JP2531292Y2 - 半導体製造装置の防塵構造 - Google Patents

半導体製造装置の防塵構造

Info

Publication number
JP2531292Y2
JP2531292Y2 JP1990082174U JP8217490U JP2531292Y2 JP 2531292 Y2 JP2531292 Y2 JP 2531292Y2 JP 1990082174 U JP1990082174 U JP 1990082174U JP 8217490 U JP8217490 U JP 8217490U JP 2531292 Y2 JP2531292 Y2 JP 2531292Y2
Authority
JP
Japan
Prior art keywords
belt
robot body
case
dustproof
dust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990082174U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0440533U (enExample
Inventor
和雄 吉野山
和雄 石渡
Original Assignee
森尾電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 森尾電機株式会社 filed Critical 森尾電機株式会社
Priority to JP1990082174U priority Critical patent/JP2531292Y2/ja
Publication of JPH0440533U publication Critical patent/JPH0440533U/ja
Application granted granted Critical
Publication of JP2531292Y2 publication Critical patent/JP2531292Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP1990082174U 1990-08-03 1990-08-03 半導体製造装置の防塵構造 Expired - Fee Related JP2531292Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990082174U JP2531292Y2 (ja) 1990-08-03 1990-08-03 半導体製造装置の防塵構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990082174U JP2531292Y2 (ja) 1990-08-03 1990-08-03 半導体製造装置の防塵構造

Publications (2)

Publication Number Publication Date
JPH0440533U JPH0440533U (enExample) 1992-04-07
JP2531292Y2 true JP2531292Y2 (ja) 1997-04-02

Family

ID=31628747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990082174U Expired - Fee Related JP2531292Y2 (ja) 1990-08-03 1990-08-03 半導体製造装置の防塵構造

Country Status (1)

Country Link
JP (1) JP2531292Y2 (enExample)

Also Published As

Publication number Publication date
JPH0440533U (enExample) 1992-04-07

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