JP2521258Y2 - 油回転真空ポンプ安全装置 - Google Patents

油回転真空ポンプ安全装置

Info

Publication number
JP2521258Y2
JP2521258Y2 JP1990085271U JP8527190U JP2521258Y2 JP 2521258 Y2 JP2521258 Y2 JP 2521258Y2 JP 1990085271 U JP1990085271 U JP 1990085271U JP 8527190 U JP8527190 U JP 8527190U JP 2521258 Y2 JP2521258 Y2 JP 2521258Y2
Authority
JP
Japan
Prior art keywords
vacuum pump
oil rotary
flange
rotary vacuum
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990085271U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0442289U (enExample
Inventor
武 深田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP1990085271U priority Critical patent/JP2521258Y2/ja
Publication of JPH0442289U publication Critical patent/JPH0442289U/ja
Application granted granted Critical
Publication of JP2521258Y2 publication Critical patent/JP2521258Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1990085271U 1990-08-10 1990-08-10 油回転真空ポンプ安全装置 Expired - Lifetime JP2521258Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990085271U JP2521258Y2 (ja) 1990-08-10 1990-08-10 油回転真空ポンプ安全装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990085271U JP2521258Y2 (ja) 1990-08-10 1990-08-10 油回転真空ポンプ安全装置

Publications (2)

Publication Number Publication Date
JPH0442289U JPH0442289U (enExample) 1992-04-09
JP2521258Y2 true JP2521258Y2 (ja) 1996-12-25

Family

ID=31634314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990085271U Expired - Lifetime JP2521258Y2 (ja) 1990-08-10 1990-08-10 油回転真空ポンプ安全装置

Country Status (1)

Country Link
JP (1) JP2521258Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5835693U (ja) * 1981-08-31 1983-03-08 株式会社島津製作所 ２段式油回転真空ポンプ

Also Published As

Publication number Publication date
JPH0442289U (enExample) 1992-04-09

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Legal Events

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EXPY Cancellation because of completion of term