JP2519151Y2 - 化学気相生成装置 - Google Patents

化学気相生成装置

Info

Publication number
JP2519151Y2
JP2519151Y2 JP1989119096U JP11909689U JP2519151Y2 JP 2519151 Y2 JP2519151 Y2 JP 2519151Y2 JP 1989119096 U JP1989119096 U JP 1989119096U JP 11909689 U JP11909689 U JP 11909689U JP 2519151 Y2 JP2519151 Y2 JP 2519151Y2
Authority
JP
Japan
Prior art keywords
wafer
reaction tube
chemical vapor
reaction
phase generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989119096U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0357931U (enFirst
Inventor
直人 中村
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP1989119096U priority Critical patent/JP2519151Y2/ja
Publication of JPH0357931U publication Critical patent/JPH0357931U/ja
Application granted granted Critical
Publication of JP2519151Y2 publication Critical patent/JP2519151Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989119096U 1989-10-11 1989-10-11 化学気相生成装置 Expired - Lifetime JP2519151Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989119096U JP2519151Y2 (ja) 1989-10-11 1989-10-11 化学気相生成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989119096U JP2519151Y2 (ja) 1989-10-11 1989-10-11 化学気相生成装置

Publications (2)

Publication Number Publication Date
JPH0357931U JPH0357931U (enFirst) 1991-06-05
JP2519151Y2 true JP2519151Y2 (ja) 1996-12-04

Family

ID=31667237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989119096U Expired - Lifetime JP2519151Y2 (ja) 1989-10-11 1989-10-11 化学気相生成装置

Country Status (1)

Country Link
JP (1) JP2519151Y2 (enFirst)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53137084A (en) * 1977-05-04 1978-11-30 Fujitsu Ltd Reaction tube with uniform flow rate
JPS62154722A (ja) * 1985-12-27 1987-07-09 Hitachi Ltd 処理装置
JPS62190337U (enFirst) * 1986-05-26 1987-12-03
JPH01100431U (enFirst) * 1987-12-23 1989-07-05

Also Published As

Publication number Publication date
JPH0357931U (enFirst) 1991-06-05

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