JP2516946Y2 - Wafer fixing device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a wafer fixing device used for fixing and holding a wafer, which is an irradiation target, in a target chamber in an ion implantation device or the like.

(Prior Art) Using a fixture to secure a wafer to hold the wafer in the target chamber is
It is already well known. In this case, a holding spring for holding the peripheral edge of the wafer is usually used for fixing and holding.

In holding such a wafer, even if the shape and size of the wafer are different, the fixed holding is required. Conventionally, the fixing spring is replaced with another fixing base having a different mounting position depending on the wafer.

Alternatively, the holding spring is fixed to the fixing base with a screw, and the mounting position is changed and fixed by changing the screw position.

(Issues to be solved by the invention) However, replacement of the fixing base causes a large loss in time, and changing the mounting position of the screw piece requires the attachment and detachment of the screw, and a tool is required during the work. In addition, the screws may be lost.

It is an object of the present invention to easily change the position of a holding spring used for fixing when the size of a wafer supported by a fixing base is changed.

(Means for Solving the Problems) This invention provides a plurality of slide grooves on the surface of a fixed base so as to extend toward the peripheral edge of a wafer held on the surface, and fits into the slide grooves. A slide base that slides and is fixed at an arbitrary slide position is provided, and a holding spring that holds the peripheral edge of the wafer is installed on the slide base.

(Operation) According to the size of the wafer, the slide base is slid along the slide groove, and the peripheral edge of the wafer is pressed and fixed by the holding spring supported by the slide base. By sliding the slide base along the slide groove according to the shape of the wafer, the wafer can be fixed and held regardless of the shape of the wafer.

(Embodiment) An embodiment of the present invention will be described with reference to the drawings. Reference numeral 1 is a target chamber, 2 is a fixed base, 3 is a wafer which is fixedly held on the surface of the fixed base 2, and 4 is an ion with which the wafer 3 is irradiated. These configurations are not particularly different from the conventional device of this type.

According to this invention, the pressing spring 5 for pressing and fixing the peripheral edge of the wafer 3 from above is fixed to the slide base 6 with the screw 7, and the lower surface of the slide base 6 is
The slide groove 8 formed on the surface of the fixed base 2 is fitted so as not to be disengaged from its opening surface, and in the fitted state, the slide groove 8 is slidable along its longitudinal direction.

Specifically, the slide groove 8 has, for example, a V-shaped cross section,
Further, the cross-sectional shape of the lower surface of the slide base 6 may be set so as to match the slide groove 8. Each slide groove 8
Extend from the peripheral edge of the fixed base 2 toward the peripheral edge of the wafer held on the surface of the fixed base 2.

The slide 6 has a slide groove 8 at any slide position.
It is fixed inside. To explain its specific configuration, a fixing screw 10 having a tightening grip portion 9 on its head is screwed into the slide base 6 to such an extent that it reaches the bottom surface of the slide groove 8.

When fixing the slide base 6, the tightening grip 9
When the fixing screw 10 is further screwed in and the lower end thereof is pressed against the slide groove 8, the slide base 6 cannot be separated from the opening surface of the slide groove, so the slide base 6
The levitation force acts on the slide base 6, and the slide base 6 is fixed to the slide groove 8.

Reference numeral 11 is a spring for eliminating backlash of the fixing screw 10.

FIG. 4 shows a structure for fixing a circular wafer 3, and in this case, each slide groove 8 is formed so as to extend along the radial direction of the wafer 3. And fixed base 2
With respect to the wafer 3 placed at the center of the surface of the wafer 3, the slide base is slid, and the peripheral edge of the wafer 3 is elastically pressed and fixedly held by the pressing spring 5.

FIG. 5 shows a structure for fixing the rectangular wafer 3, and in this case, each slide groove 8 is formed so as to extend along the side direction of the wafer 3. The fixing means for the wafer 3 having this structure is the same as that shown in FIG.

When the same fixed base 2 is used to hold both circular and rectangular wafers, the same as shown in FIGS.
Both of the slide grooves shown in the figure may be formed on one fixed base 2.

(Effect of the Invention) As described in detail above, according to the present invention, when a wafer is held and fixed, the wafer can be held and fixed in a short time without being restricted by its size. It has the effect of not being dropped or lost.

[Brief description of drawings]

FIG. 1 is a sectional view showing an embodiment of the present invention, FIG. 2 is a partially enlarged sectional view, FIG. 3 is a lateral sectional view of the same, and FIGS. 4 and 5 are front views showing examples of use. . 2 ... Fixed base, 3 ... Wafer, 5 ... Presser spring, 6 ...
… Slide base, 8 …… Slide groove, 10 …… Fixing screw,

Claims (1)

(57) [Scope of utility model registration request] 1. A surface of a fixed base is provided with a plurality of slide grooves so as to extend toward a peripheral edge of a wafer held on the surface, and a pressing spring for holding the peripheral edge of the wafer by pressing it from above is provided. The lower surface of the installed slide base is fitted so as not to be separated from the opening surface of the slide groove, and in the fitted state, the slide base is slidable in the longitudinal direction thereof, and the lower end is A fixing screw that is screwed into the slide base toward the bottom surface of the slide groove, and is fixed until the lower end is pressed against the bottom surface of the slide groove, thereby fixing the slide base to the slide groove. Wafer fixing device.