JP2521257Y2 - 自公転治具付蒸着装置 - Google Patents
自公転治具付蒸着装置Info
- Publication number
- JP2521257Y2 JP2521257Y2 JP1990084377U JP8437790U JP2521257Y2 JP 2521257 Y2 JP2521257 Y2 JP 2521257Y2 JP 1990084377 U JP1990084377 U JP 1990084377U JP 8437790 U JP8437790 U JP 8437790U JP 2521257 Y2 JP2521257 Y2 JP 2521257Y2
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- rotation
- rotation shaft
- revolution
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007740 vapor deposition Methods 0.000 title claims description 53
- 238000000151 deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990084377U JP2521257Y2 (ja) | 1990-08-08 | 1990-08-08 | 自公転治具付蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990084377U JP2521257Y2 (ja) | 1990-08-08 | 1990-08-08 | 自公転治具付蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0444358U JPH0444358U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-04-15 |
| JP2521257Y2 true JP2521257Y2 (ja) | 1996-12-25 |
Family
ID=31815470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990084377U Expired - Lifetime JP2521257Y2 (ja) | 1990-08-08 | 1990-08-08 | 自公転治具付蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2521257Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE311482T1 (de) * | 2001-05-08 | 2005-12-15 | Werkstückträger | |
| CN108866316A (zh) * | 2017-05-11 | 2018-11-23 | 重庆理工大学 | 一种齿轮表面电子束处理系统 |
| CN111101099B (zh) * | 2020-01-06 | 2024-03-29 | 宣城托新精密科技有限公司 | 一种汽车饰件无水雾化蒸镀方法及其蒸镀装置 |
| CN115011930A (zh) * | 2022-05-31 | 2022-09-06 | 北海惠科半导体科技有限公司 | 蒸发镀膜装置 |
| CN114990493B (zh) * | 2022-06-23 | 2024-01-12 | 北海惠科半导体科技有限公司 | 蒸发镀膜装置及其镀膜方法 |
| CN115110038B (zh) * | 2022-06-29 | 2024-01-12 | 北海惠科半导体科技有限公司 | 蒸发镀膜装置和镀膜方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0253965U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1988-10-06 | 1990-04-18 |
-
1990
- 1990-08-08 JP JP1990084377U patent/JP2521257Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0444358U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-04-15 |