JP2516946Y2 - ウエハー固定装置 - Google Patents
ウエハー固定装置Info
- Publication number
- JP2516946Y2 JP2516946Y2 JP1990085767U JP8576790U JP2516946Y2 JP 2516946 Y2 JP2516946 Y2 JP 2516946Y2 JP 1990085767 U JP1990085767 U JP 1990085767U JP 8576790 U JP8576790 U JP 8576790U JP 2516946 Y2 JP2516946 Y2 JP 2516946Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- slide
- base
- fixing
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990085767U JP2516946Y2 (ja) | 1990-08-13 | 1990-08-13 | ウエハー固定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990085767U JP2516946Y2 (ja) | 1990-08-13 | 1990-08-13 | ウエハー固定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0444150U JPH0444150U (hu) | 1992-04-15 |
JP2516946Y2 true JP2516946Y2 (ja) | 1996-11-13 |
Family
ID=31817130
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990085767U Expired - Lifetime JP2516946Y2 (ja) | 1990-08-13 | 1990-08-13 | ウエハー固定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2516946Y2 (hu) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5950164B2 (ja) * | 2012-10-03 | 2016-07-13 | 日新イオン機器株式会社 | 基板ホルダ |
JP6243229B2 (ja) * | 2014-01-15 | 2017-12-06 | 株式会社荏原製作所 | 回転保持装置及び基板洗浄装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59100769A (ja) * | 1982-11-30 | 1984-06-11 | 東レ株式会社 | 酸性染料可染性繊維構造物 |
-
1990
- 1990-08-13 JP JP1990085767U patent/JP2516946Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0444150U (hu) | 1992-04-15 |
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