JP2517129Y2 - 弁装置 - Google Patents
弁装置Info
- Publication number
- JP2517129Y2 JP2517129Y2 JP1989025912U JP2591289U JP2517129Y2 JP 2517129 Y2 JP2517129 Y2 JP 2517129Y2 JP 1989025912 U JP1989025912 U JP 1989025912U JP 2591289 U JP2591289 U JP 2591289U JP 2517129 Y2 JP2517129 Y2 JP 2517129Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- communication hole
- gas
- purity
- purging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004891 communication Methods 0.000 claims description 26
- 238000010926 purge Methods 0.000 claims description 24
- 238000000605 extraction Methods 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 49
- 229910001873 dinitrogen Inorganic materials 0.000 description 23
- 239000007789 gas Substances 0.000 description 20
- 239000007788 liquid Substances 0.000 description 15
- 229910052757 nitrogen Inorganic materials 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000009835 boiling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Valve Housings (AREA)
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989025912U JP2517129Y2 (ja) | 1989-03-07 | 1989-03-07 | 弁装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989025912U JP2517129Y2 (ja) | 1989-03-07 | 1989-03-07 | 弁装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02117486U JPH02117486U (en, 2012) | 1990-09-20 |
| JP2517129Y2 true JP2517129Y2 (ja) | 1996-11-13 |
Family
ID=31247066
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989025912U Expired - Fee Related JP2517129Y2 (ja) | 1989-03-07 | 1989-03-07 | 弁装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2517129Y2 (en, 2012) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102196113B1 (ko) * | 2019-06-26 | 2020-12-30 | 이덕재 | 잠수함 연료전지 산소 공급장치의 선체밸브세트용 유도구 |
| KR102196108B1 (ko) * | 2019-06-26 | 2020-12-30 | 이덕재 | 잠수함 연료전지용 산소 공급 시스템에서 글로브밸브를 이용한 보상기 교체방법 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5434261U (en, 2012) * | 1977-08-10 | 1979-03-06 |
-
1989
- 1989-03-07 JP JP1989025912U patent/JP2517129Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02117486U (en, 2012) | 1990-09-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |