JPH0265341U - - Google Patents

Info

Publication number
JPH0265341U
JPH0265341U JP14349388U JP14349388U JPH0265341U JP H0265341 U JPH0265341 U JP H0265341U JP 14349388 U JP14349388 U JP 14349388U JP 14349388 U JP14349388 U JP 14349388U JP H0265341 U JPH0265341 U JP H0265341U
Authority
JP
Japan
Prior art keywords
wafer
processing stage
rotation processing
transfer arm
vacuum suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14349388U
Other languages
English (en)
Japanese (ja)
Other versions
JP2532708Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988143493U priority Critical patent/JP2532708Y2/ja
Publication of JPH0265341U publication Critical patent/JPH0265341U/ja
Application granted granted Critical
Publication of JP2532708Y2 publication Critical patent/JP2532708Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988143493U 1988-11-04 1988-11-04 ウエハ回転処理装置 Expired - Lifetime JP2532708Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988143493U JP2532708Y2 (ja) 1988-11-04 1988-11-04 ウエハ回転処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988143493U JP2532708Y2 (ja) 1988-11-04 1988-11-04 ウエハ回転処理装置

Publications (2)

Publication Number Publication Date
JPH0265341U true JPH0265341U (zh) 1990-05-16
JP2532708Y2 JP2532708Y2 (ja) 1997-04-16

Family

ID=31410371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988143493U Expired - Lifetime JP2532708Y2 (ja) 1988-11-04 1988-11-04 ウエハ回転処理装置

Country Status (1)

Country Link
JP (1) JP2532708Y2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010199245A (ja) * 2009-02-24 2010-09-09 Yaskawa Electric Corp プリアライナ装置を備えたウェハ搬送システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01121930U (zh) * 1988-02-12 1989-08-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01121930U (zh) * 1988-02-12 1989-08-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010199245A (ja) * 2009-02-24 2010-09-09 Yaskawa Electric Corp プリアライナ装置を備えたウェハ搬送システム

Also Published As

Publication number Publication date
JP2532708Y2 (ja) 1997-04-16

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