JP2532708Y2 - ウエハ回転処理装置 - Google Patents
ウエハ回転処理装置Info
- Publication number
- JP2532708Y2 JP2532708Y2 JP1988143493U JP14349388U JP2532708Y2 JP 2532708 Y2 JP2532708 Y2 JP 2532708Y2 JP 1988143493 U JP1988143493 U JP 1988143493U JP 14349388 U JP14349388 U JP 14349388U JP 2532708 Y2 JP2532708 Y2 JP 2532708Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rotation processing
- processing stage
- wafer rotation
- transfer arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988143493U JP2532708Y2 (ja) | 1988-11-04 | 1988-11-04 | ウエハ回転処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988143493U JP2532708Y2 (ja) | 1988-11-04 | 1988-11-04 | ウエハ回転処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0265341U JPH0265341U (zh) | 1990-05-16 |
JP2532708Y2 true JP2532708Y2 (ja) | 1997-04-16 |
Family
ID=31410371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988143493U Expired - Lifetime JP2532708Y2 (ja) | 1988-11-04 | 1988-11-04 | ウエハ回転処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2532708Y2 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5187231B2 (ja) * | 2009-02-24 | 2013-04-24 | 株式会社安川電機 | プリアライナ装置、ウェハ搬送システム、半導体製造装置、半導体検査装置およびウェハのアライメント方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH062267Y2 (ja) * | 1988-02-12 | 1994-01-19 | 住友重機械工業株式会社 | ウエハ露光用ハンドリング装置 |
-
1988
- 1988-11-04 JP JP1988143493U patent/JP2532708Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0265341U (zh) | 1990-05-16 |
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