JP2532708Y2 - ウエハ回転処理装置 - Google Patents

ウエハ回転処理装置

Info

Publication number
JP2532708Y2
JP2532708Y2 JP1988143493U JP14349388U JP2532708Y2 JP 2532708 Y2 JP2532708 Y2 JP 2532708Y2 JP 1988143493 U JP1988143493 U JP 1988143493U JP 14349388 U JP14349388 U JP 14349388U JP 2532708 Y2 JP2532708 Y2 JP 2532708Y2
Authority
JP
Japan
Prior art keywords
wafer
rotation processing
processing stage
wafer rotation
transfer arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988143493U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0265341U (en, 2012
Inventor
徹治 荒井
信二 鈴木
Original Assignee
ウシオ電機 株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ウシオ電機 株式会社 filed Critical ウシオ電機 株式会社
Priority to JP1988143493U priority Critical patent/JP2532708Y2/ja
Publication of JPH0265341U publication Critical patent/JPH0265341U/ja
Application granted granted Critical
Publication of JP2532708Y2 publication Critical patent/JP2532708Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988143493U 1988-11-04 1988-11-04 ウエハ回転処理装置 Expired - Lifetime JP2532708Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988143493U JP2532708Y2 (ja) 1988-11-04 1988-11-04 ウエハ回転処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988143493U JP2532708Y2 (ja) 1988-11-04 1988-11-04 ウエハ回転処理装置

Publications (2)

Publication Number Publication Date
JPH0265341U JPH0265341U (en, 2012) 1990-05-16
JP2532708Y2 true JP2532708Y2 (ja) 1997-04-16

Family

ID=31410371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988143493U Expired - Lifetime JP2532708Y2 (ja) 1988-11-04 1988-11-04 ウエハ回転処理装置

Country Status (1)

Country Link
JP (1) JP2532708Y2 (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5187231B2 (ja) * 2009-02-24 2013-04-24 株式会社安川電機 プリアライナ装置、ウェハ搬送システム、半導体製造装置、半導体検査装置およびウェハのアライメント方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH062267Y2 (ja) * 1988-02-12 1994-01-19 住友重機械工業株式会社 ウエハ露光用ハンドリング装置

Also Published As

Publication number Publication date
JPH0265341U (en, 2012) 1990-05-16

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