JP2520592Y2 - 減圧排気装置 - Google Patents
減圧排気装置Info
- Publication number
- JP2520592Y2 JP2520592Y2 JP1989046776U JP4677689U JP2520592Y2 JP 2520592 Y2 JP2520592 Y2 JP 2520592Y2 JP 1989046776 U JP1989046776 U JP 1989046776U JP 4677689 U JP4677689 U JP 4677689U JP 2520592 Y2 JP2520592 Y2 JP 2520592Y2
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- pump
- air
- valve
- decompression
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989046776U JP2520592Y2 (ja) | 1989-04-20 | 1989-04-20 | 減圧排気装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989046776U JP2520592Y2 (ja) | 1989-04-20 | 1989-04-20 | 減圧排気装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02140971U JPH02140971U (US08063081-20111122-C00044.png) | 1990-11-26 |
JP2520592Y2 true JP2520592Y2 (ja) | 1996-12-18 |
Family
ID=31562144
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989046776U Expired - Lifetime JP2520592Y2 (ja) | 1989-04-20 | 1989-04-20 | 減圧排気装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2520592Y2 (US08063081-20111122-C00044.png) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100498467B1 (ko) * | 2002-12-05 | 2005-07-01 | 삼성전자주식회사 | 배기 경로에서의 파우더 생성을 방지할 수 있는 원자층증착 장비 |
JP5504107B2 (ja) * | 2010-09-06 | 2014-05-28 | エドワーズ株式会社 | 逆流防止システム及び該逆流防止システムを備えた真空ポンプ |
JP6685204B2 (ja) * | 2016-08-26 | 2020-04-22 | 東京エレクトロン株式会社 | 安全装置、安全システム及び燃焼除害装置の安全化方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6024057U (ja) * | 1983-07-27 | 1985-02-19 | 日本電子株式会社 | 電子顕微鏡等の排気装置 |
JPS63141893U (US08063081-20111122-C00044.png) * | 1987-03-10 | 1988-09-19 | ||
JPH01134782U (US08063081-20111122-C00044.png) * | 1988-03-07 | 1989-09-14 |
-
1989
- 1989-04-20 JP JP1989046776U patent/JP2520592Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH02140971U (US08063081-20111122-C00044.png) | 1990-11-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |