JP2517871Y2 - 荷電粒子検出用プローブの駆動機構 - Google Patents

荷電粒子検出用プローブの駆動機構

Info

Publication number
JP2517871Y2
JP2517871Y2 JP14600489U JP14600489U JP2517871Y2 JP 2517871 Y2 JP2517871 Y2 JP 2517871Y2 JP 14600489 U JP14600489 U JP 14600489U JP 14600489 U JP14600489 U JP 14600489U JP 2517871 Y2 JP2517871 Y2 JP 2517871Y2
Authority
JP
Japan
Prior art keywords
probe
guide pipe
gear
drive mechanism
rack
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14600489U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0384548U (cs
Inventor
始三 斎藤
和男 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP14600489U priority Critical patent/JP2517871Y2/ja
Publication of JPH0384548U publication Critical patent/JPH0384548U/ja
Application granted granted Critical
Publication of JP2517871Y2 publication Critical patent/JP2517871Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP14600489U 1989-12-19 1989-12-19 荷電粒子検出用プローブの駆動機構 Expired - Lifetime JP2517871Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14600489U JP2517871Y2 (ja) 1989-12-19 1989-12-19 荷電粒子検出用プローブの駆動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14600489U JP2517871Y2 (ja) 1989-12-19 1989-12-19 荷電粒子検出用プローブの駆動機構

Publications (2)

Publication Number Publication Date
JPH0384548U JPH0384548U (cs) 1991-08-27
JP2517871Y2 true JP2517871Y2 (ja) 1996-11-20

Family

ID=31692618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14600489U Expired - Lifetime JP2517871Y2 (ja) 1989-12-19 1989-12-19 荷電粒子検出用プローブの駆動機構

Country Status (1)

Country Link
JP (1) JP2517871Y2 (cs)

Also Published As

Publication number Publication date
JPH0384548U (cs) 1991-08-27

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