛ジル
コン酸鉛系セラミクス粉末を採用し、このセラミクス粉
末に所定量のバインダーと水とを加えてボールミルで撹
拌混合し、スラリー９を作成する。このスラリー９をロ
ール８が回転自在に配設されたスラリー浴槽７内に充填
する。First Step First, a lead zirconate titanate-based ceramics powder is used as the piezoelectric ceramics powder, a predetermined amount of binder and water are added to this ceramics powder, and the mixture is stirred and mixed with a ball mill to form a slurry 9. The slurry 9 is filled in a slurry bath 7 in which a roll 8 is rotatably arranged.
次に、多孔質シートとして厚さの薄い帯状のウレタ
ンシート６を採用し、このウレタンシート６を上記浴槽
７内に浸漬するとともにロール８に沿わせながら引き上
げる。すると、このウレタンシート６の内部にスラリー
９が浸透するとともに該シート６の表面に所定厚さのス
ラリー層9aが被覆された帯状の成形体５が得られること
となる。ここで、上記スラリー９の粘度やウレタンシー
ト６の気孔率を適宜選定することにより、上記成形体５
の厚さ，つまりスラリーの付着量等を設定できる。ま
た、上記成形体５のスラリー層9aの厚さを大きくしたい
場合は、上記浴槽７内へ複数回浸漬すればよい。Next, a thin belt-shaped urethane sheet 6 is adopted as the porous sheet, and the urethane sheet 6 is immersed in the bath 7 and pulled up along the roll 8. Then, the slurry 9 permeates into the urethane sheet 6 and the belt-shaped molded body 5 in which the surface of the sheet 6 is covered with the slurry layer 9a having a predetermined thickness is obtained. Here, by appropriately selecting the viscosity of the slurry 9 and the porosity of the urethane sheet 6, the molded body 5 can be obtained.
Thickness, that is, the amount of slurry adhered can be set. If it is desired to increase the thickness of the slurry layer 9a of the molded body 5, it may be dipped in the bath 7 a plurality of times.
上記帯状成形体５を乾燥させるとともに、所定寸法
の大きさに切断し、多数の成形体４を得る。The strip-shaped compact 5 is dried and cut into a predetermined size to obtain a large number of compacts 4.
第２工程 次に、上記各成形体４を電気炉内に挿入して焼成す
る。この場合、200〜600℃付近までは遅い昇温速度で加
熱し、正気バインダー，ウレタンシート６を燃焼，焼失
させる。この後セラミクスの焼成温度である1200℃まで
昇温し、所定時間保持して焼結体を得る。これにより表
面部分は緻密なセラミクス層３を有し、かつ内部に多孔
質層２を有する圧電体１が得られる。Second Step Next, the molded bodies 4 are inserted into an electric furnace and fired. In this case, heating is performed at a slow temperature rising rate up to around 200 to 600 ° C. to burn and burn the normal binder and urethane sheet 6. After that, the temperature is raised to 1200 ° C. which is the firing temperature of the ceramics and kept for a predetermined time to obtain a sintered body. As a result, a piezoelectric body 1 having a dense ceramics layer 3 on the surface portion and a porous layer 2 inside is obtained.
このように本実施例の製造方法によれば、ウレタンシ
ート６にスラリー９を浸透，付着させて成形体４を作成
し、これを焼成した圧電体１を形成したので、この圧電
体１は表面部分が緻密なセラミクス層３からなり、かつ
内部に多孔質層２を有する構造となり、その結果圧電ｇ
定数の大きい、スプリアスを抑制できる圧電素子が得ら
れる。また、上記圧電体１の表面部分は緻密なセラミク
ス層３となっているので、導電ペーストの侵入によるシ
ョートや，研磨加工によるクラック等の問題は生じるこ
とはないから、品質に対する信頼性を向上できる。As described above, according to the manufacturing method of this embodiment, the slurry 9 is permeated and adhered to the urethane sheet 6 to form the molded body 4, and the piezoelectric body 1 is formed by firing the molded body 4. The structure is composed of a dense ceramics layer 3 and a porous layer 2 inside, resulting in piezoelectric g
A piezoelectric element having a large constant and capable of suppressing spurious can be obtained. Further, since the surface portion of the piezoelectric body 1 is the dense ceramics layer 3, problems such as short circuit due to invasion of conductive paste and cracks due to polishing do not occur, so that reliability of quality can be improved. .
さらに、本実施例の製造方法では、上述のようにウレ
タンシート６をスラリー９に浸漬しながら引き上げるだ
けで成形体５を作成できるので、従来の多孔質シートに
セラミクスシートを順次積層して圧着するという工程を
省略でき、それだけ製造コストを低減できる。Further, in the manufacturing method of the present embodiment, the molded body 5 can be prepared by merely pulling up the urethane sheet 6 while immersing it in the slurry 9 as described above, so that the ceramic sheets are sequentially laminated and pressure bonded to the conventional porous sheet. Can be omitted, and the manufacturing cost can be reduced accordingly.
なお、上記実施例では、スラリー９が充填された浴槽
７内にウレタンシート６を浸しながら引き上げて成形体
５を得る方法を例にとって説明したが、本発明の第１工
程は上記実施例方法に限られるものではなく、例えばウ
レタンシートの両面にドクターブレード法によりセラミ
クスシートを横引きすることにより成形体を作成するこ
ともでき、この場合も上記実施例と同様に製造コストを
低減できる。In the above embodiment, the method of obtaining the molded body 5 by immersing the urethane sheet 6 while immersing the urethane sheet 6 in the bath 7 filled with the slurry 9 has been described, but the first step of the present invention is the same as the above embodiment method. The present invention is not limited to this. For example, a molded body can be produced by horizontally drawing a ceramics sheet on both sides of a urethane sheet by a doctor blade method, and in this case, the manufacturing cost can be reduced as in the above-mentioned embodiment.
また、上記実施例では多孔質シートにウレタンを採用
したが、本発明は勿論これに限られるものではなく、例
えば紙質材料でもよく、要は多孔状，あるいはメッシュ
状の有機物で、かつ焼成時に燃焼，焼失するものであれ
ばよい。さらに上記圧電性セラミクス粉末として、他に
チタン酸バリウム系，チタン酸鉛系，ジルコン酸鉛系な
どのセラミクス粉末等を採用しても勿論よい。Further, although urethane is adopted for the porous sheet in the above-mentioned embodiment, the present invention is not limited to this, and a paper material may be used, for example, a porous or mesh organic substance, and is burnt at the time of firing. , Anything that can be burned down. Further, as the above-mentioned piezoelectric ceramic powder, barium titanate-based, lead titanate-based, lead zirconate-based ceramics powder or the like may be adopted.
以上のように本発明に係る圧電体磁器の製造方法によ
れば、多孔質シートにセラミクス粉末からなるスラリー
を含浸させるとともに、上記多孔質シートの表面に上記
スラリーを層状に付着させて成形体を形成し、該成形体
を焼成して表面部分に緻密なセラミクス層を有し、かつ
内部に多孔質層を有する圧電体を作成したので、品質に
対する信頼性を向上できるとともに、製造コストを低減
できる効果がある。As described above, according to the method for manufacturing a piezoelectric ceramic according to the present invention, a porous sheet is impregnated with a slurry made of ceramic powder, and the slurry is layered on the surface of the porous sheet to form a compact. Since a piezoelectric body having a dense ceramics layer on the surface portion and a porous layer inside is formed by forming and firing the molded body, reliability of quality can be improved and manufacturing cost can be reduced. effective.
第１図ないし第３図は本発明の一実施例による圧電性磁
器の製造方法を説明するための図であり、第１図はその
製造方法により得られた圧電体を示す断面図、第２図は
その成形体を示す断面図、第３図はその製造工程を説明
するための概略構成図、第４図（ａ）及び（ｂ）はそれ
ぞれ従来の有機物粉末とセラミクス粉末との混合による
製造方法を示す断面図、第５図（ａ）及び（ｂ）はそれ
ぞれ従来の積層による製造方法を示す分解図，断面図で
ある。 図において、１は圧電体（圧電性磁器）、２は多孔質
層、３はセラミクス層、4,5は成形体、６はウレタンシ
ート（多孔質シート）、９はスラリーである。1 to 3 are views for explaining a method for manufacturing a piezoelectric ceramic according to an embodiment of the present invention, and FIG. 1 is a sectional view showing a piezoelectric body obtained by the manufacturing method, and FIG. FIG. 4 is a cross-sectional view showing the molded body, FIG. 3 is a schematic configuration diagram for explaining the manufacturing process, and FIGS. 4 (a) and 4 (b) are respectively manufactured by mixing a conventional organic powder and a ceramic powder. Sectional views showing the method, and FIGS. 5 (a) and 5 (b) are an exploded view and a sectional view, respectively, showing a conventional manufacturing method by lamination. In the figure, 1 is a piezoelectric body (piezoelectric porcelain), 2 is a porous layer, 3 is a ceramics layer, 4 and 5 are molded bodies, 6 is a urethane sheet (porous sheet), and 9 is a slurry.
フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０１Ｌ 41/24 Ｈ０１Ｌ 41/22 Ａ Continuation of front page (51) Int.Cl. 6 Identification number Office reference number FI technical display location H01L 41/24 H01L 41/22 A
Claims (1)
圧電性セラミクス粉末とバインダーとからなるスラリー
を含浸させるとともに、上記多孔質シートの表面に上記
スラリーを層状に付着させて成形体を得る第１工程と、
該成形体を所定温度で加熱焼成して表面部分に緻密なセ
ラミクス層を有し、かつ内部に多孔質層を有する圧電体
を得る第２工程とを備えたことを特徴とする圧電性磁器
の製造方法。1. A molded body is obtained by impregnating the pores of a porous sheet, which disappears during firing, with a slurry consisting of a piezoelectric ceramics powder and a binder, and adhering the slurry in layers on the surface of the porous sheet. The first step,
A second step of obtaining a piezoelectric body having a dense ceramics layer on the surface portion and having a porous layer in the inside by heating and firing the molded body at a predetermined temperature; Production method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18241690A JP2536671B2 (en) | 1990-07-09 | 1990-07-09 | Method for manufacturing piezoelectric porcelain |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18241690A JP2536671B2 (en) | 1990-07-09 | 1990-07-09 | Method for manufacturing piezoelectric porcelain |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0474777A JPH0474777A (en) | 1992-03-10 |
| JP2536671B2 true JP2536671B2 (en) | 1996-09-18 |
Family
ID=16117908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18241690A Expired - Fee Related JP2536671B2 (en) | 1990-07-09 | 1990-07-09 | Method for manufacturing piezoelectric porcelain |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2536671B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE20023051U1 (en) * | 1999-12-16 | 2003-01-09 | EPCOS AG, 81669 München | Piezoelectric component used as an actuator in a piezo-stack consists of a stack of ceramic layers with a copper electrode layer between the ceramic layers |
| CN1164527C (en) * | 2000-07-28 | 2004-09-01 | 株式会社村田制作所 | Ceramic paste composition, ceramic forming body and ceramic electronic element |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6144779A (en) * | 1984-08-03 | 1986-03-04 | 株式会社デンソー | Manufacture of porous ceramic body |
| JPS61106468A (en) * | 1984-10-25 | 1986-05-24 | 株式会社アイジー技術研究所 | Manufacture of lightweight foamed body |
| JPS61136973A (en) * | 1984-12-06 | 1986-06-24 | 株式会社ブリヂストン | Porous ceramic body for piezoelectric ceramic element |
-
1990
- 1990-07-09 JP JP18241690A patent/JP2536671B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0474777A (en) | 1992-03-10 |
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| Date | Code | Title | Description |
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| LAPS | Cancellation because of no payment of annual fees |